JPH0374662U - - Google Patents

Info

Publication number
JPH0374662U
JPH0374662U JP13415689U JP13415689U JPH0374662U JP H0374662 U JPH0374662 U JP H0374662U JP 13415689 U JP13415689 U JP 13415689U JP 13415689 U JP13415689 U JP 13415689U JP H0374662 U JPH0374662 U JP H0374662U
Authority
JP
Japan
Prior art keywords
magnet
plasma
annular
annular electrodes
cylindrical base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13415689U
Other languages
English (en)
Other versions
JPH0623571Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13415689U priority Critical patent/JPH0623571Y2/ja
Publication of JPH0374662U publication Critical patent/JPH0374662U/ja
Application granted granted Critical
Publication of JPH0623571Y2 publication Critical patent/JPH0623571Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
図は本考案ＣＶＤ装置の実施例を示し、第１図
は一実施例の縦断面図、第２図は円筒基体と多極
円筒磁石の回転を説明するための上面図、第３図
は多極円筒磁石と円筒基体との磁界分布との関係
を説明するための模式的断面図、第４図は他の実
施例の縦断面図、第５図は円筒基体の自公転を説
明するための上面図、第６図は多極円筒磁石の側
面図、第７図は更に他の実施例の縦断面図、第８
図は回転磁石の模式的断面図、第９図は回転磁石
と円筒基体との磁界分布との関係を説明するため
の上面図である。 １……反応容器、６……外側電極、７……内側
電極、８……円筒基体、２２，２２′……多極円
筒磁石、２９……回転磁石。

Claims (1)

    【実用新案登録請求の範囲】
  1. 減圧し得る反応容器内に同心的にその対向間に
    プラズマを発生させる一対の環状電極を有し、当
    該環状電極間に成膜される膜を支持する円筒基体
    を回転可能に保持すると共に、上記環状電極の中
    心又は外側の少なくとも一方に磁石を設け、この
    磁石による磁界分布を時間的に可変すべく当該磁
    石を可動自在とすることを特徴とするプラズマＣ
    ＶＤ装置。
JP13415689U 1989-11-17 1989-11-17 プラズマｃｖｄ装置 Expired - Fee Related JPH0623571Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13415689U JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13415689U JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH0374662U true JPH0374662U (ja) 1991-07-26
JPH0623571Y2 JPH0623571Y2 (ja) 1994-06-22

Family

ID=31681515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13415689U Expired - Fee Related JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0623571Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014169469A (ja) * 2013-03-01 2014-09-18 Denso Corp 真空成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014169469A (ja) * 2013-03-01 2014-09-18 Denso Corp 真空成膜装置

Also Published As

Publication number Publication date
JPH0623571Y2 (ja) 1994-06-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees