JPH0366636U - - Google Patents
Info
- Publication number
- JPH0366636U JPH0366636U JP12579489U JP12579489U JPH0366636U JP H0366636 U JPH0366636 U JP H0366636U JP 12579489 U JP12579489 U JP 12579489U JP 12579489 U JP12579489 U JP 12579489U JP H0366636 U JPH0366636 U JP H0366636U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- pump
- vacuum
- preliminary chamber
- preliminary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案をスパツタリング装置に適用し
た一実施例を示す概略断面図、第２図は従来のス
パツタリング装置を示す概略断面図である。
２……処理チヤンバー、８……クライオポンプ
、１０，２２……ゲートバルブ、１４……ロータ
リーポンプ、２０……予備チヤンバー。
FIG. 1 is a schematic sectional view showing an embodiment of the present invention applied to a sputtering device, and FIG. 2 is a schematic sectional view showing a conventional sputtering device. 2... Processing chamber, 8... Cryopump, 10, 22... Gate valve, 14... Rotary pump, 20... Reserve chamber.
Claims (1)
て表面現象を利用する真空ポンプを用いた真空装
置において、チヤンバーと主排気用ポンプの間に
予備チヤンバーを設けたことを特徴とする真空装
置。 (2) チヤンバーと予備チヤンバーの間の仕切り
バルブ、及び予備チヤンバーと主排気ポンプの間
の仕切りバルブはともに予備チヤンバー側に設け
られている請求項１に記載の真空装置。[Scope of Claim for Utility Model Registration] (1) In a vacuum device that uses a vacuum pump that utilizes surface phenomena as the main pump to evacuate a chamber, a preliminary chamber is provided between the chamber and the main pump. Characteristic vacuum equipment. (2) The vacuum device according to claim 1, wherein the partition valve between the chamber and the preliminary chamber and the partition valve between the preliminary chamber and the main exhaust pump are both provided on the preliminary chamber side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12579489U JPH0366636U (en) | 1989-10-27 | 1989-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12579489U JPH0366636U (en) | 1989-10-27 | 1989-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366636U true JPH0366636U (en) | 1991-06-28 |
Family
ID=31673644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12579489U Pending JPH0366636U (en) | 1989-10-27 | 1989-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366636U (en) |
-
1989
- 1989-10-27 JP JP12579489U patent/JPH0366636U/ja active Pending
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