JPH0364716B2 - - Google Patents
Info
- Publication number
- JPH0364716B2 JPH0364716B2 JP58114281A JP11428183A JPH0364716B2 JP H0364716 B2 JPH0364716 B2 JP H0364716B2 JP 58114281 A JP58114281 A JP 58114281A JP 11428183 A JP11428183 A JP 11428183A JP H0364716 B2 JPH0364716 B2 JP H0364716B2
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- refrigerator
- pump
- case
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
【発明の詳細な説明】
本発明は、超高真空を得るに使用されるクライ
オポンプに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cryopump used to obtain an ultra-high vacuum.
一般にこの種ポンプは、ポンプケース内にステ
ンレス製シリンダケースを有する２段の冷凍機シ
リンダが設けられ、その第１段の冷凍機シリンダ
には銅製のシールド及びバツフルの熱伝導部材を
取付け、その第２段の冷凍機シリンダには同じく
銅製のクライオパネルの熱伝導部材を取付けて構
成される。而して、これら熱伝導部材は、銅の素
材そのままでは表面が酸化等により変色するので
ニツケルメツキが施されるが、メツキ層には肉眼
で見えない程度の細孔が存在し、腐蝕性雰囲気中
に於ては該細孔を通過して腐蝕性ガス或は液が銅
まで浸透し、銅が腐蝕されると共に錆（緑青）が
現れ、ポンプ内が汚染される欠点が生ずる。ま
た、熱伝導部材に錆が発生すると、ニツケルメツ
キ面の光沢が失われ輻射率が増大するので、ポン
プへの輻射による熱負荷も増大し、ポンプ性能が
低下して好ましくない。また、冷凍機シリンダの
シリンダケースは、ステンレス製であり腐蝕性雰
囲気に強いと思われたが、該ポンプでCl2、
CClF3、CF4等の塩素系やフツ素系のガス或はそ
の分解生成物を排気した場合、ステンレス銅も腐
蝕され、通常、伝熱量を最小限に制限すべく薄肉
で形成され内部に高圧のヘリウムガスが充填され
たシリンダの爆発の危険やガス洩れの危険を生ず
るので、短時間でシリンダを交換しなければなら
ず、耐久性が乏しい不都合がある。 Generally, this type of pump is equipped with a two-stage refrigerator cylinder that has a stainless steel cylinder case inside the pump case, and the first stage refrigerator cylinder is equipped with a copper shield and a full heat conduction member. The two-stage refrigerator cylinder is constructed by attaching a heat conductive member of a cryopanel also made of copper. These thermally conductive members are coated with nickel plating because the surface of the copper material will change color due to oxidation, etc., but the plating layer has pores that are invisible to the naked eye and cannot be used in corrosive atmospheres. In this case, a corrosive gas or liquid passes through the pores and penetrates into the copper, corroding the copper and causing rust (patina) to appear, resulting in the inside of the pump becoming contaminated. Further, if rust occurs on the heat conductive member, the gloss of the nickel plated surface will be lost and the emissivity will increase, so the heat load due to radiation on the pump will also increase, which is undesirable because the pump performance will deteriorate. In addition, the cylinder case of the refrigerator cylinder is made of stainless steel and was thought to be resistant to corrosive atmospheres, but the pump did not contain Cl 2 ,
When chlorine-based or fluorine-based gases such as CClF 3 and CF 4 or their decomposition products are exhausted, stainless steel is also corroded, and is usually formed with a thin wall to minimize the amount of heat transfer and has a high pressure inside. There is a risk of explosion or gas leakage in the cylinder filled with helium gas, so the cylinder must be replaced in a short period of time, which is disadvantageous in terms of poor durability.
本発明は、こうした欠点等を解決することを目
的としたもので、ポンプケース内に、冷凍機シリ
ンダと該冷凍機シリンダに取付けた熱伝導部材と
を設け、冷却された該熱伝導部材にガス分子を凝
縮させて排気するようにしたものに於て、該ポン
プケース内の冷凍機シリンダ及び該熱伝導部材の
外面に、フツ素樹脂の薄膜を形成したことを特徴
とする。 The present invention aims to solve these drawbacks, and includes a refrigerator cylinder and a heat conduction member attached to the refrigerator cylinder in a pump case, and a gas is supplied to the cooled heat conduction member. The device is characterized in that a thin film of fluororesin is formed on the outer surface of the refrigerator cylinder and the heat conductive member in the pump case, in which molecules are condensed and evacuated.
