JPH0365909U - - Google Patents
Info
- Publication number
- JPH0365909U JPH0365909U JP12730589U JP12730589U JPH0365909U JP H0365909 U JPH0365909 U JP H0365909U JP 12730589 U JP12730589 U JP 12730589U JP 12730589 U JP12730589 U JP 12730589U JP H0365909 U JPH0365909 U JP H0365909U
- Authority
- JP
- Japan
- Prior art keywords
- photodiodes
- light
- measured
- displacement measuring
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 9
- 238000004088 simulation Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Description
第１図は本考案に係わる光学式変位測定器の信
号処理の一実施例を示す構成図、第２図は第１図
の信号処理を構成するゲイン調整回路の出力信号
を示す図、第３図は第１図の信号処理から得られ
るフオーカスエラー信号を示す図、第４図は本考
案に係わる光学式変位測定器の他の実施例を示す
構成図、第５図は第４図の装置を用いた際のスポ
ツト径と被測定物の変位量の関係を示すシユミレ
ーシヨン図、第６図は第４図の装置から得られる
フオトダイオードの出力信号を示す図、第７図は
第４図の装置から得られるフオーカスエラー信号
を示す図、第８図は従来例の構成図、第９図は第
８図の従来装置から得られるフオトダイオードの
出力信号を示す図、第１０図は第８図の従来装置
から得られるフオーカスエラー信号を示す図であ
る。
１……レーザダイオード、２……コリメータレ
ンズ、３……偏光ビームスプリツタ、４……1/4
波長板、５……対物レンズ、６……被測定物、７
……ハーフミラー、１０，１１……フオトダイオ
ード、１２，１３……ゲイン調整回路、１４……
演算回路、１５，１６……集光レンズ。
FIG. 1 is a block diagram showing an example of signal processing of an optical displacement measuring instrument according to the present invention, FIG. 2 is a diagram showing an output signal of a gain adjustment circuit that constitutes the signal processing of FIG. 1, and FIG. The figure shows a focus error signal obtained from the signal processing shown in Fig. 1, Fig. 4 is a block diagram showing another embodiment of the optical displacement measuring instrument according to the present invention, and Fig. 5 shows the focus error signal obtained from the signal processing shown in Fig. 4. A simulation diagram showing the relationship between the spot diameter and the amount of displacement of the object to be measured when using the device, FIG. 6 is a diagram showing the output signal of the photodiode obtained from the device in FIG. 4, and FIG. 7 is the diagram shown in FIG. 4. 8 is a diagram showing the configuration of a conventional example, FIG. 9 is a diagram showing a photodiode output signal obtained from the conventional device of FIG. 8, and FIG. FIG. 9 is a diagram showing a focus error signal obtained from the conventional device shown in FIG. 8; 1... Laser diode, 2... Collimator lens, 3... Polarizing beam splitter, 4... 1/4
Wave plate, 5... Objective lens, 6... Measured object, 7
... Half mirror, 10, 11 ... Photodiode, 12, 13 ... Gain adjustment circuit, 14 ...
Arithmetic circuit, 15, 16... condensing lens.
Claims (1)
定物上に光スポツトを集光しその反射光の光強度
パターンを光検出器で測定し演算処理することに
より被測定物の微小変位を測定する光学式変位測
定器において、 被測定物からの反射光を２方向に分岐する光学
要素と、前記光学要素により分岐された２つの光
をそれぞれ集光する２つの集光レンズと、前記２
つの集光レンズの焦点前後同距離に配置され前記
集光レンズにより集光された光がそれぞれ入射さ
れる２つのフオトダイオードと、前記２つのフオ
トダイオードの検出信号がそれぞれ入力されこの
検出信号の変化の割合を等しくするための２つの
ゲイン調整回路とを設けた構成とし、この２つの
ゲイン調整回路の出力信号の差からフオーカスエ
ラー信号を得るようにしたことを特徴とする光学
式変位測定器。 (2) 前記２つの集光レンズを検出信号の変化の
割合を等しくするための焦点距離の異なる集光レ
ンズとし、この集光レンズにより集光された光が
それぞれ入射される２つのフオトダイオードを前
記２つの集光レンズの焦点前後かつ前記フオトダ
イオードの直径とフオトダイオード上のスポツト
径が等しくなる距離に配置した構成とし、この２
つのフオトダイオードの検出信号の差からフオー
カスエラー信号を得るようにしたことを特徴とす
る光学式変位測定器。[Claims for Utility Model Registration] (1) The objective lens is driven in the focus direction to focus a light spot on the object to be measured, and the light intensity pattern of the reflected light is measured with a photodetector and processed by calculation. An optical displacement measuring instrument that measures minute displacements of a measured object includes an optical element that branches reflected light from the measured object into two directions, and two condensers that respectively collect the two lights split by the optical element. optical lens, and the above-mentioned 2
Two photodiodes are arranged at the same distance before and after the focal point of one condensing lens, and the light condensed by the condensing lens is incident on the two photodiodes, and the detection signals of the two photodiodes are respectively inputted, and the change in the detection signal is performed. An optical displacement measuring device characterized in that it has a configuration in which two gain adjustment circuits are provided to equalize the ratio of . (2) The two condensing lenses have different focal lengths to equalize the rate of change in the detection signal, and the two photodiodes each receive the light condensed by the condensing lenses. The two condenser lenses are arranged at a distance before and after the focal point and at a distance where the diameter of the photodiode and the spot diameter on the photodiode are equal.
An optical displacement measuring device characterized in that a focus error signal is obtained from the difference between detection signals of two photodiodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12730589U JPH084564Y2 (en) | 1989-10-31 | 1989-10-31 | Optical displacement measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12730589U JPH084564Y2 (en) | 1989-10-31 | 1989-10-31 | Optical displacement measuring instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0365909U true JPH0365909U (en) | 1991-06-26 |
| JPH084564Y2 JPH084564Y2 (en) | 1996-02-07 |
Family
ID=31675065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12730589U Expired - Fee Related JPH084564Y2 (en) | 1989-10-31 | 1989-10-31 | Optical displacement measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH084564Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06194125A (en) * | 1992-10-05 | 1994-07-15 | Carl Zeiss:Fa | Method and apparatus for detecting displacement or position change of object from focus of objective lens |
-
1989
- 1989-10-31 JP JP12730589U patent/JPH084564Y2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06194125A (en) * | 1992-10-05 | 1994-07-15 | Carl Zeiss:Fa | Method and apparatus for detecting displacement or position change of object from focus of objective lens |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH084564Y2 (en) | 1996-02-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |