JPH0368748U - - Google Patents
Info
- Publication number
- JPH0368748U JPH0368748U JP12888689U JP12888689U JPH0368748U JP H0368748 U JPH0368748 U JP H0368748U JP 12888689 U JP12888689 U JP 12888689U JP 12888689 U JP12888689 U JP 12888689U JP H0368748 U JPH0368748 U JP H0368748U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- guide
- magnetic pole
- axis table
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims 2
Landscapes
- Machine Tool Units (AREA)
- Linear Motors (AREA)
Description
第１図はこの考案の実施例を示す正面図、第２
図は側面図、第３図は平面図で、各図はそれぞれ
一部を切り欠いで示している。第４図は他の実施
例を示す一部の正面図、第５図はその側断面図で
ある。
１……ベース、１１……ガイド溝、２……Ｘ軸
方向磁極、３……Ｘ軸テーブル、３１……Ｘ軸コ
イル、３２……ガイド片、３３……側板、３４…
…スリツト、３５……ガイドレール、３６……ス
リツト孔、３７，３８……ローラ、４……Ｙ軸方
向磁極、５……Ｙ軸テーブル、５１……突出片、
５２……Ｙ軸コイル、５３……側板、５４……ガ
イドローラ、６……ツール取付板、７，８……空
気軸受である。
Figure 1 is a front view showing an embodiment of this invention, Figure 2 is a front view showing an embodiment of this invention.
The figure is a side view, and FIG. 3 is a plan view, each of which is partially cut away. FIG. 4 is a partial front view showing another embodiment, and FIG. 5 is a side sectional view thereof. DESCRIPTION OF SYMBOLS 1...Base, 11...Guide groove, 2...X-axis direction magnetic pole, 3...X-axis table, 31...X-axis coil, 32...Guide piece, 33...Side plate, 34...
...Slit, 35...Guide rail, 36...Slit hole, 37, 38...Roller, 4...Y-axis direction magnetic pole, 5...Y-axis table, 51...Protruding piece,
52... Y-axis coil, 53... Side plate, 54... Guide roller, 6... Tool mounting plate, 7, 8... Air bearing.
Claims (1)
方向磁極によつて駆動される平板状集中巻コイル
からなるＸ軸コイル３１をそなえたＸ軸テーブル
３と、前記Ｘ軸テーブル上に固着したＹ軸方向磁
極４と、Ｙ軸方向磁極によつて駆動される平板状
集中巻コイルからなるＹ軸コイル５２をそなえた
Ｙ軸テーブル５をそなえたＸＹテーブル装置にお
いて、ベース１にＸ軸方向のガイド溝１１を設け
、Ｘ軸テーブルに前記ガイド溝に沿つて移動する
ガイド片３２をそなえるとともに、Ｘ軸テーブル
のＹ軸方向両側に直立させた側板３３を設け、こ
の側板にスリツト３４とＹ軸方向に延長したガイ
ドレール３５をそなえ、Ｙ軸テーブルに前記スリ
ツトに挿入する突出片５１と、前記ガイドレール
に摺触するガイドローラ５４をそなえたことを特
徴とするＸＹテーブル装置。 ２ 前記スリツト３４が、突出片を挟持する上下
のローラ３７，３８をそなえている実用新案登録
請求の範囲第１項記載のＸＹテーブル装置。 ３ 前記ベース１のガイド溝１１とＸ軸テーブル
のガイド片３２との対向面およびＸ軸テーブル３
とＹ軸テーブル５の対向面に空気軸受を設けた実
用新案登録請求の範囲第１項記載または第２項記
載のＸＹテーブル装置。[Claims for Utility Model Registration] 1. An X-axis table 3 equipped with an X-axis magnetic pole 2 provided on a base 1 and an X-axis coil 31 consisting of a flat concentrated winding coil driven by the X-axis magnetic pole. and a Y-axis table 5 having a Y-axis magnetic pole 4 fixed on the X-axis table, and a Y-axis coil 52 comprising a flat concentrated winding coil driven by the Y-axis magnetic pole. In the device, a base 1 is provided with a guide groove 11 in the X-axis direction, an X-axis table is provided with guide pieces 32 that move along the guide groove, and side plates 33 are provided upright on both sides of the X-axis table in the Y-axis direction. The side plate is provided with a slit 34 and a guide rail 35 extending in the Y-axis direction, and the Y-axis table is provided with a protruding piece 51 that is inserted into the slit and a guide roller 54 that slides on the guide rail. XY table device. 2. The XY table device according to claim 1, wherein the slit 34 is provided with upper and lower rollers 37, 38 that sandwich the protruding piece. 3. The facing surface between the guide groove 11 of the base 1 and the guide piece 32 of the X-axis table, and the X-axis table 3
The XY table device according to claim 1 or 2, wherein an air bearing is provided on the opposing surface of the Y-axis table 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12888689U JPH0368748U (en) | 1989-11-02 | 1989-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12888689U JPH0368748U (en) | 1989-11-02 | 1989-11-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0368748U true JPH0368748U (en) | 1991-07-08 |
Family
ID=31676558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12888689U Pending JPH0368748U (en) | 1989-11-02 | 1989-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368748U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023509145A (en) * | 2019-12-31 | 2023-03-07 | ブイディーエル イネーブリング テクノロジーズ グループ ビー．ブイ． | Actuator devices and positioning systems used in positioning systems |
-
1989
- 1989-11-02 JP JP12888689U patent/JPH0368748U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023509145A (en) * | 2019-12-31 | 2023-03-07 | ブイディーエル イネーブリング テクノロジーズ グループ ビー．ブイ． | Actuator devices and positioning systems used in positioning systems |
| JP2025072671A (en) * | 2019-12-31 | 2025-05-09 | ブイディーエル イネーブリング テクノロジーズ グループ ビー．ブイ． | Actuator device for use in a positioning system and positioning system |
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