JPH038105A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH038105A JPH038105A JP14114689A JP14114689A JPH038105A JP H038105 A JPH038105 A JP H038105A JP 14114689 A JP14114689 A JP 14114689A JP 14114689 A JP14114689 A JP 14114689A JP H038105 A JPH038105 A JP H038105A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic core
- thereafter
- film
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明はビデオテープレコーダ、磁気ディスク記録再生
装置などに用いられる。6B性金属薄膜を磁気コアとし
た薄膜磁気ヘッド等の磁気ヘッドに係り、特にその磁気
コアの磁区構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention is used in video tape recorders, magnetic disk recording and reproducing devices, and the like. The present invention relates to a magnetic head such as a thin film magnetic head having a magnetic core made of a 6B metal thin film, and particularly to the magnetic domain structure of the magnetic core.
[従来の技術]
従来、薄膜磁気ヘッドの磁気コアの構造は、成重らの報
告した[ハードディスク装置用薄膜ヘット(応用磁気記
録研究会資料MSJ39−5)]等に報告され、第6図
に示すように、平面環流磁区構造となっていた。[Prior Art] Conventionally, the structure of the magnetic core of a thin-film magnetic head was reported in [Thin-film head for hard disk drives (Applied Magnetic Recording Research Group material MSJ39-5)] reported by Narishige et al., and is shown in Fig. 6. As shown, it had a planar circulating magnetic domain structure.
第6図において、50は磁性体(磁気コア)、51は磁
壁であ°す、52a、52bは磁化の方向を、53は磁
束伝播方向を示している。同図に示すように磁性体50
の中央部では、磁化方向52aが磁束伝播方向53に垂
直で、端部では磁化方向52bが磁束伝播方向53と平
行になっている。In FIG. 6, 50 is a magnetic body (magnetic core), 51 is a domain wall, 52a and 52b are magnetization directions, and 53 is a magnetic flux propagation direction. As shown in the figure, a magnetic body 50
At the center, the magnetization direction 52a is perpendicular to the magnetic flux propagation direction 53, and at the ends, the magnetization direction 52b is parallel to the magnetic flux propagation direction 53.
[発明が解決しようとする課題]
ところで、上記従来技術においては、磁束伝播経路の実
効的な断面積については、何等考慮がなされていなかっ
た。[Problems to be Solved by the Invention] Incidentally, in the above-mentioned prior art, no consideration was given to the effective cross-sectional area of the magnetic flux propagation path.
すなわち、第6図に示したように磁性体50が平面環流
磁区構造をなす場合、中央部では52aに示すように磁
化が磁束伝播方向53に対し、垂直となっているため、
透磁率が高く充分な磁束伝播効率を有する。しかし端部
では、52bに示すように、磁束伝播方向53に対し磁
化が平行になっているため、透磁率は非常に小さく実効
的な磁束伝播に寄与しない、このため、磁束伝播経路の
実効的な断面積は、磁性体50の断面積に比へて小さく
なる。That is, when the magnetic body 50 has a planar circulating magnetic domain structure as shown in FIG. 6, the magnetization in the central portion is perpendicular to the magnetic flux propagation direction 53 as shown at 52a.
It has high magnetic permeability and sufficient magnetic flux propagation efficiency. However, at the end, as shown at 52b, the magnetization is parallel to the magnetic flux propagation direction 53, so the magnetic permeability is very small and does not contribute to effective magnetic flux propagation. Therefore, the effective magnetic flux propagation path The cross-sectional area is smaller than the cross-sectional area of the magnetic body 50.
上述せる状況が磁気コアに発生した場合、直ちに磁気抵
抗の増大につながり、ヘッド再生効率の低下を誘発する
。When the above-mentioned situation occurs in the magnetic core, it immediately leads to an increase in magnetic resistance, leading to a decrease in head reproducing efficiency.
本発明の目的は、磁束伝播経路の実効的な断面積をヘッ
ドコア断面積に一致させ、ヘッド再生効率の向上を図れ
る磁気ヘッドを提供することにある。An object of the present invention is to provide a magnetic head in which the effective cross-sectional area of the magnetic flux propagation path matches the cross-sectional area of the head core, thereby improving head reproduction efficiency.
[課題を解決するための手段]
本発明の上記した目的は、磁気コアの磁区構造を、少く
とも作動ギャップ部において層状環流磁区構造とするこ
とによって達成される。[Means for Solving the Problems] The above objects of the present invention are achieved by making the magnetic domain structure of the magnetic core a layered circulating magnetic domain structure at least in the working gap portion.
[作用]
層状環流磁区構造を実現した際の、磁束伝播方向と磁化
の方向との関係について第5図を用いて説明する。[Function] The relationship between the magnetic flux propagation direction and the magnetization direction when the layered circulating magnetic domain structure is realized will be explained using FIG. 5.
同図に示したように、a性体30の磁束伝播方向31と
磁化の方向32a、32bとは、いづれの箇所において
も直交関係にある。従って、第6図に示した平面環流磁
区構造の場合とは異なり、場所による磁束伝播効率の差
は発生しない。なお。As shown in the figure, the magnetic flux propagation direction 31 and the magnetization directions 32a and 32b of the amorphous body 30 are orthogonal to each other at any location. Therefore, unlike the case of the planar circulation magnetic domain structure shown in FIG. 6, there is no difference in magnetic flux propagation efficiency depending on location. In addition.
同図において、33はm壁を示している。In the figure, 33 indicates an m wall.
層状環流磁区構造は、その自由エネルギーが平面環流磁
区構造の自由エネルギーに比べて小さい場合にのみ出現
する。本願発明者らは、コア磁気特性と摺動面形状に関
する理論的及び実験的な検討の結果、以下に示す条件を
満足するとき、N状環流磁区構造が再現性良く出現する
ことを見出した。A layered perfusion domain structure appears only when its free energy is small compared to the free energy of a planar perfusion domain structure. As a result of theoretical and experimental studies regarding the core magnetic properties and the shape of the sliding surface, the inventors of the present application found that when the following conditions are satisfied, an N-shaped circulating magnetic domain structure appears with good reproducibility.
但し上式において、Tは摺動面の上下コア厚の合計値、
Aはコア材の変換ステイフネス定数、 Kuは磁気異方
性定数、Wは磁気コア幅、Nは自然数である。However, in the above formula, T is the total value of the upper and lower core thickness of the sliding surface,
A is the conversion stiffness constant of the core material, Ku is the magnetic anisotropy constant, W is the magnetic core width, and N is a natural number.
[実施例]
以下、本発明の実施例を第1図〜第4図によって説明す
る。[Example] Examples of the present invention will be described below with reference to FIGS. 1 to 4.
第1図は薄膜磁気ヘッドの磁気コアと薄膜コイルを示す
斜視説明図、第2図は摺動面の要部正面図である。FIG. 1 is a perspective explanatory view showing a magnetic core and a thin film coil of a thin film magnetic head, and FIG. 2 is a front view of a main part of a sliding surface.
第1図において、1は下部磁気コア、2は上部磁気コア
で、該実施例においては、両者1,2はCo系非晶質磁
性合金の一つであるCo−Nb−Zr膜(飽和磁束密度
: 0.95T )よりなっており、スパッタリング等
の公知の薄膜形成技術とホトリソ技術によって成膜・整
形されている。また、第2図に示すトラック幅Wを48
μmとし、下部磁気コア1の厚みT4を35μm、上部
磁気コア2の厚みT2を20μmとし、合計コア厚Tを
55μmに設定されている。なお、第1図において、3
1は磁束伝播方向を、32a、32bは磁化の方向を、
33は磁壁を示している。In FIG. 1, 1 is a lower magnetic core, 2 is an upper magnetic core, and in this embodiment, both 1 and 2 are Co-Nb-Zr films (saturated magnetic flux Density: 0.95T), and is formed and shaped by known thin film forming techniques such as sputtering and photolithography. Also, the track width W shown in FIG. 2 is 48
The thickness T4 of the lower magnetic core 1 is 35 μm, the thickness T2 of the upper magnetic core 2 is 20 μm, and the total core thickness T is set to 55 μm. In addition, in Figure 1, 3
1 indicates the direction of magnetic flux propagation, 32a and 32b indicate the direction of magnetization,
33 indicates a domain wall.
