JPH0385462U - - Google Patents
Info
- Publication number
- JPH0385462U JPH0385462U JP14504889U JP14504889U JPH0385462U JP H0385462 U JPH0385462 U JP H0385462U JP 14504889 U JP14504889 U JP 14504889U JP 14504889 U JP14504889 U JP 14504889U JP H0385462 U JPH0385462 U JP H0385462U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- hearth
- support frame
- side wall
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000002826 coolant Substances 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14504889U JPH0385462U (de) | 1989-12-15 | 1989-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14504889U JPH0385462U (de) | 1989-12-15 | 1989-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0385462U true JPH0385462U (de) | 1991-08-29 |
Family
ID=31691706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14504889U Pending JPH0385462U (de) | 1989-12-15 | 1989-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0385462U (de) |
-
1989
- 1989-12-15 JP JP14504889U patent/JPH0385462U/ja active Pending
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