JPH04106014A - Conveyor device for clean room - Google Patents

Abstract

PURPOSE:To speed up and ascertain removal of dust by providing a movable base with a receiving base free to left up and down free to travel and by providing receiving parts forming slits to lift the receiving base up and down with specific pitches on a frame ceiling part inside of a rectangular box type frame the inside of which is sucked from the lower part of its bottom plate. CONSTITUTION:When a load 3 is placed on a receiving part 19, a movable base 40 is moved to directly under the load 3 by a reciprocating device 46 by way of lowering a receiving base 54. Thereafter, a lift device 55 is driven to rise so that the receiving base 54 is lifted up to lift up the load 3. Then, the movable base 40 is moved along a route 42 by the reciprocating device 46 and made to move for the next receiving part 19. Thereafter, the lift device 55 is lowered and the load 3 is placed on the receiving part 19. By this repetition, the load 3 is sequentially and repeatedly transported at each pitch of the receiving part 19.

Description

DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to a conveyor system employed for transporting loads within a clean room.

BACKGROUND OF THE INVENTION Conventionally, as this type of conveyor device, a cargo handling facility in a clean room has been provided, for example, as disclosed in Japanese Utility Model Application Publication No. 63-67505. In this conventional type, a progressive type cargo handling area is provided in a highly clean room, and this cargo handling area has a carrying-in device and a carrying-out device arranged in parallel on a rectangular box-shaped body frame. In addition, the carry-in device and the carry-out device include a push-pull body movable along the conveyance direction, cylinders provided at three locations at predetermined pitches on the push-pull body, and attached to the upward piston rods of these cylinders. It consists of a support base that can move in and out through a notch groove formed in the top plate of the main body frame, and receivers provided on both sides of the notch groove.

According to this conventional method, the support base is raised from the cylinder ξ, the load on the receiver is lifted up, the load is moved by one pitch by the push/pull motion of the push/pull body, and then the support base is lowered. After unloading the load onto the receiver, by moving the push/pull body, the load can be fed one pitch at a time.

Problems to be Solved by the Invention According to the above-mentioned conventional type, dust is generated in the drive part that pushes and pulls the push-pull body, the push-pull guide part of the push-pull body, etc., and this dust is removed from the notch from inside the body frame. It will leak upward through the groove.

Then, dust adheres to loads such as wafers and semiconductors that are handled above the notch grooves.

An object of the present invention is to provide a clean room conveyor device that can quickly remove dust generated within a frame without transferring it to the cargo side.

Means for Solving the Problems To achieve the above objects, the clean room conveyor device of the present invention includes a movable platform in a rectangular box-like frame that is supported and guided by rails provided on the frame and is movable along a fixed path. and a reciprocating device that is interlocked with the movable platform, and the movable platform is provided with a cargo receiving platform that can be raised and lowered, and an elevating device that is interlocked with the cargo receiving platform, and a top plate portion of the frame is provided with a reciprocating device that is interlocked with the movable platform. The cargo receivers are provided at predetermined pitches, the cargo receivers form slits for raising and lowering the platform, and the bottom plate of the frame is provided with a downward suction device.

According to the configuration of the present invention, the lift device raises the platform of the cargo receiver, the cargo receiver lifts the load on the section, and the reciprocating device moves the movable platform forward to move the load by one pitch. Next, the cargo receiving platform is lowered to unload the cargo onto the receiving section, and then the movable platform is moved back, so that the cargo can be sequentially fed one pitch at a time. Dust generated in the actuating part due to reciprocating and lifting movements can be removed downward outside the frame by a suction device, and furthermore, by generating a downward flow in the lifting slit part, dust can be removed near the load. Dust can be transferred into the frame.

Example An embodiment of the present invention will be described below based on the drawings.

1 to 3 show a conveyor device 1, which is composed of a rectangular box-shaped conveyor frame 10, a movable table 40 for conveyance, and the like. The main body 11 of the conveyor frame 10 is
It consists of a bottom plate 11A and a pair of left and right side plates 11B, and is formed into a negative shape by drawing aluminum. At this time, on the upper surface of the bottom plate 11A, a portion 12 for attaching a rail (described later) is formed in a dovetail shape and extending in the length direction of the main body 11. Also, on the inner and outer surfaces of the bottom plate 11A and both side plates 11B, there are plate nut insertion portions 13 for attaching or connecting other items.
are dovetail-shaped and are formed in the length direction of the main body 11. At the upper end of the side plate 11B, a large number of upper side plates 14 having short dimensions in the length direction of the conveyor are arranged at predetermined pitches in the length direction, and these are connected to plate nuts and screws ( or bolts), each of which is detachably provided. A concave groove 14A is formed on the upper surface of these upper side plates 14 in the length direction of the conveyor so that the side surface 14a thereof is on the inner side of the upper side in the left-right direction, and the outer surface of the upper part is inclined in the same direction. A receiver is formed on surface 14B.

Furthermore, a locking portion 14C facing outward and upward is formed at the lower end of the upper side plate 14. At the lower end of the side plate 11B, a large number of brackets 16 having locking portions 16A similar to those described above are removably attached by a fixture 17 and spaced at predetermined pitches in the length direction.

A cover body 18, which serves as a top plate portion of the conveyor frame 10, is attached to the upper end of the upper side plate 14 in a fitting manner. In other words, the cover unit 18 has the groove 14
A protruding line 18A that can be freely fitted from diagonally above is provided on the lower surface of the entire length, and the outer surface 18a of this protruding line 18A is inclined in the same direction as the side surface 14a of the groove 14A.
You can freely contact a with a letter. The inner surface of the outer end is formed into a contact surface 18B that allows the receiver to come into close contact with the surface 14B. Further, a cargo receiving portion 19 is provided on the upper part of the cover unit 18 at a predetermined pitch device. The receiving portions 19 are provided at a plurality of locations (three locations in the embodiment) for each predetermined pitch device, with a pair of right and left receivers and a group of four members, a pair of front and rear.

An insertion portion 20 is provided on the outer surface of the outer end and the inner surface of the inner end of the integral cover 18.
A bracket 22 for the presence sensor 21 is removably attached to the outer end using a fixture 23, and a slit cover 24 is detachably attached to the inner end using a fixture 25. A slit 26 is formed between both slit covers 24, and a lifting slit portion 27 is formed between both covers 18 above both slit covers 24.
form. A cover 28 is disposed between the side plate 11B and the outer side of the upper side plate 14, and these covers 28
A locked portion 28A is formed on the inner surface of the locking portion 14C and is lockable from above to the locking portion 14C116A. A wiring space 29 is formed inside the cover 28. A round hole-shaped opening 5 is formed in the bottom plate 11A at the intermediate portion in the length direction of the conveyor frame 10, and a duct 6 communicating with the opening 5 is vertically provided from the bottom plate 11A side. In the upper part of the duct 6, there is a fan 7 and a drive unit 8.
A downward suction device i9 is provided.

One end of the conveyor frame 1o configured in this way is closed by a control unit section 30 that also serves as a landing member, and
The other end is closed by a closing plate 31.

In addition, near the other end, a stand 32 is installed between the side plates 11B in place of the upper side plate 14#, and this installation is supported by the stand 32 and rotates around the vertical axis 33.
A ring-shaped cargo receiving body 35 with a cutout 34 at one location and a rotation drive device 36 interlocked with the body 35 are provided.

The movable table 40 is disposed in a conveyance space 41 formed within the conveyor frame 10, and is movable back and forth on a fixed path 42 in the length direction of the frame. That is, the bottom plate 11A
A rail 44 is attached to the top by means of a fixture 43 via the attachment part 12, and the movable base 40 is supported and guided by the rail 44 via a sliding body 45.

