JPH0250950U - - Google Patents
Info
- Publication number
- JPH0250950U JPH0250950U JP12943488U JP12943488U JPH0250950U JP H0250950 U JPH0250950 U JP H0250950U JP 12943488 U JP12943488 U JP 12943488U JP 12943488 U JP12943488 U JP 12943488U JP H0250950 U JPH0250950 U JP H0250950U
- Authority
- JP
- Japan
- Prior art keywords
- evacuated
- vacuum pump
- high vacuum
- potential part
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Description
第１図は、この考案の一実施例に係る真空排気
装置を示す概略図である。第２図は、従来の真空
排気装置の一例を示す概略図である。第３図は、
従来の真空排気装置の他の例を示す概略図である
。
４……高電位部、６……被排気部、２０……第
１の高真空ポンプ、２２……第２の高真空ポンプ
、２４……補助真空ポンプ、２６……絶縁排気管
。
FIG. 1 is a schematic diagram showing a vacuum evacuation device according to an embodiment of this invention. FIG. 2 is a schematic diagram showing an example of a conventional vacuum evacuation device. Figure 3 shows
FIG. 2 is a schematic diagram showing another example of a conventional vacuum evacuation device. 4... High potential part, 6... Exhausted part, 20... First high vacuum pump, 22... Second high vacuum pump, 24... Auxiliary vacuum pump, 26... Insulated exhaust pipe.
Claims (1)
構成の真空排気装置において、前記高電位部に、
被排気部の真空排気を行う第１の高真空ポンプを
搭載し、この高真空ポンプの排出口側を、絶縁排
気管を通して、大地電位部に設置した第２の高真
空ポンプで排気するよう構成したことを特徴とす
る真空排気装置。 In a vacuum evacuation device configured to evacuate a part to be evacuated provided in a high potential part, the high potential part has a
It is equipped with a first high vacuum pump that evacuates the part to be evacuated, and the exhaust port side of this high vacuum pump is configured to be evacuated by a second high vacuum pump installed at the ground potential part through an insulated exhaust pipe. A vacuum exhaust device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12943488U JPH0250950U (en) | 1988-10-01 | 1988-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12943488U JPH0250950U (en) | 1988-10-01 | 1988-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0250950U true JPH0250950U (en) | 1990-04-10 |
Family
ID=31383707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12943488U Pending JPH0250950U (en) | 1988-10-01 | 1988-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0250950U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650229U (en) * | 1992-01-09 | 1994-07-08 | 日本電子株式会社 | Exhaust device in a high frequency inductively coupled plasma mass spectrometer |
-
1988
- 1988-10-01 JP JP12943488U patent/JPH0250950U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650229U (en) * | 1992-01-09 | 1994-07-08 | 日本電子株式会社 | Exhaust device in a high frequency inductively coupled plasma mass spectrometer |