本発明の実施例を別紙図面につき説明するに、
１はクライオポンプのポンプケース、２は２段に
構成された冷凍機シリンダ３ａ，３ｂと冷凍機駆
動部４とから成る冷凍機を示し、両シリンダ３
ａ，３ｂはポンプケース１内に、また、該駆動部
４は該ポンプケース１外に夫々位置して該ケース
１に取付けられる。５は両シリンダ３ａ，３ｂに
取付けされる熱伝導部材で、ポンプケース１の吸
気口１ａに向いた開口部６を有するシールド５ａ
と、該開口部６に取付けたバツフル５ｂと、該シ
ールド５ａの筒内の第２段の冷凍機シリンダ３ｂ
に取付けたクライオパネル５ｃとで構成され、該
冷凍機２が駆動されると、シールド５ａ及びバツ
フル５ｂは約70〓以下に冷却されて吸気口１ａか
らの水蒸気を凝縮排気すると共にクライオパネル
５ｃは約20〓以下に冷却されて窒素、アルゴン等
を凝縮排気する。而して、CCl2等の腐蝕性ガス
を排気した場合、ポンプケース１内に収容された
銅製の熱伝導部材５、ステンレス製の冷凍機シリ
ンダ３ａ，３ｂ等の部材に腐蝕性ガス等が付着す
ると前記したように腐蝕する不都合を生ずるの
で、これら熱伝導部材５及び冷凍機シリンダ３
ａ，３ｂの外面若しくは一部にフツ素樹脂の薄膜
７を形成し、直接腐蝕性ガス等が付着しないよう
にした。該薄膜７の樹脂としては、例えば耐薬
性、非粘着性に優れた四フツ化系のフツ素樹脂を
使用することが好ましく、腐蝕性ガスが付着して
もその汚れを簡単にクリーニングすることが出来
る。 Embodiments of the present invention will be described with reference to the attached drawings.
Reference numeral 1 indicates a pump case of a cryopump, and reference numeral 2 indicates a refrigerator consisting of two stages of refrigerator cylinders 3a and 3b and a refrigerator drive unit 4. Both cylinders 3
a and 3b are located inside the pump case 1, and the drive section 4 is located outside the pump case 1 and attached to the case 1. 5 is a heat conductive member attached to both cylinders 3a and 3b, and includes a shield 5a having an opening 6 facing the intake port 1a of the pump case 1;
, a buttful 5b attached to the opening 6, and a second stage refrigerator cylinder 3b inside the cylinder of the shield 5a.
When the refrigerator 2 is driven, the shield 5a and the buffer 5b are cooled down to about 70° or less, condensing and exhausting the water vapor from the intake port 1a, and the cryopanel 5c It is cooled to below about 20㎓ and nitrogen, argon, etc. are condensed and exhausted. Therefore, when a corrosive gas such as CCl 2 is exhausted, the corrosive gas adheres to members such as the copper heat conductive member 5 housed in the pump case 1 and the stainless steel refrigerator cylinders 3a and 3b. This will cause the disadvantage of corrosion as described above, so these heat conductive members 5 and the refrigerator cylinder 3
A thin film 7 of fluororesin was formed on the outer surface or a part of parts a and 3b to prevent direct adhesion of corrosive gas and the like. As the resin for the thin film 7, it is preferable to use, for example, a tetrafluoride-based fluororesin that is excellent in chemical resistance and non-adhesiveness, and even if corrosive gas adheres, the dirt can be easily cleaned. I can do it.
該フツ素樹脂の薄膜７は、一般にニツケルメツ
キ面よりも輻射率が大きいが、ニツケルメツキ面
に錆が現れたときの輻射率よりも大幅に小さく、
余りクライオポンプの性能に影響を与えることが
ない。また、シリンダ３ａ，３ｂは腐蝕による肉
厚の減少がなく爆発等の危険も少なくなる。 The fluororesin thin film 7 generally has a higher emissivity than the nickel-plated surface, but it is significantly lower than the emissivity when rust appears on the nickel-plated surface.
It does not significantly affect the performance of the cryopump. Further, the cylinders 3a and 3b do not have their wall thickness reduced due to corrosion, and the risk of explosion or the like is reduced.
このように本発明によるときは、クライオポン
プのポンプケース内の該冷凍機シリンダ及び該熱
伝導部材の外面に、フツ素樹脂の薄膜を形成した
ので、腐蝕により安全性や性能が低下する不都合
が解消され、フツ素樹脂の薄膜を形成するだけで
あるので製作も容易であり、メンテナンスも簡略
化出来る等の効果がある。 In this way, according to the present invention, a thin film of fluororesin is formed on the outer surface of the refrigerator cylinder and the heat conductive member in the pump case of the cryopump, so that the inconvenience of deterioration of safety and performance due to corrosion is avoided. Since all that is required is to form a thin film of fluororesin, manufacturing is easy and maintenance can be simplified.
図面は本発明の実施例の截断側面図である。
１…ポンプケース、３ａ，３ｂ…冷凍機シリン
ダ、５…熱伝導部材、７…フツ素樹脂の薄膜。
The drawing is a cutaway side view of an embodiment of the invention. DESCRIPTION OF SYMBOLS 1... Pump case, 3a, 3b... Refrigerator cylinder, 5... Heat conduction member, 7... Fluorine resin thin film.
Claims (1)
機シリンダに取付けた熱伝導部材とを設け、冷却
された該熱伝導部材にガス分子を凝縮させて排気
するようにしたものに於て、該ポンプケース内の
該冷凍機シリンダ及び該熱伝導部材の外面に、フ
ツ素樹脂の薄膜を形成したことを特徴とするクラ
イオポンプ。1 In a pump case in which a refrigerator cylinder and a heat conduction member attached to the refrigerator cylinder are provided, and gas molecules are condensed on the cooled heat conduction member and exhausted, the pump A cryopump characterized in that a thin film of fluororesin is formed on the outer surface of the refrigerator cylinder and the heat conductive member in the case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11428183A JPS608481A (en) | 1983-06-27 | 1983-06-27 | Cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11428183A JPS608481A (en) | 1983-06-27 | 1983-06-27 | Cryopump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS608481A JPS608481A (en) | 1985-01-17 |
| JPH0364716B2 true JPH0364716B2 (en) | 1991-10-08 |
Family
ID=14633901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11428183A Granted JPS608481A (en) | 1983-06-27 | 1983-06-27 | Cryopump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608481A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9032741B2 (en) | 2009-11-09 | 2015-05-19 | Sumitomo Heavy Industries, Ltd. | Cryopump and vacuum pumping method |
| JP5553638B2 (en) | 2010-02-19 | 2014-07-16 | 住友重機械工業株式会社 | Cold trap and vacuum exhaust device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884902A (en) * | 1972-02-15 | 1973-11-10 |
-
1983
- 1983-06-27 JP JP11428183A patent/JPS608481A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS608481A (en) | 1985-01-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5538262A (en) | Ultra-high vacuum gasket and vacuum apparatus using the same | |
| KR101057321B1 (en) | Cryopump with louver extension | |
| JPH0625597B2 (en) | piston ring | |
| US4212170A (en) | Cryopump | |
| US5819545A (en) | Cryopump with selective condensation and defrost | |
| CN209186342U (en) | The stainless iron pot of acid resistance, the stainless pot of acid resistance and cooking utensils | |
| JPS608481A (en) | Cryopump | |
| JP2607417B2 (en) | Multi-layer vacuum insulation method and insulated double tube | |
| US5921559A (en) | Sealing structure for an airtight chamber | |
| JPS58117372A (en) | Superhigh vacuum pump using cryogenic pump and bulk getter pump in combination | |
| JPS62188856A (en) | Piston ring | |
| US20260055501A1 (en) | Sealing airlock for deposition chamber | |
| JP2003342752A (en) | Heat and corrosion resistant coating member for vacuum, vacuum apparatus having parts using the member, and coating method therefor | |
| JPH0474584B2 (en) | ||
| JPH05172054A (en) | Cryopump | |
| US5799493A (en) | Corrosion resistant cryopump | |
| JP2000028078A (en) | Radiation heat reflecting sheet | |
| JPH026376B2 (en) | ||
| GB2220449A (en) | Cryopump | |
| JPS6027790A (en) | Cryopump | |
| CN221943445U (en) | Antioxidant aluminum alloy composite pipe | |
| KR100695324B1 (en) | Ceramic products coated with brass or bronze and methods for coating them | |
| JPH08281868A (en) | Corrosion-resistant structure | |
| SU1130037A1 (en) | Method of cryogenic vacuum evacuation of gases | |
| KR940007272B1 (en) | Heat Treatment Object Fixture |