JPH0412616B2 - - Google Patents
Info
- Publication number
- JPH0412616B2 JPH0412616B2 JP59022610A JP2261084A JPH0412616B2 JP H0412616 B2 JPH0412616 B2 JP H0412616B2 JP 59022610 A JP59022610 A JP 59022610A JP 2261084 A JP2261084 A JP 2261084A JP H0412616 B2 JPH0412616 B2 JP H0412616B2
- Authority
- JP
- Japan
- Prior art keywords
- acid
- group
- concentrated
- inorganic
- epitaxial wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P70/00—Cleaning of wafers, substrates or parts of devices
- H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59022610A JPS60167333A (ja) | 1984-02-09 | 1984-02-09 | 無機化合物エピタキシヤルウエハ表面のしみ除去方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59022610A JPS60167333A (ja) | 1984-02-09 | 1984-02-09 | 無機化合物エピタキシヤルウエハ表面のしみ除去方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60167333A JPS60167333A (ja) | 1985-08-30 |
| JPH0412616B2 true JPH0412616B2 (de) | 1992-03-05 |
Family
ID=12087605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59022610A Granted JPS60167333A (ja) | 1984-02-09 | 1984-02-09 | 無機化合物エピタキシヤルウエハ表面のしみ除去方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60167333A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103014875B (zh) * | 2012-11-30 | 2015-10-21 | 甘肃虹光电子有限责任公司 | 一种人造蓝宝石薄片的处理方法 |
-
1984
- 1984-02-09 JP JP59022610A patent/JPS60167333A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60167333A (ja) | 1985-08-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |