JPH0371027A - Thin-film temperature sensor element - Google Patents

Abstract

PURPOSE:To directly attach a thin-film temp. measuring resistor to the surface of a material to be measured and to accurately measure the surface temp. of the material by using the flat resistor and providing a thin film for the terminal to which an output lead wire is fixed on the opposite surface. CONSTITUTION:The thin-film temp. sensor element 16 consists of a flat thin-film temp. measuring resistor 13 and a thin film 14 for the terminal to which an output lead wire 15 is fixed on the opposite surface. Consequently, the resistor 13 can be closely attached to the surface of a material 7 to be measured, and the surface temp. is measured. Accordingly, the thermal responsiveness of the resistor 13 is improved in this temp. measurement, the surface of the resistor 13 is not exposed to the external air, and the surface temp. of the material is accurately measured.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a thin film temperature sensor element for measuring the surface temperature of an object to be measured.

(Prior Art) A conventional thin film temperature sensor element is shown in FIG.
/! On one side of the substrate 1, such as N, Aj2203, Pt.

A thin film resistance thermometer 2 is provided, and thin film lead wires 3 are connected to both ends thereof, and terminal portions 4 formed at both ends of the thin film lead wire 3 are connected to output extraction wires made of Pt or the like. 5 is attached.

When measuring the surface temperature of the object to be measured using the thin film temperature sensor element 6 having such a configuration, the temperature can be measured by bringing the other surface of the substrate 1 into contact with the surface of the object to be measured 7 as shown in FIG. 8
As shown in the figure, the thin film resistance temperature detector 2 is brought into contact with the surface of the object 7 to be measured.

(Problem to be Solved by the Invention) By the way, in the method of temperature measurement not shown in FIG. In addition, since the surface of the thin film resistance thermometer 20 is exposed to the outside air, a large temperature gradient occurs, resulting in a temperature range from room temperature to 1.
When temperature was measured within the range of 00°C, an error of 1% occurred in the resistance value of the thin film resistance thermometer 2, making accurate temperature measurement impossible. Furthermore, in the temperature measuring method shown in FIG.
The temperature could not be properly measured because the terminal part 3 side rose up.

SUMMARY OF THE INVENTION Therefore, the present invention aims to provide a thin film temperature sensor element that can accurately measure temperature by directly bringing a thin film resistance thermometer into close contact with the surface of an object to be measured.

(Means for Solving the Problems) A thin film temperature sensor element of the present invention for solving the above problems is provided with a thin film temperature sensing resistor or a thin film thermocouple with thin film lead wires at both ends on one surface of a substrate, and A terminal thin film is provided on the other surface of the substrate at both ends of the lead wire or thin film thermocouple, and each terminal thin film and both ends of the thin film lead wire or thin film thermocouple are formed in a through hole formed in the substrate. The terminals are connected by a thin film provided on the inner surface of the terminal, and an output wire is attached to each terminal thin film.

(Function) In the thin film temperature sensor element of the present invention configured as described above, the terminal thin film to which the output extraction wire is attached is provided on the opposite side of the thin film resistance thermometer or the thin film thermocouple, Since the thin film resistance thermometer or thin film thermocouple is flat, when measuring the surface temperature of the object to be measured, the thin film resistance thermometer or the thin film thermocouple can be directly brought into close contact with the surface of the object to be measured. Therefore, the thermal response is good, and since the surface of the thin film resistance thermometer or thin film thermocouple is not exposed to the outside air, the surface temperature of the object to be measured can be accurately measured.

(Example) An example of the thin film temperature sensor element of the present invention will be described with reference to the drawings. Width 20mm, length 30mm as shown in Figure 1
, an inner diameter of 2 m is attached to one end of the A1N substrate 10 with a thickness of 1 mm.
Laser machining (ultrasonic machining is also acceptable) for the through hole 11 of m.
Two holes were drilled side by side. Next, this AffN substrate lO
Apply 0.0 PT to one side of the through hole 11 and the through hole 11 by sputtering.
After coating with a thickness of 3 μm, patterning is performed to form a 0-width strip located between the left ends of the thin film lead wire 12 as shown in FIG.
, 1 mm, length 10 mm, and resistance value R=100Ω.

