JPH0368036U - - Google Patents
Info
- Publication number
- JPH0368036U JPH0368036U JP12912789U JP12912789U JPH0368036U JP H0368036 U JPH0368036 U JP H0368036U JP 12912789 U JP12912789 U JP 12912789U JP 12912789 U JP12912789 U JP 12912789U JP H0368036 U JPH0368036 U JP H0368036U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- semiconductor
- gauge
- strain gauge
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は実施例１のストツパ付圧力センサの断
面図、第２図は実施例２のストツパーおよび、脈
動排除のセンサーの断面図である。
１……ハウジング、１ａ……センサ取付ねじ部
、１ｂ……中心孔、２……感圧部ハウジング、２
ａ……ストツパー、２ｂ……ダイヤフラム押え板
、２ｃ……連結孔、２ｄ……シリコーンオイル、
３……金属ダイヤフラム、４……シリコーンオイ
ル封入パイプ、５ａ……金属ガラスホルダー、５
ｂ……低融点ガラス、５ｃ……金属リング、６ａ
……半導体歪ゲージ、６ｂ……ガラス台、７……
増幅回路基板、８……カバー、９……大気導入孔
、１０……リード線、１１……金線、１２……シ
リコーンゲル。
FIG. 1 is a cross-sectional view of a pressure sensor with a stopper according to a first embodiment, and FIG. 2 is a cross-sectional view of a stopper and a sensor for eliminating pulsation according to a second embodiment. DESCRIPTION OF SYMBOLS 1... Housing, 1a... Sensor mounting screw part, 1b... Center hole, 2... Pressure sensitive part housing, 2
a...Stopper, 2b...Diaphragm holding plate, 2c...Connection hole, 2d...Silicone oil,
3...Metal diaphragm, 4...Silicone oil sealed pipe, 5a...Metal glass holder, 5
b...Low melting point glass, 5c...Metal ring, 6a
...Semiconductor strain gauge, 6b...Glass stand, 7...
Amplifier circuit board, 8...cover, 9...atmosphere introduction hole, 10...lead wire, 11...gold wire, 12...silicone gel.
Claims (1)
裏面と金属ダイヤフラムとを対向離間せしめて、
その間に形成される空間にシリコーンオイルを封
入し、上記半導体歪ゲージによつて形成される感
圧部をハウジング内に収納し、外縁つきベースで
覆い、該外縁つきベース内に集積回路を収納し、
集積回路とゲージを連結し、かつゲージ表面（抵
抗拡散面）を大気に開方したことを特徴とする半
導体圧力変換器。 ２ 前記金属ダイヤフラムは圧力により変形する
ため感圧部にダイヤフラムのストツパーを有する
特許請求の範囲第１項記載の半導体圧力変換器。 ３ 前記半導体歪ゲージはガラス台に固着し、こ
のガラス台は、低融点ガラスにて金属ガラスホル
ダに固着され、これらゲージブクミは金属リング
を介し塑性流動を利用し感圧部ハウジングに固着
され、かつ、ハウジングは圧力媒体（例えばエン
ジンオイル、ミツシヨンオイルなど）に連通せし
める中心孔を有するネジ管を一体的に連設したも
のであることを特徴とする半導体圧力変換器。[Claims for Utility Model Registration] 1. The back surface of a semiconductor strain gauge that converts pressure into an electrical signal and a metal diaphragm are spaced apart from each other,
A space formed between them is filled with silicone oil, a pressure sensitive part formed by the semiconductor strain gauge is housed in a housing, covered with a base with an outer edge, and an integrated circuit is housed in the base with an outer edge. ,
A semiconductor pressure transducer characterized by connecting an integrated circuit and a gauge, and opening the gauge surface (resistance diffusion surface) to the atmosphere. 2. The semiconductor pressure transducer according to claim 1, wherein the metal diaphragm is deformed by pressure, and therefore has a diaphragm stopper in the pressure sensitive part. 3. The semiconductor strain gauge is fixed to a glass stand, and this glass stand is fixed to a metal glass holder using low melting point glass. 1. A semiconductor pressure transducer, characterized in that the housing is integrally connected with a threaded pipe having a center hole communicating with a pressure medium (for example, engine oil, transmission oil, etc.).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12912789U JPH0368036U (en) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12912789U JPH0368036U (en) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0368036U true JPH0368036U (en) | 1991-07-03 |
Family
ID=31676786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12912789U Pending JPH0368036U (en) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368036U (en) |
-
1989
- 1989-11-06 JP JP12912789U patent/JPH0368036U/ja active Pending
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