JPH0414355U - - Google Patents
Info
- Publication number
- JPH0414355U JPH0414355U JP1990054908U JP5490890U JPH0414355U JP H0414355 U JPH0414355 U JP H0414355U JP 1990054908 U JP1990054908 U JP 1990054908U JP 5490890 U JP5490890 U JP 5490890U JP H0414355 U JPH0414355 U JP H0414355U
- Authority
- JP
- Japan
- Prior art keywords
- support member
- rod
- exchange rod
- tip
- convex portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990054908U JPH0414355U (cs) | 1990-05-25 | 1990-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990054908U JPH0414355U (cs) | 1990-05-25 | 1990-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0414355U true JPH0414355U (cs) | 1992-02-05 |
Family
ID=31577390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990054908U Pending JPH0414355U (cs) | 1990-05-25 | 1990-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414355U (cs) |
-
1990
- 1990-05-25 JP JP1990054908U patent/JPH0414355U/ja active Pending
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