JPH0362977B2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to a unit for a high-precision sterile and dust-free clean room system required in industrial applications such as semiconductor production factories, food industry, etc. .

BACKGROUND TECHNOLOGY As shown in Fig. 5, in a normal clean room, a filter device B is installed in the ceiling of the room A.
An air conditioning control unit C is provided, and the air conditioning control unit C sends air into the room through the filter device B, thereby conditioning and cleaning the indoor air. As shown in the figure,
An air circulation fan D is installed near a filter device B installed on the ceiling, and an air conditioning control unit C is installed outside the room to condition and clean the indoor air. method is adopted.

However, in the central method,
Since one air conditioning control unit is installed outside the room to control the air conditioning of the entire clean room, large diameter ducts and multiple ducts must be installed behind the ceiling or under the floor, which requires space behind the ceiling or under the floor. It is necessary to take enough. Therefore, if a clean room with two or three floors is to be constructed, the building will be quite tall.

In addition, when indoor air conditioning is performed by a single air conditioning control unit as in the central system, in the case of a clean room with a large indoor area, the overall temperature and humidity of the room is controlled to compensate for the uneven internal heat generation that occurs. It is difficult to obtain satisfactory air conditioning because it cannot be maintained uniformly. Furthermore, in the central system, when changing the indoor layout such as the area and shape of the clean room, the entire clean room must be destroyed and a new clean room created.

In addition, clean room devices such as those disclosed in Japanese Patent Application Laid-Open No. 61-243238 have been proposed, but in these devices, a pipe for supplying and discharging heat medium from a heat exchanger extends to the rear of the clean room device. Therefore, before installing the clean room equipment, connect the main supply/discharge pipes that communicate with the heat medium supply source to the rear of the clean room equipment, and connect the main supply/discharge pipes extending from each heat exchanger to the main supply/discharge pipes. It must be connected to a supply/discharge pipe, which requires piping space and piping work for the main supply/discharge pipe, resulting in problems such as an increase in dead space, an increase in construction period, and an increase in construction cost.

Problems to be Solved by the Invention The present invention allows a clean room to be formed easily and quickly, and does not require a large amount of space behind the ceiling surface or under the floor. The height of the building can be made much lower than conventional ones, the layout of the room such as area and shape can be changed freely, and the inside of the clean room can be maintained at a uniform temperature and humidity. The object of the present invention is to provide a unit for a clean room system in which connection of heat exchange medium supply and discharge pipes is easy and piping space is unnecessary.

Means for Solving the Problems The present invention provides a hollow ceiling surface portion whose tip is a connecting portion, and a rear portion of the ceiling surface portion whose upper end communicates with the ceiling surface portion and whose lower end communicates with the floor surface of the room. A clean room unit having at least a generally longitudinal side surface shape and consisting of a hollow wall section that is vertically hung from the ceiling and has both side surfaces serving as connection sections, and a front section located on the indoor side of the ceiling section that has an air purifying section. A main air supply/discharge pipe is provided at the rear of the ceiling surface portion, which communicates with an air conditioning control device that is to be connected to a blower fan, an air conditioning control device, and a heat exchange medium supply source. The above object is achieved by having both ends of the main supply/discharge pipe serving as pipe joints that are open to both side surfaces of the wall surface.

Embodiments and Effects As shown in the schematic diagram of FIG. 1, the unit 1 for a clean room system of the present invention has units 1 having a general shape in longitudinal section connected in the width direction and the length direction, and a floor surface 2 provided. A clean room 3 is formed. A heat exchange medium supply source device 4 for supplying cold water as a heat exchange medium to the air conditioning control device and an outdoor air conditioner 5 for introducing outside air into the room as necessary are disposed outside the room.

What is shown in FIG. 2 is a perspective view of the unit 1 for the clean room system, and FIGS. 3 and 4 are an enlarged sectional view and a plan view of the clean room formed by the unit 1.

The unit 1 is formed into a general shape at least in longitudinal section, consisting of a hollow ceiling surface part 6 and a hollow wall part 7 vertically disposed at the rear of the ceiling surface part 6.
The upper end of the wall section 7 communicates with the rear part of the ceiling section, and the lower end communicates with the floor surface 2, which is a well-known bleaching hole in an indoor clean room.

In the front part located on the indoor side of the ceiling surface part,
A first air blowing filter 8 for air purification is provided. Further, a blower fan 9 is provided at the rear of the ceiling section for sending air into the room 3 through the filter 8, and the air sent into the room is supplied from below the floor 2, which is a well-known bleaching method, into the hollow space 3. Pass through the wall member and move the fan 9 again.
It is now being sent indoors by
When part of the indoor air is exhausted outside, outside air is taken in from the outside air conditioner.

A cooling coil serving as a heat exchange coil of an air conditioning control device 10 is arranged behind the blower fan 9, and the device 10 adjusts the temperature and humidity within each unit. Further, a second filter 11 for air purification is arranged behind the air conditioning control device 10, and the air sent into the room is filtered through the first filter 8 and the second filter 11.
It is cleaned by the filter 11 of.

Further, a cold water feed pipe for supplying cold water as a heat exchange medium to the air conditioning control device 10 is provided at the rear of the ceiling surface portion 6 where the blower fan 9, the air conditioning control device 10, and the second filter 11 are disposed. Main supply/discharge pipe 1 consisting of cold water return pipe
2 is mounted on the support member, and the pipe 12 communicates with an air conditioning control device. The pipe 12 has an appropriate length so as to be accommodated in the rear part, and both ends thereof are pipe joints that are open to both side surfaces of the wall part 7.

Note that the arrows in FIG. 3 indicate the flow of air.

A plurality of clean room system units of the present invention are connected to form a clean room as shown in FIGS. 3 and 4.

That is, in the width direction, each unit 1
Connecting the tips of the ceiling surface parts of by a connecting means,
Also, both side surfaces are connected in the length direction. A floor surface 2 is disposed below the floor surface 2, and wall plates (not shown) are disposed on the outer side surfaces of the two units 1 located at the outermost ends to form a clean room.

As mentioned above, when connecting a plurality of units in the width direction and length direction, the tubes at the ends of the main supply and discharge pipes for each heat exchange medium installed internally at the same height position in each unit. The joints are connected to each other using flexible joints or flanges.
Then, to the main supply and exhaust pipe of one of the outermost units,
The pipe 4a of the heat exchange medium supply source device 4 disposed outdoors is connected, and the end of the main supply/discharge pipe opening to the outer surface of the other outermost unit is closed with a blank cap. As mentioned above, by providing a main supply/discharge pipe for supplying cold water, which is a heat exchange medium, to each air conditioning control device in each unit, the heat exchange medium supply source device can be connected to one of the outermost units. All you need to do is connect the main supply and exhaust pipes of adjacent units, and close the pipe end on the outer side of the main supply and exhaust pipe of the other outermost unit. It is not necessary.

The above-mentioned unit is formed into a roughly U-shaped cross section with a ceiling section, a wall section, and a floor section integrated into the lower end of the wall section. Often, in this case, a clean room is formed by simply connecting the units in the width and length directions, and since no floor preparation work is required, the clean room can be formed more easily and quickly.

Effects The present invention has the above-mentioned configuration, in which an air conditioning control device and a blower fan are provided in each unit, and a main supply and exhaust pipe for a heat exchange medium connected to the air conditioning control device is installed inside, and both the pipe joints are connected to each unit. Since the pipe ends are opened on both sides of the wall, the main supply and exhaust pipes of the outermost unit can be connected to the heat exchange medium supply source, and the main supply and discharge pipes of adjacent units can be connected to each other. It is sufficient to close off the outer end of the main supply/drain pipe of the other outermost unit, eliminating the need for extra piping and separate piping space, and therefore allowing the unit to be installed in the ceiling or under the floor. There is no need to take up a large space, and when creating a clean room on the second or third floor, for example, the height of the building can be made much lower than in conventional systems.

Furthermore, since a clean room can be formed by simply connecting each unit, the construction period for constructing a clean room can be significantly shortened, and the shape, area, etc. of the room can be easily changed. Furthermore, by providing an air conditioning control device for each unit, it is possible to maintain uniform temperature and humidity throughout the room.

[Brief explanation of drawings]

Fig. 1 is a schematic diagram showing a clean room using the unit for a clean room system of the present invention, Fig. 2 is a perspective view of the unit for a clean room system, and Fig. 3 is a clean room formed by the unit of Fig. 2. 4 is a plan view of the same, and FIGS. 5 and 6 are schematic views of a conventional clean room. 1: unit, 2: floor, 3: clean room, 4: heat exchange medium supply source device, 6: ceiling,
7: wall section, 8: filter, 10: air conditioning control device, 12: main supply and exhaust pipe.

Claims (1)

[Claims] 1. A hollow ceiling surface portion whose tip portion is a connecting portion; an upper end communicating with the ceiling surface portion and a lower end communicating with the floor surface of the room;
A unit for a clean room having at least a generally shaped longitudinal side comprising a hollow wall section with both side sections serving as connecting sections, and an air purifying filter is installed in a front section located on the indoor side of the ceiling section. A blower fan is arranged at the rear of the ceiling surface section,
A main supply/discharge pipe communicating with the air conditioning control device is provided to be connected to the air conditioning control device and a heat exchange medium supply source, and both ends of the main supply/discharge pipe are connected to both side surfaces of the wall section. A unit for clean room systems that has a pipe joint part with an opening.