JPH036536U

JPH036536U -

Info

Publication number: JPH036536U
Application number: JP6660489U
Authority: JP
Priority date: 1989-06-06
Filing date: 1989-06-06
Publication date: 1991-01-22

Description

[Brief explanation of drawings]

第１図はこの考案の一実施例による圧力センサ
の構造を示す断面図、第２図は同上実施例の第１
図の直角方向の断面図、第３図は同上実施例にお
ける制御部の電気回路図である。１……圧力センサ、２，３……ケース、４，５
……半導体チツプ、４ａ，５ａ……ダイヤフラム
、９……シリコン油膜、２１……第１の圧力室、
２２……第２の圧力室、２３……第３の圧力室、
２４……第４の圧力室、２５……導圧管部、１０
１……第１のブリツジ回路、１０２……第２のブ
リツジ回路、１０３……第１の差動増幅回路、１
０４……第２の差動増幅回路、１０５……第３の
差動増幅回路。なお、図中、同一符号は同一、ま
たは相当部分を示す。 FIG. 1 is a sectional view showing the structure of a pressure sensor according to an embodiment of this invention, and FIG.
FIG. 3, which is a sectional view taken in a direction perpendicular to the figure, is an electric circuit diagram of the control section in the same embodiment. 1... Pressure sensor, 2, 3... Case, 4, 5
...Semiconductor chip, 4a, 5a...Diaphragm, 9...Silicon oil film, 21...First pressure chamber,
22... second pressure chamber, 23... third pressure chamber,
24... Fourth pressure chamber, 25... Impulse pipe section, 10
1...First bridge circuit, 102...Second bridge circuit, 103...First differential amplifier circuit, 1
04...Second differential amplifier circuit, 105...Third differential amplifier circuit. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims

[Scope of utility model registration request]

first and fourth pressure chambers communicating with a first pressure impulse pipe section formed in the case; second and third pressure chambers communicating with a second pressure impulse pipe section formed in the case; First and second diaphragms are provided that serve as a partition wall between the first pressure chamber and the second pressure chamber and a partition wall between the third and fourth pressure chambers, and have the same shape and the same electrical characteristics, and two conductor chips whose chip surfaces are coated with a silicone oil film; a first and second diaphragm;
a second diaphragm formed on the first and second diaphragms;
first and second bridge circuits that output signals of the same value and opposite phase when the diaphragm responds to the differential pressure generated in the first and second impulse pipe sections; A pressure sensor comprising first and second differential amplifiers that differentially amplify signal outputs of the bridge circuit.