JPH0371446B2 - - Google Patents
Info
- Publication number
- JPH0371446B2 JPH0371446B2 JP20686584A JP20686584A JPH0371446B2 JP H0371446 B2 JPH0371446 B2 JP H0371446B2 JP 20686584 A JP20686584 A JP 20686584A JP 20686584 A JP20686584 A JP 20686584A JP H0371446 B2 JPH0371446 B2 JP H0371446B2
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- copolymer
- cinnamoyloxyethane
- ethyl
- same manner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000178 monomer Substances 0.000 claims description 17
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 7
- 125000000217 alkyl group Chemical group 0.000 claims description 6
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 238000000576 coating method Methods 0.000 description 57
- 239000011248 coating agent Substances 0.000 description 50
- 229920001577 copolymer Polymers 0.000 description 41
- 239000011347 resin Substances 0.000 description 23
- 229920005989 resin Polymers 0.000 description 23
- 239000002904 solvent Substances 0.000 description 22
- -1 gris Polymers 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 239000004793 Polystyrene Substances 0.000 description 16
- 229920002223 polystyrene Polymers 0.000 description 16
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 12
- 239000000203 mixture Substances 0.000 description 11
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 10
- 239000011521 glass Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 8
- 238000007334 copolymerization reaction Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 238000002835 absorbance Methods 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 6
- 239000000975 dye Substances 0.000 description 6
- KBEBGUQPQBELIU-UHFFFAOYSA-N ethyl 3-phenylprop-2-enoate Chemical compound CCOC(=O)C=CC1=CC=CC=C1 KBEBGUQPQBELIU-UHFFFAOYSA-N 0.000 description 6
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 5
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000010528 free radical solution polymerization reaction Methods 0.000 description 5
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- QQZOPKMRPOGIEB-UHFFFAOYSA-N 2-Oxohexane Chemical compound CCCCC(C)=O QQZOPKMRPOGIEB-UHFFFAOYSA-N 0.000 description 4
- SYBYTAAJFKOIEJ-UHFFFAOYSA-N 3-Methylbutan-2-one Chemical compound CC(C)C(C)=O SYBYTAAJFKOIEJ-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 4
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 4
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 4
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 4
- NMJJFJNHVMGPGM-UHFFFAOYSA-N butyl formate Chemical compound CCCCOC=O NMJJFJNHVMGPGM-UHFFFAOYSA-N 0.000 description 4
- 238000001444 catalytic combustion detection Methods 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 238000004043 dyeing Methods 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 4
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 4
- PGMYKACGEOXYJE-UHFFFAOYSA-N pentyl acetate Chemical compound CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000011253 protective coating Substances 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 4
- HCFAJYNVAYBARA-UHFFFAOYSA-N 4-heptanone Chemical compound CCCC(=O)CCC HCFAJYNVAYBARA-UHFFFAOYSA-N 0.000 description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000000499 gel Substances 0.000 description 3
- 230000036211 photosensitivity Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000007870 radical polymerization initiator Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 2
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 2
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 2
- BJINVQNEBGOMCR-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethyl acetate Chemical compound COCCOCCOC(C)=O BJINVQNEBGOMCR-UHFFFAOYSA-N 0.000 description 2
- IIYLRFRRKZNPIZ-UHFFFAOYSA-N 2-(3-phenylprop-2-enoyloxy)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOC(=O)C=CC1=CC=CC=C1 IIYLRFRRKZNPIZ-UHFFFAOYSA-N 0.000 description 2
- PTBAHIRKWPUZAM-UHFFFAOYSA-N 2-(oxiran-2-yl)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1CO1 PTBAHIRKWPUZAM-UHFFFAOYSA-N 0.000 description 2
- PTTPXKJBFFKCEK-UHFFFAOYSA-N 2-Methyl-4-heptanone Chemical compound CC(C)CC(=O)CC(C)C PTTPXKJBFFKCEK-UHFFFAOYSA-N 0.000 description 2
- ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 2-octanone Chemical compound CCCCCCC(C)=O ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 0.000 description 2
- SSIZVBOERWVGFR-UHFFFAOYSA-N 5-(oxiran-2-yl)pentyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCC1CO1 SSIZVBOERWVGFR-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- 239000004342 Benzoyl peroxide Substances 0.000 description 2
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 2
- AQZGPSLYZOOYQP-UHFFFAOYSA-N Diisoamyl ether Chemical compound CC(C)CCOCCC(C)C AQZGPSLYZOOYQP-UHFFFAOYSA-N 0.000 description 2
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000019400 benzoyl peroxide Nutrition 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 239000003759 ester based solvent Substances 0.000 description 2
- 239000004210 ether based solvent Substances 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- WBJINCZRORDGAQ-UHFFFAOYSA-N formic acid ethyl ester Natural products CCOC=O WBJINCZRORDGAQ-UHFFFAOYSA-N 0.000 description 2
- 239000008273 gelatin Substances 0.000 description 2
- 229920000159 gelatin Polymers 0.000 description 2
- 235000019322 gelatine Nutrition 0.000 description 2
- 235000011852 gelatine desserts Nutrition 0.000 description 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropanol acetate Natural products CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 2
- 229940011051 isopropyl acetate Drugs 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- GWYFCOCPABKNJV-UHFFFAOYSA-N isovaleric acid Chemical compound CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 description 2
- 239000005453 ketone based solvent Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 238000001225 nuclear magnetic resonance method Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- XUFXKBJMCRJATM-FMIVXFBMSA-N (e)-3-(4-methoxyphenyl)-1-phenylprop-2-en-1-one Chemical compound C1=CC(OC)=CC=C1\C=C\C(=O)C1=CC=CC=C1 XUFXKBJMCRJATM-FMIVXFBMSA-N 0.000 description 1