上記下部磁気コア1は、例えば、非磁性セラミックス材
よりなる基板3に設けた凹部内に成膜された後、所定形
状に整形して作成される。この後。The lower magnetic core 1 is produced, for example, by forming a film in a recess provided in a substrate 3 made of a non-magnetic ceramic material, and then shaping the film into a predetermined shape. After this.
絶縁膜4を形成し、該絶縁膜4上にヘッド駆動用の薄膜
コイル5を形成した後、薄膜コイル5上に再び絶縁膜4
を形成する。次に、絶縁膜4の所定部位にスルーホール
を形成した後、下部磁気コア1のフロント部分に非磁性
材(例えばCr、或いはSiO2等の非磁性絶縁材)に
よってギャップ規制膜を形成する。然る後、上部磁気コ
ア2を形成して、下部磁気コア1と上部磁気コア2とを
、フロント部ではギャップ規制薄膜を介して接合して作
動ギャップ6を形成すると共に、リア部では両者1,2
を直接接続する。After forming the insulating film 4 and forming the thin film coil 5 for driving the head on the insulating film 4, the insulating film 4 is again formed on the thin film coil 5.
form. Next, after forming a through hole in a predetermined portion of the insulating film 4, a gap regulating film is formed on the front portion of the lower magnetic core 1 using a nonmagnetic material (for example, a nonmagnetic insulating material such as Cr or SiO2). After that, the upper magnetic core 2 is formed, and the lower magnetic core 1 and the upper magnetic core 2 are joined at the front part through a gap regulating thin film to form an operating gap 6, and at the rear part, both 1 and 1 are joined. ,2
Connect directly.
その後、異方性定数及び容易軸制御のために、磁場中(
磁界:11KOe)で熱処理(400℃。Then, for anisotropy constant and easy axis control, in a magnetic field (
Heat treatment (magnetic field: 11 KOe) at 400°C.
30分)を施こし、セラミックス薄膜により保護膜7を
形成し、最後に組立加工を施こして簿膜磁気ヘッドとし
て完成される。30 minutes), a protective film 7 is formed using a ceramic thin film, and finally an assembly process is performed to complete the film magnetic head.
上記手法で作成した第1,2図の薄膜磁気ヘツドの磁区
構造をビッタ−法及びマイクロカー効果を用いて観察し
た結果、層状環流磁区構造が出現していることが確認さ
れた。As a result of observing the magnetic domain structure of the thin film magnetic head shown in FIGS. 1 and 2 prepared by the above method using the Bitter method and the microcar effect, it was confirmed that a layered circulating magnetic domain structure had appeared.
第3図に本発明の上述した実施例による層状環流磁区構
造をとる薄膜磁気ヘッドと、従来の平面環流磁区構造を
とる薄膜磁気ヘッドの再生出力の周波数特性を示す、同
図において、・印でプロットした特性線Aが本発明の実
施例による薄膜ヘッドを、また1印でプロットした特性
線Bが従来例を示している。同図から明らかなように、
本発明により成る層状環流磁区構造の薄膜磁気ヘッドの
再生出力は、従来の平面環流磁区構造のものに比べて2
〜4dB改善されている。FIG. 3 shows the frequency characteristics of the reproduction output of the thin film magnetic head having a layered perfusion magnetic domain structure according to the above-described embodiment of the present invention and the conventional thin film magnetic head having a planar perfusion magnetic domain structure. The plotted characteristic line A shows the thin film head according to the embodiment of the present invention, and the characteristic line B plotted with one mark shows the conventional example. As is clear from the figure,
The reproduction output of the thin film magnetic head with the layered circulating magnetic domain structure according to the present invention is 2 times higher than that of the conventional planar circulating magnetic domain structure.
It is improved by ~4dB.
第4図に、コア幅Wを一定にし、異方性定数とコア膜厚
を変化させた場合の5は区構造を示す。In FIG. 4, reference numeral 5 shows a ward structure when the core width W is constant and the anisotropy constant and core film thickness are varied.
Oは平面環流磁区構造、・は層状環流磁区構造が出現し
た条件を示した0点線は、Ku、W、Tの前述した関係
式(1)により算出したものである。The 0 dotted line indicating the conditions under which O indicates a planar circulating magnetic domain structure and . indicates a condition under which a layered circulating magnetic domain structure appears, is calculated using the above-mentioned relational expression (1) for Ku, W, and T.
同図から明らかなように、前記関係式(1)の条件を満
足すれば1層状環流磁区構造が得られることは明らかで
ある。なお、異方性磁界は、磁場中熱処理温度により制
御した。As is clear from the figure, it is clear that a single-layer circulating magnetic domain structure can be obtained if the condition of relational expression (1) is satisfied. Note that the anisotropic magnetic field was controlled by the heat treatment temperature in the magnetic field.
なお、上述した実施例においては、磁気コア全体を層状
環流磁区構造としたが、磁気コアの幅狭のギャップ形成
部(フロント部)のみを層状環流磁区構造としても同等
の効果が期待できる。さらにまた、即動コイルを薄膜コ
イルとした所謂薄膜磁気ヘッド以外にも、非磁性もしく
は磁性体よりなるコア基体に、金属磁性薄膜をコア主体
部として被着してなるタイプの磁気ヘッドにも本発明は
適用可能である。In the above embodiments, the entire magnetic core has a layered circulating magnetic domain structure, but the same effect can be expected even if only the narrow gap forming part (front part) of the magnetic core has a layered circulating magnetic domain structure. Furthermore, in addition to so-called thin-film magnetic heads in which the instant-acting coil is a thin-film coil, there are also magnetic heads of a type in which a metal magnetic thin film is coated as the core main body on a core base made of a non-magnetic or magnetic material. The invention is applicable.
[発明の効果]
以上のように本発明によれば、磁束伝播経路の実効的な
断面積が拡大され、ヘッド再生効率及び記録効率が向上
できる。[Effects of the Invention] As described above, according to the present invention, the effective cross-sectional area of the magnetic flux propagation path is expanded, and head reproducing efficiency and recording efficiency can be improved.
第1図及び第2図は本発明の実施例による薄膜磁気ヘッ
ドに係り、第1図は簡略化した要部斜視図、第2図は摺
動面を示す要部正面図、第3図は本発明による薄膜磁気
ヘッドと従来の1膜磁気へラドどの再生出力の周波数特
性を示す説明図、第4図はコア幅を一定にしコア膜厚と
異方性定数を変化させた時の磁区構造の現出条件を示す
説明図。
第5図は層状環流磁区構造を示す説明図、第6図は平面
環流磁区構造を示す説明図である。
1・・・・・下部磁気コア、2・・・・上部磁気コア、
3・基板、4・・・・・・絶縁膜、5・・・・・・薄膜
コイル、6・・作動ギャップ、31・・・・磁束伝播方
向、32a、32b・・・・・・磁化の方向、33・・
・・・磁壁、W・・・・・トラック幅、T・・・・・・
コア合計厚み。
第1 図
32σ
5:i頑M)L
6:イ繁動キ゛セツア
31:tsJ臥東イ云オー17!r句
、52a、32b:石区イヒの方向
33:万態5【
第2図
1
第3@
JIA遁〕交
iMHz)
第4@
層厚(&、を享位)
15図
第6図1 and 2 relate to a thin film magnetic head according to an embodiment of the present invention, in which FIG. 1 is a simplified perspective view of the main part, FIG. 2 is a front view of the main part showing the sliding surface, and FIG. 3 is a main part front view showing the sliding surface. An explanatory diagram showing the frequency characteristics of the reproduction output of the thin-film magnetic head according to the present invention and the conventional single-film magnetic head. Figure 4 shows the magnetic domain structure when the core width is constant and the core film thickness and anisotropy constant are varied. An explanatory diagram showing appearance conditions. FIG. 5 is an explanatory diagram showing a layered circulating magnetic domain structure, and FIG. 6 is an explanatory diagram showing a planar circulating magnetic domain structure. 1...Lower magnetic core, 2...Upper magnetic core,
3. Substrate, 4... Insulating film, 5... Thin film coil, 6... Operating gap, 31... Magnetic flux propagation direction, 32a, 32b... Magnetization Direction, 33...
...Domain wall, W...Track width, T...
Total core thickness. 1st Figure 32 σ 5: i hard M) L 6: i busy motion setup 31: tsJ 臥東Iunoh 17! r phrase, 52a, 32b: Sekigu Ihi direction 33: Bansho 5 [Fig. 2 1 Fig. 3 @ JIAton] Exchange iMHz) No. 4 @ Layer thickness (&, is placed) Fig. 15 Fig. 6
Claims (1)
において、前記磁気コアの磁区構造が少くとも作動ギャ
ップ部において、層状環流磁区構造となつていることを
特徴とする磁気ヘッド。 2、請求項1記載において、前記磁気コアの膜厚をT、
摺動面での磁気コア幅をW、磁気コアの交換ステイフネ
ス定数をA、磁気異方性定数をKu、Nを自然数とした
時、磁気コアの膜厚Tが、 T■2N(2W√[A/Ku])^1^/^2の関係に
あることを特徴とする磁気ヘッド。[Scope of Claims] 1. A magnetic head equipped with a magnetic core made of a magnetic metal thin film, characterized in that the magnetic domain structure of the magnetic core is a layered circulating magnetic domain structure at least in the working gap portion. head. 2. In claim 1, the film thickness of the magnetic core is T,
When the width of the magnetic core on the sliding surface is W, the exchange stiffness constant of the magnetic core is A, the magnetic anisotropy constant is Ku, and N is a natural number, the film thickness T of the magnetic core is T■2N(2W√[ A magnetic head characterized by a relationship of A/Ku])^1^/^2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14114689A JPH038105A (en) | 1989-06-05 | 1989-06-05 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14114689A JPH038105A (en) | 1989-06-05 | 1989-06-05 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038105A true JPH038105A (en) | 1991-01-16 |
Family
ID=15285227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14114689A Pending JPH038105A (en) | 1989-06-05 | 1989-06-05 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038105A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5406434A (en) * | 1990-11-06 | 1995-04-11 | Seagate Technology, Inc. | Thin film head with contoured pole face edges for undershoot reduction |
| US6683748B2 (en) * | 2000-11-24 | 2004-01-27 | Samsung Electronics Co., Ltd. | Vertical writing type magnetic head |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6252710A (en) * | 1985-08-30 | 1987-03-07 | Nec Corp | Thin film magnetic head |
-
1989
- 1989-06-05 JP JP14114689A patent/JPH038105A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6252710A (en) * | 1985-08-30 | 1987-03-07 | Nec Corp | Thin film magnetic head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5406434A (en) * | 1990-11-06 | 1995-04-11 | Seagate Technology, Inc. | Thin film head with contoured pole face edges for undershoot reduction |
| US6683748B2 (en) * | 2000-11-24 | 2004-01-27 | Samsung Electronics Co., Ltd. | Vertical writing type magnetic head |
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