JPH0375855B2 - - Google Patents

Info

Publication number
JPH0375855B2
JPH0375855B2 JP27296788A JP27296788A JPH0375855B2 JP H0375855 B2 JPH0375855 B2 JP H0375855B2 JP 27296788 A JP27296788 A JP 27296788A JP 27296788 A JP27296788 A JP 27296788A JP H0375855 B2 JPH0375855 B2 JP H0375855B2
Authority
JP
Japan
Prior art keywords
ion beam
mask
ion
deflection electrode
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27296788A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01158450A (ja
Inventor
Takeoki Myauchi
Mikio Ppongo
Masao Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63272967A priority Critical patent/JPH01158450A/ja
Publication of JPH01158450A publication Critical patent/JPH01158450A/ja
Publication of JPH0375855B2 publication Critical patent/JPH0375855B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP63272967A 1988-10-31 1988-10-31 マスクの欠陥修正方法 Granted JPH01158450A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63272967A JPH01158450A (ja) 1988-10-31 1988-10-31 マスクの欠陥修正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63272967A JPH01158450A (ja) 1988-10-31 1988-10-31 マスクの欠陥修正方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP61213821A Division JPS6285253A (ja) 1986-09-12 1986-09-12 マスクの欠陥修正方法

Publications (2)

Publication Number Publication Date
JPH01158450A JPH01158450A (ja) 1989-06-21
JPH0375855B2 true JPH0375855B2 (mo) 1991-12-03

Family

ID=17521286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63272967A Granted JPH01158450A (ja) 1988-10-31 1988-10-31 マスクの欠陥修正方法

Country Status (1)

Country Link
JP (1) JPH01158450A (mo)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2025320A1 (fr) 2007-08-10 2009-02-18 L'Oréal Ensemble de conditionnement et d'application d'un vernis à ongles de viscosité élevée

Also Published As

Publication number Publication date
JPH01158450A (ja) 1989-06-21

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