JPH04134100U - Window device in ion irradiation equipment - Google Patents

Abstract

(57) [Summary] [Purpose] To simplify the mounting structure of the vacuum sealing membrane and shorten the replacement time in an ion irradiation device. [Structure] The sealing film 7 is attached to the atmosphere side end of the cylindrical window 13 with an adhesive. Cylindrical window 13
is inserted and fitted into the inner circumference of the conflat flange 12, and a vacuum seal having an O-ring 16 is attached to the inner circumference.
A round part is formed. If the sealing film is torn, the cylindrical window 13 is removed and replaced with a spare cylindrical window to which the sealing film is adhered.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

This invention is applied to the extraction part of the ion beam into the atmosphere in the ion irradiation equipment. The present invention relates to a window device provided.

0002

[Conventional technology]

When extracting the ion beam from inside the irradiation equipment body to the atmosphere, the inside of the irradiation equipment body must be Since the ion beam is in a vacuum state, the ion beam extraction section has no way of passing the ion beam. A thin film for vacuum sealing is installed to prevent the inside of the irradiation device from affecting the output. It is isolated from air and kept in a vacuum. FIG. 2 shows a cross-sectional view of the attachment part of such a sealing film. Then, a window 3 is attached to the flange 2 of the beamline duct 1, and this The window 3 has an opening 4 through which the ion beam passes. Flange 2 and window 3 Although not shown, the vacuum seal connection uses an asymmetric edge and a copper gasket. The well-known conflat flange method is adopted. Atmospheric edge of window 3 A vacuum seal part 6 having an O-ring 5 is formed at the end and covers the opening 4. A sealing film 7 is arranged. The membrane 7 is attached to the window 3 in close contact with the O-ring 5. A membrane presser 8 presses the peripheral part of the membrane 7 against the atmosphere side end of the window 3 so that the membrane 7 is The flange 9 of this membrane holder 8 is a stepped part formed on the window 3, and the membrane holder is fixed. It is fixed to part 10 with bolts 11.

0003

[Problem that the idea aims to solve]

In this way, the conventional device uses a film presser to attach the sealing film 7 to the window 3. 8, and by fixing this membrane holder to the window 3 with bolts 11, the membrane 7 is attached in close contact with the window 3 to maintain a vacuum state within the irradiation device main body. However, when an ion beam of several MeV to several tens of MeV is extracted into the atmosphere, In this case, the membrane 7 is extremely delicate and thin, with a thickness of several μm, so it may not break. It is easy to replace the membrane 7 each time, but the mounting bolts 11 There are many membranes, and careful tightening is required, and it takes time to replace the membranes. It has the disadvantage of being inefficient. In addition, the membrane presser 8, which is required separately, should be fully attached to the O-ring. In order to press down and prevent vacuum leaks, use a wall with a thickness of at least 1 mm. However, an air layer of this thickness is required for the ion beam to pass through. .

0004 The present invention solves the problems of such conventional devices, and it In addition to simplifying the structure and making it easy to remove and replace, A window that allows the object to be irradiated by the beam to be brought as close to the membrane as possible. The purpose of this project is to provide a c-device.

[0005]

[Means to solve the problem]

The present invention is a window device in an ion irradiation device. a flange coupled to a duct and having an O-ring in a groove on its inner peripheral surface; A cylindrical window that fits on the inner peripheral surface of the window, and a cylindrical window that is attached to the end surface of the window. The invention is characterized by comprising a sealed sealing film.

[0006]

[Effect]

A sealing film is pasted on a cylindrical window with adhesive, and this window is exposed to a beam. The window is made by fitting into the inner peripheral surface of the flange connected to the line duct. Attach to the flange. The outer periphery of the window is placed on the inner periphery of the flange. The beam line and duct, and therefore the irradiation equipment itself, are in close contact with the O-ring. kept in condition. The cylindrical window has a membrane pasted on it that absorbs the difference between vacuum pressure and atmospheric pressure. It is held by the flange because pressure is applied. Cylindrical window with attached membrane By preparing the Since there are no parts located closer to the atmosphere than the membrane surface, the irradiated object can be placed closer to the membrane. Can be placed.

[0007]

【Example】

FIG. 1 shows a cross-sectional view of one embodiment of the present invention, showing the flange of the beamline duct 1. A conflat flange 12 is coupled to the conflat flange 12. A cylindrical window 13 is fitted onto the inner peripheral surface of the cylindrical window 13 . Atmospheric side of cylindrical window 13 A membrane attachment part 14 is formed at the end, and the sealing membrane 7 is applied with adhesive to this attachment part 14. It is attached using. This sealing film 7 has a thickness of about 7.5 μm. Kapton film is used for resin, titanium foil and aluminum are used for metal. Luminium foil, beryllium foil, Haver foil, etc. are used. Confra An O-ring 16 is placed in the groove 15 formed on the inner circumference of the cut flange 12, and the It constitutes an empty seal section. On the opposite side of the membrane attachment part 14 of the cylindrical window 13 A flange portion 17 is formed, and this flange portion is seated on a stepped portion 18 of the conflat flange 12. This increases the reach of atmospheric pressure to the vacuum seal part and promotes the vacuum seal effect. There is.

[0008] After pasting the sealing film 7 on the cylindrical window 13 with adhesive in advance, Insert and fit the doe into the conflat flange 12. In the vacuum state, the sealing film 7 and The space between the cylindrical windows 13 is attached to the cylindrical window 13 using adhesive for pasting. The space between the flat flange 12 is maintained by an O-ring 16. cylindrical window Since the differential pressure between the vacuum pressure and atmospheric pressure acts on the sealing film 7 stuck to the cylindrical tube 13, The window 13 is held in the conflat flange 12 and will not come off.

[0009]

[Effect of the idea]

Always have two or three spare cylindrical windows 13 with sealing films glued on hand. This allows the membrane to be replaced immediately if it breaks. The replacement process is simply Remove the cylindrical window with a torn membrane from the conflat flange and replace it with a new one. Just insert and fit into the flange, so there is no need to tighten bolts like conventional technology. It is extremely simple compared to something that requires skill and requires consideration of torque. , can be carried out in almost no time, and the replacement time is significantly reduced.

0010 In addition, the structure is a cylindrical window with a sealing film glued on, and an O-ring on the inner periphery. Is it intended to be fitted to a conflat flange that has a vacuum seal part? It is very simple with a small number of parts, and each part is easy to process, reducing costs. It is also inexpensive to use.

[0011] In the conventional technology, the film is pushed about 1 mm closer to the atmosphere than the sealing film. Although there is a thick part of the membrane, in this invention there is a member located on the atmosphere side from the membrane surface. Therefore, it is necessary to place the irradiated object closer to the membrane, even if it is within 1 mm. The effective air layer through which the ion beam passes can be made thinner. Ru.

[Brief explanation of drawings]

FIG. 1 is a sectional view of an embodiment of the present invention.

FIG. 2 is a sectional view of a conventional example.

[Explanation of symbols]

1 Beamline duct 7 Vacuum sealing film 12 Conflat Flange 13 Cylindrical window 14 Membrane attachment part 15 groove 16 O-ring

Claims (1)

[Scope of utility model registration request] Claim 1: A flange that is connected to a beam line duct and has an O-ring in a groove on its inner circumferential surface, a cylindrical window that fits into the inner circumferential surface of the flange, and a cylindrical window that is attached to an end surface of the window. 1. A window device for an ion irradiation device, characterized in that it is provided with a sealed sealing film.