JPH039932Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial field of application] The present invention uses X-ray fluoroscopy to detect reference marks for drilling provided on the inner layer of a multilayer board that constitutes a printed circuit. This relates to a reference hole drilling device for multilayer substrates using X-rays, which drills holes at detected predetermined positions, and when not used as a drilling machine, can be used as an X-ray fluoroscopy device for inspecting inner layers. be.

[Conventional technology]

Conventionally, in order to drill holes in a multilayer board made by laminating a plurality of boards on which printed circuits are formed, the following steps are generally performed.

First, as shown in Figure 6, from the top, there is a double-sided copper-clad laminate P ₁ whose top surface is unprinted and a printed circuit is formed on the bottom surface, a prepreg R ₁ , and a double-sided copper-clad laminate with printed circuits formed on both the top and bottom surfaces. Laminate r ₂ , prepreg r ₂ , and double-sided copper-clad laminate p ₃ with a printed circuit formed on the bottom surface and unprinted on the top surface are arranged in this order, and this is combined with mirror plate m' and release film f. Then, as shown in Fig. 7, after sandwiching the jig templates between the upper and lower jig templates j ₁ and J ₂ , the jig templates are sandwiched between the hot plates Hp ₁ and Hp ₂ from above and below and heated. Apply pressure and press mold.

As a result, one integrated multilayer substrate P as shown in FIG. 8 is formed.

In this case, an adhesive is applied between each of the above-mentioned laminates constituting the multilayer board and the pre-reg, and a piece of film a is sandwiched between the reference hole mark b, as shown in Fig. 7. Press molding is performed by applying heat and pressure using a hot press machine.

Then, as shown in FIG. 8, the integrated multilayer board P is bored out with a counterbore machine to make the reference hole mark portion larger, exposing the reference hole mark b provided on the copper-clad laminate. A hole is drilled at the reference hole mark position using a visual drilling machine.

[Problem that the invention attempts to solve]

However, in order to obtain a multilayer board with the above-mentioned reference hole marks, an adhesive is interposed between the laminated plates, and this is sandwiched from above and below with a jig template and heated. Pressure is applied, but if adhesive is also applied between the laminated plates at the reference hole mark area, the reference hole mark area will not be visible even if it is countersunk with a counterboring machine. Therefore, even between laminated boards, no adhesive is applied to the reference hole mark area,
By interposing a release film instead, the reference hole mark is exposed when the hole is seated, making it easier to drill the hole.

However, interposing a release film at only a part of the reference hole mark position makes laminating operations troublesome and poor workability, and the exposed surface of the reference hole mark is not polished. There is a problem that the copper foil mark cannot be clearly seen.

Therefore, an X-ray generator consisting of an X-ray generation power supply 10, an X-ray source 3, and an
When a fiducial mark hidden inside a multilayer substrate is detected using X-ray radiation using a fluoroscope,
The conventional process can be omitted.

That is, the principle of the above-mentioned X-ray fluoroscope is based on the fifth principle.
As shown in the figure, the X-rays emitted to the substance to be inspected pass through a scintillator (SCINTILLATOR) 4 ₁ , and then a fiber lens (FIBEROPTICS) 4
₂ , → PHOTOCATHODE 4
₃ , the light quantum is converted into an electron, → MICROCHANNEL PLATE 4
An electron passes through ₄ → PHOSPHOR 4 At ₅ the electron converts into a photon, →
Visible through FIBEROPTICS 4 ₆ as →VISIBLELIGHT.

However, when this X-ray is used, the exterior of the device becomes large in order to prevent leakage of the X-rays emitted from the X-ray emitting section 30 toward the X-ray receiving section 41, and when operated by the operator, However, due to the indirect operation for safety reasons, the workability was extremely poor.

[Means for solving problems]

The present invention eliminates the conventional step of interposing a release film between the laminated plates for the reference hole mark portion and the counterbore step by machine, and uses X-rays instead. By improving the conventional X-ray leakage prevention measures and effectively blocking X-ray leakage with a small exterior, safety is increased.In addition, the drilling machine automatically moves to the hole-marking position of the multilayer board. It is an object of the present invention to enable the drilling process to be performed by moving the hole and correcting the deviation of the reference hole position while visually observing it with a viewing unit or a TV monitor.

In order to achieve the above object, the present invention provides an apparatus for drilling reference holes in a multilayer substrate using X-rays. An X-ray source in a space between the plane of the main body frame, an X-ray emitter directly above the base facing the X-ray source, and a drill unit placed directly above the base with a predetermined distance from the X-ray emitter. is attached to the die plate so as to be horizontally movable, and a clamp that can move up and down on the base surface and fixes the multilayer substrate body so as not to move is provided with its base on the plane of the main body frame via a stay and a cylinder. It is something that

[Effect]

Next, the effects based on the above means are as follows.
An X-ray source and an X-ray emitter placed above and below the base on which the multilayer substrate to be drilled is mounted are placed with the X-ray power turned off to prevent leakage of X-rays. While horizontally moving, the multilayer substrate body is moved on the base to detect the reference hole mark position, and then the multilayer substrate body is fixed with a clamp, and the X-ray source device and the X-ray emitter are integrally and in the same stroke. After the moving drill unit is moved to the position of the reference hole mark, it is stopped, and the drill head is lowered to the position of the reference hole mark of the multilayer substrate placed on the base, and the hole is drilled with the drill.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a side view of an apparatus for making reference holes in a multilayer substrate using X-rays according to the present invention, FIG. 2 is a side view of the X-ray detection portion thereof, and FIG. 3 is a plan view.

In the figure, 1 is the main body frame, 2 is a base provided horizontally at a constant height on the plane 1 ₁ of the main body frame, and 3 is an X-ray machine placed horizontally in the space S between the plane 1 ₁ of the main body frame and the base 2. It is built in a rectangular tubular case, has an X-ray emitting part 30 facing upward on the head side, and has a base 32 attached to a die plate to be described later, and the head 31 is connected to the rail 33 and the flat surface 11 of the main body frame. Rail receiver 3 installed in
It is supported through 4.

4 is an X placed vertically just above base 2
A radiation emitter is shown, which has an X-ray receiver 41 at one end and a horizontal viewing section 42 at the other end, with the X-ray receiver 41 directed toward the base surface, and the radiation of the X-ray source. This is attached to the die plate via a horizontal arm 43 and a reinforcing stay 44. It should be noted that a television camera T may be incorporated in place of the above-mentioned viewing section 42, and a cathode ray tube type monitor M may be provided to receive the television camera T so as to allow visual viewing.

The X-ray receiving section 41 of the X-ray emitter is hermetically sealed with a shielding member 40 formed of a lead-containing synthetic resin sheet piece or a plate or sheet material of iron, lead, or the like.

The shielding member 40 is made by making vertical cuts of 40 ₁ , _{40 2} . It is wound around the outer periphery of the X-ray receiving part 41 so that the cut on the inner side is not exposed to the outside, and the lower edge 40' is in contact with the surface of the base 2.

Reference numeral 5 designates the emitting part 31 of the X-ray source 3 and the X-ray receiving part 41 of the X-ray emitter 4 with the base 2 in the vertical direction.
This is a die plate for horizontal movement in which the base 32 of the X-ray source, the base 43 ₁ of the horizontal arm for supporting the X-ray emitter, and the base 44 ₁ of the reinforcing stay are fixed.

Reference numeral 6 denotes a drill unit which is placed at a fixed interval W in the lateral direction with respect to the X-ray source 3 and the X-ray emitter 4 and is placed directly above the base 2, and the drill center C of the micro spindle portion 61 of the drill. is set to be on the same line as the center C' of the radiation section 30 of the X-ray source 3, and is fixed to the die plate 5 via a horizontal arm 62. The drill unit described above includes a holder 63 that supports it, an air cylinder 64 that serves as a rotation source for the drill section 61, and a shock absorber 6 that adjusts the stroke of the drill section.
5. Place the drill holder 63 on its slider part 63 ₁
and an air cylinder 66 for raising and lowering the sliding body 62 ₁ at the tip of the horizontal arm.
It is formed from a bracket 67 and the like provided to support the shock absorber 65 and receive the shock absorber 65.

Reference numeral 7 designates a clamp which is arranged so as to be able to move upwardly and downwardly toward and away from the base 2 and for fixing _the multilayer substrate P placed on the base. It is attached to an upright pillar ₇₂ via a stay ₇₁ . Note that instead of the above-mentioned clamp, an existing vacuum suction device 71 may be provided at the lower part of the base 2, and the multilayer substrate body P may be suctioned to the base surface by the vacuum suction device.
Furthermore, the clamp 7 and the vacuum suction device 71 can also be used together.

Reference numeral 8 denotes a horizontal movement mechanism for horizontally moving the X-ray source 3, the X-ray emitter ₄ , and the drill unit ₆ . A guide bar ₈₂ is fixed horizontally, a fitting member ₈₃ supporting it is fixed to the die plate 5, and the die plate 5 is fixed to the guide bar with a cylinder ₈₄ disposed between the mounting support and the die plate. 8 ₂ .

Reference numeral 9 indicates stopper members provided at the left and right ends of the mounting support 11, and are adapted to adjust the movement of the die plate 5 in the horizontal direction.

[Working process for drilling reference holes based on examples]

Next, the effects based on the above embodiment are as follows.

A die plate 5 on which a multilayer substrate P to be drilled is placed on a base 2, and an X-ray source 3 and an X-ray emitter 4 placed above and below the base are moved in the left-right direction. The X-ray emitting unit 3 is moved while adjusting the movement via the holder 62 that is movable in the front-rear direction while visually observing through the viewing unit 42 of the X-ray emitter.
1 and the X-ray receiving part 41 detect the reference hole mark b,
In addition, by correcting the positional deviation and determining the drilling position, the clamp 7 is operated by operating the jig cylinder 70.
After fixing the multilayer substrate P by lowering the
When the radiation source and the X-ray emitter are moved horizontally away from the detection position, the drill unit is simultaneously moved to the detected drilling position and stopped. Note that the amount of movement of the X-ray source 3 and the X-ray emitter 4 is the same as the amount of movement of the drill unit 6.

