JPH0412649U - - Google Patents
Info
- Publication number
- JPH0412649U JPH0412649U JP5248690U JP5248690U JPH0412649U JP H0412649 U JPH0412649 U JP H0412649U JP 5248690 U JP5248690 U JP 5248690U JP 5248690 U JP5248690 U JP 5248690U JP H0412649 U JPH0412649 U JP H0412649U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- lid
- wafer container
- protrusion
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 7
- -1 polypropylene Polymers 0.000 claims 2
- 239000004698 Polyethylene Substances 0.000 claims 1
- 239000004743 Polypropylene Substances 0.000 claims 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 claims 1
- 229920000573 polyethylene Polymers 0.000 claims 1
- 229920001155 polypropylene Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Description
第１図ａ及び第１図ｂは、この考案の第１の実
施例を説明する、ウエハー容器の外形図、第２図
は第１図のウエハー容器の断面図、第３図はこの
考案の他の実施例を示す、本体の外形図、第４図
はこの考案の他の実施例を示す、蓋の外形図、第
５図はこの考案の第２の実施例を説明する、ウエ
ハー容器の外形図、第６図は突起部分の拡大断面
図、第７図は従来のウエハー容器の外形図、第８
図はこの考案の別の実施例を示す、ウエハー容器
の外形図である。
１……本体、２……蓋、３……ウエハー、４…
…突起、５……爪、６……溝、７……突起部分の
厚み、１４……バネ、４１，４２……突起。
Figures 1a and 1b are external views of a wafer container explaining the first embodiment of this invention, Figure 2 is a sectional view of the wafer container of Figure 1, and Figure 3 is a diagram of the wafer container of this invention. FIG. 4 is an outline drawing of the lid, showing another embodiment of the invention; FIG. 5 is an outline drawing of the wafer container, showing a second embodiment of the invention. Figure 6 is an enlarged sectional view of the protruding portion, Figure 7 is an outline diagram of a conventional wafer container, and Figure 8 is an outline diagram of a conventional wafer container.
The figure is an external view of a wafer container showing another embodiment of this invention. 1...Body, 2...Lid, 3...Wafer, 4...
...Protrusion, 5...Claw, 6...Groove, 7...Thickness of protrusion portion, 14...Spring, 41, 42...Protrusion.
Claims (1)
とからなる容器において、本体と蓋の両方または
いずれか一方にウエハーを押圧固定するための突
起を設けたことを特徴とするウエハー容器。 (2) 蓋に一体整形された弾性爪を設け、この弾
性爪を本体に整形された溝に係合させることによ
つて本体と蓋とを相互に固定することを特徴とす
る請求項(1)記載のウエハー容器。 (3) 本体内壁が多角錐状の凹部をなすことを特
徴とする請求項(2)記載のウエハー容器。 (4) 突起を形成する部分は、材質がポリプロピ
レンまたはエチレンプロピレンであり、かつ厚み
が０．２mm以上０．７mm以下であることを特徴と
する請求項(1)，(2)または(3)記載のウエハー容
器。 (5) 突起を形成する部分は、材質がポリエチレ
ンであり、かつ厚みが０．３mm以上１mm以下であ
ることを特徴とする請求項(1)，(2)または(3)記
載のウエハー容器。[Scope of Claim for Utility Model Registration] (1) A container consisting of a main body and a lid for storing semiconductor wafers, in which a protrusion for press-fixing the wafer is provided on both or one of the main body and the lid. Characteristic wafer container. (2) Claim (1) characterized in that the lid is provided with an integrally formed elastic claw, and the main body and the lid are fixed to each other by engaging the elastic claw with a groove formed in the main body. ) Wafer container. (3) The wafer container according to claim (2), wherein the inner wall of the main body forms a polygonal pyramid-shaped recess. (4) Claim (1), (2) or (3), wherein the portion forming the protrusion is made of polypropylene or ethylene propylene, and has a thickness of 0.2 mm or more and 0.7 mm or less. Wafer container as described. (5) The wafer container according to claim (1), (2) or (3), wherein the portion forming the protrusion is made of polyethylene and has a thickness of 0.3 mm or more and 1 mm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5248690U JPH0412649U (en) | 1990-05-18 | 1990-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5248690U JPH0412649U (en) | 1990-05-18 | 1990-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0412649U true JPH0412649U (en) | 1992-01-31 |
Family
ID=31572830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5248690U Pending JPH0412649U (en) | 1990-05-18 | 1990-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0412649U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7780440B2 (en) | 2004-10-19 | 2010-08-24 | Canon Anelva Corporation | Substrate supporting/transferring tray |
-
1990
- 1990-05-18 JP JP5248690U patent/JPH0412649U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7780440B2 (en) | 2004-10-19 | 2010-08-24 | Canon Anelva Corporation | Substrate supporting/transferring tray |