JPH04105206A - Magnetic head - Google Patents

Abstract

PURPOSE:To allow good magnetic recording and reproducing by forming magnetic alloy films of soft magnetic films consisting of iron-nitrogen-oxygen and at least >=1 kinds of elements selected from metals or semimetals exclusive of iron. CONSTITUTION:The magnetic head 1 is constituted of two laminated blocks 61, 62 in such a manner that the magnetic alloy films 51, 51 are crimped from both sides by substrates 21, 31, 22, 32 consisting of nonmagnetic materials. The magnetic alloy films 51, 52 are the soft magnetic films consisting of the iron- nitrogen-oxygen and at least >=1 kinds of the elements selected from the metals or semimetals exclusive of the iron. Namely, the soft magnetic films having a high saturation magnetic flux density Bs, low Hc and excellent thermal stability are used for the magnetic materials constituting tracks and cores. The good recording and reproducing to and from the high-coercive force medium are possible in this way.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a magnetic head used in a magnetic recording/reproducing device, and particularly to high-density magnetic recording used in the fields of audio, video, computers, etc. The present invention relates to a suitable magnetic head.

(Conventional technology) In recent years, the need for higher density and wider band magnetic recording has increased, and high-density recording has been achieved by using magnetic materials with high coercive force in magnetic recording media and narrowing the recording track width. are doing. Saturation magnetic flux density Bs is used as a magnetic head material for recording and reproducing on magnetic recording media with high coercive force.
There is a need for a magnetic alloy with high magnetic properties, and a multilayer magnetic head has been proposed in which a core made of Sendust alloy, an amorphous alloy, or the like is sandwiched from both sides by nonmagnetic substrates.

(For example, Japanese Unexamined Patent Publication No. 61-233405) (Problem to be solved by the invention) However, as the coercive force of magnetic recording media continues to increase, and the coercive force exceeds 20,000 e, sendust alloys and amorphous alloys are used. It is difficult to achieve good magnetic recording and reproduction with magnetic heads that use magnetic heads. Magnetic alloys mainly composed of iron such as iron nitride and FeSi alloys are known as alloys for magnetic heads that have a higher saturation magnetic flux density Bs than sendust alloys and amorphous alloys. A magnetic alloy with a high density has a large coercive force Hc and is not suitable as a material for a magnetic head. head is proposed. However, in the magnetic head, there are problems in that using a multilayered magnetic material requires a lot of man-hours and costs, and it is difficult to maintain reliability. In particular, in order to obtain a magnetic film thickness of several μm or more, it may be necessary to use a magnetic material with a multilayer structure of 100 or more layers, which limits the range of use. Furthermore, when manufacturing a magnetic head using a magnetic alloy mainly composed of iron, it is necessary to have thermal stability that can withstand the glass malting process. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide, for example, a laminated magnetic head that uses a magnetic alloy that maintains a high saturation magnetic flux density, has a small coercive force, and has excellent thermal stability as a magnetic core.

(Means for Solving the Problem) The present invention has been made to solve the problem, and as a first invention, a magnetic alloy film is provided on the upper surface of one non-magnetic substrate, and the magnetic alloy film is provided on the upper surface of one non-magnetic substrate. In the magnetic head in which the other non-magnetic substrate is disposed on the upper surface of the film with a low melting point glass interposed therebetween, the magnetic alloy film is at least one selected from iron-nitrogen-oxygen and a metal or semi-metal other than iron. A second invention provides a magnetic head which is a soft magnetic film made of one or more kinds of elements. The soft magnetic film is represented by the composition formula FexN, O7Mv, where 1≦y≦10. 0.1≦2≦10.
0.5 ≦ V ≦ 6x + y + z
The magnetic head according to claim 1, which has the relationship: + v = 100 (wherein M is at least one element selected from metals or semimetals other than iron). The present invention provides a magnetic head according to claims 1 and 2, respectively, wherein the alloy film is multilayered with an insulating film interposed therebetween.

(Embodiment) FIG. 1 is an external perspective view of an embodiment of a magnetic head according to the present invention, and FIG. 2 is an enlarged plan view of the vicinity of the working gap for performing magnetic recording in FIG. 1.

In this magnetic head 1, a substrate 2I of non-magnetic material,
For example, two laminated blocks 61.6□ are arranged so that the magnetic alloy films 51, 52 are sandwiched from both sides by 3+, 22, 32.
It is made up of. These laminated blocks 61.62
via a gap spacer made of non-magnetic material 4,
The magnetic alloy films 5+ and 52 of the blocks 61 and 6□ are aligned with each other (see FIG. 2) and then bonded together. By this joining, a winding window hole 7 is formed in one or both of the laminated blocks so that the winding wire can be wound therein when they are joined. The coil is wound a predetermined number of times through the window hole 7.

