JPH0363510A - Radiation thickness meter - Google Patents

Radiation thickness meter

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Publication number
JPH0363510A
JPH0363510A JP19994089A JP19994089A JPH0363510A JP H0363510 A JPH0363510 A JP H0363510A JP 19994089 A JP19994089 A JP 19994089A JP 19994089 A JP19994089 A JP 19994089A JP H0363510 A JPH0363510 A JP H0363510A
Authority
JP
Japan
Prior art keywords
thickness
measured
radiation
measurement
moisture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19994089A
Other languages
Japanese (ja)
Inventor
Koji Tomita
浩司 冨田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP19994089A priority Critical patent/JPH0363510A/en
Publication of JPH0363510A publication Critical patent/JPH0363510A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To accurately measure the thickness of a body to be measured by measuring the water in the measurement space between the body to be measured and a radiation detector, calculating the equivalent thickness of the body to be measured which is generated by the water in the measurement space from the obtained measured value, and correcting the thickness of the measured body with the equivalent thickness. CONSTITUTION:When the measurement is started, the intensity I of radiation detected by a radiation detector 2 at specific sampling intervals, the temperature of the body to be measured, e.g. a steel plate 5 which is measured by a thermom eter 3 for the body to be measured, and the water rate of air in the measure ment space which is measured by a radiation moisture meter 6 are read in a measurement unit. Then the thickness of the steel plate 5 is found by a mea surement unit 4 from the values which are read in this time. Namely, the equiva lent thickness of the steel plate 5 which is generated by the water in the air in the measurement space is calculated, the thickness is corrected according to the equivalent thickness, and a signal indicating the thickness of the steel plate 5 is outputted.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、測定空間に存在する水分により生じる誤差
を補正するようにした放射線厚み計に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a radiation thickness meter that corrects errors caused by moisture existing in a measurement space.

〔従来の技術〕[Conventional technology]

従来より、放射線厚み計としては、その構成ブロック図
の第3図に示すようなものが知られている。すなわち、
図における符号51は放射線源であり、この放射線源5
1と間隔を隔てて放射線検出器52が設けられており、
また、この放射線検出器52に近接した位置に、放射線
源51と放射線検出器520間にセットされる被測定物
55の温度を測定するための被測定物用温度計53が配
設されている。そして、54は、測定ユニットであって
、上記放射線検出器52と被測定物用温度計53からの
各出力を受けて、後述する測定式に従って被測定物55
の厚みを算出し、図示しない表示器あるいは記録計、及
び上位計算機等に得られた被測定物56の厚みを示す信
号を出力するものである。
2. Description of the Related Art Conventionally, a radiation thickness meter as shown in FIG. 3, a block diagram of its configuration, has been known. That is,
Reference numeral 51 in the figure is a radiation source, and this radiation source 5
A radiation detector 52 is provided at an interval from 1,
Further, a thermometer 53 for measuring the object to be measured is arranged in a position close to the radiation detector 52 for measuring the temperature of the object to be measured 55 set between the radiation source 51 and the radiation detector 520. . Reference numeral 54 denotes a measurement unit, which receives outputs from the radiation detector 52 and the thermometer 53 for the measured object, and measures the measured object 55 according to the measurement formula described later.
It calculates the thickness of the object to be measured 56 and outputs a signal indicating the obtained thickness of the object to be measured 56 to a display or recorder (not shown), a host computer, or the like.

次に、上記構成になる放射線厚み計の測定原理を以下に
紹介する。
Next, the measurement principle of the radiation thickness meter having the above configuration will be introduced below.

即ち、その測定原理は周知の次式のに基づく。That is, the measurement principle is based on the well-known equation below.

I−1,exp(−ρ・μ、・X)   −・−■なお
、上記測定式において、各符号は以下のことを表す。
I-1,exp(-ρ・μ,・X) −・−■ In addition, in the above measurement formula, each symbol represents the following.

rA ;被測定物がないときの放射線検出器の受ける放
射線の強さ I ;被測定物があるときの放射線検出器の受ける放射
線の強さ ρ :被測定物の密度(g/c1) μ、;被測定物の質量吸収係数(cm”/g)X ;被
測定物の厚み(cIl) つまり、放射線源51から放射された放射線は、被測定
物55がセットされていないとき、放射線源51と放射
線検出器52との間の大気空間で吸収されて減衰しつつ
放射線検出器52に到達し、この検出器52により放射
線の強さrAとして検出される。
rA: Intensity of radiation received by the radiation detector when there is no object to be measured I; Intensity of radiation received by the radiation detector when there is an object to be measured ρ: Density of the object to be measured (g/c1) μ, ; Mass absorption coefficient of the object to be measured (cm"/g) The radiation reaches the radiation detector 52 while being absorbed and attenuated in the atmospheric space between the radiation detector 52 and the radiation detector 52, and is detected by the radiation detector 52 as a radiation intensity rA.

一方、被測定物55がセットされているときは、放射線
は大気と被測定物55とを透過して減衰し、放射線検出
器52により放射線の強さIとして検出される。このよ
うに、放射線源51からの放射線は上記測定式■に従っ
て変化するので、両数射線の強さlA、rから被測定物
55の厚みXが求めるられる。
On the other hand, when the object to be measured 55 is set, the radiation passes through the atmosphere and the object to be measured 55 and is attenuated, and is detected by the radiation detector 52 as the intensity I of the radiation. In this way, the radiation from the radiation source 51 changes according to the above measurement formula (2), so the thickness X of the object to be measured 55 can be determined from the intensities lA and r of both numerical rays.

ところで、被測定物55はそれ自身の温度の変動により
その密度と厚みが変化するので、測定ユニット54では
、放射線検出器52により検出した放射線の強さIと1
.被測定物用温度計53により測定した被測定物55の
温度tとに基づいて、次の測定式■に従って標準温度に
おける被測定物55の厚みを求め、被測定物55の厚み
に変化を与える被測定物55の温度変動の補正を行うよ
うにしている。
Incidentally, since the density and thickness of the object to be measured 55 change due to fluctuations in its own temperature, the measurement unit 54 uses the intensity I and 1 of the radiation detected by the radiation detector 52.
.. Based on the temperature t of the object to be measured 55 measured by the object to be measured thermometer 53, the thickness of the object to be measured 55 at the standard temperature is determined according to the following measurement formula (2), and the thickness of the object to be measured 55 is changed. Temperature fluctuations in the object to be measured 55 are corrected.

X=((1+2α、・ΔT)/ρ・μ、〕x (Inr
a −1nl)         −一■なお、上記測
定式において、各符号は以下のことを表す。
X=((1+2α,・ΔT)/ρ・μ,]x (Inr
a -1nl) -1■ Note that in the above measurement formula, each symbol represents the following.

α、;被測定物の温度tにおける線膨張係数(’C−’
) ΔT;被測定物の標準温度との温度差(°C)〔発明が
解決しようとする課題〕 上記の放射線厚み計は被測定物とそれ以外の物質、つま
り測定空間の大気とを共に測定していることになるから
、前記測定式■に従って正確な被測定物の厚みを求める
場合には、大気の状態に変動がないことが必須条件であ
る。
α,; Coefficient of linear expansion at temperature t of the measured object ('C-'
) ΔT: Temperature difference between the standard temperature of the object to be measured (°C) [Problem to be solved by the invention] The radiation thickness meter described above measures both the object to be measured and other substances, that is, the atmosphere in the measurement space. Therefore, in order to accurately determine the thickness of the object to be measured according to the measurement formula (2), it is essential that there be no fluctuation in the atmospheric condition.

ところが、上記した従来の放射線厚み計は、鉄鋼業にお
ける熱間圧延工程での鋼板の厚みの測定にも多用されて
いる。この場合、鋼板が通過中のときと、そうでないと
きでは、鋼板通過中は圧延機やローラ等の圧延設備に冷
却水が噴射されるので、測定空間の大気の水分に変動が
生じる。そのため、例えば、測定空間の間隔を250c
mとして、X線またはセシウム137によるγ線を放射
線源とする放射線厚み計を使用した場合には、測定空間
の水分が50g/a+”変動すると、鋼板の厚みとして
約21t1mの違いが生じている。
However, the above-mentioned conventional radiation thickness meter is also frequently used to measure the thickness of a steel plate during a hot rolling process in the steel industry. In this case, since cooling water is injected to rolling equipment such as a rolling mill and rollers while the steel plate is passing through the steel plate and when it is not, the atmospheric moisture in the measurement space varies. Therefore, for example, the spacing of the measurement space can be set to 250c.
When using a radiation thickness meter that uses X-rays or γ-rays from cesium-137 as the radiation source, if the moisture in the measurement space fluctuates by 50g/a+'', there will be a difference in the thickness of the steel plate of approximately 21t1m. .

つまり、測定空間中に存在する水分により、得られる被
測定物の厚みに違いが生じるという問題点があった。
In other words, there is a problem in that the thickness of the object to be measured varies depending on the moisture present in the measurement space.

この発明は、上記のような問題点を解決するためになさ
れたものであって、測定空間に存在する水分が被測定物
の厚みに与える誤差をなくし、被測定物の正確な厚みを
測定することができる放射線厚み計の提供を目的とする
This invention was made in order to solve the above-mentioned problems, and it eliminates the error caused by moisture existing in the measurement space on the thickness of the object to be measured, and measures the accurate thickness of the object to be measured. The purpose is to provide a radiation thickness meter that can.

〔課題を解決するための手段〕[Means to solve the problem]

上記の目的を達成するために、この発明による放射線厚
み計は、放射線源の対応位置に放射線の強さを検出する
放射線検出器を備え、放射線源と放射線検出器の間にセ
ットされた被測定物の厚みを測定する放射vA厚み計に
おいて、前記被測定物と前記放射線検出器の間の測定空
間の水分を測定する水分計と、この水分計によって得ら
れた測定値に基づいて測定空間の水分により生じる被測
定物の等価厚み分を算出し、求めたこの等価厚み分によ
り被測定物の厚みを補正する補正演算手段とを備えたこ
とを特徴としている。
In order to achieve the above object, the radiation thickness meter according to the present invention includes a radiation detector for detecting the intensity of radiation at a position corresponding to a radiation source, and a radiation thickness meter set between the radiation source and the radiation detector. A radiation vA thickness meter that measures the thickness of an object includes a moisture meter that measures the moisture in the measurement space between the object to be measured and the radiation detector, and a moisture meter that measures the moisture content of the measurement space based on the measured value obtained by this moisture meter. The present invention is characterized by comprising a correction calculation means for calculating the equivalent thickness of the object to be measured caused by moisture and correcting the thickness of the object to be measured based on the calculated equivalent thickness.

〔作 用〕 この発明による放射線厚み計においては、被測定物と放
射線検出器の間の測定空間の水分を測定する水分計によ
って得られた測定(lIに基づいて、補正演算手段によ
って、測定空間の水分により生じる被測定物の等価厚み
分が算出されるとともに、この等価厚み分により補正さ
れた被測定物の厚みが求められる。
[Function] In the radiation thickness meter according to the present invention, the measurement space is adjusted based on the measurement (lI) obtained by the moisture meter that measures the moisture in the measurement space between the object to be measured and the radiation detector. The equivalent thickness of the object to be measured caused by the moisture content is calculated, and the thickness of the object to be measured corrected by this equivalent thickness is determined.

〔実施例〕〔Example〕

この発明の一実施例を、第1図の熱間圧延工程ラインの
鋼板の厚み測定に適用した際の放射線厚み計の構成ブロ
ック図、第2図の補正演算手段を備えた測定ユニットと
してのマイクロコンピュータの構成図に基づいて、以下
に説明する。
A configuration block diagram of a radiation thickness meter when an embodiment of the present invention is applied to the thickness measurement of a steel plate in a hot rolling process line as shown in FIG. This will be explained below based on the configuration diagram of the computer.