A reciprocating device 46 interlocked with this movable table 40 is driven by a motor 4 attached to the lower surface of one end of the bottom plate 11A and capable of forward and reverse driving.
7, a driving silver wheel 48 attached to its output shaft, and a side plate 11.
It consists of a plurality of driven silver wheels 51 attached to B via a fixture 49 and a bracket 50, a chain 52 hung between these silver rings 48, 51, etc. It is connected to the movable base 40 by 53. The movable platform 40 has a part 19 where the cargo receiving part 19 is moved up and down.
The cargo receiver that can move in and out of the platform is a platform 54;
An elevating device 55 interlocked with is provided. That is, a guide tube 56 is provided upright from the movable base 40, and an elevating rod 57 guided by the guide tube 56 is inserted into the slit 26, and a cargo receiver located in the elevating slit portion 27 is inserted into the upper end of the elevating rod 57. connects the stand 54. The elevating device 55 has an operating rod 58 that can be raised and lowered, and the upper end of the operating rod 58 passes through the slit 26 so that the cargo is placed on the platform 54.
is connected to.

Reference numeral 59 indicates a cable carrier, and reference numeral 60 indicates an integrated cover of the reciprocating device 46. Reference numeral 3 denotes a load, which has the shape of a case that can freely store products, and has locking protrusions 3a provided on both sides.

The conveyor device 1 having the above configuration is used, for example, as shown in FIG. 4, for carrying in and out of a closed cargo storage device 71 installed in a clean room 70.

That is, in the box-shaped main body outer panel 72 of the cargo storage device 71, a pair of cargo storage sections (shelf) 74, each having a plurality of storage spaces 73 divided in the vertical direction, are provided on the left and right sides with the front facing the passage 75. It will be done. The front surface facing the passage 75 and the rear surface on the opposite side of each of the cargo storage sections 74 are open, and a filter 76 is disposed to cover the rear surface. 1,700 supply passages 77 are formed between them. Further, an air supply unit (not shown) is disposed below the air supply path 77 and the like. The carry-in device 78 disposed in the passageway 75 includes a cart 80 that can freely run on a fixed traveling path 79 along the front surface of the art object storage section 74, and a support frame 81 erected from above the cart 80. The lift table 82 is guided by a guide body disposed within the support frame 81, and a transfer device 83 is provided on the lift table 82 so as to be movable laterally. A through passage 84 is formed in the lower part of the cargo storage section 74 on one side by cutting out a part of the outer panel 72 of the main body.
is located.

In the above embodiment, the conveyor frame 10 can have the desired height by using the optimal one among the upper side plates 14 having different height dimensions. In addition, by using the optimal cover unit 18 with different width dimensions, the cargo receiver suitable for the type of cargo 3 to be handled has the part 19, and the cargo receiver suitable for the cargo 3 can be moved up and down to allow the platform 54 to move up and down. A slit portion 27 for use can be secured. At this time, the cover unit 18 can be attached to and detached from the upper side plate body 14 by moving the rosette cover unit 18 in the direction of arrow A in FIG. 1 along the fitting slope between the side surface 14a and the outer surface 18a. Furthermore, when the cover unit 18 is attached, due to the close contact between the inclined fitting surfaces described above, the cover unit 18 does not fall off from the inner end side, and the connection is strong. 14
By bringing the abutment surface 18B into sliding contact with B, it is possible to guide when the protrusion 18A is fitted into the groove 14A.

Next, the conveyance operation of the load 3 in the conveyor device 1 will be explained. For example, a cargo 3 transported by a self-propelled vehicle is unloaded onto a receiving section 19 at one end. As shown by the solid line in FIG. 1, the movable platform 40, in which the cargo receiver is positioned within the elevating slit section 27 by lowering the platform 54, is moved to one end side by the operation of the reciprocating device 46. 54 is located directly below the load 3. In this state, the elevating device 55 is operated to raise the cargo receiving platform 54 via the operating rod 58, thereby lifting the cargo 3 as shown by the imaginary line in FIG. Next, the movable base 40 is moved toward the other end on the fixed path 42 by the operation of the reciprocating device 46 in the opposite direction to that described above. Then, after placing the load 3 in front of another load receiving section 19, by lowering the lifting device 55, the load 3 is placed in the other load receiving section 19.
can be sold. As a result, it is possible to carry out sequential feeding at a predetermined pitch of pH. While performing such sequential feeding, the suction device 9 is operated. That is, the rotation of the fan 7 generates a downward flow inside the duct 6, which causes the movement from the lifting slit portion 27 to the slit 26 to the conveyor frame 1.
A flow is generated which reaches the duct 6 through the inside of the duct 6. Therefore, the dust generated at the driving part by the chino 52, the sliding part of the sliding body 45 against the rail 44, etc. is removed by the duct 6 along with the above-mentioned flow, and then discharged to the perforated underfloor. In addition, by generating a downward flow in the slit 26, the dust floating around the load 3, the load receiver part 19, and the load receiver platform 54 is drawn into the conveyor frame IO, and then flows toward the duct 6 side. obtain.

In the case of sequential feeding as described above, the last receiver is the load 3 on the section 19, for example, the first receiver is the load 3 on the section 19, and the middle receiver is the cargo 3 that is movable when the section 19 is empty. The cargo receiver is conveyed to the section 35 by the platform 40. In other words, by moving the movable base 40 with the cutout part 34 connected to the elevating slit part 27, the cargo receiving platform 54 is prevented from colliding with the cargo receiving part 35 (this cargo receiving part is positioned at the center of the part 35). Therefore, by lowering the platform 54, the cargo 3 can be placed on the cargo receiving section 35, and then the movable platform 401 is withdrawn to one end side.As a result, as shown in FIG. The load 3 is positioned in the load storage device 71.Then, by rotating the load receiving section 35 around the vertical axis 33 by the rotary drive device 36, the direction of the load 3 is changed to a state in which the transfer device 83 can act. Then, the load 3 is moved to the target storage space 73 by the combined operation of the running movement of the cart 80 in the loading/unloading device 78, the lifting/lowering movement of the lifting platform 82, and the passing movement of the receiving/transferring device 83. Also, by reverse operation, the cargo 3 in the target storage space 73 is transferred to the conveyor device 1 on the exit side.
The consignment can be delivered onto section 35.

Thereafter, the load 3 is removed by the reverse operation of the conveyor device 1 as described above.
can be conveyed to one end (outer end) side.

Effects of the Invention According to the present invention having the above configuration, dust generated within the frame can be quickly removed without being transferred to the load side, and dust floating near the load can also be removed from the frame through the lifting slit. This can prevent dust from adhering to loads such as wafers and semiconductors.

[Brief explanation of the drawing]

The drawings show one embodiment of the present invention, and FIG. III is a longitudinal sectional front view of the conveyor device, FIG. 2 is a side view of the same, FIG. . DESCRIPTION OF SYMBOLS 1... Conveyor device, 3... Load, 3a--Locked protrusion, 5... Opening, 6...-Duct, 7...-Fan,
8... Drive unit, 9... a-pulling device 1.1o--conveyor frame, 11... main body, IIA... bottom plate, I
IB...Side plate, 12-- Mounting part, 14- Upper side plate body, 14A... Concave groove, 14a... Side surface, 14B...-
The receiver is a surface, 18...Cover integrated (top plate part), 18A...-
Convex strip, 18B-・Attaching surface, 19...Consignment receiving part, 24・
・・Slit cover, 27-°° lifting slit part, 2
8...Cover, 29...Space for wiring, 35...Receiver section, 4o...-Movable platform, 41...Space for transportation, 4
2... Fixed path, 44... Rail, 46 - Reciprocating device, 54... Load receiving platform, 55... Lifting device, 71
-... Cargo storage device, 78... Loading/unloading device, 83...
Transfer device, P...predetermined pitch.

Claims (1)

[Claims] 1. In a rectangular box-shaped frame, a movable base that is supported and guided by rails provided on this frame and can move freely on a fixed path, and a reciprocating device that interlocks with this movable base are provided, and the movable base is , a load receiving table which can be raised and lowered freely and an elevating device interlocked with the load receiving table are provided, load receiving parts are provided at predetermined pitches on the top plate part of the frame, and slits for raising and lowering the load receiving table are formed. A conveyor device for a clean room, characterized in that a downward suction device is provided on the bottom plate of the frame.