JPH0372158B2 - - Google Patents

Info

Publication number
JPH0372158B2
JPH0372158B2 JP2050485A JP2050485A JPH0372158B2 JP H0372158 B2 JPH0372158 B2 JP H0372158B2 JP 2050485 A JP2050485 A JP 2050485A JP 2050485 A JP2050485 A JP 2050485A JP H0372158 B2 JPH0372158 B2 JP H0372158B2
Authority
JP
Japan
Prior art keywords
plating
energy beam
selective
workpiece
jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2050485A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61179884A (ja
Inventor
Minoru Fujita
Minoru Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2050485A priority Critical patent/JPS61179884A/ja
Publication of JPS61179884A publication Critical patent/JPS61179884A/ja
Publication of JPH0372158B2 publication Critical patent/JPH0372158B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • ing And Chemical Polishing (AREA)
JP2050485A 1985-02-05 1985-02-05 選択的化学加工装置 Granted JPS61179884A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2050485A JPS61179884A (ja) 1985-02-05 1985-02-05 選択的化学加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2050485A JPS61179884A (ja) 1985-02-05 1985-02-05 選択的化学加工装置

Publications (2)

Publication Number Publication Date
JPS61179884A JPS61179884A (ja) 1986-08-12
JPH0372158B2 true JPH0372158B2 (fr) 1991-11-15

Family

ID=12028987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2050485A Granted JPS61179884A (ja) 1985-02-05 1985-02-05 選択的化学加工装置

Country Status (1)

Country Link
JP (1) JPS61179884A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5216633B2 (ja) * 2008-03-19 2013-06-19 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． バックグラウンドめっきを抑制する方法
EP2157209B1 (fr) * 2008-07-31 2014-10-22 Rohm and Haas Electronic Materials LLC Inhibition de placage d'arrière plan

Also Published As

Publication number Publication date
JPS61179884A (ja) 1986-08-12

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