Next, the other surface of the Aj2N substrate 10 at a position including the through hole 11 was coated with 1 μm of PT by sputtering to form two terminal thin films 14 each having a width of 5 mm and a length of 8 mm.

After that, each terminal thin film 14 is coated with a wire having a diameter of 0.
An output wire 15 made of 5 mm of annealed Pt was fixed by firing with PT paste and connected to produce a thin film temperature sensor element 16.

The thin film temperature sensor element 16 of the example made in this way is as follows:
Since the thin film resistance thermometer 13 is flat and the terminal thin film 14 to which the output extraction wire 15 is attached is on the opposite side, the thin film resistance thermometer 13 can be directly attached to the surface of the object to be measured 7 as shown in FIG. The surface temperature can be measured by closely contacting the thin film resistance thermometer 13 with no gaps, so the thermal response of the thin film resistance thermometer 13 is good in this temperature measurement, and since the surface of the thin film resistance thermometer 13 is not exposed to the outside air, it can be measured accurately. We were able to measure the surface temperature of objects. When measuring the surface temperature of the object to be measured 7 within the range of room temperature to 100°C, the resistance value of the thin film resistance thermometer 13 is 0.
．． The error was maintained within 5%.

Note that the substrate 10 of the thin film temperature sensor element 16 of the above embodiment
is composed of AnN, but Al2zO,j,, S r O,
etc. is also fine. Further, the through hole 11 of the substrate 1o is
It is also possible to make holes in a green sheet and fire it.

Furthermore, the output extraction wire 15 is not limited to PT, and may vary depending on the operating temperature of the thin film temperature sensor element 16.
U, Au, etc. are used.

Furthermore, although the above embodiment is an example in which the object to be measured 6 is an insulating material, if the object to be measured 6 is a conductive material such as a metal, the surface of the thin film lead wire 12 and the thin film resistance temperature detector 13 may be coated with AI. ! N,E
120. By coating with an insulating thin film (approximately 0.1 μm) such as , SfO, etc., accurate temperature measurement becomes possible. Further, in the above embodiments, the case of a thin film resistance temperature detector has been described, but the present invention is not limited to this, and similar effects can be obtained in the case of a thin film thermocouple.

(Effects of the Invention) As can be seen from the above explanation, in the thin film temperature sensor element of the present invention, the thin film resistance thermometer or thin film thermocouple is flat, and the terminal thin film to which the output extraction wire is attached is on the opposite side. Since it is provided on the surface, the thin film resistance thermometer or thin film thermocouple can be directly attached to the surface of the object to be measured.
It has good thermal response, and the surface of the thin film resistance thermometer or thin film thermocouple is not exposed to the outside air, so the surface temperature of the object to be measured can be measured accurately.

[Brief explanation of drawings]

1 to 4 are manufacturing process diagrams of an embodiment of the thin film temperature sensor element of the present invention, and FIG. 5 is a diagram showing a state in which the surface temperature of a measured object is measured by the thin film temperature sensor element of the present invention. FIG. 6 is a diagram showing a conventional thin film temperature sensor element, and FIGS. 7 and 8 are diagrams showing a state in which the surface temperature of an object to be measured is measured by the thin film temperature sensor element.

Claims (1)

[Claims] 1. A thin film resistance thermometer or a thin film thermocouple with thin film lead wires at both ends is provided on one surface of the substrate, and a thin film for a terminal is provided on the other surface of the substrate at both ends of the thin film lead wire or thin film thermocouple. each terminal thin film and both ends of the thin film lead wire or thin film thermocouple are connected by a thin film provided on the inner surface of a through hole drilled in the substrate, and an output extraction wire is attached to each terminal thin film. A thin film temperature sensor element characterized by: