JPH0378604A - positioning device - Google Patents
positioning deviceInfo
- Publication number
- JPH0378604A JPH0378604A JP21649089A JP21649089A JPH0378604A JP H0378604 A JPH0378604 A JP H0378604A JP 21649089 A JP21649089 A JP 21649089A JP 21649089 A JP21649089 A JP 21649089A JP H0378604 A JPH0378604 A JP H0378604A
- Authority
- JP
- Japan
- Prior art keywords
- outer diameter
- laser
- measured
- diameter measuring
- measuring machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、レンズなどの透明でしかも軸対象である物体
の位置決め装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a positioning device for a transparent and axially symmetrical object such as a lens.
[従来の技術]
従来の位置決め装置は、第2図に示すように、移動平面
と直交する方向に置かれた工TVカメラ7により測定物
3の画像を取り込み、画像処理装置8により測定物30
重心を求め、目的とする重心位置からの偏差量を基に移
動装置4により移動を行うことにより位置決めをしてい
た。[Prior Art] As shown in FIG. 2, the conventional positioning device captures an image of the object to be measured 3 using a TV camera 7 placed in a direction perpendicular to the plane of movement, and uses an image processing device 8 to capture an image of the object to be measured 3.
The center of gravity is determined, and the moving device 4 is used to move the object based on the amount of deviation from the desired center of gravity position, thereby determining the position.
[発明が解決しようとする課jW]
しかし従来の位置決め装置は、工TVカメラにより測定
物の全体像を取り込んでいたために、レンズなどの透明
な物体の検出は難しく、しかも測定物が大きい場合は分
解能が大きくなるため高精度な位置決めができなかった
。さらに、位置決めの基準となる領域を1TVカメラの
光軸方向に選択することができないために、基準面が1
TVカメラの死角になる場合や測定物が下面にい(はど
広(なっているような場合は何らかの工夫が必要であっ
た。[Issue to be solved by the invention] However, since the conventional positioning device captures the entire image of the object to be measured using a mechanical TV camera, it is difficult to detect transparent objects such as lenses, and moreover, when the object to be measured is large, it is difficult to detect transparent objects such as lenses. Because of the large resolution, highly accurate positioning was not possible. Furthermore, since it is not possible to select the area that serves as the reference for positioning in the optical axis direction of the 1TV camera, the reference plane is
In cases where there is a blind spot for the TV camera or where the object to be measured is located on the bottom (wide), some kind of ingenuity is required.
そこで本発明はこのような課題を解決するもので、レン
ズなどの透明でしかも軸対象である物体の位置決めを任
意の領域での外径基準で高精度かつ高速に行うことを目
的とする。SUMMARY OF THE INVENTION The present invention is intended to solve these problems, and aims to position a transparent and axially symmetrical object such as a lens with high precision and high speed in an arbitrary area based on the outer diameter.
[課題を解決するための手段]
上記問題を解決するために、本発明は、レーザ走査光学
系を用いて測定物の外径および基準位置からの距離を測
定するレーザ外径測定機と前記レーザ外径測定機からの
信号を入力して外径中心位置を求め、目的とする位置か
らの偏差量を出力する演算装置と前記偏差量を入力して
目的とする位置まで測定物を移動する移動装置からなる
ことを特徴とする。[Means for Solving the Problems] In order to solve the above problems, the present invention provides a laser outer diameter measuring machine that uses a laser scanning optical system to measure the outer diameter of an object and a distance from a reference position, and a laser A calculation device that inputs signals from an outer diameter measuring machine to determine the outer diameter center position and outputs the amount of deviation from the target position, and a movement that inputs the amount of deviation and moves the object to be measured to the target position. It is characterized by consisting of a device.
[実施例コ 以下に本発明の実施例を図面に基づいて説明する。[Example code] Embodiments of the present invention will be described below based on the drawings.
第1図は本発明の一実施例を示す平面図である図中符号
1はレーザ外径測定機の送光系であり、符号2は受光系
である。二系統のレーザ外径測定機により、測定物3の
外径および基準面9からの距離をそれぞれ二方向から測
定する。図中符号2は演算装置であり、レーザ外径測定
機によって二方向から測定された測定物3の外径データ
および基準面からの距離データから外径中心位置を算出
して目的とする位置からの二方向の偏差量を出力する。FIG. 1 is a plan view showing an embodiment of the present invention. In the figure, reference numeral 1 is a light transmitting system of a laser outer diameter measuring device, and reference numeral 2 is a light receiving system. Two systems of laser outer diameter measuring machines measure the outer diameter of the object 3 and the distance from the reference surface 9 from two directions, respectively. Reference numeral 2 in the figure is a calculation device, which calculates the outer diameter center position from the outer diameter data of the object 3 measured from two directions by the laser outer diameter measuring machine and the distance data from the reference plane, and moves it from the target position. Outputs the amount of deviation in two directions.
図中符号4は二次元移動装置であり、入力した二方向の
偏差量をそれぞれ零とする方向に移動する。レーザ外径
測定機はレーザ光学系を使用しているため、検出範囲が
数十ミリと広(、しかも分解能は[15ミクロン程度で
あるため外径中心位置は2〜3ミクロンの高精度で求め
ることができる。従って、精度の良い直線案内と位置検
出機構およびクローズトループ制御された駆動機構を有
する移動装置を使用することにより、数ミクロンの精度
で位置決めを行うことができる。Reference numeral 4 in the figure is a two-dimensional moving device, which moves in a direction that makes the input deviation amounts in two directions zero. Since the laser outer diameter measuring machine uses a laser optical system, the detection range is as wide as several tens of millimeters (and the resolution is about 15 microns, so the outer diameter center position can be determined with high precision of 2 to 3 microns). Therefore, by using a moving device that has a highly accurate linear guide and position detection mechanism and a closed-loop controlled drive mechanism, positioning can be performed with an accuracy of several microns.
第5図はレーザ外径測定機での測定値から外径中心位置
を求める方法を示す概略図である。周知のように、レー
ザ外径測定機はレーザ光が測定物によって遮られる時間
を測定することにより、基準面から測定物のエツジまで
の距離L1および測定物の外径L2を瞬時に測定して出
力する。演算装置は外径測定機から得られたデータL1
.L2を用いて、L 5 = L 1 + L 2 /
2という演算を行い、外径中心位置し3を算出する。FIG. 5 is a schematic diagram illustrating a method for determining the outer diameter center position from the measured values by the laser outer diameter measuring device. As is well known, a laser outer diameter measuring machine instantly measures the distance L1 from the reference plane to the edge of the object and the outer diameter L2 of the object by measuring the time that the laser beam is blocked by the object. Output. The calculation device uses data L1 obtained from the outer diameter measuring machine.
.. Using L2, L 5 = L 1 + L 2 /
Perform the calculation 2, locate the center of the outer diameter, and calculate 3.
第4図はレーザ外径測定機の受光部の出力を示す概略図
である。ここでtlは基準面から測定物のエツジまでの
距fiL1に対応し、t2は測定物の外径L2に対応す
る。測定物が透明でない場合、測定物に照射されたレー
ザ光は測定物によって完全に遮蔽されるため、図中符号
10のように受光部の出力はほとんど零になる。したが
って出力の立ち下がりと立ち上がり開時間を測定するこ
とにより、測定物の外径を測定することができる。FIG. 4 is a schematic diagram showing the output of the light receiving section of the laser outer diameter measuring device. Here, tl corresponds to the distance fiL1 from the reference plane to the edge of the object to be measured, and t2 corresponds to the outer diameter L2 of the object to be measured. If the object to be measured is not transparent, the laser beam irradiated onto the object is completely blocked by the object, so the output of the light receiving section becomes almost zero, as indicated by reference numeral 10 in the figure. Therefore, by measuring the falling and rising opening times of the output, the outer diameter of the object to be measured can be measured.
これに対して、測定物が透明な場合、レーザ光は測定物
をほとんど透過する。しかし図中符号11のようにエツ
ジ部で散乱が生じるため、エツジによる散乱量時間を測
定することにより測定物の外径を測定することができる
。On the other hand, when the object to be measured is transparent, most of the laser light passes through the object. However, since scattering occurs at the edges as indicated by reference numeral 11 in the figure, the outer diameter of the object to be measured can be measured by measuring the amount of scattering caused by the edges.
第5図は測定の一例を示す概略図である。測定物3の基
準面が測定物の特定部分12である場合、測定物または
レーザ外径測定機を調整してレーザ光が基準面に照射さ
れるようにすることにより、特定部分12を基準とした
位置決めが可能になる[発明の効果]
本発明は以上説明したように、測定物の外径中心位置を
レーザ外径測定機によって検出することにより、レンズ
のように透明で軸対象な物体の位置決めを任意の領域で
の外径基準で高精度かつ高速に行うという効果がある。FIG. 5 is a schematic diagram showing an example of measurement. When the reference surface of the measurement object 3 is a specific part 12 of the measurement object, the specific part 12 can be used as a reference by adjusting the measurement object or the laser outer diameter measuring device so that the laser beam is irradiated onto the reference surface. [Effects of the Invention] As explained above, the present invention detects the outer diameter center position of the object to be measured using a laser outer diameter measuring device, thereby enabling accurate positioning of transparent and axially symmetrical objects such as lenses. There is an effect that positioning can be performed with high precision and high speed based on the outer diameter in any region.