In this case, a television camera T is installed in the X-ray emitter 4 instead of the viewing unit 42 to receive the X-rays, process the signals, and display the signals on a cathode ray tube monitor M installed near the X-ray emitter 4. Positioning can also be performed by aligning the aiming mark with the reference hole mark b of the multilayer substrate P.

Then, the computer calculates the positional deviation of the aiming mark displayed on the monitor M, and adjusts the difference by moving the die plate 5 to which the drill unit 6 is attached and the horizontal arm holder 62, and adjusts the difference between the positional deviation and the reference hole mark B. The difference is corrected so that it becomes 0 (zero), and then the hole drilling process is performed automatically.

Next, the drill part ₆₁ of the drill unit 6 is rotated by the air cylinder ₆₃ , and the holder part ₆₂ supports the drill part ₆₁ so that it can be adjusted forward and backward.
is lowered by a predetermined stroke by another air cylinder ₆₄ via a stopper ₆₅ , thereby drilling a predetermined reference hole at the hole punching mark position b of the multilayer substrate body P.

After completing the drilling, the clamp 7 is moved upward by a set amount by actuation of the cylinder 70 to release the fixation of the multilayer substrate P, thereby completing one process.

[Effect of idea]

Since the present invention has the above-mentioned configuration, there is no need for the counterbore process that was conventionally used to make reference holes in the multilayer substrate, and in addition, in the part of the reference hole mark that was required for the counterboring, When processing a multilayer board using a hot press, there is no need to insert a release film between the laminated plates, making the work extremely efficient and making it possible to create uniform reference holes. Since the holes can be drilled, the quality is improved and the yield is improved.

In addition, X-rays are used to detect the reference hole drilling position mark, but unlike conventional X-ray detection, a lead-containing synthetic resin sheet piece or iron/lead material is used to block X-ray leakage. By sealing with a shielding member made of a plate or sheet material, the exterior can be made smaller, and the amount of X-ray leakage can be reduced to approximately 0.3 mR/H, which is below the regulated value under domestic law, and compared to the amount in nature. It is possible to keep it approximately equal.

Furthermore, since the reference hole drilling position mark can be detected using X-rays by visual observation through the viewing section and by direct operation while correcting positional deviations, work efficiency is significantly improved.

Furthermore, by receiving the X-ray emitter with a television camera, processing the signal, and displaying it on a cathode ray tube monitor, and matching the focal point mark on the monitor with the reference mark on the multilayer board, positioning for drilling becomes easy. I can do it.

The positional deviation between the aiming mark and the reference hole mark displayed on the monitor is calculated by a computer, and the difference is determined by moving and adjusting the die plate and horizontal arm holder to which the drill unit is attached. After the correction is made, the drilling process can be automatically performed using the drill unit.

Moreover, even though no special training or experience is required to operate the drilling device according to the present invention, it can be used by anyone on the production line in real time because uniform drilling can be achieved. .

[Brief explanation of drawings]

The drawings show an apparatus for drilling reference holes in multilayer substrates using X-rays. Figure 1 is a side view, Figure 2 is a side view showing the X-ray detection area, Figure 3 is a plan view, and Figure 4 is a conventional A perspective view of a known X-ray fluoroscope, FIG. 5 is a diagram of the principle of X-ray fluoroscopy, FIG. 6 is an exploded perspective view of one multilayer substrate, and FIG. 7 is a diagram showing the processing state of the multilayer substrate. The front view and FIG. 8 are perspective views of the multilayer substrate body. 1... Main body frame, 2... Base for mounting the multilayer substrate body, 3... X-ray source, 4... X-ray emitter,
5...Die plate, 6...Drill unit, 7
... Clamp for fixing the multilayer board body, 8... Horizontal movement mechanism, P... Multilayer board body.

Claims (1)

[Claims for Utility Model Registration] (1) A base on which the multilayer substrate is placed is provided directly above the flat surface of the main body frame, and an X-ray source and the An X-ray emitter is placed directly above the base facing the X-ray source, and a drill unit is placed directly above the base with a predetermined spacing between the X-ray emitter and the drill unit. A reference hole for a multilayer substrate by X-rays, characterized in that a clamp that can move up and down in the substrate and fixes the multilayer substrate so that it does not move is provided with its base on the plane of the main body frame via a stay and a cylinder. Dawn device. (2) Criteria for a multilayer board based on X-rays as described in claim (1) of the utility model registration claim, in which a vacuum suction device is provided at the bottom of the base to fix the multilayer board on the base surface so that it does not move. Hole drilling device. (3) In order to fix the multilayer board on the base surface so that it does not move, a clamp is installed with its base on the plane of the main body frame via a stay and a cylinder, and a vacuum suction device is installed at the bottom of the base. An apparatus for drilling reference holes in a multilayer substrate using X-rays as set forth in claim (1) of the utility model registration.