- YKYIFUROKBDHCY-ONEGZZNKSA-N (e)-4-ethoxy-1,1,1-trifluorobut-3-en-2-one Chemical group CCO\C=C\C(=O)C(F)(F)F YKYIFUROKBDHCY-ONEGZZNKSA-N 0.000 description 1
- IGGDKDTUCAWDAN-UHFFFAOYSA-N 1-vinylnaphthalene Chemical compound C1=CC=C2C(C=C)=CC=CC2=C1 IGGDKDTUCAWDAN-UHFFFAOYSA-N 0.000 description 1
- JPOUDZAPLMMUES-UHFFFAOYSA-N 2,2-bis(tert-butylperoxy)octane Chemical compound CCCCCCC(C)(OOC(C)(C)C)OOC(C)(C)C JPOUDZAPLMMUES-UHFFFAOYSA-N 0.000 description 1
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 1
- CBKJLMZJKHOGEQ-UHFFFAOYSA-N 2-(oxiran-2-yl)ethyl prop-2-enoate Chemical compound C=CC(=O)OCCC1CO1 CBKJLMZJKHOGEQ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- PFHOSZAOXCYAGJ-UHFFFAOYSA-N 2-[(2-cyano-4-methoxy-4-methylpentan-2-yl)diazenyl]-4-methoxy-2,4-dimethylpentanenitrile Chemical compound COC(C)(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)(C)OC PFHOSZAOXCYAGJ-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 1
- WWFHNTLFRMYXKQ-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl 3-phenylprop-2-enoate Chemical compound C=CC(=O)OCCOC(=O)C=CC1=CC=CC=C1 WWFHNTLFRMYXKQ-UHFFFAOYSA-N 0.000 description 1
- BIISIZOQPWZPPS-UHFFFAOYSA-N 2-tert-butylperoxypropan-2-ylbenzene Chemical compound CC(C)(C)OOC(C)(C)C1=CC=CC=C1 BIISIZOQPWZPPS-UHFFFAOYSA-N 0.000 description 1
- HRSPJFPORLWKHP-UHFFFAOYSA-N 3-(oxiran-2-yl)propyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCC1CO1 HRSPJFPORLWKHP-UHFFFAOYSA-N 0.000 description 1
- PFCUPDCFNMMJON-UHFFFAOYSA-N 4-(3-phenylprop-2-enoyloxy)butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCOC(=O)C=CC1=CC=CC=C1 PFCUPDCFNMMJON-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- ZPQAKYPOZRXKFA-UHFFFAOYSA-N 6-Undecanone Chemical compound CCCCCC(=O)CCCCC ZPQAKYPOZRXKFA-UHFFFAOYSA-N 0.000 description 1
- JWOWFSLPFNWGEM-UHFFFAOYSA-N Cl.Cl.NC(=N)C(C)CN=NCC(C)C(N)=N Chemical compound Cl.Cl.NC(=N)C(C)CN=NCC(C)C(N)=N JWOWFSLPFNWGEM-UHFFFAOYSA-N 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- XMEQKUYDQRWRMT-UHFFFAOYSA-N [4-(3-phenylprop-2-enoyl)phenyl] 2-methylprop-2-enoate Chemical compound C1=CC(OC(=O)C(=C)C)=CC=C1C(=O)C=CC1=CC=CC=C1 XMEQKUYDQRWRMT-UHFFFAOYSA-N 0.000 description 1
- OUWHQBKPGAWGMH-UHFFFAOYSA-N [4-(3-phenylprop-2-enoyl)phenyl] prop-2-enoate Chemical compound C1=CC(OC(=O)C=C)=CC=C1C(=O)C=CC1=CC=CC=C1 OUWHQBKPGAWGMH-UHFFFAOYSA-N 0.000 description 1
- XMEQKUYDQRWRMT-MDWZMJQESA-N [4-[(e)-3-phenylprop-2-enoyl]phenyl] 2-methylprop-2-enoate Chemical compound C1=CC(OC(=O)C(=C)C)=CC=C1C(=O)\C=C\C1=CC=CC=C1 XMEQKUYDQRWRMT-MDWZMJQESA-N 0.000 description 1
- UAEQGYMDJSXOTL-UHFFFAOYSA-N [4-[3-(4-methoxyphenyl)prop-2-enoyl]phenyl] 2-methylprop-2-enoate Chemical compound C1=CC(OC)=CC=C1C=CC(=O)C1=CC=C(OC(=O)C(C)=C)C=C1 UAEQGYMDJSXOTL-UHFFFAOYSA-N 0.000 description 1
- KYIKRXIYLAGAKQ-UHFFFAOYSA-N abcn Chemical compound C1CCCCC1(C#N)N=NC1(C#N)CCCCC1 KYIKRXIYLAGAKQ-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229960000583 acetic acid Drugs 0.000 description 1
- 239000000980 acid dye Substances 0.000 description 1
- 238000012644 addition polymerization Methods 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 238000012661 block copolymerization Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- OHHIVLJVBNCSHV-UHFFFAOYSA-N butyl 3-phenylprop-2-enoate Chemical compound CCCCOC(=O)C=CC1=CC=CC=C1 OHHIVLJVBNCSHV-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010556 emulsion polymerization method Methods 0.000 description 1
- 150000002168 ethanoic acid esters Chemical class 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- 108010025899 gelatin film Proteins 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 239000012362 glacial acetic acid Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000001160 methoxycarbonyl group Chemical group [H]C([H])([H])OC(*)=O 0.000 description 1
- ZQMHJBXHRFJKOT-UHFFFAOYSA-N methyl 2-[(1-methoxy-2-methyl-1-oxopropan-2-yl)diazenyl]-2-methylpropanoate Chemical compound COC(=O)C(C)(C)N=NC(C)(C)C(=O)OC ZQMHJBXHRFJKOT-UHFFFAOYSA-N 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 125000000864 peroxy group Chemical group O(O*)* 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002685 polymerization catalyst Substances 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000011085 pressure filtration Methods 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- ISXSCDLOGDJUNJ-UHFFFAOYSA-N tert-butyl prop-2-enoate Chemical compound CC(C)(C)OC(=O)C=C ISXSCDLOGDJUNJ-UHFFFAOYSA-N 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical group C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
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Landscapes
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Description
(産業上の利用分野)
本発明は感光性樹脂の製造方法に関し、更に詳
しくは感光性塗膜の形成材料として好適な感光性
樹脂の製造方法に関するものである。
(従来の技術)
従来、各種物品の基体表面の劣化や損傷を防止
するために、その表面に保護塗膜を形成すること
が広く行なわれている。このような保護塗膜に
は、塗膜の基体への接着性が高いこと、更に塗膜
が平滑で強靭であること、耐熱性および耐光性が
高くて長期にわたつて変色等の変質をしないこ
と、耐水性および耐溶剤性が優れていること等の
性能が要求されている。
一方、近年、チヤージカツプルドデバイス(以
下、「CCD」と称する)等の光電変換素子とし
て、色分離フイルターを内蔵した固体撮像素子が
種々発表されている。この固体撮像素子の色分離
フイルターは、例えばCCD素子上に次のような
工程を経て形成される。すなわち、CCD素子
(基体)の表面を透明な塗膜により平坦化した後、
ポリビニルアルコール、グリユー、ゼラチン等に
感光性物質を加えて感光性を付与した感光性材料
を、前記基体上に均一に塗布し、パターンマスク
を介して紫外線を照射し、第1色目の色相部分を
構成すべき部分のみを光硬化させ、未硬化部分を
溶解除去して現像し、この部分を所定の分光特性
を有する材料で染色し、次いで透明な防染保護膜
によつて被覆する。更にこの防染保護膜上に上記
感光性材料を塗布し、第2色目の色相部分につい
ても同様の工程によつて、露光、現像、染色およ
び防染保護膜の形成を行ない、更に第3色目の色
相部分についても同様の工程によつて露光、現
像、染色し、最後に表面保護膜を形成する。この
防染保護膜および表面保護膜には、前述の保護塗
膜に要求される性能、すなわち接着性、平滑性、
強靭性、耐熱性、耐光性、耐水性および耐溶剤性
等に加えて、更に透明性および染料に染色されな
いための耐染性等の性能も要求される。
更にCCD等においては、防染保護膜または表
表面保護膜が不要なボンデイングパツト部分など
に塗布されたこれらの塗膜を選択的に除去するた
めに該塗膜に感光性を付与し、部分的に光硬化さ
せることによつて塗膜を溶媒に対して不溶化させ
て未硬化部分を溶媒で除去することが必要とな
り、このために優れた感光性能が要求される。そ
して、さらにこれらの塗膜を構成する材料は、溶
液として塗布されるが、均一な塗膜を形成させる
ために、スピンコーターによる回転塗布法を用い
る場合があり、この塗布法にも適することが要求
される。
従来、これらの要求性能を全て満足する感光性
塗膜形成材料は見出されていなかつた。
(発明が解決しようとする問題点)
本発明の目的は、感光性塗膜の形成材料として
要求される前記の諸性能の全てを有する優れた感
光性樹脂の製造方法を提供することにある。
(問題点を解決するための手段)
本発明は、一般式()
(式中R1は水素原子またはメチル基、エチル基、
プロピル基、ブチル基等の低級アルキル基、R2
は水素原子、低級アルキル基またはメトキシ基、
エトキシ基、プロポキシ基、ブトキシ基等の低級
アルコキシ基、nは2〜5の整数を意味する)で
表わされる重合性単量体と、一般式()
(式中R3は水素原子または低級アルキル基、m
は1〜5の整数を意味する)で表わされる重合性
単量体とを共重合することを特徴とする感光性樹
脂の製造方法を提供するものである。
一般式()の重合性単量体としては、例えば
1−メタクロイロキシ−2−(4−メチル)シ
ンナモイロキシエタン、
1−メタクロイロキシ−2−(4−エチル)シ
ンナモイロキシエタン、
