JPH0366541A - Control mechanism for movement of table - Google Patents

Abstract

PURPOSE:To simplify the device by pressingly advancing the outside end face of a table energized so as to move in one direction against a base member, with a highly accurate screw through a highly accurate drive source connected to the side end face of the base member, and retreating it through the energizing force. CONSTITUTION:A table 4 is supported with a base member 1 so as to enable to reciprocate in the A - B direction, and energized to the A direction with a tension spring 6. The lower end of a L-shaped fitting member 7 is fixed on one side end part of the base member 1, a slide guide 9 is formed on the extending part in reverse L-shape, and also a bracket 10 bending at right angles is slidably connected on the slide guide 9. A highly accurate drive source 5 is fitted on the vertical part of the bracket 10, and connected to a highly accurate screw 8 threadly fitted on the vertical middle part of the fitting member 7 through a coupling 11. Consequently, the drive source 5 is also advanced by rotation of the drive source 5 and the table 4 is pressingly advanced with the extreme end of the screw 8. Further, by reverse rotation, it is retreated and the table 4 is retreated with the tension spring 6.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a table movement control mechanism that constitutes an alignment stage of a high-precision aligner that aligns, for example, a mask and a semiconductor substrate in the manufacturing process of electronic components, etc. In particular, the present invention relates to a table movement control mechanism that allows the overall structure to be made thinner, smaller, and simpler.

[Conventional technology]

As shown in FIG. 2, a conventional table movement control mechanism of this type includes a ball screw 2 stretched over the top surface of a base member 1.
A flat table 4 is mounted on the upper surface of the block 3, and a high-precision drive source 5 such as a pulse motor is provided at one end of the base member 1. The drive source 5 and one end of the ball screw 2 were connected. Then, by appropriately driving the high-precision drive source 5 to rotate the ball screw 2,
A block 3 is moved on the ball screw 2, and the table 4 is reciprocated in a straight line relative to the base member 1.

[Problem to be solved by the invention]

However, in the conventional table movement control mechanism with such a configuration, the high precision drive source 5 rotates the ball screw 2 provided on the same axis as the rotation axis of the high precision opening drive source 5,
When the ball screw 2 is screwed onto the ball screw 2, the table 4 provided above the ball screw 2 is moved in the direction of arrows A and H through the block 3, so that the ball screw 2 and the table 4 are connected to each other. It has a two-stage configuration, which increases the thickness t of one movement control mechanism and makes the structure complicated. This single table movement control mechanism is stacked in two stages for X-direction movement and Y-direction movement to form an alignment stage, but the overall structure of the combined structure becomes thicker and larger. It was something. Furthermore, in order to configure one table movement control mechanism, the base member 1, ball screw 2, mounting block 3, table 4, and high-precision drive source 5 must be assembled in sequence to configure the entire structure. However, the assembly was complicated and the manufacturing process was time-consuming.

SUMMARY OF THE INVENTION An object of the present invention is to provide a table movement control mechanism that can solve these problems and make the overall structure thinner, smaller, and simpler.

[Means to solve the problem]

In order to achieve the above object, a table movement control mechanism according to the present invention is a table movement control mechanism that reciprocates a table on which a work is set in a straight line with respect to a base member. The base member has a high precision screw that presses the outer end surface of the table on the base side in the direction in which the table is urged in a direction opposite to the direction in which it is urged, using a high precision screw. A drive source is connected, and when the high-precision screw moves forward with this high-precision drive source, it presses and moves the outer end surface of the table, and when the high-precision screw retreats, the urging force of the table moves it back in the opposite direction. This is how it was done.

[For production]

The table movement control mechanism configured in this way moves the outer end surface of the table, which is biased so as to be able to move in one direction relative to the base member, to a high-precision drive connected to one end of the base member. When the high-precision screw is advanced by the source, it is pressed and moved in the opposite direction to the biasing direction, and when the high-precision screw is retreated, the biasing force of the table is used to move the high-precision screw back in the opposite direction. This allows you to simply press the outer end surface of the table directly on the same axis with the table using a high-precision drive source via a high-precision screw.

As well as being able to control the movement of the table above.

Since the table and the high-precision drive source are arranged on the same axis, their thickness can be reduced and the overall size can be reduced.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

FIG. 1 is an explanatory front view showing an embodiment of the table movement control mechanism according to the present invention. This table movement control mechanism is
It constitutes the alignment stage of a high-precision aligner that aligns, for example, a mask and a semiconductor substrate in the manufacturing process of electronic components, etc. In FIG. 4
It is shaped like a somewhat thick plate.

A table 4 is provided on the upper surface of the base member 1. This table 4 is used to set workpieces such as masks and semiconductor substrates on its upper surface, and is formed into a plate shape with appropriate dimensions and thickness, and is movable back and forth in a straight line with respect to the base member 1. A tension spring 6 is tensioned between, for example, one end of the front side of the base member 1 and a central part of the front side of the table 4, so that the table 4 is moved in one direction with respect to the base member 1. , for example, so as to be able to move in the six directions indicated by the arrows. Therefore, the table 4 is always trying to move in the direction of arrow A on the base member 1.

A high-precision drive g5 is connected to one end of the base member 1 via a mounting member 7. This high precision opening movement G5
is for pressing the outer end surface of the table 4 on the base side of the table 4 in the direction in which it is urged by the tension spring 6 in the direction opposite to the direction in which it is urged, that is, in the direction of arrow B, via a high-precision screw 8; For example, it consists of a pulse motor or a servo motor.

An example of the specific mounting structure is as shown in Figure 1.
For example, the lower end of the mounting member 7 extending in an L-shape is fixed to one side end of the base member 1, and the slide guide 9 is formed at the upper end of the mounting member 7 extending in an inverted shape. , Bracket 1 is used for installation bent at right angles.
0 are slidably connected as shown by arrows C and D, and a high-precision drive source 5 is attached to a vertical piece of the bracket 10. A high-precision screw 8 consisting of, for example, a micrometer head is screwed into the vertical intermediate portion of the mounting member 7, and its base end connects to the rotation shaft of the high-precision drive source 5 and the coupling 1. The ends thereof are connected by means of a mechanical process, and the tip portion thereof is in contact with a pressing member 12 provided on the outer end surface of the table 4. Note that a tension spring 13 is tensioned between the mounting member 7 and the bracket 10 for mounting the high-precision drive source 5.

Next, the operation of the table movement control mechanism configured as described above will be explained. First, in Figure 1, table 4
To move in the direction of arrow B, drive the high-precision drive g5 to rotate its rotating shaft in a predetermined direction, and the high-precision screw 8 connected by the coupling 11 will rotate in the direction of arrow E or one direction. By passing through the threaded portion into the mounting member 7, the tip portion moves forward in the direction of arrow G. At this time, as mentioned above, since the rotating shaft of the high-precision motion 'g5 and the high-precision screw 8 are connected by the coupling 11, as the high-precision screw 8 moves forward in the direction of the arrow G,
The high-precision drive source 5 itself is also mounted and moved forward in the same direction under the guidance of the bracket 10 and slide guide 9. As the high-precision screw 8 moves forward in the direction of the arrow G, the tip of the suppressing member 12 provided on the outer end surface of the table 4 is moved by a portion numerically controlled by the high-precision drive source 5 and the high-precision screw 8. by pushing the table 4 against the tension spring 6.
can be moved by a predetermined amount in the direction of arrow B.

Next, in order to move the table 4 in the direction of arrow A in FIG. 1, the high-precision drive g5 is driven to rotate its rotating shaft in the opposite direction to that described above. Then, coupling 11
The high-precision screw 8 connected with is rotated in the direction of the arrow E or one direction, and its tip portion retreats in the direction of the arrow H by passing through the threaded portion into the mounting member 7. At this time, since the rotating shaft of the high-precision screw 8 [5 and the high-precision screw 8 are connected by the coupling 11 as described above, as the high-precision screw 8 retreats in the direction of arrow H, the high-precision drive t
When installing the JX 5 itself, it is moved back in the same direction under the guidance of the bracket 10 and slide guide 9. When the high-precision screw 8 retreats in the direction of the arrow H, its tip moves back by an amount numerically controlled by the high-precision drive source 5 and the high-precision screw 8, so that the tension spring 6 exerts a biasing force on the table. 4 can be moved by a predetermined amount in the six directions of arrows.

- As an example, the high-precision drive g5 is a pulse motor with 5ooo divisions/1 rotation, and the lead of the high-precision screw 8 is 0.5-
In this case, the movement of the table 4 can be controlled by pushing and pulling in increments of 0.01μ.

Note that by stacking the table movement control mechanisms configured as described above in two stages, one for movement in the X direction and one for movement in the Y direction, an alignment stage that can control movement in one direction, X, can be constructed.

〔Effect of the invention〕

Since the present invention is configured as described above, the table 4 is biased so as to be movable in one direction relative to the base member 1.
The outer end surface of the base member 1 is pressed and moved in the opposite direction to the biasing direction by the advance of the high precision screw 8 by the high precision drive source 5 connected to one end side of the base member 1, and the high precision screw 8, the table 4 can be moved back in the opposite direction by the urging force of the table 4. At this time, table 4
The movement of the table 4 can be controlled simply by directly pressing the outer end surface of the table 4 with the high precision drive source 5 via the high precision screw 8 on the same axis where the table 4 is provided. Further, since the table 4 and the high-precision drive source 5 are arranged on the same axis, the thickness tl can be reduced and the overall size can be reduced. Also, when an alignment stage is constructed by stacking this single table movement groove control mechanism in two stages for X-direction movement and Y-direction movement, the overall structure can be made smaller than before. Furthermore, in order to configure one table movement control mechanism, it is only necessary to connect the high-precision drive source 5 that presses to one end of the base member 1 via the high-precision screw 8.
Its assembly is simple and can be manufactured in a short time.

[Brief explanation of drawings]

FIG. 1 is an explanatory front view showing an embodiment of a table movement control mechanism according to the present invention, and FIG. 2 is an explanatory front view showing a conventional table movement control mechanism. 1...Base member, 4...Table, 5...
High precision drive source, 6... Tension spring, 7... Mounting member, 8... High precision screw, 11... Coupling, 12... Suppressing member.

Claims (1)

[Claims] In a table movement control mechanism that reciprocates a table on which a work is set in a straight line relative to a base member,
A table is urged to move in one direction with respect to the base member, and the base member has an outer end surface of the table on the root side of the table in the direction opposite to the direction of urging. A high-precision drive source that presses is connected via a high-precision screw, and the advance of the high-precision screw by this high-precision drive source presses and moves the outer end surface of the table, and the retreat of the high-precision screw moves the table. A table movement control mechanism characterized in that the table is moved back in the opposite direction by a biasing force.