JPH041262Y2 - - Google Patents

Description

[Detailed description of the invention] [Summary] The invention is a cassette device with a closed structure,
The opening/closing door is designed to open and close automatically, and when the cassette device is placed in a predetermined position on the carrier station, the electrical contacts are automatically connected.
The present invention proposes a completely dust-proof cassette device in which the drive unit moves the door of the cassette device upwards and when the electrical contacts are separated, the door automatically closes.

[Industrial Field of Application] The present invention relates to a cassette device, and particularly to automation of an opening/closing door.

Effective dustproofing has become a major issue in many fields, including the manufacturing process of semiconductor devices, but especially for cassette devices that are frequently opened and closed, there is a demand for dustproof cassette devices that open and close automatically only when necessary. ing.

[Prior Art] A conventional cassette device for storing parts is usually a hexahedron, one side of which is an opening/closing door.

For example, in a manufacturing process that requires strict dustproofing, such as the manufacturing process of semiconductor devices, parts are stored in a cassette device, and the parts are only transported outside the cassette device. The door is opened and closed manually, but if the number of times is increased, it becomes complicated to open and close the door each time, and the door remains open, causing foreign matter to adhere to the parts.

[Problems to be solved by the invention] A problem with conventional cassettes for storing parts is that the opening and closing doors are manually opened and closed, making opening and closing complicated.

[Means for Solving the Problems] The present invention provides a cassette device for solving the above-mentioned problems. When a cassette device having a When the cassette device rotates and the opening/closing door of the cassette device is opened by the drive shaft and pinion-rack mechanism, and the electrical contacts are separated, the opening/closing door is automatically closed by its own weight.

[Function] The present invention automatically opens and closes the opening/closing door of the cassette device only at necessary positions in the manufacturing process, and seals it when not required, thereby significantly increasing the dustproof effect.

[Embodiment] FIG. 1 is a schematic sectional view of the main parts of a cassette device according to the present invention.

There is a cassette device 1 which is formed into a hexahedron using a material such as fluororesin or polypropylene, and is composed of a cassette main body 2 and an opening/closing door 3 whose front portion moves up and down.

The opening/closing door 3 is configured to slide smoothly via a bearing (not shown) with a guide 4 provided on the cassette main body.

The movement mechanism of the opening/closing door 3 is such that the movement of the opening/closing door 3 is carried out by a pinion 7 provided on the shaft 6 of a drive motor, which is a drive unit 5 disposed on the upper part of the cassette body, and a rack 8 formed on the end face of the opening/closing door. This drive is connected to electrical contacts 9 provided at the bottom of the cassette device.

On the carrier station 10 there is an electrical contact 1
1, the cassette device is placed at a predetermined position on the carrier station as shown by the arrow, the electrical contacts are automatically connected, and the drive unit 5 is rotated by being energized by the power source 12.

Therefore, the opening/closing door moves to the top and opens. When the work is finished and the cassette is pulled away from the carrier station, the motor is automatically disconnected and the opening/closing door is opened by gravity and its own weight. Descend and close the door.

Therefore, there is no complication in opening and closing the opening/closing door unlike in the past, and there is an advantage that dustproofness is completely maintained.

[Effects of the invention] As explained above in detail, the cassette device according to the present invention is extremely easy to handle and is completely dust-proof, so that the parts stored using this cassette device are It has the great effect of being completely dustproof and providing parts of excellent quality.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of the cassette device of the present invention. In the figure, 1 is the cassette device, 2 is the cassette main body, 3 is the opening/closing door, 4 is the guide, 5 is the drive section,
6 is a shaft, 7 is a pinion, 8 is a rack, 9 is an electrical contact, 10 is a carrier station, 11 is an electrical contact, and 12 is a power source.

Claims (1)

[Claims for Utility Model Registration] A cassette device 1 comprising a drive unit 5 connected to an electric contact 9 and an opening/closing door 3 that moves by the drive unit, a pinion 7 and a rack 8, and a carrier equipped with an electric contact 11. station 1
When the cassette is placed on the carrier station, the electrical contact 9 of the cassette device and the electrical contact 11 provided on the carrier station are connected, and the drive section rotates to open the opening/closing door 3 of the cassette.
The cassette device is characterized in that when the door is opened and the connection between the electrical contact 9 of the cassette device and the electrical contact 11 provided on the carrier station is separated, the opening/closing door 3 is closed by its own weight.