JPH0332428U - - Google Patents

Info

Publication number
JPH0332428U
JPH0332428U JP9232389U JP9232389U JPH0332428U JP H0332428 U JPH0332428 U JP H0332428U JP 9232389 U JP9232389 U JP 9232389U JP 9232389 U JP9232389 U JP 9232389U JP H0332428 U JPH0332428 U JP H0332428U
Authority
JP
Japan
Prior art keywords
cassette
dual
wafer cassettes
cassettes
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9232389U
Other languages
Japanese (ja)
Other versions
JPH0648848Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989092323U priority Critical patent/JPH0648848Y2/en
Publication of JPH0332428U publication Critical patent/JPH0332428U/ja
Application granted granted Critical
Publication of JPH0648848Y2 publication Critical patent/JPH0648848Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係るカセツト整列装置の第１
の実施例を示す要部縦断面図、第２図はその平面
図、第３図はその動作説明図、第４図は本考案に
係る第２の実施例を示す要部平面図、第５図はス
ピンドライヤの動作説明図、第６図はカセツト二
連式基板処理装置の斜視図である。 １……カセツト二連式基板処理装置、２……カ
セツトバツフア停留部、３，３ａ，３ｂ……ウエ
ハカセツト、４……搬送用ロボツト、５……処理
槽、６……スピンドライヤ、１０……カセツト整
列装置、１１……移送手段、２０……方向転換手
段、Ａ……スピンドライヤの受入姿勢、Ｇ……搬
送用ロボツトの取出し位置。 Figure 1 shows the first cassette aligning device according to the present invention.
FIG. 2 is a plan view thereof, FIG. 3 is an explanatory diagram of its operation, FIG. 4 is a plan view of principal portions showing a second embodiment of the present invention, The figure is an explanatory diagram of the operation of the spin dryer, and FIG. 6 is a perspective view of the dual cassette type substrate processing apparatus. DESCRIPTION OF SYMBOLS 1... Dual cassette substrate processing apparatus, 2... Cassette buffer stop, 3, 3a, 3b... Wafer cassette, 4... Transfer robot, 5... Processing tank, 6... Spin dryer, 10... cassette alignment device, 11... transfer means, 20... direction change means, A... receiving attitude of spin dryer, G... take-out position of transport robot.

Claims (1)

【実用新案登録請求の範囲】 カセツト二連式基板処理装置のカセツトバツフ
ア停留部に設けられたカセツト整列装置であつて
、 搬入されたウエハカセツトを搬送用ロボツトの
取出し位置まで移送する二連の移送手段と、少な
くとも一方の移送手段に付設された方向転換手段
とを具備して成り、 方向転換手段で一方のウエハカセツトの向きを
所定角度水平旋回させることにより、一組のカセ
ツトの向きを、当該基板処理装置のスピンドライ
ヤの受入姿勢に整列配置することを特徴とするカ
セツト二連式基板処理装置のカセツト整列装置。[Scope of Claim for Utility Model Registration] A cassette aligning device installed in the cassette buffer stop of a dual cassette type substrate processing apparatus, which is a dual transport means for transporting loaded wafer cassettes to the take-out position of a transport robot. and a direction changing means attached to at least one of the transfer means, the direction changing means horizontally turning the direction of one of the wafer cassettes by a predetermined angle, thereby changing the direction of the set of wafer cassettes to the substrate. A cassette alignment device for a dual cassette type substrate processing apparatus, characterized in that the cassettes are aligned in a receiving attitude of a spin dryer of the processing device.
JP1989092323U 1989-08-04 1989-08-04 Cassette Alignment Device for Dual Cassette Type Substrate Processing Equipment Expired - Lifetime JPH0648848Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989092323U JPH0648848Y2 (en) 1989-08-04 1989-08-04 Cassette Alignment Device for Dual Cassette Type Substrate Processing Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989092323U JPH0648848Y2 (en) 1989-08-04 1989-08-04 Cassette Alignment Device for Dual Cassette Type Substrate Processing Equipment

Publications (2)

Publication Number Publication Date
JPH0332428U true JPH0332428U (en) 1991-03-29
JPH0648848Y2 JPH0648848Y2 (en) 1994-12-12

Family

ID=31641760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989092323U Expired - Lifetime JPH0648848Y2 (en) 1989-08-04 1989-08-04 Cassette Alignment Device for Dual Cassette Type Substrate Processing Equipment

Country Status (1)

Country Link
JP (1) JPH0648848Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002051904A (en) * 2000-08-10 2002-02-19 Nippon Kouatsu Electric Co Incense burner
JP2002142965A (en) * 2000-11-16 2002-05-21 Nippon Kouatsu Electric Co Incense burner

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596545A (en) * 1982-07-05 1984-01-13 Hitachi Ltd Wafer drier
JPS60163436A (en) * 1984-02-06 1985-08-26 Seiichiro Sogo Method for cleaning and drying of semiconductor material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596545A (en) * 1982-07-05 1984-01-13 Hitachi Ltd Wafer drier
JPS60163436A (en) * 1984-02-06 1985-08-26 Seiichiro Sogo Method for cleaning and drying of semiconductor material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002051904A (en) * 2000-08-10 2002-02-19 Nippon Kouatsu Electric Co Incense burner
JP2002142965A (en) * 2000-11-16 2002-05-21 Nippon Kouatsu Electric Co Incense burner

Also Published As

Publication number Publication date
JPH0648848Y2 (en) 1994-12-12

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