JPH0365853B2 - - Google Patents
Info
- Publication number
- JPH0365853B2 JPH0365853B2 JP24272083A JP24272083A JPH0365853B2 JP H0365853 B2 JPH0365853 B2 JP H0365853B2 JP 24272083 A JP24272083 A JP 24272083A JP 24272083 A JP24272083 A JP 24272083A JP H0365853 B2 JPH0365853 B2 JP H0365853B2
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- pressure
- support part
- natural frequency
- slit holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 239000013078 crystal Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は、圧力変化を可動板を支持する支持部
の固有振動数の変化として検出する圧力センサに
関するものである。更に詳しくは、本発明は、例
えば0.01μm水柱といつた程度の微小圧力測定を
行なう場合に使用して特に有効な圧力センサに関
するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a pressure sensor that detects pressure changes as changes in the natural frequency of a support portion that supports a movable plate. More specifically, the present invention relates to a pressure sensor that is particularly effective for use in measuring minute pressures such as, for example, 0.01 μm water column.
従来、微小圧力測定の可能な圧力センサとし
て、コンデンサマイクロホンが知られている。こ
れは、圧力を受ける金属膜と、この金属膜に対向
設置された固定電極とで構成されており、圧力に
よる金属膜の変位を金贈膜と固定電極の間の静電
容量変化として検出するものである。
Conventionally, a condenser microphone is known as a pressure sensor capable of measuring minute pressure. This consists of a metal membrane that receives pressure and a fixed electrode placed opposite this metal membrane, and detects the displacement of the metal membrane due to pressure as a change in capacitance between the metal membrane and the fixed electrode. It is something.
しかしながら、この装置においては、金属膜を
全面に亘つて均一に張力がかかるように張らない
と、検出感度にばらつきを生じ良好な特性が得ら
れないという問題点がある。また、検出感度が高
いが故に、振動雑音や姿勢変化の影響を受けやす
いという欠点がある。 However, this device has a problem in that unless the metal film is tensioned uniformly over the entire surface, detection sensitivity will vary and good characteristics cannot be obtained. Furthermore, since the detection sensitivity is high, there is a drawback that it is easily affected by vibration noise and changes in posture.
本発明は、従来技術におけるこれらの問題点や
欠点に鑑みてなされたもので、構成が簡単で検出
感度にバラツキが生ずることはなく、コンピユー
タで信号処理を容易に行える圧力センサを実現す
ることを目的とする。
The present invention has been made in view of these problems and drawbacks in the prior art, and aims to realize a pressure sensor that has a simple configuration, does not cause variations in detection sensitivity, and can easily perform signal processing using a computer. purpose.
本発明に係る装置は、スリツト孔を有した固定
板と、この固定板と対向配置され測定すべき圧力
が与えられる可動板と、この可動板が回転できる
ようにその重心を通る直線上の２点で当該可動板
を支持する支持部と、この支持部をその固有振動
数で励振させるとともに当該支持部の固有振動数
の変化を検出する検出手段とで構成される。
The device according to the present invention includes a fixed plate having a slit hole, a movable plate placed opposite to the fixed plate and to which a pressure to be measured is applied, and two parts on a straight line passing through the center of gravity of the movable plate so that the movable plate can rotate. The movable plate is composed of a support part that supports the movable plate at a point, and a detection means that excites the support part at its natural frequency and detects a change in the natural frequency of the support part.
