JPH0383945U - - Google Patents

Info

Publication number
JPH0383945U
JPH0383945U JP1989145286U JP14528689U JPH0383945U JP H0383945 U JPH0383945 U JP H0383945U JP 1989145286 U JP1989145286 U JP 1989145286U JP 14528689 U JP14528689 U JP 14528689U JP H0383945 U JPH0383945 U JP H0383945U
Authority
JP
Japan
Prior art keywords
substrate
hole
stage
positioning device
camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1989145286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989145286U priority Critical patent/JPH0383945U/ja
Publication of JPH0383945U publication Critical patent/JPH0383945U/ja
Pending legal-status Critical Current

Links

JP1989145286U 1989-12-16 1989-12-16 Pending JPH0383945U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989145286U JPH0383945U (fr) 1989-12-16 1989-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989145286U JPH0383945U (fr) 1989-12-16 1989-12-16

Publications (1)

Publication Number Publication Date
JPH0383945U true JPH0383945U (fr) 1991-08-26

Family

ID=31691933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989145286U Pending JPH0383945U (fr) 1989-12-16 1989-12-16

Country Status (1)

Country Link
JP (1) JPH0383945U (fr)

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