JPS61179884A - 選択的化学加工装置 - Google Patents

選択的化学加工装置

Info

Publication number
JPS61179884A
JPS61179884A JP2050485A JP2050485A JPS61179884A JP S61179884 A JPS61179884 A JP S61179884A JP 2050485 A JP2050485 A JP 2050485A JP 2050485 A JP2050485 A JP 2050485A JP S61179884 A JPS61179884 A JP S61179884A
Authority
JP
Japan
Prior art keywords
plating
selective
energy beam
workpiece
chemical solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2050485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0372158B2 (fr
Inventor
Minoru Fujita
実 藤田
Minoru Kobayashi
実 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2050485A priority Critical patent/JPS61179884A/ja
Publication of JPS61179884A publication Critical patent/JPS61179884A/ja
Publication of JPH0372158B2 publication Critical patent/JPH0372158B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • ing And Chemical Polishing (AREA)
JP2050485A 1985-02-05 1985-02-05 選択的化学加工装置 Granted JPS61179884A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2050485A JPS61179884A (ja) 1985-02-05 1985-02-05 選択的化学加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2050485A JPS61179884A (ja) 1985-02-05 1985-02-05 選択的化学加工装置

Publications (2)

Publication Number Publication Date
JPS61179884A true JPS61179884A (ja) 1986-08-12
JPH0372158B2 JPH0372158B2 (fr) 1991-11-15

Family

ID=12028987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2050485A Granted JPS61179884A (ja) 1985-02-05 1985-02-05 選択的化学加工装置

Country Status (1)

Country Link
JP (1) JPS61179884A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009299178A (ja) * 2008-03-19 2009-12-24 Rohm & Haas Electronic Materials Llc バックグラウンドめっきを抑制する方法
JP2010070849A (ja) * 2008-07-31 2010-04-02 Rohm & Haas Electronic Materials Llc バックグラウンドめっきの抑制

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009299178A (ja) * 2008-03-19 2009-12-24 Rohm & Haas Electronic Materials Llc バックグラウンドめっきを抑制する方法
JP2010070849A (ja) * 2008-07-31 2010-04-02 Rohm & Haas Electronic Materials Llc バックグラウンドめっきの抑制

Also Published As

Publication number Publication date
JPH0372158B2 (fr) 1991-11-15

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