第１図は、本発明に係る圧力センサの一例を示
す構成断面図、第２図は一部を断面で示す要部斜
視図、第３図は要部の組立構成図である。ここで
は圧力P1と圧力P2の差圧を検出する場合を例示
する。これらの図において、１は容器、２１，２
２はこの容器内を２部分に仕切る隔壁である。隔
壁２１，２２で仕切られた各部屋１ａ，１ｂ内に
は、圧力導入孔１１，１２から測定すべき圧力
P1，P2が導入されている。
FIG. 1 is a sectional view showing an example of the pressure sensor according to the present invention, FIG. 2 is a perspective view of a main part partially shown in cross section, and FIG. 3 is an assembled view of the main part. Here, a case where the differential pressure between pressure P 1 and pressure P 2 is detected will be exemplified. In these figures, 1 is a container, 21, 2
2 is a partition wall that partitions the inside of this container into two parts. In each room 1a, 1b partitioned by partition walls 21, 22, pressure to be measured from pressure introduction holes 11, 12 is stored.
P 1 and P 2 have been introduced.
３は本発明において特徴としている圧力検知部
で、隔壁２１，２２に固定された固定板４と、ス
ペーサ５を介して固定板４と対向配置された可動
部６とで構成されている。 Reference numeral 3 denotes a pressure detection section, which is a feature of the present invention, and is composed of a fixed plate 4 fixed to partition walls 21 and 22, and a movable section 6 disposed opposite to the fixed plate 4 with a spacer 5 in between.
固定板４には、部屋１ｂの圧力を導びく複数個
のスリツト（ここでは５個のスリツト）が設けら
れている。また可動部６は、フレーム６１、この
フレーム６１に支持部６３を介して支持されると
ともに、固定板４に対して対向するように設置さ
れた可動板６２とから成り、可動板６２には複数
個のスリツト（ここでは５個のスリツト）６４が
固定板４の複数個のスリツト４１とは対向しない
位置に設けられている。ここで、可動板６２を支
持する支持部６２は、ばねとしても機能するもの
であり、この可動板が回転できるように、可動部
６２の重心Ｐ（第３図参照）を通る直線1上の２
点でこの可動板６２を支持している。 The fixed plate 4 is provided with a plurality of slits (five slits in this case) for guiding the pressure in the chamber 1b. The movable part 6 includes a frame 61 and a movable plate 62 supported by the frame 61 via a support part 63 and installed to face the fixed plate 4. slits (five slits in this case) 64 are provided in the fixing plate 4 at positions that do not face the plurality of slits 41. Here, the support part 62 that supports the movable plate 62 also functions as a spring, and so that the movable plate can rotate, the support part 62 supports the movable plate 62 . 2
This movable plate 62 is supported at points.
なお、この例では、可動板６２には、２つの支
持部６３を結ぶ直線1（回転軸に相当）に対し
て、左側にのみスリツト孔６４が設けてある。７
１，７２は支持部６３に取付けられた支持部６３
の励振手段と、振動検出手段で、例えば圧電素子
が使用されている。 In this example, the movable plate 62 is provided with the slit hole 64 only on the left side with respect to the straight line 1 (corresponding to the rotation axis) connecting the two support parts 63. 7
1 and 72 are support parts 63 attached to support parts 63;
For example, a piezoelectric element is used as the excitation means and the vibration detection means.
この様に構成した装置の動作を次に説明する。
圧力導入孔１１，１２に圧力を導入しない状態
（部屋１ａと１ｂ内の圧力が等しい状態）では、
可動板６２は固定板４との間でスペーサ５の厚さ
と等しい僅かな間隔ｄを保つて保持されている。
なお、スペーサ５としては、固定板４上に設けた
メツキ層を利用し、僅かな間隔を得るようにして
もよい。 The operation of the apparatus configured in this way will be explained next.
In a state where no pressure is introduced into the pressure introduction holes 11 and 12 (a state where the pressures in the chambers 1a and 1b are equal),
The movable plate 62 is held with a small distance d equal to the thickness of the spacer 5 between it and the fixed plate 4.
Note that as the spacer 5, a plating layer provided on the fixed plate 4 may be used to obtain a small distance.
圧力導入孔１１から圧力Ｐ１が、圧力導入孔１
２から圧力Ｐ２が導入された場合（Ｐ１＜Ｐ２と
する）、２つの部屋１ａ，１ｂを仕切つている圧
力検出部３の両側には、差圧（Ｐ２−Ｐ１）が加
わる。この様な圧力差が存在すると、圧力の高い
方の部屋１ｂからの圧力流体が、固定板４に形成
したスリツト孔を通過し、さらに固定板と可動板
の僅かな〓間を通過して、可動板６２に形成した
スリツト孔を通つて部屋１ａ側に移動しようとす
る。 Pressure P1 is transmitted from pressure introduction hole 11 to pressure introduction hole 1.
When pressure P2 is introduced from 2 (P1<P2), a differential pressure (P2-P1) is applied to both sides of the pressure detection section 3 that partitions the two rooms 1a and 1b. When such a pressure difference exists, the pressurized fluid from the higher pressure chamber 1b passes through the slit hole formed in the fixed plate 4, and further passes through the small gap between the fixed plate and the movable plate. It attempts to move toward the room 1a through the slit hole formed in the movable plate 62.
第４図ａは、可動板６２に加わる圧力の状態を
示す図であり、第４図ｂはこの状態を電気回路で
等価的に示した図である。 FIG. 4a is a diagram showing the state of pressure applied to the movable plate 62, and FIG. 4b is a diagram equivalently showing this state using an electric circuit.
固定板４と可動板６２との間の微小な〓間（間
隔）に流体が流れると、その流体の速度に比例し
た流体抵抗が発生する。すなわち、固定板４と可
動板６２との間であつて、固定板と可動板のいず
れの側にもスリツト孔が形成されていない回転軸
を横切る位置付近や、スリツト孔４１からフレー
ム６１と可動板６２との〓間に至る部分には、ｂ
図に示すように、流体抵抗Ｒ１，Ｒ２が生ずるこ
ととなる。これに対して、複数のスリツト孔が形
成された部分は、流体抵抗の発生はほとんど無
い。 When fluid flows through the small gap between the fixed plate 4 and the movable plate 62, a fluid resistance proportional to the velocity of the fluid is generated. That is, between the fixed plate 4 and the movable plate 62, in the vicinity of a position crossing the rotating shaft where no slit hole is formed on either side of the fixed plate and the movable plate, or between the slit hole 41 and the movable plate 61. In the part between the bottom and the plate 62, b
As shown in the figure, fluid resistances R1 and R2 will occur. On the other hand, in the portion where a plurality of slit holes are formed, almost no fluid resistance occurs.
このために、可動板６２において、可動板６２
が受ける部屋１ａ内の圧力Ｐ１は、複数のスリツ
ト孔６４をそのまま通過し、ａに示すように、回
転軸に対して可動板６２のスリツト孔が設けられ
ている一方の側の裏面にも加わる。 For this purpose, in the movable plate 62, the movable plate 62
The pressure P1 in the chamber 1a that is applied to the movable plate 62 passes through the plurality of slit holes 64 as it is, and is also applied to the back surface of the movable plate 62 on one side where the slit holes are provided with respect to the rotating shaft, as shown in a. .
また、固定板４において、固定板４が受ける部
屋１ｂ内の圧力Ｐ２は、複数のスリツト孔４１を
そのまま通過して、回転軸に対して可動板６２の
スリツト孔が設けられていない他方の側の裏面に
加わる。従つて、ａに示すように、可動板６２に
おいて、スリツト孔が形成されている一方の側
（回転軸に対して左側）の両面（表面と裏面）は、
同じ圧力Ｐ１が加わり、スリツト孔が形成されて
いない他方の側（回転軸に対して右側）の両面
（表面と裏面）には、圧力Ｐ１と圧力Ｐ２が加る
こととなる。 In addition, in the fixed plate 4, the pressure P2 in the chamber 1b that the fixed plate 4 receives passes through the plurality of slit holes 41 as it is, and the other side of the movable plate 62 where the slit holes are not provided with respect to the rotation axis. Added to the back side of. Therefore, as shown in a, both surfaces (front and back surfaces) of the movable plate 62 on one side (the left side with respect to the rotation axis) where the slit hole is formed are as follows.
