JPH0410212B2 - - Google Patents

Info

Publication number
JPH0410212B2
JPH0410212B2 JP61148312A JP14831286A JPH0410212B2 JP H0410212 B2 JPH0410212 B2 JP H0410212B2 JP 61148312 A JP61148312 A JP 61148312A JP 14831286 A JP14831286 A JP 14831286A JP H0410212 B2 JPH0410212 B2 JP H0410212B2
Authority
JP
Japan
Prior art keywords
band
laser beam
strip
shaped
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61148312A
Other languages
English (en)
Japanese (ja)
Other versions
JPS636828A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61148312A priority Critical patent/JPS636828A/ja
Publication of JPS636828A publication Critical patent/JPS636828A/ja
Publication of JPH0410212B2 publication Critical patent/JPH0410212B2/ja
Granted legal-status Critical Current

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Landscapes

  • Recrystallisation Techniques (AREA)
JP61148312A 1986-06-26 1986-06-26 単結晶半導体薄膜の製造方法 Granted JPS636828A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61148312A JPS636828A (ja) 1986-06-26 1986-06-26 単結晶半導体薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61148312A JPS636828A (ja) 1986-06-26 1986-06-26 単結晶半導体薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS636828A JPS636828A (ja) 1988-01-12
JPH0410212B2 true JPH0410212B2 (fr) 1992-02-24

Family

ID=15449973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61148312A Granted JPS636828A (ja) 1986-06-26 1986-06-26 単結晶半導体薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS636828A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142810A (ja) * 1986-12-05 1988-06-15 Matsushita Electronics Corp 半導体装置の製造方法
JP2003168645A (ja) * 2001-12-03 2003-06-13 Hitachi Ltd 半導体薄膜装置、その製造方法及び画像表示装置

Also Published As

Publication number Publication date
JPS636828A (ja) 1988-01-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term