第1図において、1はセシウム137によるγ線の放射
線源であり、この放射!!1lailと間隔を隔てて放
射線検出器2が設けられている。また、この放射線検出
器2に近接した位置に、上記放射線alと放射線検出器
2の間にセットされる熱間圧延工程ラインにおける調板
5の温度を測定するための被測定物用温度計3と、放射
線式水分計6とが配設されている。この放射線式水分計
6は、測定空間の大気の水分を測定するためのものであ
って、応答速度が速く、また大気の過飽和な状態の水分
をも測定できる。そして、4は補正演算手段を備えた測
定ユニットであり、上記放射線検出器2、被測定物用温
度計3及び放射線式水分計6からの各出力を受けて、後
述する測定式に従って鋼板5の厚みを算出し、得られた
鋼板5の厚みを示す信号を出力するものである。
In Fig. 1, 1 is a gamma ray radiation source due to cesium 137, and this radiation! ! A radiation detector 2 is provided at an interval of 1rail. Further, a thermometer 3 for measuring the object to be measured for measuring the temperature of the conditioning plate 5 in the hot rolling process line is set in a position close to the radiation detector 2 between the radiation al and the radiation detector 2. and a radiation type moisture meter 6 are provided. This radiation type moisture meter 6 is for measuring atmospheric moisture in a measurement space, has a fast response speed, and can also measure supersaturated atmospheric moisture. Reference numeral 4 denotes a measurement unit equipped with a correction calculation means, which receives outputs from the radiation detector 2, the thermometer 3 for the object to be measured, and the radiation moisture meter 6, and measures the steel plate 5 according to the measurement formula described later. The thickness is calculated and a signal indicating the obtained thickness of the steel plate 5 is output.

この補正演算手段を備えた測定ユニット4は、プログラ
ムされたマイクロコンピュータで構成されており、第2
図に示すように、CPUと、プログラムや測定データが
格納されるメモリと、A/D変換器を含む入力インター
フェース回路と、表示やデータ出力制御回路を含む出力
インターフェース回路とを備え、上記の放射線検出器2
、被測定物用温度計3及び放射線式水分計6の出力がそ
れぞれ人力され、かつ求めた鋼板5の厚みを示す信号を
、図示しない表示器あるいは記録計、及び上位計算機等
に与えるようになっている。
The measurement unit 4 equipped with this correction calculation means is composed of a programmed microcomputer, and the second
As shown in the figure, it is equipped with a CPU, a memory in which programs and measurement data are stored, an input interface circuit including an A/D converter, and an output interface circuit including a display and data output control circuit. Detector 2
The outputs of the thermometer 3 for the object to be measured and the radiation moisture meter 6 are manually input, and a signal indicating the determined thickness of the steel plate 5 is given to a display or recorder (not shown), a host computer, etc. ing.

次に、上記構成になる放射線厚み計の動作を説明すると
、まず、測定が開始されると、所定サンプリング間隔毎
に、放射線検出器2によって検出される放射線の強さ■
と、被測定物用温度計3によって測定される鋼板5の温
度t、放射線式水分計6によって測定される測定空間の
大気の水分率りとが測定ユニット4に読み込まれる。そ
して、今回読み込まれたこれらの値に基づいて、測定ユ
ニット4にて次の測定式■及び各定数が予め入力された
プログラムが実行され、鋼板5の厚みXが求められる。
Next, to explain the operation of the radiation thickness meter having the above configuration, first, when measurement is started, the intensity of radiation detected by the radiation detector 2 is measured at each predetermined sampling interval.
, the temperature t of the steel plate 5 measured by the object to be measured thermometer 3, and the moisture content of the atmosphere in the measurement space measured by the radiation moisture meter 6 are read into the measurement unit 4. Then, based on these values read this time, the measurement unit 4 executes a program in which the following measurement formula (2) and each constant are input in advance, and the thickness X of the steel plate 5 is determined.

X−((1+2α、・ΔT)/ρ・μ、〕×(1nlo
 −1nl−ρ Hμ、  ・X、  ・D/10’ 
”)−■ なお、上記測定式において、各符号は以下のことを表す
、(測定式■、■の符号をも参照)■。 ;測定空間に
大気以外の物質が存在しないときの放射線検出器の受け
る放射線の強さ ρ、;水の密度(g/am”) μ、;水の質量吸収係数(cm”/g)Xw :測定空
間の距離(c+w) D ;水分率(c−” /−’) つまり、測定空間の大気の水分により生じる被測定物の
等価厚み分が算出され、前記の測定式■により得られる
偵からこの等価厚み分を差し引くという補正が施され、
得られたこの被測定物の厚みXを示す信号が出力される
。そして、このような測定動作が時系列に繰り返される
X-((1+2α,・ΔT)/ρ・μ,]×(1nlo
-1nl-ρ Hμ, ・X, ・D/10'
”) −■ In the above measurement formula, each symbol represents the following (see also the symbols for measurement formulas ■ and ■) ■. ; Radiation detector when no substances other than the atmosphere exist in the measurement space Intensity of radiation received by ρ, ; Density of water (g/am”) μ, ; Mass absorption coefficient of water (cm”/g) -') In other words, the equivalent thickness of the object to be measured caused by atmospheric moisture in the measurement space is calculated, and a correction is made by subtracting this equivalent thickness from the value obtained by the measurement formula (■) above.
A signal indicating the obtained thickness X of the object to be measured is output. Then, such measurement operations are repeated in time series.

以上の結果、測定空間に存在する水分が被測定物の厚み
に与える誤差が取り除かれ、測定空間の大気の水分変動
にかかわらず、より正確な鋼板5の厚みが得られる。
As a result of the above, the error caused by the moisture present in the measurement space on the thickness of the object to be measured is removed, and a more accurate thickness of the steel plate 5 can be obtained regardless of atmospheric moisture fluctuations in the measurement space.

なお、上記実施例にあってはこの放射線厚み計を熱間圧
延工程ラインにおける鋼板の厚み測定に適用した例につ
いて説明したが、特にこれに限定されるものではなく、
圧延油処理により測定空間の水分が変動するような冷間
圧延工程における鋼板の厚み測定や、非鉄材料、非金属
材料の厚み測定に対しても適用することができる。特に
、非鉄材料の中でもアルミニウムやチタン材の場合には
、周知のように鉄鋼材料に比較してその厚みの値が測定
空間に存在する水分の影響をより強く受けるので、この
発明による放射線厚み計を適用すれば、いっそうの効果
を期待することができる。
In addition, in the above embodiment, an example was described in which this radiation thickness meter was applied to measuring the thickness of a steel plate in a hot rolling process line, but it is not particularly limited to this.
It can also be applied to the thickness measurement of steel plates in cold rolling processes where the moisture content in the measurement space fluctuates due to rolling oil treatment, as well as the thickness measurement of non-ferrous materials and non-metallic materials. In particular, among non-ferrous materials, in the case of aluminum and titanium materials, the thickness value is more strongly affected by moisture existing in the measurement space than steel materials, as is well known, so the radiation thickness meter according to the present invention If you apply it, you can expect even better results.

