JPH0363937U - - Google Patents

Info

Publication number
JPH0363937U
JPH0363937U JP12423089U JP12423089U JPH0363937U JP H0363937 U JPH0363937 U JP H0363937U JP 12423089 U JP12423089 U JP 12423089U JP 12423089 U JP12423089 U JP 12423089U JP H0363937 U JPH0363937 U JP H0363937U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
cassette
transfer
boat
hawk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12423089U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12423089U priority Critical patent/JPH0363937U/ja
Publication of JPH0363937U publication Critical patent/JPH0363937U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の一実施例を例示する斜視図
であり、第２図及び第３図はカセツト及びボンド
の具体例を示す斜視図である。 Ａ……カセツト、Ｂ……ボート、Ｃ……半導体
ウエーハ移替装置、１……半導体ウエーハ、１１
……移送機構、１２……スライドステージ、１３
……カセツト専用移替ホーク、１４……ボート専
用移替ホーク。 FIG. 1 is a perspective view illustrating an embodiment of this invention, and FIGS. 2 and 3 are perspective views illustrating specific examples of a cassette and a bond. A...Cassette, B...Boat, C...Semiconductor wafer transfer device, 1...Semiconductor wafer, 11
...Transfer mechanism, 12...Slide stage, 13
... Transfer hawk for cassettes, 14... Transfer hawk for boats.

Claims (1)

【実用新案登録請求の範囲】 半導体ウエーハを水平に配して整列保持させる
カセツトとボートとの間で移替ホークによつて半
導体ウエーハを載置して移し替えるものにおいて
、 カセツトからボートへ専用に半導体ウエーハを
載置して移し替えるカセツト専用移替ホークと、 ボートからカセツトへ専用に半導体ウエーハを
載置して移し替えるボート専用移替ホークとを各
々備えたことを特徴とする半導体ウエーハ移替装
置。[Claims for Utility Model Registration] In a device in which semiconductor wafers are placed and transferred between a boat and a cassette in which semiconductor wafers are arranged horizontally and maintained in alignment, a transfer fork is used to place and transfer semiconductor wafers from the cassette to the boat. A semiconductor wafer transfer device characterized by comprising a cassette-dedicated transfer hawk for loading and transferring semiconductor wafers, and a boat-dedicated transfer hawk for loading and transferring semiconductor wafers from a boat to a cassette. Device.
JP12423089U 1989-10-23 1989-10-23 Pending JPH0363937U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12423089U JPH0363937U (en) 1989-10-23 1989-10-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12423089U JPH0363937U (en) 1989-10-23 1989-10-23

Publications (1)

Publication Number Publication Date
JPH0363937U true JPH0363937U (en) 1991-06-21

Family

ID=31672162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12423089U Pending JPH0363937U (en) 1989-10-23 1989-10-23

Country Status (1)

Country Link
JP (1) JPH0363937U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100317320B1 (en) * 1999-05-24 2001-12-22 김영환 device for handling wafer for CVD process in fabrication of semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100317320B1 (en) * 1999-05-24 2001-12-22 김영환 device for handling wafer for CVD process in fabrication of semiconductor

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