第1図は本発明の位置決め装置の概略図、第2図は従来
の位置決め装置の概略図、第3図はレーザ外径測定機で
の測定値から外径中心位置を求める方法を示す概略図、
第4図はレーザ外径測定機の受光部の出力を示す概略図
、第5図は測定の一例を示す概略図である。
1・・・・・・・・・レーザ外径測定機送光系1
2・・・・・・・・・レーザ外径測定機受光系3・・・
・・・・・・測定物
4・・・・・・・・・二次元移動装置
5・・・・・・・・・演算装置
6・・・・、・・・・L/ −4光
7・・・・・・・・・工TVカメラ
8・・・・・・・・・画像処理装置
9・・・・・・・・・基準面
0・・・・・・・・・測定物が透明でない場合の出力グ
ラフ
ト・・・・・・・・測定物が透明な場合の出力グラフ2
・・・・・・・・・基準面となる特定部分以上Fig. 1 is a schematic diagram of the positioning device of the present invention, Fig. 2 is a schematic diagram of a conventional positioning device, and Fig. 3 is a schematic diagram showing a method for determining the outer diameter center position from the measured value with a laser outer diameter measuring machine. ,
FIG. 4 is a schematic diagram showing the output of the light receiving section of the laser outer diameter measuring machine, and FIG. 5 is a schematic diagram showing an example of measurement. 1... Laser outer diameter measuring machine light transmitting system 1 2... Laser outer diameter measuring machine light receiving system 3...
・・・・・・Measurement object 4・・・・・・Two-dimensional movement device 5・・・・・・Calculation device 6・・・・・・・L/−4 Light 7 .........Engineer TV camera 8...Image processing device 9...Reference plane 0...Measurement object Output graph when the object is not transparent...Output graph 2 when the measurement object is transparent
・・・・・・・・・More than the specific part that becomes the reference surface
Claims (1)
置からの距離を測定するレーザ外径測定機と前記レーザ
外径測定機からの信号を入力して外径中心位置を求め、
目的とする位置からの偏差量を出力する演算装置と前記
偏差量を入力して目的とする位置まで測定物を移動する
移動装置からなることを特徴とする位置決め装置。A laser outer diameter measuring machine that measures the outer diameter of the object to be measured and the distance from the reference position using a laser scanning optical system, and inputting signals from the laser outer diameter measuring machine to determine the outer diameter center position,
A positioning device comprising: an arithmetic device that outputs the amount of deviation from a target position; and a moving device that inputs the amount of deviation and moves the object to the target position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21649089A JPH0378604A (en) | 1989-08-23 | 1989-08-23 | positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21649089A JPH0378604A (en) | 1989-08-23 | 1989-08-23 | positioning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378604A true JPH0378604A (en) | 1991-04-03 |
Family
ID=16689250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21649089A Pending JPH0378604A (en) | 1989-08-23 | 1989-08-23 | positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378604A (en) |
-
1989
- 1989-08-23 JP JP21649089A patent/JPH0378604A/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1828713B1 (en) | Thin film thickness measurement method and apparatus | |
| CA1059752A (en) | Gauging surfaces by remotely tracking multiple images | |
| EP1102087B1 (en) | Baseline length variable surface geometry measuring apparatus and range finder | |
| US5432330A (en) | Two-stage detection noncontact positioning apparatus having a first light detector with a central slit | |
| KR0149741B1 (en) | Position coordinate measuring method and position coordinate measuring device | |
| EP0316624A2 (en) | Improved imaging and inspection apparatus and method | |
| JPH02184715A (en) | Distance measuring apparatus and method | |
| US4993830A (en) | Depth and distance measuring system | |
| JPH0123041B2 (en) | ||
| KR100295477B1 (en) | Device for measuring the dimensions of objects | |
| EP0019941B1 (en) | Reduction projection aligner system | |
| JPH0378604A (en) | positioning device | |
| JPS5745406A (en) | Three-dimensional coordinate measuring device | |
| JPS6316892A (en) | Distance measuring instrument for laser beam machine | |
| WO1987002449A1 (en) | Method and apparatus for measuring the position of an object boundary | |
| SU905633A1 (en) | Device for measuring dimensional parameters of mask topology | |
| SU1523907A1 (en) | Spherometer | |
| JPH0712829A (en) | Method and device for detecting movement | |
| JPS6067807A (en) | Control method for copying motion in non-contact shape measurement | |
| JPS61189405A (en) | Non-contact shape measuring device | |
| JPS5759326A (en) | Method for detection of image-forming position and device thereof | |
| JPS5819502A (en) | Relative displacement light increase section detector | |
| JPS63252204A (en) | Distance and angle-of-inclination measuring device | |
| JPH03205503A (en) | Image position detecting method for sheet light | |
| JPH0360957A (en) | Tracer head for non-contact type digitalizer |