JPH0367059U - - Google Patents

Info

Publication number
JPH0367059U
JPH0367059U JP1989128928U JP12892889U JPH0367059U JP H0367059 U JPH0367059 U JP H0367059U JP 1989128928 U JP1989128928 U JP 1989128928U JP 12892889 U JP12892889 U JP 12892889U JP H0367059 U JPH0367059 U JP H0367059U
Authority
JP
Japan
Prior art keywords
cylinder
shutter
shutter plate
plate
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989128928U
Other languages
English (en)
Other versions
JPH0730677Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989128928U priority Critical patent/JPH0730677Y2/ja
Publication of JPH0367059U publication Critical patent/JPH0367059U/ja
Application granted granted Critical
Publication of JPH0730677Y2 publication Critical patent/JPH0730677Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の実施例の斜視図、第２図は
実施例を用いた薄膜形成装置の一部断面図で、シ
ヤツター装置を遮断した状態の図、第３図は同じ
くシヤツター装置を遮断した状態の他の断面図、
第４図は同じくシヤツター装置を開放した状態の
断面図、第５図は同じくシヤツター装置を開放し
た状態の他の断面図、第６図は実施例を用いた別
の薄膜形成装置の一部断面図、第７図はこの考案
の他の実施例の斜視図である。 ３……円筒、３ａ……内壁、５……シヤツター
装置、６，１３……シヤツター板、７……回転導
入機、９ａ，９ｂ，１４ａ，１４ｂ……半環状遮
蔽板、１２……四角筒、１２ａ……内壁。

Claims (1)

    【実用新案登録請求の範囲】
  1. 筒体の内側に、筒体の断面形状と相似形のシヤ
    ツター板が回動可能に設置してあると共に、前記
    シヤツター板の遮蔽時に、シヤツター板の周縁部
    に重合する半環状遮蔽板が筒体の内壁に沿つて設
    けてあることを特徴としたシヤツター装置。
JP1989128928U 1989-11-02 1989-11-02 シャッター装置 Expired - Lifetime JPH0730677Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989128928U JPH0730677Y2 (ja) 1989-11-02 1989-11-02 シャッター装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989128928U JPH0730677Y2 (ja) 1989-11-02 1989-11-02 シャッター装置

Publications (2)

Publication Number Publication Date
JPH0367059U true JPH0367059U (ja) 1991-06-28
JPH0730677Y2 JPH0730677Y2 (ja) 1995-07-12

Family

ID=31676599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989128928U Expired - Lifetime JPH0730677Y2 (ja) 1989-11-02 1989-11-02 シャッター装置

Country Status (1)

Country Link
JP (1) JPH0730677Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01222049A (ja) * 1988-03-01 1989-09-05 Fujitsu Ltd のぞき窓用シャッター機構

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01222049A (ja) * 1988-03-01 1989-09-05 Fujitsu Ltd のぞき窓用シャッター機構

Also Published As

Publication number Publication date
JPH0730677Y2 (ja) 1995-07-12

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