JPH0414432Y2 - - Google Patents

Description

[Detailed description of the invention] [Field of industrial application] The present invention relates to a heat-resistant ceramic jig used for glass sealing to metal or ceramic members such as electronic parts and mechanical parts. The present invention relates to a ceramic jig for glass sealing whose base material is a non-oxide ceramic sintered body such as porous silicon carbide or silicon nitride that is sintered without shrinking.

[Conventional technology]

Conventionally, in order to seal glass to metal or ceramic members such as electronic parts or mechanical parts, it is necessary to use a base material that can sufficiently withstand the heat and various stresses applied to the member, and has enough strength to firmly support the member. have,
In addition, in view of the need for positioning accuracy and fixing accuracy of processed products, jigs made of graphite material are mainly used.

The graphite material is generally able to maintain its crystalline state until sublimation at a high temperature of around 3,360°C, so it is an extremely excellent high-temperature refractory material in a non-oxidizing atmosphere, but at high temperatures in an oxidizing atmosphere, It has the property of being easily oxidized and worn out, and due to oxidized wear and tear, the dimensional accuracy of the jig, especially at the corners, decreases, resulting in a decrease in the positioning accuracy of metal or ceramic parts such as electronic parts and mechanical parts, which interferes with glass sealing. It may cause

In view of these circumstances, the surface of graphite material
Attempts are being made to prevent oxidative consumption by forming SIC compounds.

However, the jig made of graphite material is
When compounding, a volume change occurs in the relevant part, making it difficult to create a jig with high dimensional accuracy.Also, the sic surface has wettability with glass, so molten glass may stick to it. It was causing inconvenience.

[Problem that the invention attempts to solve]

In view of the above-mentioned state of the prior art, the present invention consists of a heat-resistant non-oxidized ceramic body whose main body is mainly made of a non-oxide ceramic sintered body, and whose part that comes into direct contact with the glass of the workpiece is resistant to getting wet by molten glass. By providing a ceramic jig made of a ceramic fired body, we eliminate the drawbacks of conventional graphite jig, such as a decrease in dimensional accuracy of the jig due to oxidation wear and insufficient durability.・It has been improved and can effectively seal glass to various parts such as electronic parts and mechanical parts that require extremely high precision.

In particular, the present invention is a porous silicon carbide sintered body or silicon nitride sintered body that is sintered without substantially shrinking, and the shrinkage rate during sintering is particularly 2%.
The following properties are possible, and it is possible to provide a jig with almost the same shape without substantially shrinking the formed body molded into a jig of a desired shape, so it is possible to provide a jig with almost the same shape, especially when high dimensional accuracy is required. It is possible to provide various complex-shaped jigs used for glass sealing various parts such as electronic parts and mechanical parts at a relatively low cost and without special machining. be.

[Means and actions for solving problems]

The present inventors had previously found a new method for minimizing shrinkage during sintering of silicon carbide sintered bodies, etc., and published JP-A-59-267006 and JP-A-59-267007, etc. We proposed patent applications related to ``silicon carbide sintered bodies with excellent heat-resistant jigs'' and ``nitride sintered bodies with excellent dimensional accuracy and heat-resistant nitride sintered bodies with excellent dimensional accuracy for use in jigs.'' ing. That is, a formed body formed into a desired shape using a jig of various shapes is inserted into a heat-resistant container in which the firing atmosphere of the formed body can be controlled, and non-oxide ceramics, which are the main components of the formed body during firing, are Sintered bodies of various non-oxide ceramics whose volatilization rate of the main component, such as silicon carbide or silicon nitride, is controlled to 5% or less, and which has a shrinkage rate of at least 2% or less without substantially shrinking during firing. Even if the jig has a desired complex shape, it is possible to obtain a jig with almost the same shape as the formed object without any special machining after firing. Even if the jig requires dimensional accuracy, a jig member with excellent heat resistance, oxidation resistance, abrasion resistance, and dimensional accuracy can be obtained easily and quickly at low cost.

Among them, porous non-oxide sintered bodies mainly composed of silicon carbide or silicon nitride have a density of 1.4 to 2.6.
g/cm ³ and has practical mechanical strength with an average bending strength of 7 Kg/mm ² or more, making it suitable as a material for heat-resistant jigs. It also has extremely excellent wear resistance and chemical resistance. , it is possible to eliminate and improve the decrease in dimensional accuracy due to oxidative wear, which is the biggest drawback of conventional jigs.

By the way, as mentioned above, silicon carbide or silicon nitride sintered bodies have high strength, excellent wear resistance, oxidation resistance, corrosion resistance, and good thermal conductivity, and are widely used as various heat-resistant structural materials. However, when used for a long time in an oxidizing atmosphere at high temperatures, an extremely thin oxidized film of _two layers of SiO2 is formed on the surface. Since this SiO ₂ film is glassy, it has extremely good compatibility and wettability with molten glass, and when used as it is as a jig for glass sealing, which is the main purpose of this invention, it can be used for electronic components. The parts of various metal members such as metal parts and mechanical parts that come into direct contact with the glass may become wet with the molten glass and become fused or adhered to the glass, causing inconveniences.

