JPH0370306U

JPH0370306U -

Info

Publication number: JPH0370306U
Application number: JP13193089U
Authority: JP
Priority date: 1989-11-13
Filing date: 1989-11-13
Publication date: 1991-07-15

Description

[Brief explanation of drawings]

図面は本考案の実施例を示すもので、第１図は
第１の考案に係る走査型トンネル顕微鏡の試料の
交換状態を示す側面図、第２図は試料を試料ホル
ダとともに交換する状態を示す側面図、第３図は
第１図の−線に沿う断面図である。１……走査型トンネル顕微鏡、２……真空チヤ
ンバ、４……試料、６……試料ホルダ、８……探
針、１０…試料支持台、１６……探針保持台、１
８ｘ，１８ｙ，１８ｚ……圧電素子（変位手段）
、２０……マニピユレータ、３６……駆動手段。 The drawings show an embodiment of the present invention, and FIG. 1 is a side view showing a state in which a sample is replaced in a scanning tunneling microscope according to the first invention, and FIG. 2 is a side view showing a state in which a sample is replaced together with a sample holder. The side view and FIG. 3 are cross-sectional views taken along the - line in FIG. 1. DESCRIPTION OF SYMBOLS 1... Scanning tunneling microscope, 2... Vacuum chamber, 4... Sample, 6... Sample holder, 8... Probe, 10... Sample support stand, 16... Probe holding stand, 1
8x, 18y, 18z...Piezoelectric element (displacement means)
, 20...manipulator, 36...driving means.

Claims

[Claims for Utility Model Registration] (1) A sample holder to which a sample is mounted and a probe for passing a tunneling current between the sample and the sample are disposed in a vacuum chamber facing each other, and The holder is removably attached to the sample support stand,
The probe is fixed to a probe fixing plate, and the probe fixing plate is removably attached to a probe holder. In a scanning tunneling microscope, a scanning tunneling microscope is provided with a displacement means for individually displacing the probe in three axes, namely, the X-axis direction and the Y-axis direction, which are orthogonal to the probe. The sample support base is provided so as to be movable in a straight line in the vertical direction at the mounting position of the probe fixing plate, and the sample holder is disposed directly below the manipulator from a position where at least the probe and the sample are separated by a predetermined distance. a scanning type, characterized in that the scanning type is provided with a drive means that is provided so as to be slidable along the Z-axis direction over a range up to a position where the sample support is moved, and that drives the sample support table forward and backward along the sliding direction; tunnel microscope. (2) A sample holder on which a sample is attached and a probe for passing a tunneling current between the sample and the sample are arranged opposite to each other in the vacuum chamber, and the sample holder is removably attached to a sample support stand. attached to
The probe is fixed to a probe fixing plate, and the probe fixing plate is removably attached to a probe holder. In a scanning tunneling microscope, a scanning tunneling microscope is provided with a displacement means for individually displacing the probe in three axes, namely, the X-axis direction and the Y-axis direction, which are orthogonal to the probe. The probe holder is provided so as to be movable in a straight line in the vertical direction at the mounting position of the sample holder, and the probe holder is provided with a probe fixing plate directly below the manipulator from a position where the probe and the sample are separated by a predetermined distance. The probe is provided with a drive means that is slidably provided along the Z-axis direction over a range up to the position where the probe is disposed, and that drives the probe holding base forward and backward along the sliding direction. Scanning tunneling microscope.