JPH0411033Y2 - - Google Patents

Description

[Detailed description of the invention] (Field of industrial application) The present invention relates to a work robot that assembles parts, transfers parts, etc. in a dust-free room, and is particularly designed to dissipate dust generated from the moving parts of the robot into the dust-free room. The present invention relates to a work robot for use in a dust-free room that can prevent air pollution caused by air pollution.

(Prior technology) Workers perform tasks such as tightening screws and applying sealant during the assembly of precision instruments, and supplying printed circuit boards during the LSI manufacturing process in a dust-free room called a clean room. Recently, it has been widely used to replace work with robots and aim for highly efficient production through unmanned operation, but since work robots use lubricants in moving parts, especially sliding parts, The problem is that the solvents in the robots evaporate and the fine dust generated by robot movement scatters inside the clean room, contaminating the indoor air.

Therefore, in the past, the air inside the clean room was discharged to the outside, and the clean air from which dust was removed was supplied to the room.

(Problem that the invention aims to solve) By the way, in the conventional ventilation system that cleans the air in a clean room, dust scattered from the sliding parts of the robot falls down before being led to the exhaust duct and damages the assembled parts. Therefore, it was difficult to say that ventilation alone was a fundamental solution.

Focusing on these facts, the present invention was devised to solve the conventional problems, and by forming the sliding part of the robot, which is the source of dust, in a negative pressure region, it eliminates dust and harmful moisture. The purpose of the present invention is to prevent the scattering of dust, etc., and to discharge these directly outside the clean room to prevent indoor contamination, thereby further promoting the effective use of work robots for dust-free rooms.

(Means for Solving the Problems) Accordingly, the present invention includes a rail 1, a slide base 3 fixed to the upper part of the guide bearing 2 slidably engaged with the rail 1, and a slide base 3 parallel to the rail 1. It has a linear movement axis structure consisting of a threaded rod 4 that is rotatably provided and screwed into a nut 4a fixed to the slide base 3, and an actuator 5 such as a jig is mounted on the slide base 3,
In a work robot installed in a dust-free room,
A cover 6 is attached along the side peripheral surface and lower surface of the guide bearing 2 and the slide base 3 so that the gap between the surface of the rail 1 and the threaded rod 4 is kept as small as possible. At least, a space surrounded by the guide bearing 2, the slide base 3, and the cover 6 is formed in the exhaust chamber 7, and an end is opened on each side of the slide base 3 facing the exhaust chamber 7, and the slide In addition to providing extended air passages 11, 11 in the base 3,
Connection port 1 opened on the exposed surface of slide base 3
2, the air passages 11 and 11 are connected to each other, and an exhaust device 10 consisting of an exhaust pump 8 and an exhaust pipe 9 is connected to the connection port 12, and the air in the exhaust chamber 7 is discharged to the outside of the dust-free room through the exhaust device 10. It is characterized by being able to be forcibly discharged.

(Function) The present invention is designed for the guide bearing 2, which is a place where a lot of dust is generated in the vicinity of the slide base 3, which is a source of dust.
The sliding part of the threaded insertion part of the threaded rod 4 is covered with a cover 6 to form an exhaust chamber 7, and the chamber 7 is made into a load area communicating with the suction part of the exhaust pump 8, so that generated dust etc. It is no longer released into the clean room, and the cleanliness of the room can be maintained reliably.

Further, since the exhaust chamber 7 with the minimum space needs only to be formed in a negative pressure region, the exhaust system 10 can be made small, and the layout of the robot in the clean room can be easily arranged without being restricted.

Further, since air passages 11, 11 for exhaust are provided in the slide base 3 and communicate with one connection port 12, connection of the exhaust pipe 9 is easy. By arranging them symmetrically in the left and right directions, it is possible to achieve balanced exhaust gas by making the flow resistance uniform.

Hereinafter, one embodiment of the present invention will be described with reference to the accompanying drawings.

FIG. 1 schematically shows an example of the present invention, which is constructed as a rectangular coordinate robot and has a linear motion axis structure in two stages perpendicular to the axis.

As shown in FIGS. 2 to 8, the above-mentioned linear motion shaft structure includes a pair of rails 1, 1 extending parallel to a base serving as a base, both rails 1,
1, a slide base 3 fixed across the upper parts of the guide bearings 2, 2, and a pair of rails 1, 1 parallel to each other. It consists of a threaded rod 4 which extends and is rotatably supported at both ends by bearings and is screwed into a nut 4a fixed to a slide base 3, and a motor M which rotates this threaded rod 4. By mounting an actuator 5 such as a jig on the upper slide base 3a, the actuator 5 is configured to be able to move two-dimensionally on orthogonal coordinates using a structure of two linear motion axes.

In a work robot having such a linear motion shaft structure, each sliding part, that is, the sliding surface between the guide bearing 2 and the rail 1, and the sliding surface between the nut 4a fixed to the slide base 3 and the threaded rod 4. The contact surfaces are coated with a lubricant such as grease to prevent wear and seizure and to ensure smooth sliding.

Since this lubricant will scatter around during the linear movement of the slide base 3, covers 6 are provided at required locations to prevent the lubricant from scattering.

The cover 6 is shown in detail in FIGS. 5 to 8, and is provided along the side circumferential surfaces and lower surfaces of the guide bearing 2 and the slide base 3 to cover dust-generating areas.

In this case, the covers 6 provided along both left and right side surfaces (see FIGS. 5, 7, and 8), which are opened through the female threaded portion of the slide base 3, are attached to the threaded rod 4 and Since the arrangement is such that it intersects the rails 1, 1, it is necessary to provide a notch at each intersection.

In addition, in order to cover the portion of the lower surface of the guide bearing 2 that makes sliding contact with the rail 1, an L
Covers 6, 6 consisting of a shaped patch plate and a rectangular patch plate
are locked to the guide bearing 2 and the slide base 3, respectively.

By attaching the cover 6 to each necessary location in this way, the gap between the rail 1 and the surface of the threaded rod 4 is kept as small as possible, and the narrow space formed by covering the part where dust is generated can be created. is formed, and the above-mentioned narrow space surrounded by the guide bearing 2, the slide base 3, and the cover 6 is formed in the exhaust chamber 7.

The exhaust chamber 7 is kept in a negative pressure region with respect to the atmosphere of the clean room during robot operation, and for this purpose is connected to an exhaust system 10 comprising an exhaust pump 8 and an exhaust pipe 9.

At this time, air passages 11, 11 are provided within the main body of the slide base 3 as relay paths for communicating the exhaust chamber 7 and the exhaust device 10.

The air passage 11 is a passage whose end is open on the surface facing the exhaust chamber 7 of each surface of the slide base 3 and extended by drilling into the main body of the slide base 3. The front side and the rear side have a symmetrical shape, and the left side and right side have the same symmetrical shape.

Each of the air passages 11, 11 further communicates with a connecting port 12 opened on the exposed surface of the slide base 3, that is, a surface unrelated to the exhaust chamber 7, for example, on the top surface or the upper part of the side surface. Thus, each air passage 11, 11 is configured to branch and extend from one connection port 12.

Then, the exhaust device 10 is connected to the connection port 12, and the example shown in FIG.
Since it has a tiered structure, there is one connection port 12 provided in the upper slide base 3 on which the actuator 5 is mounted, and the lower slide base 3.
A flexible exhaust pipe 9 is connected to the connection port 12 provided in the
For example, they are connected with a hose.

In addition, since each air passage 11, 11 provided in the lower slide base 3 needs to be connected to the exhaust device 10, it is necessary to open two connection ports 12 in this slide base 3. The suction part of the exhaust pump 8 fixed to the slide base 3 is connected to the connection port 12 in the vicinity thereof via an exhaust pipe 9, while the discharge part of the exhaust pump 8 is connected to an exhaust pipe 9 of an appropriate length, such as a hose. It is connected.

In this case, the hose 9 connected to the discharge part of the exhaust pump 8 needs to be long enough to penetrate the wall of the clean room and expose the pipe end to the outside.

The work robot configured as described above discharges the exhaust chamber 7 by energizing the exhaust pump 8.
can be formed in a negative pressure region compared to the inside of the clean room, so the dust and moisture scattered from the lubricant will not be released from inside the exhaust chamber 7 toward the clean room, and the exhaust device 10 will exhaust all the dust and moisture outside the clean room. be discharged.

Therefore, the inconvenience of contaminating the inside of the clean room is eliminated.

Note that the exhaust chamber 7 is formed along the outer surfaces of the slide base 3 and the guide bearing 2, which have complex shapes, so if the exhaust is induced from one location, pressure differences will occur depending on the position, and uniform exhaustion will not be possible. Although this is not possible, in the illustrated example, the air passages 11, 11 can equalize the piping resistance to the dispersed dust generation locations, and form the exhaust chamber 7 in which the pressure is balanced.

(Effects of the invention) The present invention improves the sliding contact area of the guide bearing 2 with the rail 1, which is the place where dust is generated, and the threaded rod 4 of the slide base 3.
An exhaust chamber 7 with the minimum necessary volume is provided by the cover 6 in the sliding contact area with the slider, and this exhaust chamber 7 is provided integrally with the moving body consisting of the guide bearing 2 and the slide base 3. As soon as the generated dust moisture is generated at this location, it is captured by the exhaust device 10 and discharged outside, and even a small amount is not discharged into the clean room.

Therefore, compared to the conventional system in which air is ventilated throughout the entire clean room, dust can be captured more reliably, the dust suction efficiency is better, and the air purification function can be fully demonstrated.

Further, the end portions are opened on each side of the slide base 3 facing the exhaust chamber 7, and extend into the slide base 3 to communicate with connection ports 12 opened on the exposed surface of the slide base 3. Since the air passages 11, 11 are provided to exhaust air from the connection port 12, the piping resistance on the exhaust side for each part where dust is generated can be equalized, and balanced exhaust air from inside the exhaust chamber 7 can be achieved. It is.

Furthermore, since the exhaust chamber 7 has a small volume and communicates with the outside through a narrow gap, the exhaust pump 8 can be downsized, and moreover, it can be fixed to the slide base 3 and brought close to the exhaust chamber 7. If installed, the dust suction efficiency can be further improved and further downsizing can be promoted.

As a result, not only can the work robot itself be made more compact, but the layout of the work robot is easier because there is no need for a large exhaust device in the clean room, and work efficiency is significantly improved. be done.

[Brief explanation of the drawing]

FIG. 1 is a schematic skeletal structure diagram according to an embodiment of the present invention, and FIGS. 2 to 4 are a front view, a sectional plan view, and a right side view of the linear motion shaft structure. Fifth
The figure is an enlarged partial view of the slide base in Figure 3, Figure 6 is a sectional view taken along the line A-A in Figure 5,
Figure 7 is a side view taken along arrow B-B in Figure 5;
The figure is an enlarged left side view of the slide base in FIG. 3. 1...Rail, 2...Guide bearing, 3...Slide base, 4...Threaded rod, 4a...Nut, 5
... Actuator, 6 ... Cover, 7 ... Exhaust chamber, 8 ... Exhaust pump, 9 ... Exhaust pipe,
10...Exhaust device, 11...Air passage, 12...
Connection.

Claims (1)

[Scope of utility model registration request] a rail 1; a slide base 3 fixed to the upper part of a guide bearing 2 slidably engaged with the rail 1; a slide base 3 rotatably provided parallel to the rail 1;
and a nut 4 fixed to the slide base 3.
In a working robot, which has a linear motion shaft structure consisting of a threaded rod 4 screwed into the slide base 3, has an actuator 5 such as a jig mounted on the slide base 3, and is disposed in a dust-free room, the guide bearing 2,
A cover 6 is installed along the side peripheral surface and lower surface of the slide base 3 so that the gap between the rail 1 and the surface of the threaded rod 4 is kept as small as possible.
is applied to form a space surrounded by the guide bearing 2, the slide base 3 and the cover 6 in the exhaust chamber 7, while an end is opened on each side of the slide base 3 facing the exhaust chamber 7, and , an air passage 1 extending into the slide base 3
1 and 11 respectively, and a slide base 3
The air passages 11, 11 are connected to the connection port 12 opened on the exposed surface of the exhaust chamber 7, and the exhaust device 10 consisting of the exhaust pump 8 and the exhaust pipe 9 is connected to the connection port 12, and the air inside the exhaust chamber 7 is discharged. Exhaust device 1
1. A working robot for a dust-free room, characterized in that it is capable of forcibly discharging dust to the outside of the dust-free room through a vacuum cleaner.