JPH0367059U - - Google Patents
Info
- Publication number
- JPH0367059U JPH0367059U JP12892889U JP12892889U JPH0367059U JP H0367059 U JPH0367059 U JP H0367059U JP 12892889 U JP12892889 U JP 12892889U JP 12892889 U JP12892889 U JP 12892889U JP H0367059 U JPH0367059 U JP H0367059U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- shutter
- shutter plate
- plate
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の実施例の斜視図、第２図は
実施例を用いた薄膜形成装置の一部断面図で、シ
ヤツター装置を遮断した状態の図、第３図は同じ
くシヤツター装置を遮断した状態の他の断面図、
第４図は同じくシヤツター装置を開放した状態の
断面図、第５図は同じくシヤツター装置を開放し
た状態の他の断面図、第６図は実施例を用いた別
の薄膜形成装置の一部断面図、第７図はこの考案
の他の実施例の斜視図である。
３……円筒、３ａ……内壁、５……シヤツター
装置、６，１３……シヤツター板、７……回転導
入機、９ａ，９ｂ，１４ａ，１４ｂ……半環状遮
蔽板、１２……四角筒、１２ａ……内壁。
Figure 1 is a perspective view of an embodiment of this invention, Figure 2 is a partial sectional view of a thin film forming apparatus using the embodiment, with the shutter device shut off, and Figure 3 is a diagram with the shutter device shut off. Another cross-sectional view of the state
FIG. 4 is a cross-sectional view of the shutter device in an open state, FIG. 5 is another cross-sectional view of the shutter device in an open state, and FIG. 6 is a partial cross-section of another thin film forming device using the embodiment. 7 are perspective views of other embodiments of this invention. 3...Cylinder, 3a...Inner wall, 5...Shutter device, 6, 13...Shutter plate, 7...Rotation introduction device, 9a, 9b, 14a, 14b...Semi-annular shielding plate, 12...Square cylinder , 12a...Inner wall.
Claims (1)
ツター板が回動可能に設置してあると共に、前記
シヤツター板の遮蔽時に、シヤツター板の周縁部
に重合する半環状遮蔽板が筒体の内壁に沿つて設
けてあることを特徴としたシヤツター装置。 A shutter plate having a cross-sectional shape similar to that of the cylinder is rotatably installed inside the cylinder, and a semi-annular shielding plate that overlaps the peripheral edge of the shutter plate when the shutter plate is shielded is attached to the cylinder. A shutter device characterized by being installed along the inner wall of a
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989128928U JPH0730677Y2 (en) | 1989-11-02 | 1989-11-02 | Shutter device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989128928U JPH0730677Y2 (en) | 1989-11-02 | 1989-11-02 | Shutter device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0367059U true JPH0367059U (en) | 1991-06-28 |
| JPH0730677Y2 JPH0730677Y2 (en) | 1995-07-12 |
Family
ID=31676599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989128928U Expired - Lifetime JPH0730677Y2 (en) | 1989-11-02 | 1989-11-02 | Shutter device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0730677Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01222049A (en) * | 1988-03-01 | 1989-09-05 | Fujitsu Ltd | Shutter mechanism for peephole |
-
1989
- 1989-11-02 JP JP1989128928U patent/JPH0730677Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01222049A (en) * | 1988-03-01 | 1989-09-05 | Fujitsu Ltd | Shutter mechanism for peephole |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0730677Y2 (en) | 1995-07-12 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |