JPH0399434U - - Google Patents
Info
- Publication number
- JPH0399434U JPH0399434U JP864490U JP864490U JPH0399434U JP H0399434 U JPH0399434 U JP H0399434U JP 864490 U JP864490 U JP 864490U JP 864490 U JP864490 U JP 864490U JP H0399434 U JPH0399434 U JP H0399434U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- exhaust
- pipe
- gas ejection
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Furnace Details (AREA)
Description
第１図ないし第５図は本考案の一実施例に係り
、第１図は本考案の炉口排気装置を具備した縦型
熱処理炉の一部縦断面図、第２図は炉口排気装置
の概略構成を示す斜視図、第３図は分散部の内部
構成を示す縦断面図、第４図はガス噴出ノズルの
内部構造を示す縦断面図、第５図は整流部の内部
構造を示す横断面図である。第６図および第７図
は本考案のその他の実施例を示した斜視図であり
、第８図と第９図は、分散部の別実施例の内部構
造を示す縦断面図である。また、第１０図は従来
の炉口排気装置を具備した縦型熱処理炉の一部縦
断面図である。
１…炉芯管、５…炉口、６…スカベンジヤー、
｛９…分散部、１０…ガス噴出ノズル｝ガス噴出
管、｛１１…整流部、１２…ガス排出ノズル｝ガ
ス排出管。
Figures 1 to 5 relate to an embodiment of the present invention, in which Figure 1 is a partial vertical cross-sectional view of a vertical heat treatment furnace equipped with the furnace exhaust system of the present invention, and Figure 2 is the furnace exhaust system. 3 is a vertical cross-sectional view showing the internal structure of the dispersion section, FIG. 4 is a vertical cross-sectional view showing the internal structure of the gas jet nozzle, and FIG. 5 is the internal structure of the rectifying section. FIG. 6 and 7 are perspective views showing other embodiments of the present invention, and FIGS. 8 and 9 are longitudinal cross-sectional views showing the internal structure of another embodiment of the dispersion section. Further, FIG. 10 is a partial vertical cross-sectional view of a vertical heat treatment furnace equipped with a conventional furnace opening exhaust device. 1... Furnace core tube, 5... Furnace mouth, 6... Scavenger,
{9... Dispersion section, 10... Gas ejection nozzle} Gas ejection pipe, {11... Rectification section, 12... Gas discharge nozzle} Gas discharge pipe.
Claims (1)
を外部排気装置に連通接続して炉口周辺の排気を
行うようにした基板熱処理炉の炉口排気装置にお
いて、 前記排気筒内で炉口に近接配置され、炉芯管の
管軸に略直交する方向で、少なくとも炉口を覆う
偏平な層流状の不活性ガスを噴出するガス噴出管
と、 前記排気筒内でガス噴出管と対向状態に設けら
れるガス排気管と を備えたことを特徴とする基板熱処理炉の炉口排
気装置。[Scope of Claim for Utility Model Registration] Furnace exhaust system for a substrate heat treatment furnace, in which an exhaust pipe is attached to the furnace mouth of a furnace core tube, and this exhaust pipe is connected to an external exhaust system to exhaust air around the furnace mouth. a gas ejection tube disposed close to the furnace opening in the exhaust stack and jetting out flat laminar inert gas covering at least the furnace opening in a direction substantially perpendicular to the tube axis of the furnace core tube; A furnace exhaust device for a substrate heat treatment furnace, characterized in that it includes a gas ejection pipe and a gas exhaust pipe disposed in opposition to a gas ejection pipe within an exhaust stack.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864490U JPH0399434U (en) | 1990-01-30 | 1990-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864490U JPH0399434U (en) | 1990-01-30 | 1990-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0399434U true JPH0399434U (en) | 1991-10-17 |
Family
ID=31512267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP864490U Pending JPH0399434U (en) | 1990-01-30 | 1990-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0399434U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017028144A (en) * | 2015-07-24 | 2017-02-02 | 光洋サーモシステム株式会社 | Heat treatment device |
-
1990
- 1990-01-30 JP JP864490U patent/JPH0399434U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017028144A (en) * | 2015-07-24 | 2017-02-02 | 光洋サーモシステム株式会社 | Heat treatment device |
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