JPH0392028U - - Google Patents
Info
- Publication number
- JPH0392028U JPH0392028U JP1990000202U JP20290U JPH0392028U JP H0392028 U JPH0392028 U JP H0392028U JP 1990000202 U JP1990000202 U JP 1990000202U JP 20290 U JP20290 U JP 20290U JP H0392028 U JPH0392028 U JP H0392028U
- Authority
- JP
- Japan
- Prior art keywords
- exposure apparatus
- projection
- detector
- lens
- exposed object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990000202U JPH0392028U (da) | 1990-01-08 | 1990-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990000202U JPH0392028U (da) | 1990-01-08 | 1990-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392028U true JPH0392028U (da) | 1991-09-19 |
Family
ID=31504170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990000202U Pending JPH0392028U (da) | 1990-01-08 | 1990-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392028U (da) |
-
1990
- 1990-01-08 JP JP1990000202U patent/JPH0392028U/ja active Pending
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