1−メタクロイロキシ−2−(4−n−プロピ
ル)シンナモイロキシエタン、
1−メタクロイロキシ−2−(4−イソプロピ
ル)シンナモイロキシエタン、
1−メタクロイロキシ−2−(4−n−ブチル)
シンナモイロキシエタン、
1−メタクロイロキシ−2−(4−イソブチル)
シンナモイロキシエタン、
1−アクリロキシ−2−(4−メチル)シンナ
モイロキシエタン、
1−アクリロキシ−2−(4−イソブチル)シ
ンナモイロキシエタン、
1−メタクロイロキシ−3−(4−メチル)シ
ンナモイロキシプロパン、
1−メタクロイロキシ−4−(4−イソプロピ
ル)シンナモイロキシブタン、
1−アクリロキシ−2−シンナモイロキシエタ
ン、
1−メタクロイロキシ−2−シンナモイロキシ
エタン、
1−(α−エチル)アクリロキシ−2−シンナ
モイロキシエタン、
1−(α−プロピル)アルリロキシ−2−シン
ナモイロキシエタン、
1−アクリロキシ−2−(4−メトキシ)シン
ナモイロキシエタン、
1−アクリロキシ−2−(4−エトキシ)シン
ナモイロキシエタン、
1−アクリロキシ−2−(4−プロポキシ)シ
ンナモイロキシエタン、
1−メタクロイロキシ−2−(4−メトキシ)
シンナモイロキシエタン、
1−メタクロイロキシ−2−(4−エトキシ)
シンナモイロキシエタン、
1−メタクロイロキシ−2−(4−プロポキシ)
シンナモイロキシエタン、
1−(α−エチル)アクリロキシ−2−シンナ
モイロキシエタン、
1−(α−エチル)アクリロキシ−2−(4−メ
トキシ)シンナモイロキシエタン、
1−(α−エチル)アクリロキシ−2−(4−エ
トキシ)シンナモイロキシエタン、
1−アクリロキシ−3−シンナモイロキシプロ
パン、
1−メタクロイロキシ−3−シンナモイロキシ
プロパン、
1−(α−エチル)アクリロキシ−3−シンナ
モイロキシプロパン、
1−(α−プロピル)アクリロキシ−3−シン
ナモイロキシプロパン、
1−アクリロキシ−3−(4−メトキシ)シン
ナモイロキシプロパン、
1−メタクロイロキシ−4−シンナモイロキシ
ブタン、
1−メタクロイロキシ−4−(4−エトキシ)
シンナモイロキシブタン、
1−(α−エチル)アクロキシ−4−(4−プロ
ポキシ)シンナモイロキシブタン、
1−(α−ブチル)アクリロキシ−4−(4−ブ
トキシ)シンナモイロキシブタン、
等が挙げられる。
一般式()の重合性単量体としては、例えば
アクリル酸グリシジル、メタクリル酸グリシジ
ル、α−エチルアクリル酸グリシジル、α−n−
プロピルアクリル酸グリシジル、α−n−ブチル
アクリル酸グリシジル、アクリル酸−3,4−エ
ポキシブチル、メタクリル酸−3,4−エポキシ
ブチル、メタクリル酸−4,5−エポキシペンチ
ル、アクリル酸−6,7−エポキシヘプチル、メ
タクリル酸−6,7−エポキシヘプチル、メタク
リル酸−6,7−エポキシヘプチル、α−エチル
アクリル酸−6,7−エポキシヘプチル等が挙げ
られる。これらの化合物のうち、一般式()に
おいてR3が水素原子、メチル基またはエチル基
の場合が好ましく、またmの値の1または2の場
合が好ましい。
本発明の感光性樹脂を製造するに際して、一般
式()の重合性単量体と、一般式()の重合
性単量体との共重合比率は、()の共重合モル
数/(()の共重合モル数+()の共重合モル
数)×100=2〜60であることが好ましく、特に好
ましくは5〜40である。一般式()の重合性単
量体の共重合比率が小さいと感光性能が低下し、
一般式()の重合性単量体の共重合比率が小さ
いと塗膜の平滑性並びに光硬化した場合の塗膜の
密着性、耐熱性、耐溶剤性、耐染性および硬度が
低下するようになる。
本発明の感光性樹脂の製造に際しては、感光性
能が損なわれない限り、一般式()および
()の重合性単量体以外に、第3の単量体成分
を共重合していてもよい。第3の単量体成分とし
ては、例えばアクリル酸メチル、メタクリル酸メ
チル、アクリル酸エチル、メタクリル酸エチル、
アクリル酸n−ブチル、メタクリル酸n−ブチ
ル、アクリル酸t−ブチル、メタクリル酸t−ブ
チル、4′アクリロイロキシカルコン、4′−メタク
ロイロキシカルコン、4′−アクリロイロキシ−
(4−メトキシカルコン)、4′−メタクロイロキシ
−(4−メトキシカルコン)等のアクリル酸また
はメタクリル酸のエステル、スチレン、α−メチ
ルスチレン、p−メチルスチレン、ビニルナフタ
リン等のビニル方香族化合物が用いられる。これ
らの第3の単量体成分は、通常、一般式()お
よび()の重合性単量体の合計量1モルに対し
て0.2モル程度以下である。
一般式()の重合性単量体と、一般式()
の重合性単量体との共重合形態は、特に制限され
ず、付加重合によるランダム共重合、ブロツク共
重合等のいずれでもよく、また共重合方法も溶液
重合法、乳化重合法等のいずれでもよい。
次に、本発明の感光性樹脂の製造方法に関し
て、溶液重合法を用いる場合について詳細に説明
する。
溶液重合に使用する溶媒は、単量体および重合
開始剤を溶解し、かつ生成する感光性樹脂を溶解
し、また溶媒自身が反応しないものであれば特に
限定されるものではなく、例えばアセトン、メチ
ルエチルケトン、メチル−n−プロピルケトン、
メチルイソプロピルケトン、メチル−n−ブチル
ケトン、メチルイソブチルケトン、メチル−n−
アミルケトン、メチル−n−ヘキシルケトン、ジ
エチルケトン、エチル−n−ブチルケトン、ジー
n−プロピルケトン、ジイソブチルケトン、シク
ロヘキサノン、ホロン等のケトン系溶媒、エチル
エーテル、イソプロピルエーテル、n−ブチルエ
ーテル、ジイソアミルエーテル、エチレングリコ
ールジメチルエーテル、エチレングリコールジエ
チルエーテル、ジエチレングリコールジメチルエ
ーテル、ジエチレングリコール、ジオキサン、テ
トラヒドロフラン等のエーテル系溶媒、ギ酸エチ
ル、ギ酸プロピル、ギ酸−n−ブチル、酢酸エチ
ル、酢酸−n−プロピル、酢酸イソプロピル、酢
酸−n−ブチル、酢酸−n−アミル、エチレング
リコールモノメチルエーテルアセテート、エチレ
ングリコールモノエチルエーテルアセテート、ジ
エチレングリコールモノメチルエーテルアセテー
ト、ジエチレングリコールモノエチルエーテルア
セテート等のエステル系溶媒を挙げることができ
る。これらの溶媒は単独で使用しても2種以上を
混合して使用してもよい。
また溶液重合法において使用される重合触媒は
特に限定されるものではなく、例えばラジカル重
合開始剤を用いることができる。ラジカル重合開
始剤としては、2,2′−アゾビスイソブチロニト
リル、2,2′−アゾビス(2,4−ジメチルバレ
ロニトリル)、2,2′−アゾビス(4−メトキシ
−2,4−ジメチルバレロニトリル)、2,2′ア
ゾビスイソ酪酸ジメチル、1,1′−アゾビス(シ
クロヘキサン−1−カルボニトリル)、2,2′−
アゾビス(2−アミジノプロパン)二塩酸塩等の
アゾ系化合物、ベンゾイルペルオキシド、ジクミ
ルペルオキシド、t−ブチルクミルペルオキシ
ド、1,1−ビス(t−ブチルペルオキシ)3,
3,5−トリメチルシクロヘキサン、2,2−ビ
ス(t−ブチルペルオキシ)オクタン等のペルオ
キシ系化合物を例示することができる。これらの
ラジカル重合開始剤を用いる場合の使用量は、通
常、重合に用いられる単量体の合計量1モルに対
して1/1000〜1/200モルであり、好ましくは1/800
〜1/300モルである。使用量が少ないと重合収率
が低下し、使用量が多すぎると分子量の感光性
(樹脂の分子量が低下しやすくなる。なおこれら
の場合の重合温度は特に限定されるものではない
が、通常20〜120℃の範囲である。
溶液重合法において使用する溶媒の量は、一般
的には前単量体に対して0.5〜4倍量(重量)で
あり、好ましくは1〜3.5倍量(重量)である。
溶媒の使用量が0.5倍量未満の場合は、重合系の
粘度が高くなり撹拌効率が悪くなるのみでなく、
生成する感光性樹脂がゲル化しやすくなる。また
溶媒の使用量が4倍量を越えると、感光性の樹脂
の分子量が低下しやすくなる。
本発明により得られる感光性樹脂は、一般式
()
および一般式()
(式中R1、R2、R3、nおよびmは前記の意味を
有する)で表わされる構造単位から主としてな
る。
本発明により得られる感光性樹脂の分子量は、
ポリスチレン換算数平均分子量で50000〜600000
であることが好ましく、特に100000〜400000であ
ることが好ましい。この数平均分子量が50000未
満の場合には、感光性塗膜として紫外線照射部を
光架橋し、未照射部を溶剤により溶解してパター
ンニングする際に、分子量が小さいため、光架橋
して溶剤に不溶化するのにより大きな紫外線量を
照射する必要があり、その結果、感光性能として
の感度が悪化する。更にこの場合は多量の紫外線
を照射するため、ハレーシヨンによりパターンニ
ング特性も悪化する。一方、数平均分子量が
600000を超える場合には、感光性樹脂の保存安定
性が悪くなり、ゲル化しやすくなる。
本発明により得られる感光性樹脂の分子量分散
度には、特に限定はないが、感光性能の1つであ
るパターンの解像性の点からポリスチレン換算重
量平均分子量/ポリスチレン換算数平均分子量が
5以下であることが好ましい。
本発明により得られる感光性樹脂は、適当な溶
媒に溶解することにより感光性塗膜を形成するた
めの感光性樹脂溶液とすることができる。この際
用いられる溶媒としては、感光性樹脂を溶解し、
かつこれと反応しないものであればよく、特に限
定されない。例えばアセトン、メチルエチルケト
ン、メチル−n−プロピルケトン、メチルイソプ
ロピルケトン、メチル−n−ブチルケトン、メチ
ルイソブチルケトン、メチル−n−アミルケト
ン、メチル−n−ヘキシルケトン、ジエチルケト
ン、エチル−n−ブチルケトン、ジ−n−プロピ
ルケトン、ジイソブチルケトン、シクロヘキサノ
ン、ホロン等のケトン系溶媒、エチルエーテル、
イソプロピルエーテル、n−ブチルエーテル、ジ
イソアミルエーテル、エチレングリコールジメチ
ルエーテル、エチレングリコールジエチルエーテ
ル、ジエチレングリコールジメチルエーテル、ジ
エチレングリコール、ジオキサン、テトラヒドロ
フラン等のエーテル系溶媒、ギ酸エチル、ギ酸プ
ロピル、ギ酸−n−ブチル、酢酸エチル、酢酸−
n−プロピル、酢酸イソプロピル、酢酸−n−ブ
チル、酢酸−n−アミル、エチレングリコールモ
ノメチルエーテルアセテート、エチレングリコー
ルモノエチルエーテルアセテート、ジエチレング
リコールモノメチルエーテルアセテート、ジエチ
レングリコールモノエチルエーテルアセテート等
のエステル系溶媒が用いられる。感光性樹脂溶液
の濃度は、特に限定されず、使用目的に応じて適
宜選択することができるが、通常5〜50重量%で
ある。
感光性樹脂の溶液を、基体表面に塗布する方法
として、例えばスプレー法、ロールコート法、回
転塗布法等が挙げられる。
これらの方法で塗布して得られる塗膜は、通
常、50〜100℃で10分間ないし1時間程度の熱処
理を行ない(プレベーク)、溶媒を除去した後、
ホトマスクを通じて例えば250〜400nmの紫外線
を照射する。紫外線照射量は、例えば波長254n
mの紫外線で通常10〜500mJ/cm2である。また
塗膜の未照射部を溶解除去して現像する際に用い
られる溶媒は、未照射部が溶出するものであれば
よく、通常、メチルエチルケトン等の感光性樹脂
に対する良溶媒と、イソプロピルアルコール等の
貧溶媒とを適当な割合で混合したものが使用され
る。またこのようにして現像された塗膜は、通
常、膨潤しているので、必要に応じてリンスによ
り収縮させる。リンス液としてはメチルイソブチ
ルケトン等の貧溶媒が使用される。
次いでこのようにして得られる塗膜を、100〜
200℃で30分間ないし2時間熱処理(ポストベー
ク)することにより、所望の形状の光硬化した塗
膜を得ることができる。
以下、実施例により本発明を詳細に説明する。
なお本実施例におけるポリスチレン換算数平均
分子量およびポリスチレン換算重量平均分子量
は、ゲルパーミエーシヨンクロマトグラムを用
い、下記の測定条件によつて求めたものである。
装置:米国ウオーターズ社製高温高速ゲルパーミ
エーシヨンクロマトグラム(モデル150−C
ALC/GPC)
カラム:昭和電工(株)製SHODEX A−8M、長さ
50cm
測定温度:40℃
流速:1ml/分
溶媒:テトラヒドロフラン
サンプル濃度:感光性樹脂(1g)/テトラヒド
ロフラン(100ml)
標準ポリスチレン:米国プレツシヤーケミカル社
製標準ポリスチレン
実施例 1
撹拌装置、温度計、冷却用コンデンサおよび窒
素ガス導入口を備えた500mlの丸底フラスコ内を
窒素ガスで置換した後、このフラスコに脱気蒸留
したジオキサン343g(3.9モル)を加え、更にメ
タクリル酸グリシジル42.6g(0.30モル)、1−
メタクロイロキシ−2−シンナモイロキシエタン
26.0g(0.10モル)およびアゾビスイソブチロニ
トリル0.17g(0.01モル)を仕込んだ。
次いで反応溶液を撹拌しながら、50℃で18時間
加熱することにより共重合し、そ後反応溶液を室
温まで冷却して2のメタノールで処理し、生成
した共重合体を凝固させた。凝固した共重合体を
濾別した後、室温下において減圧乾燥して白色粉
末状の共重合体28gを得た。この共重合体の組成
比を紫外線吸光度法で定量したところ、グリシジ
ルユニツトとシンナモイルユニツトとのモル比は
77:23であつた。またこの重合体のポリスチレン
換算数平均分子量は、170000であつた。ポリスチ
レン換算重量平均分子量とポリスチレン換算数平
均分子量との比(MW/MN)は2.51であつた。
こうして得られた共重合体11gをエチルセロソ
ルブアセテート89.0gに溶解し、この溶液を孔径
0.2μmのメンブランフイルターで加圧濾過した
後、スピンコーターを用いてシリコンウエハー上
に回転数2400rpmで回転塗布した。得られた塗膜
の表面は極めて滑らかであり、膜荒れは全く見ら
れなかつた。これを150℃で30分間熱処理した後、
触針式膜厚計(ダンクテーラーホブソン社製、タ
リステツプ)により測定した膜厚は、1.01μmで
あつた。
更に共重合体溶液をシリコンウエハー上に回転
数2400rpmで回転塗布したものを、80℃の恒温槽
中において10分間熱処理した後、ホトマスクを通
じて、光源として500Wのキセノン−水銀ランプ
を使用したキヤノン(株)製の露光機(PLA−521F)
を用いて紫外線を照射した。これをメチルエチル
ケトンとイソプロピルアルコールとの混合溶媒
(重量比で4.5:1)に、室温で1分間浸漬するこ
とよにより、未照射部分を溶解して現像した後、
メチルイソブチルケトンに室温で1分間浸漬して
リンス処理し、ホトマスクに忠実な所望の形状で
塗膜を得た。これを更に150℃の恒温槽中で1時
間熱処理した。
この場合の紫外線照射時間の最適値(以下、最
適露光時間と称す)は4秒(波長が254nmの紫
外線エネルギー換算量で30mJ/cm2)であつた。
なお最適露光時間とは、紫外線照射量の不足によ
つて現像後に光硬化した塗膜が肌荒れ現象を生ぜ
ず、かつ紫外線照射量の過多によつて解像度が低
下することのない紫外線照射時間を示すものであ
る。
このようにして作製した光硬化した塗膜につい
て、以下の試験を行なつた。まず上記の方法で光
硬化した塗膜を形成したガラス板の吸収スペクト
ルを、塗膜を形成しない同様のガラス板を対照と
して測定した。波長350〜800nmの全領域におい
て光線透過率は95%以上であつた。
次にこのガラス板上で光硬化した塗膜の接着性
を調べるためにテープ剥離によるゴバン目試験
(JIS K−5400)を行なつたが、剥離は全く認め
られなかつた。またこのガラス板を沸騰水中に入
れて5時間放置した後、同様にしてゴバン目試験
を行なつたが、この場合も剥離は全く見られなか
つた。また上記の塗膜つきのガラス板をトルエン
中に入れて5時間加熱還流した後、ゴバン目試験
を行なつたが、この場合も剥離は全く認められな
かつた。
また上記と同様にして作製した光硬化した塗膜
を形成したガラス板を、200℃のギヤオーブン中
で200時間熱処理し、塗膜の耐熱性を検討したと
ころ、クラツクの発生は認められず、また吸収ス
ペクトルの変化も認められなかつた。
更に、上記と同様にして作製した光硬化した塗
膜を形成したガラス板にハロゲンランプ(岩崎電
気(株)製のJCD100V、650W/B)で10000ルツク
スの光を1000時間照射し、塗膜の耐光性を検討し
たところ、吸収スペクトルの変化は認められず、
クラツクの発明も認められなかつた。
また上記と同様にして作成した光硬化した塗膜
の鉛筆硬度をJIS K−5400に準拠し測定したとこ
ろ4Bであつた。
次に上記と同様にして作製した光硬化した塗膜
を形成したガラス板を、下記組成の染色浴中に入
れ、100℃で30分間放置した後、ガラス板を取出
してよく水洗し乾燥した後、塗膜の様子を目視で
調べ、耐染性を検討したところ、クラツクや膜荒
れ等の異常は認められず、また塗膜の光線透過率
は、波長400〜800nmの範囲において95%以上で
あつた。
(染色浴)
酸性染料(Kayanol Milling Red RS−125)
2g
氷酢酸 2g
蒸留水 100g
これらの結果をまとめて第1表に示す。
一方、シリコンウエハー上に市販のゼラチン水
溶液(固形分含量:20%)を回転塗布して得た塗
膜を、150℃の恒温槽中で1時間熱処理した。こ
の時のゼラチン膜厚は1.52μmであつた。更に上
記の共重合体溶液と同様のものを用い、上記と同
様にして、回転塗布、熱処理、露光、現像、リン
ス、熱処理の各処理を行なつて、2層構造の塗膜
を形成した。この塗膜についてテープ剥離による
ゴバン目試験を行なつたところ、剥離は全く認め
られなかつた。
実施例 2
メタクリル酸グリシジルの代わりに、メタクリ
ル酸−3,4−エポキシブチル53g(0.31モル)
を用い、その他は実施例1と同様にして共重合体
を製造した。この共重合体のポリスチレン換算数
平均分子量は、185000であり、MW/MNの値は
2.45であつた。この共重合体の組成比を紫外線吸
光度法で定量したところ、シンナモイルユニツト
と3,4−エポキシブチルユニツトとのモル比は
23:77であつた。
次いでこの共重合体11gを用いて、実施例1と
同様に処理して共重合体溶液を調製し、これを用
いて実施例1と同様にして膜厚1.0μmの塗膜を形
成し、この塗膜について実施例1と同様に種々の
特性を調べた。その結果を第1表に示す。
実施例 3
1−メタクロイロキシ−2−シンナモイロキシ
エタンの代わりに、1−メタクロイロキシ−2−
(4−メメトキシ)シンナモイロキシエタン21g
(0.072モル)を用い、かつジオキサンの代わり
に、テトラヒドロフラン320g(4.4モル)を用
い、その他は実施例1と同様にして共重合体を製
造した。この共重合体のポリスチレン換算数平均
分子量は、182000であり、MW/MNの値は2.23
であつた。この共重合体の組成比を紫外線吸光度
法を定量したところ、グリシジルユニツトと4−
メトキシシンナモイルユニツトとのモル比は82:
18であつた。
次いでこの共重合体10gを用いて、実施例1と
同様に処理して共重合体溶液を調製し、これを用
いて実施例1と同様にして膜厚1.1μmの塗膜を形
成し、この塗膜について実施例1と同様に種々の
特性を調べた。その結果を第1表に示す。
実施例 4
撹拌装置、温度計、冷却用コンデンサおよび窒
素ガス導入口を備えた500mlの丸底フラスコ内を
窒素ガスで置換した後、このフラスコに脱気蒸留
したエチルセロソルブアセテート300g(2.27モ
ル)を加え、更にメタクリル酸グリシジル45g
(0.32モル)、メタクリル酸t−ブチル10g(0.07
モル)、1−メタクロイロキシ−2−シンナモイ
ロキシエタン26g(0.1モル)およびアゾビスイ
ソブチロニトリル0.17g(0.001モル)を仕込ん
だ。次いで反応溶液を撹拌しながら、60℃で20時
間加熱することにより共重合し、その後反応溶液
を室温まで冷却して2のメタノールで処理し、
生成した共重合体を凝固させた。凝固した共重合
体を濾別した後、室温下において減圧乾燥して白
色粉末状の共重合体61gを得た。この共重合体の
組成比を核磁気共鳴法および紫外線吸光度法で定
量したところ、グリシジルユニツトとt−ブチル
エステルユニツトとシンナモイルユニツトとのモ
ル比は、63:14:23であつた。またこの共重合体
の換算数平均分子量は、220000であり、MW/
MNの値は2.35であつた。
得られた共重合体11.5gを用いて、実施例1と
同様に処理して共重合体溶液を調製し、これを用
いて実施例1と同様にして膜厚0.95μmの塗膜を
形成し、この塗膜について実施例1と同様に種々
の特性を調べた。その結果を第1表に示す。
比較例 1
メタクリル酸グリシジルの代わりに、メタクリ
ル酸メチル32g(0.32モル)を用い、その他は実
施例1と同様にして、メタクリル酸メチルと1−
メタクロイロキシ−2−シンナモイロキシエタン
との共重合体を製造した。この共重合体のポリス
チレン換算数平均分子量は、140000であり、
MW/MNの値は3.0であつた。
この共重合体の組成比を紫外線吸光度法で定量
したところ、メトキシカルボニルユニツトとシン
ナモイルユニツトとの組成比は78:22であつた。
次いでこの共重合体10gを用いて、実施例1と
同様に処理して共重合体溶液を調製し、これを用
いて実施例1と同様にして膜厚0.85μmの塗膜を
形成し、この塗膜について実施例1と同様に種々
の特性を調べた。その結果を第1表に示す。
実施例 5
実施例4におけるメタクリル酸t−ブチルにか
えて、4′−メタクロイロキシカルコン17g(0.06
モル)を用いたほかは他は実施例4と同様して、
白色粉末状の共重合体67gを得た。この共重合体
の組成比を核磁気共鳴法および紫外線吸光度法で
定量したところ、グリシジルユニツトとカルコン
ユニツトとシンナモイルユニツトとのモル比は
64:12:24であつた。またこの共重合体のポリス
チレン換算数平均分子量は250000であり、MW/
MN値は2.3であつた。この共重合体10gをシク
ロヘキサノン90gに溶解し実施例1と同様にして
塗布溶液を調製し、この塗膜について種々の特性
を調べた。その結果を第1表に示す。
実施例 6
実施例1におけるジオキサンにかえて、エチレ
ングリコールモノエチルエーテルモノアセテート
340g(2.58モル)を用いたほかは実施例1と同
様にして共重合体26gを得た。この共重合体の組
成比を実施例1と同様にして定量したところグリ
シジルユニツトとシンナモイルユニツトとのモル
比は77:23であつた。またこの共重合体のポリス
チレン換算数平均分子量は180000でありMW/
MN比は2.40であつた。この共重合体を用い、実
施例1と同様にして塗布溶液を調製し、この塗膜
について種々の特性を調べた。その結果をまとめ
て第1表に示す。
実施例 7
実施例1におけるアゾビスイソブチロニトリル
にかえて、ベンゾイルペルオキシド0.24g
(0.001モル)を用いたほかは、実施例1と同様に
して、白色粉末状の共重合体22gを得た。この共
重合体の組成比を実施例1と同様にして定量した
ところ、グリシジルユニツトとシンナモイルユニ
ツトとのモル比は77:23であつた。またこの共重
合体の共重合体のポリスチレン換算数平均分子量
は180000であり、MW/MN比は2.50であつた。
この共重合体を用い、実施例1と同様にして塗布
溶液を調製し、この塗膜について種々の特性を調
べた。その結果をまとめて第1表に示す。
(Industrial Application Field) The present invention relates to a method for producing a photosensitive resin, and more particularly to a method for producing a photosensitive resin suitable as a material for forming a photosensitive coating film. (Prior Art) Conventionally, in order to prevent deterioration and damage to the substrate surface of various articles, it has been widely practiced to form a protective coating on the surface of the substrate. This type of protective coating film must have high adhesion to the substrate, be smooth and strong, and have high heat and light resistance so that it will not change in quality such as discoloration over a long period of time. In addition, performance such as excellent water resistance and solvent resistance is required. On the other hand, in recent years, various solid-state imaging devices with built-in color separation filters have been announced as photoelectric conversion devices such as charge coupled devices (hereinafter referred to as "CCD"). The color separation filter of this solid-state image sensor is formed, for example, on a CCD element through the following steps. That is, after flattening the surface of the CCD element (substrate) with a transparent coating,
A photosensitive material made by adding a photosensitive substance to polyvinyl alcohol, gris, gelatin, etc., is uniformly applied onto the substrate, and ultraviolet rays are irradiated through a pattern mask to change the hue of the first color. Only the portion to be constructed is photocured, the uncured portion is dissolved and removed, developed, this portion is dyed with a material having predetermined spectral characteristics, and then covered with a transparent anti-stain protection film. Furthermore, the photosensitive material described above is applied onto this resist-dye protective film, and the hue portion of the second color is exposed, developed, dyed, and a resist-dye protective film is formed by the same process, and then the third color is coated with the photosensitive material. Similar steps are used to expose, develop, and dye the colored portion, and finally, a surface protective film is formed. This anti-stain protection film and surface protection film have the properties required for the above-mentioned protective coating, namely adhesion, smoothness,
In addition to toughness, heat resistance, light resistance, water resistance, solvent resistance, etc., performance such as transparency and resistance to staining with dyes is also required. Furthermore, in CCDs, etc., in order to selectively remove coatings applied to areas such as bonding pads where anti-dye protection coatings or surface protection coatings are unnecessary, the coatings are imparted with photosensitivity and are partially coated. It is necessary to make the coating film insoluble in a solvent by photo-curing it, and to remove the uncured portion with a solvent, and for this purpose, excellent photosensitivity is required. Furthermore, the materials constituting these coatings are applied as a solution, but in order to form a uniform coating, a spin coating method using a spin coater may be used, and it may be suitable for this coating method as well. required. Until now, no photosensitive coating film-forming material has been found that satisfies all of these required performances. (Problems to be Solved by the Invention) An object of the present invention is to provide a method for producing an excellent photosensitive resin that has all of the above-mentioned performances required as a material for forming a photosensitive coating film. (Means for solving the problem) The present invention is based on the general formula () (In the formula, R 1 is a hydrogen atom, a methyl group, an ethyl group,
Lower alkyl groups such as propyl group and butyl group, R 2
is a hydrogen atom, a lower alkyl group or a methoxy group,
A polymerizable monomer represented by a lower alkoxy group such as an ethoxy group, a propoxy group, or a butoxy group (n means an integer of 2 to 5), and a general formula () (In the formula, R 3 is a hydrogen atom or a lower alkyl group, m
is an integer from 1 to 5). Examples of the polymerizable monomer of general formula () include 1-methacryoloxy-2-(4-methyl)cinnamoyloxyethane, 1-methacryoloxy-2-(4-ethyl)cinnamoyloxyethane, and 1-methacryoloxy-2-(4-ethyl)cinnamoyloxyethane. 2-(4-n-propyl)cinnamoyloxyethane, 1-methacloyloxy-2-(4-isopropyl)cinnamoyloxyethane, 1-methacloyloxy-2-(4-n-butyl)
Cinnamoyloxyethane, 1-methacryloyloxy-2-(4-isobutyl)
Cinnamoyloxyethane, 1-acryloxy-2-(4-methyl)cinnamoyloxyethane, 1-acryloxy-2-(4-isobutyl)cinnamoyloxyethane, 1-methacryloxy-3-(4-methyl)cinnamoy Roxypropane, 1-methacryloxy-4-(4-isopropyl)cinnamoyloxybutane, 1-acryloxy-2-cinnamoyloxyethane, 1-methacryloxy-2-cinnamoyloxyethane, 1-(α-ethyl)acryloxy- 2-cinnamoyloxyethane, 1-(α-propyl)allyloxy-2-cinnamoyloxyethane, 1-acryloxy-2-(4-methoxy)cinnamoyloxyethane, 1-acryloxy-2-(4-ethoxy) Cinnamoyloxyethane, 1-acryloxy-2-(4-propoxy)cinnamoyloxyethane, 1-methacryloxy-2-(4-methoxy)
Cinnamoyloxyethane, 1-metachloroyloxy-2-(4-ethoxy)
Cinnamoyloxyethane, 1-metachloroyloxy-2-(4-propoxy)
Cinnamoyloxyethane, 1-(α-ethyl)acryloxy-2-cinnamoyloxyethane, 1-(α-ethyl)acryloxy-2-(4-methoxy)cinnamoyloxyethane, 1-(α-ethyl)acryloxy -2-(4-ethoxy)cinnamoyloxyethane, 1-acryloxy-3-cinnamoyloxypropane, 1-methacryloxy-3-cinnamoyloxypropane, 1-(α-ethyl)acryloxy-3-cinnamoyloxypropane , 1-(α-propyl)acryloxy-3-cinnamoyloxypropane, 1-acryloxy-3-(4-methoxy)cinnamoyloxypropane, 1-methacryloxy-4-cinnamoyloxybutane, 1-methacryloxy-4- (4-ethoxy)
Cinnamoyloxybutane, 1-(α-ethyl)acryloxy-4-(4-propoxy)cinnamoyloxybutane, 1-(α-butyl)acryloxy-4-(4-butoxy)cinnamoyloxybutane, etc. It will be done. Examples of the polymerizable monomer of general formula () include glycidyl acrylate, glycidyl methacrylate, α-ethyl glycidyl acrylate, α-n-
Glycidyl propyl acrylate, α-n-butyl glycidyl acrylate, 3,4-epoxybutyl acrylate, 3,4-epoxybutyl methacrylate, 4,5-epoxypentyl methacrylate, 6,7-epoxy acrylate Examples include -epoxyheptyl, 6,7-epoxyheptyl methacrylate, 6,7-epoxyheptyl methacrylate, and 6,7-epoxyheptyl α-ethyl acrylate. Among these compounds, in the general formula (), R 3 is preferably a hydrogen atom, a methyl group or an ethyl group, and m is preferably 1 or 2. When producing the photosensitive resin of the present invention, the copolymerization ratio of the polymerizable monomer of general formula () and the polymerizable monomer of general formula () is the number of copolymerized moles of ()/(( It is preferable that the number of moles of copolymerization of )+the number of moles of copolymerization of ()×100=2 to 60, particularly preferably 5 to 40. If the copolymerization ratio of the polymerizable monomer of general formula () is small, the photosensitive performance will decrease,
If the copolymerization ratio of the polymerizable monomer of general formula () is small, the smoothness of the coating film and the adhesion, heat resistance, solvent resistance, dyeing resistance, and hardness of the coating film when photocured will decrease. become. When producing the photosensitive resin of the present invention, a third monomer component may be copolymerized in addition to the polymerizable monomers of general formulas () and (), as long as the photosensitive performance is not impaired. . Examples of the third monomer component include methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate,
n-butyl acrylate, n-butyl methacrylate, t-butyl acrylate, t-butyl methacrylate, 4'acryloyloxychalcone, 4'-methacryloyloxychalcone, 4'-acryloyloxy-
Acrylic acid or methacrylic acid esters such as (4-methoxychalcone) and 4'-methacryloxy-(4-methoxychalcone), vinyl aromatic compounds such as styrene, α-methylstyrene, p-methylstyrene, and vinylnaphthalene. used. The amount of these third monomer components is usually about 0.2 mol or less per 1 mol of the total amount of the polymerizable monomers of general formulas () and (). Polymerizable monomer of general formula () and general formula ()
The form of copolymerization with the polymerizable monomer is not particularly limited, and may be random copolymerization by addition polymerization, block copolymerization, etc., and the copolymerization method may be any of solution polymerization method, emulsion polymerization method, etc. good. Next, regarding the method for producing the photosensitive resin of the present invention, a case where a solution polymerization method is used will be described in detail. The solvent used for solution polymerization is not particularly limited as long as it dissolves the monomer and polymerization initiator, dissolves the photosensitive resin to be produced, and does not react itself; for example, acetone, Methyl ethyl ketone, methyl-n-propyl ketone,
Methyl isopropyl ketone, methyl-n-butyl ketone, methyl isobutyl ketone, methyl-n-
Ketone solvents such as amyl ketone, methyl-n-hexyl ketone, diethyl ketone, ethyl-n-butyl ketone, di-n-propyl ketone, diisobutyl ketone, cyclohexanone, holon, ethyl ether, isopropyl ether, n-butyl ether, diisoamyl ether, Ether solvents such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol, dioxane, tetrahydrofuran, ethyl formate, propyl formate, n-butyl formate, ethyl acetate, n-propyl acetate, isopropyl acetate, n-acetate Ester solvents such as -butyl, n-amyl acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, and diethylene glycol monoethyl ether acetate can be mentioned. These solvents may be used alone or in combination of two or more. Further, the polymerization catalyst used in the solution polymerization method is not particularly limited, and for example, a radical polymerization initiator can be used. As the radical polymerization initiator, 2,2'-azobisisobutyronitrile, 2,2'-azobis(2,4-dimethylvaleronitrile), 2,2'-azobis(4-methoxy-2,4- dimethylvaleronitrile), 2,2' dimethyl azobisisobutyrate, 1,1'-azobis(cyclohexane-1-carbonitrile), 2,2'-
Azo compounds such as azobis(2-amidinopropane) dihydrochloride, benzoyl peroxide, dicumyl peroxide, t-butylcumyl peroxide, 1,1-bis(t-butylperoxy) 3,
Examples include peroxy compounds such as 3,5-trimethylcyclohexane and 2,2-bis(t-butylperoxy)octane. When using these radical polymerization initiators, the amount used is usually 1/1000 to 1/200 mol, preferably 1/800 mol, based on 1 mol of the total amount of monomers used for polymerization.
~1/300 mole. If the amount used is too small, the polymerization yield will decrease, and if the amount used is too large, the molecular weight will be photosensitive (the molecular weight of the resin will tend to decrease).The polymerization temperature in these cases is not particularly limited, but it is usually The temperature is in the range of 20 to 120°C.The amount of solvent used in the solution polymerization method is generally 0.5 to 4 times the amount (weight) of the premonomer, preferably 1 to 3.5 times the amount (weight). weight).
If the amount of solvent used is less than 0.5 times the amount, not only will the viscosity of the polymerization system become high and the stirring efficiency will deteriorate;
The resulting photosensitive resin becomes more likely to gel. Furthermore, if the amount of solvent used exceeds 4 times the amount, the molecular weight of the photosensitive resin tends to decrease. The photosensitive resin obtained by the present invention has the general formula () and general expression () It mainly consists of a structural unit represented by (in the formula, R 1 , R 2 , R 3 , n and m have the above-mentioned meanings). The molecular weight of the photosensitive resin obtained by the present invention is
Polystyrene equivalent number average molecular weight: 50,000 to 600,000
It is preferable that it is, and it is especially preferable that it is 100000-400000. If this number average molecular weight is less than 50,000, when forming a photosensitive coating film by photocrosslinking the ultraviolet irradiated areas and dissolving the unirradiated areas in a solvent for patterning, the molecular weight is small, so photocrosslinking and solvent removal are required. It is necessary to irradiate a larger amount of ultraviolet rays in order to make it insolubilized, and as a result, the sensitivity as a photosensitive performance deteriorates. Furthermore, in this case, since a large amount of ultraviolet rays are irradiated, patterning characteristics are also deteriorated due to halation. On the other hand, the number average molecular weight
When it exceeds 600,000, the storage stability of the photosensitive resin deteriorates and gelation tends to occur. The degree of molecular weight dispersion of the photosensitive resin obtained by the present invention is not particularly limited, but from the viewpoint of pattern resolution, which is one of the photosensitive properties, the polystyrene equivalent weight average molecular weight/polystyrene equivalent number average molecular weight is 5 or less. It is preferable that The photosensitive resin obtained by the present invention can be made into a photosensitive resin solution for forming a photosensitive coating film by dissolving it in a suitable solvent. The solvent used at this time is to dissolve the photosensitive resin,
It is not particularly limited as long as it does not react with this. For example, acetone, methyl ethyl ketone, methyl n-propyl ketone, methyl isopropyl ketone, methyl n-butyl ketone, methyl isobutyl ketone, methyl n-amyl ketone, methyl n-hexyl ketone, diethyl ketone, ethyl n-butyl ketone, di- Ketone solvents such as n-propyl ketone, diisobutyl ketone, cyclohexanone, and holon, ethyl ether,
Ether solvents such as isopropyl ether, n-butyl ether, diisoamyl ether, ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol, dioxane, tetrahydrofuran, ethyl formate, propyl formate, n-butyl formate, ethyl acetate, acetic acid −
Ester solvents such as n-propyl, isopropyl acetate, n-butyl acetate, n-amyl acetate, ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate are used. . The concentration of the photosensitive resin solution is not particularly limited and can be appropriately selected depending on the purpose of use, but is usually 5 to 50% by weight. Examples of the method for applying the photosensitive resin solution onto the substrate surface include a spray method, a roll coating method, and a spin coating method. The coating film obtained by applying these methods is usually heat treated at 50 to 100°C for about 10 minutes to 1 hour (prebaking) to remove the solvent.
For example, ultraviolet rays of 250 to 400 nm are irradiated through a photomask. The amount of UV irradiation is, for example, at a wavelength of 254n.
The amount of ultraviolet rays is usually 10 to 500 mJ/cm 2 . The solvent used to dissolve and remove the unirradiated areas of the coating film for development may be any solvent as long as the unirradiated areas are eluted, and is usually a good solvent for photosensitive resins such as methyl ethyl ketone and isopropyl alcohol. A mixture of a poor solvent and a suitable proportion is used. Furthermore, since the coating film developed in this manner is usually swollen, it is shrunk by rinsing as necessary. A poor solvent such as methyl isobutyl ketone is used as the rinsing liquid. Next, the coating film obtained in this way is
By heat-treating (post-baking) at 200°C for 30 minutes to 2 hours, a photocured coating film with a desired shape can be obtained. Hereinafter, the present invention will be explained in detail with reference to Examples. Note that the polystyrene equivalent number average molecular weight and polystyrene equivalent weight average molecular weight in this example were determined using a gel permeation chromatogram under the following measurement conditions. Equipment: High-temperature, high-speed gel permeation chromatogram (Model 150-C, manufactured by Waters, USA)
ALC/GPC) Column: SHODEX A-8M manufactured by Showa Denko Co., Ltd., length
50cm Measurement temperature: 40℃ Flow rate: 1ml/min Solvent: Tetrahydrofuran Sample concentration: Photosensitive resin (1g) / Tetrahydrofuran (100ml) Standard polystyrene: Standard polystyrene manufactured by Pressure Chemical Co., USA Example 1 Stirring device, thermometer, cooling After purging the inside of a 500 ml round bottom flask equipped with a condenser and a nitrogen gas inlet with nitrogen gas, 343 g (3.9 mol) of degassed and distilled dioxane was added to the flask, followed by 42.6 g (0.30 mol) of glycidyl methacrylate. , 1-
Methachlorooxy-2-cinnamoyloxyethane
26.0 g (0.10 mol) and 0.17 g (0.01 mol) of azobisisobutyronitrile were charged. Next, the reaction solution was copolymerized by heating at 50°C for 18 hours while stirring, and then the reaction solution was cooled to room temperature and treated with methanol (2) to solidify the produced copolymer. After the coagulated copolymer was filtered off, it was dried under reduced pressure at room temperature to obtain 28 g of a white powdery copolymer. When the composition ratio of this copolymer was determined by ultraviolet absorbance method, the molar ratio of glycidyl units and cinnamoyl units was found to be
It was 77:23. Further, the number average molecular weight of this polymer in terms of polystyrene was 170,000. The ratio of the weight average molecular weight in terms of polystyrene to the number average molecular weight in terms of polystyrene (MW/MN) was 2.51. 11 g of the copolymer thus obtained was dissolved in 89.0 g of ethyl cellosolve acetate, and this solution was added to
After pressure filtration with a 0.2 μm membrane filter, it was spin-coated onto a silicon wafer at a rotation speed of 2400 rpm using a spin coater. The surface of the resulting coating film was extremely smooth, and no film roughness was observed at all. After heat-treating this at 150℃ for 30 minutes,
The film thickness measured with a stylus-type film thickness meter (Talystep, manufactured by Dank Taylor Hobson) was 1.01 μm. Furthermore, the copolymer solution was spin-coated onto a silicon wafer at a rotational speed of 2400 rpm, heat-treated for 10 minutes in a constant temperature bath at 80°C, and then exposed through a photomask using a Canon Inc. ) manufactured exposure machine (PLA-521F)
UV rays were irradiated using a This was immersed in a mixed solvent of methyl ethyl ketone and isopropyl alcohol (4.5:1 by weight) at room temperature for 1 minute to dissolve the unirradiated areas and develop.
The sample was rinsed by immersion in methyl isobutyl ketone at room temperature for 1 minute to obtain a coating film in the desired shape faithful to the photomask. This was further heat treated in a constant temperature bath at 150°C for 1 hour. In this case, the optimum value of the ultraviolet irradiation time (hereinafter referred to as optimum exposure time) was 4 seconds (30 mJ/cm 2 in terms of ultraviolet energy with a wavelength of 254 nm).
The optimal exposure time refers to the UV irradiation time that does not cause the photocured coating film to become rough after development due to an insufficient amount of UV irradiation, and does not cause a decrease in resolution due to an excessive amount of UV irradiation. It is something. The following tests were conducted on the photocured coating film thus produced. First, the absorption spectrum of a glass plate on which a photocured coating film was formed by the above method was measured using a similar glass plate without a coating film as a control. The light transmittance was 95% or more in the entire wavelength range of 350 to 800 nm. Next, in order to examine the adhesion of the photocured coating film on this glass plate, a cross-cut test (JIS K-5400) by tape peeling was conducted, but no peeling was observed. Further, this glass plate was placed in boiling water and left for 5 hours, and then a similar cross-cut test was performed, but no peeling was observed in this case as well. Further, the glass plate with the above-mentioned coating film was placed in toluene and heated under reflux for 5 hours, and then a cross-cut test was conducted, but no peeling was observed in this case as well. In addition, a glass plate with a photocured coating film prepared in the same manner as above was heat-treated in a gear oven at 200°C for 200 hours to examine the heat resistance of the coating film, and no cracks were observed. Further, no change in the absorption spectrum was observed. Furthermore, the glass plate on which the photocured coating film prepared in the same manner as above was irradiated with 10,000 lux light for 1,000 hours using a halogen lamp (JCD100V, 650W/B manufactured by Iwasaki Electric Co., Ltd.) to cure the coating film. When examining light resistance, no change in absorption spectrum was observed.
Krack's invention was also not recognized. Further, the pencil hardness of the photocured coating film prepared in the same manner as above was measured in accordance with JIS K-5400 and was found to be 4B. Next, the glass plate with the photocured coating prepared in the same manner as above was placed in a dyeing bath with the following composition, left at 100°C for 30 minutes, and then the glass plate was taken out, thoroughly washed with water, and dried. When we visually inspected the condition of the paint film and examined its stain resistance, we found no abnormalities such as cracks or roughness of the film, and the light transmittance of the paint film was 95% or more in the wavelength range of 400 to 800 nm. It was hot. (Dyeing bath) Acid dye (Kayanol Milling Red RS-125)
2g Glacial acetic acid 2g Distilled water 100g These results are summarized in Table 1. On the other hand, a coating film obtained by spin-coating a commercially available aqueous gelatin solution (solid content: 20%) onto a silicon wafer was heat-treated in a constant temperature bath at 150° C. for 1 hour. The gelatin film thickness at this time was 1.52 μm. Further, using the same copolymer solution as above, spin coating, heat treatment, exposure, development, rinsing, and heat treatment were performed in the same manner as above to form a two-layered coating film. When this coating film was subjected to a cross-cut test using tape peeling, no peeling was observed at all. Example 2 53 g (0.31 mol) of 3,4-epoxybutyl methacrylate instead of glycidyl methacrylate
A copolymer was produced in the same manner as in Example 1 except for the following. The number average molecular weight of this copolymer in terms of polystyrene is 185,000, and the value of MW/MN is
It was 2.45. When the composition ratio of this copolymer was determined by ultraviolet absorbance method, the molar ratio of cinnamoyl units and 3,4-epoxybutyl units was found to be
It was 23:77. Next, using 11 g of this copolymer, a copolymer solution was prepared by processing in the same manner as in Example 1, and a coating film with a thickness of 1.0 μm was formed using this in the same manner as in Example 1. Various properties of the coating film were investigated in the same manner as in Example 1. The results are shown in Table 1. Example 3 Instead of 1-methacryoloxy-2-cinnamoyloxyethane, 1-methacryoloxy-2-
(4-Memethoxy)cinnamoyloxyethane 21g
A copolymer was produced in the same manner as in Example 1 except that 320 g (4.4 mol) of tetrahydrofuran was used in place of dioxane. The number average molecular weight of this copolymer in terms of polystyrene is 182,000, and the value of MW/MN is 2.23.