The same pressure P1 is applied, and pressures P1 and P2 are applied to both surfaces (front and back surfaces) on the other side (the right side with respect to the rotating shaft) where the slit hole is not formed.
このため、可動板６２には圧力Ｐ１と圧力Ｐ２
の差に比例したトルクが発生し、支持部６３のね
じりバネ剛さと釣り合う角度まで傾斜（回転）す
る。 Therefore, the pressure P1 and the pressure P2 are applied to the movable plate 62.
A torque proportional to the difference is generated, and the support part 63 is tilted (rotated) to an angle that balances with the torsion spring stiffness.
なお、可動板６２と固定板４との間隔ｄは、例
えば10ミクロン程度の微小間隔で、可動板６２や
固定板４に形成するスリツト孔の大きさや、可動
板６２とフレーム６１との間隔ｄ１に比べて充分
小さくなつており、第４図ｂのような等価回路が
構成でき、可動板６２を圧力差（Ｐ２−Ｐ１）に
対応して傾斜させることができる。そして、可動
板６２と固定板４との微小間隔で形成される流体
抵抗の値は、非常に大きく等価的にここでシール
された状態になつている。 Note that the distance d between the movable plate 62 and the fixed plate 4 is a minute distance of, for example, about 10 microns, and depends on the size of the slit holes formed in the movable plate 62 and the fixed plate 4, and the distance d1 between the movable plate 62 and the frame 61. It is sufficiently small compared to , so that an equivalent circuit as shown in FIG. 4b can be constructed, and the movable plate 62 can be tilted in response to the pressure difference (P2-P1). The value of the fluid resistance formed by the minute interval between the movable plate 62 and the fixed plate 4 is extremely large, equivalently creating a sealed state here.
可動板６２が傾斜すると、これを支持している
支持部が捩れる。 When the movable plate 62 is tilted, the support portion supporting it is twisted.
第５図は支持部６３に取付けられている励振手
段７１と振動検出手段７２とが接続される電気回
路の一例を示す構成ブロツク図である。ここでは
励振手段７１、振動検出手段７２として、いずれ
も圧電素子を使用したものであつて、これらはア
ンプ７３の出力端及び入力端に接続され、アンプ
７３を含んで自励振回路を構成している。従つ
て、支持部６３は機械振動子として機能し、その
固有振動数で振動する。そして、この固有振動数
は、支持部６３に与えられる捩れによる歪に対応
して変化する。カウンタ７４は、アンプ７３を含
んで形成されている自励振回路からの周波数信号
を計数するもので、この計数値は、可動板６２の
傾斜角に対応したものとなり、この計数値から
P1とP2の圧力差を知ることができる。 FIG. 5 is a structural block diagram showing an example of an electric circuit to which excitation means 71 and vibration detection means 72 attached to support portion 63 are connected. Here, piezoelectric elements are used as the excitation means 71 and the vibration detection means 72, and these are connected to the output end and the input end of an amplifier 73, and a self-oscillation circuit including the amplifier 73 is configured. There is. Therefore, the support portion 63 functions as a mechanical vibrator and vibrates at its natural frequency. This natural frequency changes in response to distortion due to torsion applied to the support portion 63. The counter 74 counts the frequency signal from the self-oscillation circuit formed including the amplifier 73, and this counted value corresponds to the inclination angle of the movable plate 62.
You can know the pressure difference between P 1 and P 2 .