Here, FeX-NY-0 used as a magnetic alloy film
A magnetic material represented by the formula □-Mv (where M is at least one selected from metals or metalloids other than iron)
Various conventionally known methods can be considered as a method for forming a non-magnetic material on the surface of a substrate made of a non-magnetic material, and among them, a vacuum thin film forming technique is preferable. Examples of this vacuum thin film forming technique include sputtering, ion blating, and vacuum evaporation.

Next, a substrate 2 of non-magnetic material. ．． 3. The forming method for obtaining a laminated block sandwiched from both sides by 2□ and 32 is as follows:
Although various methods can be considered, the low melting point glass 9 is formed to a predetermined thickness at the bonding interface using the vacuum thin film forming technique described above, and the substrates 2+, 31, 22 made of non-magnetic materials are formed.
．． No. 32 is obtained by thermocompression bonding in a nitrogen atmosphere.

Figures 3 and 5 show the magnetic key material expressed by the formula F e , which shows the change in coercive force (Hc) of a conventional iron nitride (FeN) alloy depending on the heat treatment temperature. As shown in this figure, iron nitride is heat treated at a temperature of 300
℃, Hc is relatively low, but when the temperature exceeds 300℃, Hc increases rapidly.

On the other hand, it can be seen that the magnetic material used in the present invention has a small Hc and excellent thermal stability. Therefore, the process of thermocompression bonding using low-melting point glass and the process of welding and bonding formed through a gap of non-magnetic material when producing a laminated magnetic head can be carried out stably.

At this time, as shown in FIG. 2, the Fe
A magnetic material represented by the formula NyO2Mv may be multilayered with a thickness of several μm as an interlayer insulating film 10 made of an electrically insulating material in order to prevent deterioration of recording and reproducing efficiency in a high frequency band. (Note that this multilayering is only for suppressing eddy current loss in the magnetic core.) (The following is a blank space) Table 1 Table 1 shows the Fe-N alloys that were formed, especially the Fe-No-M alloys. shows the relationship between the content, saturation magnetic flux density (Bs), and coercive force (Hc) when Ti, ZrHf, etc. are applied as M, and the content is ESC
It is expressed in atomic % by quantitative analysis using A (X-ray photoelectron spectroscopy), EPMA (X-ray microanalyzer method), etc., but an error of about ±20% is expected. The coercive force is
This is the value when heat treatment is performed in a vacuum, and the heat treatment temperature is 400°C here. Among these, sample number 1 is the result when only nitrogen is contained in Fe. Sample numbers 2 to 12 are magnetic alloy films used in the present invention.

(Margins below) Table 2 Table 2 shows the Fe-N alloys formed into films, especially FeN-0-M
In the system alloy, M is Si or B.

This shows the relationship between the content, saturation magnetic flux density (Bs), and coercive force (Hc) when AI, Ga, C, and Ge are applied. ), quantitative analysis using EPMA (X-ray microanalyzer method), etc., and it is expressed as atomic %, but an error of about ±20% is expected.

Coercive force is the value when heat treatment is performed in vacuum,
The heat treatment temperature here is 400°C.

Among these, sample number 1 is the result when only nitrogen is contained in Fe. Sample numbers 2 to 10 are magnetic alloy films used in the present invention.

What is shown in FIG. 4 shows the relationship between the nitrogen content and the saturation magnetic flux density Bs in the Fe--N alloy. As this figure shows, when the nitrogen content is less than the original atomic weight of IO, Bs
A high Bs magnetic alloy with a force of 15 kG or more can be obtained. Also, M
Similar results can be obtained when the amount is 10 atomic % or less.

Here, when the nitrogen content is less than 1 atomic %, no significant effect of nitrogen is observed, and Hc hardly decreases.

On the other hand, as is clear from Tables 11 and 2, when the nitrogen content is 1 atomic % or more, the effect of nitrogen becomes noticeable. Therefore, when the nitrogen content is 1 to 10 atomic %, a magnetic alloy film with high Bs and low HC can be obtained.

On the other hand, when looking at the oxygen content, when the oxygen content is less than 0.1 atomic %, no significant oxygen effect is observed, and Hc hardly decreases.

On the other hand, it can be seen that when the oxygen content is 0.1 atomic % or more, the effect of oxygen becomes remarkable.

Therefore, when the oxygen content is 0.1 to 10 at%,
A magnetic alloy film with high Bs and low Hc can be obtained.

Here, if the total content of Ti, Zr, If, St, B, At, etc. is less than 0.5 at%, no significant effect on lowering HC and improving thermal stability is observed, and 6 If the amount exceeds atomic %, an increase in Hc occurs.

Therefore, at least one selected from metals or metalloids
When the total content of more than one type of elements is 0.5 to 6 at %, a magnetic alloy film with high Bs, low Hc and excellent thermal stability can be obtained.

FIG. 6 is a graph showing the relationship between the magnetic permeability and frequency of the magnetic alloy film used in the present invention when the film thickness of this alloy is 2 μm.

The magnetic alloy film used in the present invention has a high magnetic permeability of 5,000, and can provide sufficient reproduction efficiency as a magnetic head.

In addition, in the description of this example, Ti, S
Although the explanation has been made using i, Ga, W, etc., it is needless to say that the material is not limited thereto.

Here, a comparison is made between the Fe-N-0-M alloy film, which is a high-performance material used in the magnetic head of the present invention, and Sendust, an amorphous alloy which is a magnetic material that can be bonded to glass. It is shown as Table 3.

(Hereafter, remaining white) table element).

FIG. 7 shows the coercive force 194 produced by the magnetic head according to the present invention.
The head output characteristics of a 00e magnetic recording medium (tape) are compared with a conventional laminated head using an amorphous alloy. As shown in this figure, the magnetic head according to the present invention can perform better recording and reproducing on a high coercive force magnetic recording medium than the conventional magnetic head.

(Margins below) As is clear from Table 3, when using a high Hc medium to achieve high recording density, the FeN-0-M magnetic alloy film is most suitable.

The composition range that makes the best use of the characteristics of this magnetic material is 1≦y≦
to, 0.1≦z≦10.0.5≦v≦6z + y
+ z + v -100 (numbers are atomic %, M is
At least one element selected from metals or metalloids other than iron (A) (B) Table Input/Output Characteristics Measurement Conditions Magnetic Film Specifications Table 4 is for explaining this Fig. 7. (A) is the measurement conditions for human output characteristics, and (B) is the magnetic film specifications.

As is clear from FIG. 7, head 2, which is a conventional example,
On the other hand, the head 2 according to the present invention can perform saturation recording sufficiently on a medium of Hc or 19400 e, and the maximum output value is also 3.5 dB higher. This means that the core material of the magnetic head according to the present invention is 180%
This is thought to be due to the fact that magnetic saturation of the core material is less likely to occur due to the material having a high Bs of 0.00 Gauss, so sufficient recording could be performed on the high Hc medium.

Moreover, in the present invention, F ex-Ny -O2Mv
When forming a magnetic alloy film represented by the composition formula as the magnetic core of a magnetic head, vacuum thin film formation technology can be used. Since it corresponds to the actual film thickness,
The track width can be formed with precision in film thickness control, and a narrow track width magnetic head for high-density magnetic recording/reproducing devices can be produced relatively easily.

(Effects of the Invention) As detailed above, according to the magnetic head of the present invention,
A magnetic alloy film is provided on the top surface of one non-magnetic substrate, and
In the magnetic head in which the other non-magnetic substrate is arranged on the upper surface of the magnetic alloy film with a low melting point glass interposed therebetween, the magnetic alloy film is made of iron-nitrogen-oxygen and a metal or semi-metal other than iron. In other words, the magnetic materials constituting the trunk and core have a high saturation magnetic flux density BS, a low Hc, and are soft magnetic with excellent thermal stability. Since it uses a film, it is possible to perform good recording and reproduction on a high coercive force medium.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an external perspective view of an embodiment of the magnetic head according to the present invention, FIG. 2 is an enlarged plan view of the vicinity of the operating cap for magnetic recording in FIG. FIG. 3 is a diagram showing changes in Hc depending on heat treatment temperature, FIG. 4 is a diagram showing nitrogen content and saturation magnetic flux density (Bs), and FIG. 5 is a diagram showing changes in Hc depending on heat treatment temperature. FIG. 6 is a diagram showing the relationship between magnetic permeability μ and frequency, and FIG. 7 is a diagram showing the input/output characteristics of the magnetic head of the present invention and a conventional magnetic head. ]...Magnetic head, 2+, 22.31.32...Nonmagnetic material, 51.5
□ ...Magnetic alloy film.

Claims (3)

[Claims] (1) In a magnetic head in which a magnetic alloy film is provided on the upper surface of one non-magnetic substrate, and another non-magnetic substrate is arranged on the upper surface of this magnetic alloy film with a low melting point glass interposed therebetween, the magnetic alloy film 1. A magnetic head, wherein is a soft magnetic film made of iron-nitrogen-oxygen and at least one element selected from metals or metalloids other than iron. (2) A soft magnetic film made of iron-nitrogen-oxygen and at least one element selected from metals or metalloids other than iron is represented by the composition formula Fe_XN_YO_ZM_V, 1≦y≦10,0 .1≦z≦10, 0.5≦v≦6x+
The magnetic head according to claim 1, characterized in that the magnetic head has the following relationship: y+z+v=100. (However, M is at least one element selected from metals or semimetals other than iron) (3) The magnetic head according to claim 1 or claim 2, wherein the magnetic alloy film is multilayered with an insulating film interposed therebetween.