It was hot. When the composition ratio of this copolymer was quantified using ultraviolet absorbance method, it was found that glycidyl units and 4-
The molar ratio with methoxycinnamoyl unit is 82:
I was 18. Next, using 10 g of this copolymer, a copolymer solution was prepared by processing in the same manner as in Example 1, and a coating film with a thickness of 1.1 μm was formed using this in the same manner as in Example 1. Various properties of the coating film were investigated in the same manner as in Example 1. The results are shown in Table 1. Example 4 After purging the inside of a 500 ml round bottom flask equipped with a stirrer, a thermometer, a cooling condenser, and a nitrogen gas inlet with nitrogen gas, 300 g (2.27 mol) of degas-distilled ethyl cellosolve acetate was added to the flask. In addition, 45g of glycidyl methacrylate
(0.32 mol), t-butyl methacrylate 10g (0.07
26 g (0.1 mol) of 1-methacryloyloxy-2-cinnamoyloxyethane and 0.17 g (0.001 mol) of azobisisobutyronitrile were charged. The reaction solution was then copolymerized by heating at 60°C for 20 hours while stirring, and then the reaction solution was cooled to room temperature and treated with methanol in 2.
The resulting copolymer was coagulated. After the coagulated copolymer was filtered off, it was dried under reduced pressure at room temperature to obtain 61 g of a white powdery copolymer. When the composition ratio of this copolymer was determined by nuclear magnetic resonance method and ultraviolet absorbance method, the molar ratio of glycidyl units, t-butyl ester units, and cinnamoyl units was 63:14:23. In addition, the converted number average molecular weight of this copolymer is 220000, which is MW/
The value of MN was 2.35. Using 11.5 g of the obtained copolymer, a copolymer solution was prepared by processing in the same manner as in Example 1, and a coating film with a thickness of 0.95 μm was formed using this in the same manner as in Example 1. Various properties of this coating film were investigated in the same manner as in Example 1. The results are shown in Table 1. Comparative Example 1 Methyl methacrylate and 1-methyl methacrylate were used in the same manner as in Example 1 except that 32 g (0.32 mol) of methyl methacrylate was used instead of glycidyl methacrylate.
A copolymer with methachlorooxy-2-cinnamoyloxyethane was produced. The number average molecular weight of this copolymer in terms of polystyrene is 140,000,
The value of MW/MN was 3.0. When the composition ratio of this copolymer was determined by ultraviolet absorbance method, the composition ratio of methoxycarbonyl units to cinnamoyl units was 78:22. Next, using 10 g of this copolymer, a copolymer solution was prepared by processing in the same manner as in Example 1, and a coating film with a thickness of 0.85 μm was formed using this in the same manner as in Example 1. Various properties of the coating film were investigated in the same manner as in Example 1. The results are shown in Table 1. Example 5 In place of t-butyl methacrylate in Example 4, 17 g of 4'-methacryloxychalcone (0.06
Same as Example 4 except that mol) was used,
67 g of a white powdery copolymer was obtained. When the composition ratio of this copolymer was determined by nuclear magnetic resonance method and ultraviolet absorbance method, the molar ratio of glycidyl unit, chalcone unit, and cinnamoyl unit was found to be
It was 64:12:24. In addition, the number average molecular weight of this copolymer in terms of polystyrene is 250,000, and MW/
The MN value was 2.3. A coating solution was prepared by dissolving 10 g of this copolymer in 90 g of cyclohexanone in the same manner as in Example 1, and various properties of this coating film were investigated. The results are shown in Table 1. Example 6 Ethylene glycol monoethyl ether monoacetate was used instead of dioxane in Example 1.
26 g of a copolymer was obtained in the same manner as in Example 1 except that 340 g (2.58 mol) was used. The composition ratio of this copolymer was determined in the same manner as in Example 1, and the molar ratio of glycidyl units to cinnamoyl units was 77:23. In addition, the number average molecular weight of this copolymer in terms of polystyrene is 180,000, which is MW/
The MN ratio was 2.40. A coating solution was prepared using this copolymer in the same manner as in Example 1, and various properties of this coating film were investigated. The results are summarized in Table 1. Example 7 Instead of azobisisobutyronitrile in Example 1, 0.24 g of benzoyl peroxide
22 g of a white powdery copolymer was obtained in the same manner as in Example 1, except that (0.001 mol) was used. When the composition ratio of this copolymer was determined in the same manner as in Example 1, the molar ratio of glycidyl units to cinnamoyl units was 77:23. Further, the number average molecular weight of this copolymer in terms of polystyrene was 180,000, and the MW/MN ratio was 2.50.
A coating solution was prepared using this copolymer in the same manner as in Example 1, and various properties of this coating film were investigated. The results are summarized in Table 1.
【表】【table】
【表】
(注) 表中の〓○〓はゴバン目試験において剥離を生
じなかつたことを示す。
(発明の効果)
本発明により得られる感光性樹脂の塗膜は、優
れた感光性能を有し、また光硬化した塗膜は、紫
外から可視の領域にわたる広い範囲の波長域にお
いて高い光線透過率を有して透明性に優れている
ほか、ガラス、金属、プラスチツク等の種々の材
料からなる基体に対して優れた接着性を示す。ま
たこの塗膜は平滑、強靭で、耐光性および耐熱性
に優れており、長期にわたる使用によつても変色
などの変質を起こすこともなく、更に、耐水性、
耐溶剤性および耐染性にも優れたもので、かつ硬
度の高いものである。このため本発明により得ら
れる感光性樹脂を用いて形成される塗膜は、各種
物品の基体表面の保護塗膜として有用であるのみ
ならず、色分離フイルターの防染保護層、表面保
護層等としても極めて好適であり、色の鮮明度や
明るさに優れて信頼性の高い色分離フイルターを
得ることができる。[Table] (Note) 〓○〓 in the table indicates that no peeling occurred in the cross-section test.
(Effects of the Invention) The photosensitive resin coating film obtained by the present invention has excellent photosensitivity, and the photocured coating film has high light transmittance in a wide wavelength range from ultraviolet to visible regions. In addition to having excellent transparency, it also exhibits excellent adhesion to substrates made of various materials such as glass, metal, and plastic. In addition, this coating film is smooth, tough, and has excellent light and heat resistance, and does not change in quality such as discoloration even after long-term use.
It has excellent solvent resistance and dye resistance, and is highly hard. Therefore, the coating film formed using the photosensitive resin obtained by the present invention is not only useful as a protective coating film on the substrate surface of various articles, but also as an anti-dyeing protective layer of color separation filters, a surface protective layer, etc. It is extremely suitable as a color separation filter, and a highly reliable color separation filter with excellent color clarity and brightness can be obtained.
Claims (1)
は水素原子、低級アルキル基または低級アルコキ
シ基、nは2〜5の整数を意味する)で表わされ
る重合性単量体と、一般式() (式中R3は水素原子または低級アルキル基、m
は1〜5の整数を意味する)で表わされる重合性
単量体とを共重合することを特徴とする感光性樹
脂の製造方法。[Claims] 1 General formula () (In the formula, R 1 is a hydrogen atom or a lower alkyl group, R 2
is a hydrogen atom, a lower alkyl group or a lower alkoxy group, n is an integer of 2 to 5), and a polymerizable monomer represented by the general formula () (In the formula, R 3 is a hydrogen atom or a lower alkyl group, m
means an integer of 1 to 5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20686584A JPS6185421A (en) | 1984-10-02 | 1984-10-02 | Production of photosensitive resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20686584A JPS6185421A (en) | 1984-10-02 | 1984-10-02 | Production of photosensitive resin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6185421A JPS6185421A (en) | 1986-05-01 |
| JPH0371446B2 true JPH0371446B2 (en) | 1991-11-13 |
Family
ID=16530316
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20686584A Granted JPS6185421A (en) | 1984-10-02 | 1984-10-02 | Production of photosensitive resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6185421A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0760265B2 (en) * | 1985-07-02 | 1995-06-28 | 三菱化学株式会社 | Photosensitive composition |
| US7847017B2 (en) | 2005-11-10 | 2010-12-07 | Nec Corporation | Photosensitive resin composition for optical waveguide formation, optical waveguide and method for producing optical waveguide |
| TWI693470B (en) * | 2015-06-30 | 2020-05-11 | 日商富士軟片股份有限公司 | Photosensitive resin composition, method for producing cured film, cured film, and liquid crystal display device |
| WO2017170182A1 (en) * | 2016-03-31 | 2017-10-05 | 株式会社Adeka | Photosensitive composition and novel compound |
-
1984
- 1984-10-02 JP JP20686584A patent/JPS6185421A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6185421A (en) | 1986-05-01 |
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