JPH0388345U - - Google Patents
Info
- Publication number
- JPH0388345U JPH0388345U JP14832789U JP14832789U JPH0388345U JP H0388345 U JPH0388345 U JP H0388345U JP 14832789 U JP14832789 U JP 14832789U JP 14832789 U JP14832789 U JP 14832789U JP H0388345 U JPH0388345 U JP H0388345U
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- light receiving
- dicing
- dicing blade
- emitting element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 4
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
第１図は本考案の実施例１を示す要部の正面図
、第２図は第１図のダイシングブレードの部分拡
大側面図である。第３図は本考案の実施例２を示
す要部の正面図である。第４図は従来のダイシン
グ装置の要部の正面図、第５図は第４図のダイシ
ングブレードの部分拡大側面図である。
１……ダイシングブレード、７，８，９……投
光素子、１０，１１，１２……受光素子、１４，
１５，１６……投光素子、１７，１８，１９……
受光素子、Ａ１〜Ａ５……検査エリア。
FIG. 1 is a front view of essential parts showing a first embodiment of the present invention, and FIG. 2 is a partially enlarged side view of the dicing blade shown in FIG. 1. FIG. 3 is a front view of main parts showing a second embodiment of the present invention. FIG. 4 is a front view of essential parts of a conventional dicing device, and FIG. 5 is a partially enlarged side view of the dicing blade shown in FIG. 1... Dicing blade, 7, 8, 9... Light emitting element, 10, 11, 12... Light receiving element, 14,
15, 16... Light projecting element, 17, 18, 19...
Light receiving element, A1 to A5 ...Inspection area.
Claims (1)
その両側方に対向させて配置した複数対の投光素
子と受光素子で光学的に行うようにしたものであ
つて、 少なくとも一対の投光素子と受光素子をダイシ
ングブレードの側面に対して所定の傾斜角で対向
するように配置して、この投光素子と受光素子に
よるダイシングブレードの検査エリアを他の投光
素子と受光素子の検査エリアと部分的に重なるよ
うにしたことを特徴とするダイシング装置。[Scope of claim for utility model registration] Inspection of the shape of the cutting edge of a dicing blade,
The dicing is performed optically using a plurality of pairs of light emitting elements and light receiving elements arranged facing each other on both sides of the dicing blade. A dicing device characterized in that the light emitting element and the light receiving element are arranged so as to face each other at an inclined angle so that the inspection area of the dicing blade formed by the light emitting element and the light receiving element partially overlaps with the inspection area of the other light emitting element and light receiving element. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14832789U JPH0388345U (en) | 1989-12-22 | 1989-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14832789U JPH0388345U (en) | 1989-12-22 | 1989-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388345U true JPH0388345U (en) | 1991-09-10 |
Family
ID=31694784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14832789U Pending JPH0388345U (en) | 1989-12-22 | 1989-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388345U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006287111A (en) * | 2005-04-04 | 2006-10-19 | Disco Abrasive Syst Ltd | Cutting apparatus and blade state detection method |
| JP2006310396A (en) * | 2005-04-26 | 2006-11-09 | Tokyo Seimitsu Co Ltd | Blade breakage detector |
| JP2009083010A (en) * | 2007-09-28 | 2009-04-23 | Disco Abrasive Syst Ltd | Cutting blade detection mechanism of cutting equipment |
| JP2009083072A (en) * | 2007-10-02 | 2009-04-23 | Disco Abrasive Syst Ltd | Cutting blade detection mechanism of cutting equipment |
| JP2010141009A (en) * | 2008-12-10 | 2010-06-24 | Disco Abrasive Syst Ltd | Cutting blade detecting mechanism of cutting device |
| JP2016007673A (en) * | 2014-06-25 | 2016-01-18 | 株式会社ディスコ | Cutting equipment |
| JP2020028947A (en) * | 2018-08-22 | 2020-02-27 | Tdk株式会社 | Cutting equipment |
| JP2023148470A (en) * | 2022-03-30 | 2023-10-13 | 株式会社東京精密 | Blade damage detection device |
-
1989
- 1989-12-22 JP JP14832789U patent/JPH0388345U/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006287111A (en) * | 2005-04-04 | 2006-10-19 | Disco Abrasive Syst Ltd | Cutting apparatus and blade state detection method |
| JP2006310396A (en) * | 2005-04-26 | 2006-11-09 | Tokyo Seimitsu Co Ltd | Blade breakage detector |
| JP2009083010A (en) * | 2007-09-28 | 2009-04-23 | Disco Abrasive Syst Ltd | Cutting blade detection mechanism of cutting equipment |
| JP2009083072A (en) * | 2007-10-02 | 2009-04-23 | Disco Abrasive Syst Ltd | Cutting blade detection mechanism of cutting equipment |
| JP2010141009A (en) * | 2008-12-10 | 2010-06-24 | Disco Abrasive Syst Ltd | Cutting blade detecting mechanism of cutting device |
| JP2016007673A (en) * | 2014-06-25 | 2016-01-18 | 株式会社ディスコ | Cutting equipment |
| JP2020028947A (en) * | 2018-08-22 | 2020-02-27 | Tdk株式会社 | Cutting equipment |
| WO2020040142A1 (en) * | 2018-08-22 | 2020-02-27 | Tdk株式会社 | Cutting device, sensor unit, and detection method |
| JP2023148470A (en) * | 2022-03-30 | 2023-10-13 | 株式会社東京精密 | Blade damage detection device |