JPH041341U - - Google Patents
Info
- Publication number
- JPH041341U JPH041341U JP4052290U JP4052290U JPH041341U JP H041341 U JPH041341 U JP H041341U JP 4052290 U JP4052290 U JP 4052290U JP 4052290 U JP4052290 U JP 4052290U JP H041341 U JPH041341 U JP H041341U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- exhaust
- air
- blower
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Description
第１図は、クリーンルーム内外の各設備の配置
を示す概略平面図である。第２図は、クリーンル
ーム内で使用するクリーンベンチの概略側面断面
図である。
３……クリーンベンチ、１１……吸気用送風機
、１７……排気用送風機、１８……作業室。
FIG. 1 is a schematic plan view showing the arrangement of equipment inside and outside the clean room. FIG. 2 is a schematic side sectional view of a clean bench used in a clean room. 3...Clean bench, 11...Intake blower, 17...Exhaust blower, 18...Work room.
Claims (1)
、供給する空気をクリーンルーム外から取り、該
空気の供給量に対して排気量を１．０〜１．１倍
に設定した局所排気設備を組込んだクリーンベン
チを有する、ことを特徴とするクリーンルーム。 (2) 請求項１記載のクリーンルームにおいて、
クリーンベンチは、空気を清浄にするフイルタと
、該フイルタの下流に配置した吸気用送風機と、
該吸気用送風機の下流に配置されかつクリーンル
ーム内に連通可能な作業室と、該作業室の下流に
配置した排気用送風機と、を有し、排気用送風機
の排気量を吸気用送風機の吸気量の１．０〜１．
１倍に設定し、これによつて、前記作業室内の排
気圧をクリーンルーム内の空気圧の１．０〜１．
１倍に設定する、ことを特徴とするクリーンルー
ム。[Scope of claim for utility model registration] (1) Separately from the air supplied into the clean room, the supplied air is taken from outside the clean room, and the exhaust volume is increased to 1.0 to 1.1 times the amount of air supplied. A clean room characterized by having a clean bench incorporating set local exhaust equipment. (2) In the clean room according to claim 1,
The clean bench includes a filter that cleans the air, an intake blower placed downstream of the filter,
It has a work chamber that is placed downstream of the intake blower and can communicate with the inside of the clean room, and an exhaust blower that is placed downstream of the work chamber, and the exhaust amount of the exhaust blower is equal to the intake amount of the intake blower. 1.0 to 1.
By setting the exhaust pressure in the working chamber to 1.0 to 1.1 times the air pressure in the clean room.
A clean room characterized by a setting of 1x.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4052290U JPH041341U (en) | 1990-04-16 | 1990-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4052290U JPH041341U (en) | 1990-04-16 | 1990-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH041341U true JPH041341U (en) | 1992-01-08 |
Family
ID=31550383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4052290U Pending JPH041341U (en) | 1990-04-16 | 1990-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041341U (en) |
-
1990
- 1990-04-16 JP JP4052290U patent/JPH041341U/ja active Pending
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