JPH04106705A - Magnetic head - Google Patents

Abstract

PURPOSE:To obtain the magnetic head of a lamination type for which a magnetic alloy having a high saturation magnetic flux density, small coercive force and excellent thermal stability is used as a magnetic core, by constituting soft magnetic films of a magnetic material expressed by specific compsn. formula FexNyMz. CONSTITUTION:This magnetic head 1 is constituted of, for example, two laminated blocks 61, 62 in such a manner than the magnetic alloy films 51, 52 are crimped from both sides by substrates 21, 31, 22, 32 consisting of nonmagnetic materials. The magnetic material expressed by the formula Fex-Ny-Mz is used as the magnetic alloy films. In the formula, atomic % expressed by x, y, z are 1<=y<=10, 0.5<=z<=10, z+y+z=100. (M is at least >=1 kinds of the elements selected from metals or semimetals exclusive of iron.)

Description

Detailed Description of the Invention (Industrial Field of Application) The present invention relates to a magnetic head used in a magnetic recording/reproducing device, and particularly to high-density magnetic recording used in the fields of audio, video, computers, etc. Concerning a suitable magnetic helix.

(Prior art) In recent years, the need for higher density and wider band magnetic recording has increased. A record has been achieved. A magnetic alloy with a high saturation magnetic flux density Bs is required as a magnetic head material for recording internally in a magnetic recording medium with a high coercive force, and Sendust alloy, amorphous alloy, etc. are used for the core. , seven proposals have been made for a laminated magnetic material sandwiched from both sides by non-magnetic substrates. (For example, Japanese Patent Application Laid-Open No. 61-233405) (
However, as the coercive force of magnetic recording media continues to increase, and the coercive force exceeds 20,000 e, magnetic heads using sendust alloys or amorphous alloys cannot achieve good magnetic recording and reproduction. It becomes difficult. Magnetic alloys containing iron as a main component, such as iron nitride and Fe-3i alloys, are known as alloys for magnetic heads that have a higher saturation magnetic flux density Bs than sendust alloys and amorphous alloys. A magnetic alloy with a saturation magnetic flux density has a large coercive force Hc and is not sufficient as a material for a magnetic head. Therefore, a magnetic material with a multilayer structure using a magnetic material with a low coercive force such as Sendust alloy or permalloy as an interlayer film is used. A magnetic head has been proposed. However, in such a magnetic head, there are problems in that creating a multilayered magnetic material requires a lot of man-hours and costs, and it is difficult to maintain reliability. In particular, in order to obtain a magnetic film thickness of several μm or more, it is necessary to
It was necessary to use a magnetic material with a multilayer structure of more than one layer, and the range of use was also limited. Furthermore, when manufacturing a magnetic head using a magnetic alloy mainly composed of iron, it is necessary to have thermal stability that can withstand a glass molding process.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a laminated magnetic head that uses a magnetic alloy that maintains a high saturation magnetic flux density, has a small coercive force, and has excellent thermal stability as a magnetic core.

(Means for Solving the Problem) The present invention has been made to solve the problem, and as a first invention, on the upper surface of one non-magnetic substrate,
A magnetic alloy film of a soft magnetic film made of iron-nitrogen and at least one element selected from metals or semimetals other than iron is provided, and a low-melting, ζ
A magnetic head in which the other non-magnetic substrate is arranged through glass, and the soft magnetic film is represented by the composition formula FexN, Mz, where: ■≦y≦to, 0.5≦z≦10x+y+z
A magnetic head characterized by having the following relationship (however, M
is at least one element selected from metals or metalloids other than iron), and as a second invention,
Claim 1: Multi-layered with a magnetic alloy film or an insulating film interposed therebetween.
Each of the magnetic heads described above is provided.

(Embodiment) FIG. 1 is an external perspective view of an embodiment of a magnetic head according to the present invention, and FIG. 2 is an enlarged plan view of the vicinity of the working gap for performing magnetic recording in FIG. 1.

In this magnetic head 1, the base number of the nonmagnetic material is 21.3.
．． ．． For example, it is constructed of two laminated blocks 61, 6□ such that the magnetic alloy films 51, 52 are sandwiched from both sides at 2° and 3□. These laminated blocks 64, 6□ are
The magnetic alloy films 51 and 5 of the blocks 61 and 62 are aligned with each other via a gap spacer made of a non-magnetic material 4 (see FIG. 2) and then joined together. By this joining, a winding window hole 7 is formed in one or both of the laminated blocks, which is shaped so that the winding wire is wound therein when they are joined. The coil is wound a predetermined number of times through the window hole 7. Here, a magnetic material expressed by the formula Fex-N-M2 used as a magnetic alloy film (M is at least one element selected from metals or metalloids other than iron) Various conventionally known methods can be considered as a method for forming the magnetic material on the surface of a substrate made of a non-magnetic material, but among them, a vacuum thin film forming technique is preferable. Examples of this vacuum thin film forming technique include sputtering, ion blating, and vacuum evaporation.

Next, a substrate 2 of non-magnetic material. ．． 31 22.32 As a forming method to obtain a laminated block that is sandwiched from both sides,
Although various methods can be considered, low melting glass 9 is formed at a bonding interface with a predetermined thickness using the above-mentioned blank thin film forming technique, and the substrates 2+ and 31 2 made of non-magnetic materials are formed.
2, -. No. 32 is obtained by thermocompression bonding in a nitrogen atmosphere.

FIG. 3 shows a magnetic material expressed by the formula Fex-N, -M, which is used as a magnetic alloy film in the present invention.
This figure shows the change in coercive force (He) depending on the heat treatment temperature of iron nitride (FeN) alloy, which is a conventional example, and when AI is used. As this figure shows, iron nitride is heated at a heat treatment temperature of 3 (
Hc is relatively low when the temperature is 1°C, but when the temperature exceeds 300°C, Hc increases rapidly. In contrast, it can be seen that the magnetic material used in the present invention has a small Hc and excellent thermal stability. Therefore, the process of thermocompression bonding using low-melting point glass and the process of welding and bonding formed through a gap of non-magnetic material when producing a laminated magnetic head can be performed stably.

At this time, as shown in FIG. 2, the Fex-
A magnetic material represented by the formula Ny-Mz may be multilayered with a thickness of several μm as an interlayer insulating film 10, which is an electrically insulating material, in order to prevent deterioration of recording and reproducing efficiency in a high frequency band.

Table (margins below) Table 1 shows the respective contents and saturation magnetic flux density ( Bs) and coercive force (Hc), and the content is ESC
It is expressed in atomic % by quantitative analysis using A (X-ray photoelectron spectroscopy), EPMA (X-ray microanalyzer method), etc., but an error of about ±20% is expected. The coercive force is
This is the value when heat treatment is performed in a vacuum, and the heat treatment temperature is 300°C here. Among these, sample number] is
These are the results when Fe is made to contain only nitrogen, and sample number 2 is the result when Fe is made to contain only AI. Sample numbers 3 to 8 are magnetic alloy films used in the present invention.

Here, when the nitrogen content is less than 1 atomic %, no significant effect of nitrogen is observed and Hc hardly decreases.

What is shown in FIG. 4 shows the relationship between the nitrogen content and the saturation magnetic flux density Bs in the Fe--N alloy. As shown in this figure, the nitrogen content is 10 atoms? When 6 or less, B
A high Bs magnetic alloy with s of 15 kG or more can be obtained. Also,
Similar results can be obtained when M is 10 atomic % or less.

Therefore, when the nitrogen content is ~10 at%, high B
A low Hc magnetic alloy can be obtained.

Here, if the total content of A1, Ga, etc. is less than 05 atoms, 96 atoms, no noticeable effect on lowering He and improving thermal stability can be seen, and if it exceeds IO atomic percent, Bs or 15 kG
It is no longer possible to obtain a magnetic alloy with the above-mentioned properties.

Therefore, when the total content of A1, Ga, etc. is 05 to 10 atomic %, it is possible to obtain a magnetic alloy with high Bs, low Hc, and excellent thermal stability.

In addition, in the explanation of this embodiment, M is AI, G
Although the explanation has been made using a and B, it is needless to say that the present invention is not limited thereto.

Here, a comparison is made between the Fe-N-M alloy film, which is a high-performance material used in the magnetic head of the present invention, and Sendust, an amorphous alloy which is a magnetic material that can be bonded to glass. Shown as 2.

table element).

FIG. 5 shows the coercive force 194 produced by the magnetic head according to the present invention.
The head output characteristics of a 00e magnetic recording medium (tape) are compared with a conventional laminated head using an amorphous alloy. As shown in this figure, the magnetic head according to the present invention can perform better recording and reproduction on a magnetic recording medium having a higher coercive force than conventional magnetic heads.

(Margin below) As is clear from Table 2, when using a medium with high Hc to achieve high recording density, it can be seen that the Fe--N--M magnetic alloy film is most suitable.

The composition range that makes the best use of the characteristics of this magnetic material is 1≦y≦
to, 0.5≦2≦10 Output characteristic measurement conditions (B) Magnetic film specification table 3 is for explaining this Fig. 5, in which (A) is the measurement condition of the input/output characteristics, and (B) is the magnetic film specification table 3. These are the specifications.

As is clear from FIG. 5, head 2, which is a conventional example,
The head 2 of the present invention was not able to perform sufficient saturation recording on the medium with Hc of 194006, but the head 2 according to the present invention was able to perform sufficient saturation recording, and the maximum output value was also 3.5 dB higher. This is the core material of the magnetic head according to the present invention.
Because it is a material with a high Bs of 0 Gauss, it has a high H
This is thought to be due to the fact that sufficient recording was possible on the C medium.

Further, in the present invention, Fe-N, -M.

When forming a magnetic alloy film represented by the composition formula as the magnetic core of a magnetic head, vacuum thin film formation technology can be used. Since it corresponds to the actual film thickness,
The trunk width can be formed by controlling the thickness of the film, and a narrow trunk width magnetic head for high-density magnetic recording and reproducing devices can be produced relatively easily.

(Effects of the Invention) As detailed above, according to the magnetic head of the present invention,
A magnetic alloy film of a soft magnetic film made of at least one element selected from iron-nitrogen and metals or metalloids other than iron is provided on the upper surface of one of the non-magnetic substrates. A magnetic head in which the other nonmagnetic substrate is disposed on the upper surface with a low melting point glass interposed therebetween, and the soft magnetic film is represented by the composition formula FexNyMz, l≦y≦to, ,O,,5 ≦z≦10X +, y
Since it is configured to have the relationship: +z-100, it is possible to perform good recording and reproduction on a high coercive force medium.

[Brief explanation of the drawing]

FIG. 1 is an external perspective view of one embodiment of the magnetic head according to the present invention, and FIG. 2 is an enlarged plan view of the vicinity of the working gap for magnetic recording in FIG. 1. Figure 4 shows the change in He depending on the heat treatment temperature. Figure 4 shows the nitrogen content and saturation magnetic flux density (Bs). Figure 5 shows the human output characteristics of the magnetic head of the present invention and the conventional magnetic helad. FIG. 1...Magnetic spatula 2'+, 22, 3 32...Nonmagnetic material 51.52...Magnetic alloy film.

Claims (2)

[Claims] (1) A magnetic alloy film of a soft magnetic film made of iron-nitrogen and at least one element selected from metals or metalloids other than iron is provided on the upper surface of one non-magnetic substrate, and this magnetic A magnetic head in which the other non-magnetic substrate is placed on the upper surface of the alloy film with a low melting point glass interposed therebetween, the magnetic head comprising:
A magnetic head characterized in that the soft magnetic film is represented by the composition formula Fe_xN_yM_z and has the following relationships: 1≦y≦10, 0.5≦z≦10 x+y+z=100. (However, M is at least one element selected from metals or semimetals other than iron) (2) The magnetic head according to claim 1, wherein the magnetic alloy film is multilayered with an insulating film interposed therebetween.