JPH038426U - - Google Patents
Info
- Publication number
- JPH038426U JPH038426U JP6771689U JP6771689U JPH038426U JP H038426 U JPH038426 U JP H038426U JP 6771689 U JP6771689 U JP 6771689U JP 6771689 U JP6771689 U JP 6771689U JP H038426 U JPH038426 U JP H038426U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- reaction
- heater
- defining
- curved surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Description
第１図は本考案の一実施例の要部を示す断面図
、第２図は縦型ＣＶＤ装置の概略を示す説明図、
第３図は従来例を示す部分図である。
１はヒータ、２は反応管、２ａは上端部、２ｂ
は円筒部、５は仕切筒、６は反応ガス、９はウエ
ーハ、１０はボートを示す。
FIG. 1 is a cross-sectional view showing the main parts of an embodiment of the present invention, FIG. 2 is an explanatory view schematically showing a vertical CVD apparatus,
FIG. 3 is a partial diagram showing a conventional example. 1 is the heater, 2 is the reaction tube, 2a is the upper end, 2b
5 is a cylindrical portion, 5 is a partition tube, 6 is a reaction gas, 9 is a wafer, and 10 is a boat.
Claims (1)
れ、ヒータ内部に反応室を画成する反応管に於い
て、該反応管の上端部を偏平な曲面により形成し
たことを特徴とする縦型ＣＶＤ装置の反応管。 A vertical type CVD apparatus characterized in that, in a reaction tube disposed inside a heater of a reaction furnace and defining a reaction chamber inside the heater, the upper end of the reaction tube is formed with a flat curved surface. Reaction tube of CVD equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067716U JP2541813Y2 (en) | 1989-06-09 | 1989-06-09 | Reaction tube of vertical CVD equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989067716U JP2541813Y2 (en) | 1989-06-09 | 1989-06-09 | Reaction tube of vertical CVD equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH038426U true JPH038426U (en) | 1991-01-28 |
| JP2541813Y2 JP2541813Y2 (en) | 1997-07-23 |
Family
ID=31601535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989067716U Expired - Lifetime JP2541813Y2 (en) | 1989-06-09 | 1989-06-09 | Reaction tube of vertical CVD equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2541813Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62201927U (en) * | 1986-06-13 | 1987-12-23 |
-
1989
- 1989-06-09 JP JP1989067716U patent/JP2541813Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62201927U (en) * | 1986-06-13 | 1987-12-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2541813Y2 (en) | 1997-07-23 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |