JPH036914Y2 - - Google Patents

Info

Publication number
JPH036914Y2
JPH036914Y2 JP1985138591U JP13859185U JPH036914Y2 JP H036914 Y2 JPH036914 Y2 JP H036914Y2 JP 1985138591 U JP1985138591 U JP 1985138591U JP 13859185 U JP13859185 U JP 13859185U JP H036914 Y2 JPH036914 Y2 JP H036914Y2
Authority
JP
Japan
Prior art keywords
ion beam
nozzle
mask
vacuum vessel
compound vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985138591U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62106238U (mo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985138591U priority Critical patent/JPH036914Y2/ja
Publication of JPS62106238U publication Critical patent/JPS62106238U/ja
Application granted granted Critical
Publication of JPH036914Y2 publication Critical patent/JPH036914Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1985138591U 1985-09-10 1985-09-10 Expired JPH036914Y2 (mo)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985138591U JPH036914Y2 (mo) 1985-09-10 1985-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985138591U JPH036914Y2 (mo) 1985-09-10 1985-09-10

Publications (2)

Publication Number Publication Date
JPS62106238U JPS62106238U (mo) 1987-07-07
JPH036914Y2 true JPH036914Y2 (mo) 1991-02-21

Family

ID=31043718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985138591U Expired JPH036914Y2 (mo) 1985-09-10 1985-09-10

Country Status (1)

Country Link
JP (1) JPH036914Y2 (mo)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012008145A (ja) * 1999-07-09 2012-01-12 Fei Co 二次イオンの収量を高める方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012008145A (ja) * 1999-07-09 2012-01-12 Fei Co 二次イオンの収量を高める方法及び装置
JP4863593B2 (ja) * 1999-07-09 2012-01-25 エフ イー アイ カンパニ 二次イオンの収量を高める方法及び装置

Also Published As

Publication number Publication date
JPS62106238U (mo) 1987-07-07

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