JPH0388331U - - Google Patents
Info
- Publication number
- JPH0388331U JPH0388331U JP15093089U JP15093089U JPH0388331U JP H0388331 U JPH0388331 U JP H0388331U JP 15093089 U JP15093089 U JP 15093089U JP 15093089 U JP15093089 U JP 15093089U JP H0388331 U JPH0388331 U JP H0388331U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- sliding
- fixing plate
- liquid phase
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 210000004349 growth plate Anatomy 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は、本考案になる液相エピタキシヤル成
長装置の断面図、第２図〜第５図は、第１図の装
置の摺動工程を示す断面図である。
１０……固定板、１１……基板、１２……溝、
１３……第１の摺動板、１４，１５……透孔、１
６……第２の摺動板、１７……ロート状透孔。
FIG. 1 is a sectional view of a liquid phase epitaxial growth apparatus according to the present invention, and FIGS. 2 to 5 are sectional views showing the sliding process of the apparatus of FIG. 1. 10...Fixing plate, 11...Substrate, 12...Groove,
13...First sliding plate, 14,15...Through hole, 1
6...Second sliding plate, 17...Funnel-shaped through hole.
補正 平２．３．２９
図面の簡単な説明を次のように補正する。
明細書９頁第２０行の「断面図である。」を「
断面図であり、第６図は、スライデイング法によ
つて二層の成長を行なうための装置の断面図であ
る。」と補正する。Amendment 2.3.29. The brief description of the drawing is amended as follows. “It is a cross-sectional view” on page 9, line 20 of the specification is changed to “
FIG. 6 is a cross-sectional view of an apparatus for growing two layers by a sliding method. ” he corrected.
Claims (1)
定板と、その内部に複数の透孔を設け、前記固定
板上を摺動する第１の摺動板と、その内部に液相
成長に供される溶液を収容する複数のロート状透
孔を設け、前記第１の摺動板上を摺動する第２の
摺動板とを備えてなる液相エピタキシヤル成長装
置。 A fixing plate in which a substrate is placed in a groove formed in a predetermined size, a first sliding plate having a plurality of through holes therein and sliding on the fixing plate, and a liquid phase growth plate in the fixing plate; A liquid phase epitaxial growth apparatus comprising a plurality of funnel-shaped through holes for accommodating a solution to be applied, and a second sliding plate that slides on the first sliding plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15093089U JPH0388331U (en) | 1989-12-26 | 1989-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15093089U JPH0388331U (en) | 1989-12-26 | 1989-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388331U true JPH0388331U (en) | 1991-09-10 |
Family
ID=31697261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15093089U Pending JPH0388331U (en) | 1989-12-26 | 1989-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388331U (en) |
-
1989
- 1989-12-26 JP JP15093089U patent/JPH0388331U/ja active Pending
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