このように構成した装置は、可動板６２がその
重心を通る直線上の２点で回転可能に支持される
構成であり、従来のコンデンサマイクロホンのよ
うに金属膜を全面で一様に張力がかかるように張
る必要はない。このため、検出感度にバラツキが
生ずることはなく、また、張力が温度によつて変
わると言うこともない。 In the device configured in this way, the movable plate 62 is rotatably supported at two points on a straight line passing through its center of gravity, and like a conventional condenser microphone, tension is applied uniformly over the entire surface of the metal membrane. There is no need to tighten it like this. Therefore, there is no variation in the detection sensitivity, and the tension does not change depending on the temperature.
なお、上記の実施例においては、励振手段と振
動検出手段として、いずれも圧電素子を用い、こ
れを支持部６３に取付けたものを例示したが、支
持部６３を水晶のような圧電材料で構成すれば、
これに電極を取付けることによつて圧電素子を構
成でき、本発明はこの様な構成にしてもよい。ま
た、励振手段と振動検出手段は圧電素子を使用す
るものの他、電磁力や静電力等、他の公知の手段
を用いてもよい。 In the above embodiment, piezoelectric elements are used as both the excitation means and the vibration detection means, and the piezoelectric elements are attached to the support part 63. However, the support part 63 may be made of a piezoelectric material such as crystal. if,
A piezoelectric element can be constructed by attaching an electrode to this, and the present invention may be configured in this manner. In addition to using a piezoelectric element as the excitation means and vibration detection means, other known means such as electromagnetic force or electrostatic force may be used.
第６図は、圧力検知部３の他の例を示す要部平
面図及び断面図である。 FIG. 6 is a plan view and a sectional view of main parts showing another example of the pressure sensing section 3. FIG.
第６図に示す実施例は、可動板６２において、
回転軸1に対して左片方側６２ａに、ほぼ全面
に亘つてピツチP1で複数個（ここでは９個）の
スリツト孔６４ａを形成するとともに、右片方側
６２ｂの上下周縁部に、スリツト孔６４ａと同じ
数で、同じ形状のスリツト孔６４ｂを形成させた
ものである。 In the embodiment shown in FIG. 6, in the movable plate 62,
A plurality of (nine in this case) slit holes 64a with a pitch P 1 are formed on the left side 62a with respect to the rotation axis 1 , and slit holes 64a are formed on the upper and lower peripheral edges of the right side 62b. The slit holes 64b are formed in the same number and shape as the slit holes 64a.
この実施例によれば、可動板６２の左右のバラ
ンスを容易にとることができ、回転軸1をこの
可動板６２の対称位置にもつてくることができ
る。 According to this embodiment, the left and right balance of the movable plate 62 can be easily maintained, and the rotating shaft 1 can be brought to a symmetrical position with respect to the movable plate 62.
以上説明したように、本発明によれば、容器内
に設置される検知部は、可動板や固定板を例えば
単結晶の水晶基板等を利用して構成することが可
能であり、また可動板と固定板との間隔を維持さ
せるスペーサはメツキ膜等を利用して構成するこ
とができるので、全体構成が簡単で、検出感度に
バラツキが生ずることもない。
As explained above, according to the present invention, the detection unit installed in the container can be configured by using a movable plate and a fixed plate using, for example, a single-crystal quartz substrate, and the movable plate Since the spacer for maintaining the distance between the fixed plate and the fixing plate can be constructed using a plating film or the like, the overall construction is simple and there is no variation in detection sensitivity.
また、支持部に生ずる固有振動数の変化から圧
力差に関連する信号を得るようにしたもので、周
波数信号が直接得られるので、コンピユータなど
で信号処理を簡単に行える圧力センサが実現でき
る。 Furthermore, since the signal related to the pressure difference is obtained from the change in the natural frequency occurring in the support part, and the frequency signal is directly obtained, a pressure sensor that can easily process the signal with a computer or the like can be realized.
第１図は本発明に係る圧力センサの一例を示す
構成断面図、第２図は一部を断面で示す要部斜視
図、第３図は要部の組立構成図、第４図は可動板
に加わる圧力の状態を示す説明図、第５図は電気
回路の一例を示す構成ブロツク図、第６図は圧力
検知部の他の例を示す要部平面図及び断面図であ
る。
１…容器、２０…ヨーク、２ａ，２ｂ…磁石、
３…圧力検知部、４…固定板、５…スペーサ、６
…可動部、６１…フレーム、６２…可動板、６３
…支持部、７１…励振手段、７２…振動検出手
段。
Fig. 1 is a cross-sectional view of the configuration of an example of the pressure sensor according to the present invention, Fig. 2 is a perspective view of the main part showing a part in cross section, Fig. 3 is an assembled configuration diagram of the main part, and Fig. 4 is a movable plate. FIG. 5 is a configuration block diagram showing an example of an electric circuit, and FIG. 6 is a plan view and a sectional view of main parts showing another example of the pressure detection section. 1... Container, 20... Yoke, 2a, 2b... Magnet,
3...Pressure detection part, 4...fixing plate, 5...spacer, 6
...Movable part, 61...Frame, 62...Movable plate, 63
...support part, 71...excitation means, 72...vibration detection means.
Claims (1)
有し、各部屋に変動する被測定圧力が導入される
ようにした容器を備え、 前記圧力検知部は、 重心を通る直線上の２点でフレームに回転可能
に支持部によつて支持されると共に、回転軸に対
して少なくとも一方の側に被測定圧力流体を通す
複数のスリツト孔が形成された可動板と、 この可動板との間でシール状態が維持されるよ
うな僅かな間隔を隔てて設置され、可動板の回転
軸に対して他方の側に面した部分に被測定圧力流
体を通す複数のスリツト孔が形成された固定板
と、 前記支持部をその固有振動数で励振させる励振
手段と、 前記支持部の固有振動数の変化を検出する振動
検出手段とで構成され、 前記可動板は、回転軸に対して一方の面と他方
の面が受ける圧力の差に応じて回転し、その回転
による前記支持部の固有振動数の変化から前記２
つの部屋に与えられる圧力の差を知るようにした
ことを特徴とする圧力センサ。[Claims] 1. A container having two chambers whose interior is partitioned by a pressure sensing section and into which a varying pressure to be measured is introduced, the pressure sensing section passing through the center of gravity. a movable plate that is rotatably supported by a support part on a frame at two points on a straight line, and has a plurality of slit holes formed on at least one side of the rotation axis for passing a pressure fluid to be measured; A plurality of slit holes are installed at a small distance from the movable plate to maintain a sealing state, and the part facing the other side of the movable plate with respect to the rotational axis has a plurality of slit holes through which the pressure fluid to be measured passes. The movable plate is configured to include a fixed plate, an excitation unit that excites the support part at its natural frequency, and a vibration detection unit that detects a change in the natural frequency of the support part, and the movable plate is connected to the rotating shaft. On the other hand, it rotates according to the difference in pressure that one surface and the other surface receive, and from the change in the natural frequency of the support section due to the rotation, the above-mentioned 2.
A pressure sensor characterized by being able to detect the difference in pressure applied to two rooms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272083A JPS60133332A (en) | 1983-12-22 | 1983-12-22 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272083A JPS60133332A (en) | 1983-12-22 | 1983-12-22 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133332A JPS60133332A (en) | 1985-07-16 |
| JPH0365853B2 true JPH0365853B2 (en) | 1991-10-15 |
Family
ID=17093237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24272083A Granted JPS60133332A (en) | 1983-12-22 | 1983-12-22 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133332A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5867821B2 (en) * | 2012-03-08 | 2016-02-24 | セイコーインスツル株式会社 | Pressure sensor |
| JP5867820B2 (en) * | 2012-03-08 | 2016-02-24 | セイコーインスツル株式会社 | Pressure sensor |
-
1983
- 1983-12-22 JP JP24272083A patent/JPS60133332A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60133332A (en) | 1985-07-16 |
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