JPH0364717B2 - - Google Patents

Info

Publication number: JPH0364717B2
Authority: JP; Japan
Prior art keywords: cryopump; cryopanel; gas; pump; heat sink
Prior art date: 1983-07-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP58502481A

Other languages

English (en)

Japanese (ja)

Other versions

JPS59501223A (ja

Inventor

Fuiritsupu Ei Resaado

Aren Jei Baatoretsuto

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Azenta Inc

Original Assignee

Helix Technology Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-07-01

Filing date

1983-07-01

Publication date

1991-10-08

1983-07-01 Application filed by Helix Technology Corp filed Critical Helix Technology Corp

1983-07-01 Priority claimed from PCT/US1983/001005 external-priority patent/WO1984000404A1/en

1984-07-12 Publication of JPS59501223A publication Critical patent/JPS59501223A/ja

1991-10-08 Publication of JPH0364717B2 publication Critical patent/JPH0364717B2/ja

Status Granted legal-status Critical Current

Links

239000007789 gas Substances 0.000 description 64
238000009835 boiling Methods 0.000 description 29
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 13
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 12
239000001257 hydrogen Substances 0.000 description 11
229910052739 hydrogen Inorganic materials 0.000 description 11
239000003463 adsorbent Substances 0.000 description 8
230000005855 radiation Effects 0.000 description 6
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
230000008929 regeneration Effects 0.000 description 5
238000011069 regeneration method Methods 0.000 description 5
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
238000000034 method Methods 0.000 description 4
239000013307 optical fiber Substances 0.000 description 4
239000002904 solvent Substances 0.000 description 4
229910052782 aluminium Inorganic materials 0.000 description 3
XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
238000004891 communication Methods 0.000 description 3
230000005294 ferromagnetic effect Effects 0.000 description 3
239000011521 glass Substances 0.000 description 3
230000003287 optical effect Effects 0.000 description 3
229920006395 saturated elastomer Polymers 0.000 description 3
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
229910052786 argon Inorganic materials 0.000 description 2
230000005540 biological transmission Effects 0.000 description 2
238000001816 cooling Methods 0.000 description 2
239000000835 fiber Substances 0.000 description 2
238000010438 heat treatment Methods 0.000 description 2
239000001307 helium Substances 0.000 description 2
229910052734 helium Inorganic materials 0.000 description 2
SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
229910052754 neon Inorganic materials 0.000 description 2
GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
229910052757 nitrogen Inorganic materials 0.000 description 2
238000005086 pumping Methods 0.000 description 2
239000012453 solvate Substances 0.000 description 2
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
239000006227 byproduct Substances 0.000 description 1
229910002092 carbon dioxide Inorganic materials 0.000 description 1
239000001569 carbon dioxide Substances 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
239000010949 copper Substances 0.000 description 1
238000000151 deposition Methods 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000003795 desorption Methods 0.000 description 1
229910052736 halogen Inorganic materials 0.000 description 1
150000002367 halogens Chemical class 0.000 description 1
150000002431 hydrogen Chemical class 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
229910052751 metal Inorganic materials 0.000 description 1
239000002184 metal Substances 0.000 description 1
239000002808 molecular sieve Substances 0.000 description 1
230000000737 periodic effect Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
229910052721 tungsten Inorganic materials 0.000 description 1
239000010937 tungsten Substances 0.000 description 1
238000010792 warming Methods 0.000 description 1

Landscapes

Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

JP58502481A 1982-07-06 1983-07-01 クライオポンプ Granted JPS59501223A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
PCT/US1983/001005 WO1984000404A1 (en)	1982-07-06	1983-07-01	Means for periodic desorption of a cryopump
US395120		1999-09-14

Publications (2)

Publication Number	Publication Date
JPS59501223A JPS59501223A (ja)	1984-07-12
JPH0364717B2 true JPH0364717B2 (de)	1991-10-08

Family

ID=22175323

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP58502481A Granted JPS59501223A (ja)	1982-07-06	1983-07-01	クライオポンプ

Country Status (1)

Country	Link
JP (1)	JPS59501223A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5400604A (en) *	1990-11-19	1995-03-28	Leybold Ag	Cryopump and process for regenerating said cryopump
JP2014122602A (ja) *	2012-12-21	2014-07-03	High Energy Accelerator Research Organization	ハイブリッド真空装置及びそれを用いた排気方法
JP7898812B2 (ja) *	2022-12-14	2026-08-03	住友重機械工業株式会社	クライオポンプおよびクライオポンプ再生方法

1983
- 1983-07-01 JP JP58502481A patent/JPS59501223A/ja active Granted

Also Published As

Publication number	Publication date
JPS59501223A (ja)	1984-07-12

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