また、上記実施例では放射線式水分計を用いたが、これ
に代えて、応答速度が速く、また大気の過飽和な状態の
水分をも測定できる機能を備えたものとして、赤外線式
水分計を用いるようにしてもよい。
In addition, although a radiation moisture meter was used in the above embodiment, an infrared moisture meter may be used instead, as it has a fast response speed and has the ability to measure even supersaturated moisture in the atmosphere. You can do it like this.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、この発明による放射線厚み計によ
れば、被測定物と放射線検出器の間の測定空間の水分を
測定する水分計を設け、この水分計によって得られた測
定値に基づいて、補正演算手段によって、測定空間の水
分により生じる被測定物の等価厚み分を算出し、この等
価厚み分により補正された被測定物の厚みを求めるよう
にtllittしたので、測定空間の大気の水分変動に
かかわらず、より正確な被測定物の厚みを得ることがで
きる。
As explained above, according to the radiation thickness meter according to the present invention, a moisture meter is provided to measure the moisture in the measurement space between the object to be measured and the radiation detector, and based on the measured value obtained by this moisture meter, , the correction calculation means calculates the equivalent thickness of the object to be measured due to moisture in the measurement space, and the thickness of the object corrected by this equivalent thickness is calculated. Regardless of variations, more accurate thickness of the object to be measured can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は熱間圧延工程ラインの鋼板の厚み測定に適用し
たこの発明に係る放射線厚み計の構成ブロック図、第2
図は補正演算手段を備えた測定ユニットとしてのマイク
ロコンピュータの構成図、第3図は従来の放射線厚み計
の構成ブロック図である。 1−放射線源、2−・−放射線検出器、3−・−被測定
物用温度計、4−補正演算手段を備えた測定ユニット、
5・−鋼板、6・・−放射線式水分計。
Figure 1 is a block diagram of the configuration of the radiation thickness meter according to the present invention, which is applied to measuring the thickness of steel plates in a hot rolling process line.
The figure is a block diagram of a microcomputer as a measuring unit equipped with correction calculation means, and FIG. 3 is a block diagram of a conventional radiation thickness meter. 1-Radiation source, 2-.-Radiation detector, 3-.-Measurement object thermometer, 4-Measurement unit equipped with correction calculation means,
5.--steel plate, 6.--radiation type moisture meter.

Claims (1)

【特許請求の範囲】[Claims] (1)放射線源の対応位置に放射線の強さを検出する放
射線検出器を備え、放射線源と放射線検出器の間にセッ
トされた被測定物の厚みを測定する放射線厚み計におい
て、前記被測定物と前記放射線検出器の間の測定空間の
水分を測定する水分計と、この水分計によって得られた
測定値に基づいて測定空間の水分により生じる被測定物
の等価厚み分を算出し、求めたこの等価厚み分により被
測定物の厚みを補正する補正演算手段とを備えたことを
特徴とする放射線厚み計。
(1) A radiation thickness meter that is equipped with a radiation detector that detects the intensity of radiation at a position corresponding to a radiation source, and that measures the thickness of an object to be measured that is set between the radiation source and the radiation detector. A moisture meter that measures moisture in the measurement space between the object and the radiation detector, and an equivalent thickness of the object to be measured caused by moisture in the measurement space based on the measured value obtained by this moisture meter. A radiation thickness meter characterized by comprising a correction calculation means for correcting the thickness of the object to be measured based on the equivalent thickness of the octopus.
JP19994089A 1989-07-31 1989-07-31 Radiation thickness meter Pending JPH0363510A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19994089A JPH0363510A (en) 1989-07-31 1989-07-31 Radiation thickness meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19994089A JPH0363510A (en) 1989-07-31 1989-07-31 Radiation thickness meter

Publications (1)

Publication Number Publication Date
JPH0363510A true JPH0363510A (en) 1991-03-19

Family

ID=16416128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19994089A Pending JPH0363510A (en) 1989-07-31 1989-07-31 Radiation thickness meter

Country Status (1)

Country Link
JP (1) JPH0363510A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013108859A (en) * 2011-11-22 2013-06-06 Yokogawa Electric Corp Radiographic inspection apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170752A (en) * 1980-09-26 1984-09-27 Sofutetsukusu Kk Method and device for measuring thickness and examining quality of thin film paper or the like by threshold x-ray
JPS6079207A (en) * 1983-10-06 1985-05-07 Sumitomo Metal Ind Ltd Thickness measurement of plate by radiation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170752A (en) * 1980-09-26 1984-09-27 Sofutetsukusu Kk Method and device for measuring thickness and examining quality of thin film paper or the like by threshold x-ray
JPS6079207A (en) * 1983-10-06 1985-05-07 Sumitomo Metal Ind Ltd Thickness measurement of plate by radiation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013108859A (en) * 2011-11-22 2013-06-06 Yokogawa Electric Corp Radiographic inspection apparatus

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