JPH0330434U - - Google Patents
Info
- Publication number
- JPH0330434U JPH0330434U JP8988089U JP8988089U JPH0330434U JP H0330434 U JPH0330434 U JP H0330434U JP 8988089 U JP8988089 U JP 8988089U JP 8988089 U JP8988089 U JP 8988089U JP H0330434 U JPH0330434 U JP H0330434U
- Authority
- JP
- Japan
- Prior art keywords
- furnace body
- heater element
- rod
- mounting
- along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
Description
第１図は本考案の一実施例を示す炉体の断面図
、第２図は横型拡散装置の全体斜視図、第３図は
従来例を示す炉体の断面図、第４図はヒータエレ
メントの取付構造を示すもので第３図のＡ−Ａ矢
視図である。
４……炉体、５……ヒータエレメント、１１…
…外筒、１２……内筒、１３……反応管、１６…
…保持片、２１……棒状絶縁体を示す。
Fig. 1 is a sectional view of a furnace body showing an embodiment of the present invention, Fig. 2 is an overall perspective view of a horizontal diffusion device, Fig. 3 is a sectional view of a furnace body showing a conventional example, and Fig. 4 is a heater element. FIG. 3 is a view taken along the line A-A in FIG. 3, showing the mounting structure. 4... Furnace body, 5... Heater element, 11...
...Outer tube, 12...Inner tube, 13...Reaction tube, 16...
...Holding piece, 21... shows a rod-shaped insulator.
Claims (1)
タエレメントの取付構造に於いて、ヒータエレメ
ントを円周に沿つて複数点を保持片により炉体側
に支持させると共に支持具と保持片との間及びヒ
ータエレメントと炉体との間にセラミツク繊維を
布状とし更に棒状に形成した棒状絶縁体を介在さ
せたことを特徴とする半導体装置に於けるヒータ
エレメント取付構造。 In the mounting structure of the heater element, which is arranged concentrically with the furnace body along the wall surface of the furnace body, the heater element is supported on the furnace body side at multiple points along the circumference by holding pieces, and a support and a holding piece are used. 1. A structure for mounting a heater element in a semiconductor device, characterized in that a rod-shaped insulator made of cloth-like ceramic fiber and further formed into a rod-shape is interposed between the heater element and the furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8988089U JPH0330434U (en) | 1989-07-31 | 1989-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8988089U JPH0330434U (en) | 1989-07-31 | 1989-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0330434U true JPH0330434U (en) | 1991-03-26 |
Family
ID=31639433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8988089U Pending JPH0330434U (en) | 1989-07-31 | 1989-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330434U (en) |
-
1989
- 1989-07-31 JP JP8988089U patent/JPH0330434U/ja active Pending