Therefore, the inventors of the present invention have developed a method that allows the molten glass to adhere to the surface of the jig during glass sealing, does not cause dimensional reduction due to oxidative wear even under oxidizing high temperatures, and is suitable for jigs with various complex shapes. The main body of the jig is a porous non-oxide sintered body that requires almost no special post-processing such as machining, and the part of the jig body that comes into direct contact with the glass is wetted with the glass. The present invention was completed by devising a ceramic jig for sealing glass using a heat-resistant non-oxide sintered body such as a graphite material with extremely low susceptibility or a boron nitride sintered body.

Hereinafter, the present invention will be specifically explained based on embodiments shown in the drawings.

FIG. 1 is a perspective view of a ceramic jig for glass sealing of the present invention, and 1 is a jig body made of a non-oxide ceramic sintered body, for example, silicon carbide or silicon nitride sintered body. . Although the dimensions and plate thickness of this jig main body are determined depending on its intended use, it is advantageous to form the jig into a desired shape in advance at the stage of producing the formed body. The reason for this is that the non-oxide ceramic sintered body used in the jig body of the present invention is sintered without substantially shrinking, and the shrinkage rate during sintering is 2%. It is possible to advantageously use various types of porous sintered ceramics having a practical strength of 1.4 to 2.6 g/cm ³ and a density of 1.4 to 2.6 g/cm 3 . This is because a heat-resistant jig with excellent dimensional accuracy can be provided. In particular, silicon carbide or silicon nitride sintered bodies have less wettability with glass than oxide-based sintered bodies, and silicides have excellent oxidation resistance because a thin film of SiO ₂ forms on the surface at high temperatures. Therefore, it is suitable as a base material that is used repeatedly at high temperatures like this type of jig.

2 is a heat-resistant non-oxide fired body, particularly preferably boron nitride (BN), which has extremely low wettability with glass, or various carbon materials such as natural scale-like or earthy graphite, artificial graphite, pyrolytic graphite, It is a fired body made of one or more materials such as carbon black, glassy carbon, pyrolytic carbon, and carbon fiber. These carbon materials include not only graphitic materials that have been graphitized to some extent, but also carbonaceous materials that are mainly composed of amorphous carbon. Since both the carbon material and boron nitride have extremely low wettability with glass, it is advantageous to use carbon material or boron nitride for the portion of the jig that comes into direct contact with the glass.

In particular, as shown in the cross-sectional views of FIGS. 2 and 3, in the ceramic jig for glass sealing of the present invention, parts that come into direct contact with glass, that is, metal or ceramic members such as electronic parts and mechanical parts, or sealing It is preferable that the part 2 of the jig, on which the wearing glass is placed in direct contact with it, is mounted in a state that protrudes from the surface of the jig body 1, and in particular, the jig body 1 has a plurality of through holes, etc. In view of the above, it is preferable that the heat-resistant non-oxide fired body has a cylindrical shape such as a cylindrical ring or a polygonal prism, or a shape similar to this. The reason for this is that by inserting the cylindrical ring body etc. into the through hole of the jig main body, the cylindrical ring body which has been consumed by oxidation can be easily and quickly replaced with a new one. Moreover, it is preferable that the cylindrical ring body is provided with a pore or a hole 3 in the center thereof. The reason is that it is convenient for absorbing thermal stress and mechanical stress. Also,
When inserting the cylindrical ring body into the through hole, it is convenient because it is highly elastic.

Note that the jig main body is made of TiC, TaC, B ₄ C, WC, in addition to the silicon carbide and silicon nitride mentioned above.
It may be a non-oxide ceramic sintered body such as carbide, nitride, or boride such as Cr ₃ C ₂ , BN, TiN, TaN, AlN, TiB, CrB ₂ . These ceramic sintered bodies have less wettability with glass than oxide-based ceramic sintered bodies, and even if the sealing glass spills onto the surface of the jig body other than the component placement part 2, the glass will not melt. This is because it is less likely to be contaminated by dirt and is relatively inert, so even if the metal or ceramic member to be glass-sealed comes into contact with the surface of the jig body, it is less likely to be contaminated. .

[Effect of idea]

As described above, according to the present invention, ceramic jigs with complex shapes can be produced at low cost, with glass for sealing being difficult to adhere to, with little oxidation wear and tear, and excellent durability, and which do not necessarily require special mechanical finishing. It can be provided easily and easily, and is extremely useful in this field of industry.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of a ceramic jig for sealing glass according to the present invention, and FIGS. 2 and 3 are longitudinal sectional views showing an example of the ceramic jig for sealing glass according to the present invention. 1... jig body made of non-oxide ceramics,
2...Component mounting part made of heat-resistant non-oxide fired material,
3... Pores in cylinder rings, etc.

Claims (1)

[Claims for Utility Model Registration] 1. A jig made of heat-resistant ceramics used for glass-sealing metal or ceramic members such as electronic parts and mechanical parts, the main body of which is mainly made without substantially shrinking. It is sintered, and the shrinkage rate during sintering is 2% or less,
It is made of a ceramic sintered body of carbide or nitride with a density of 1.4 to 2.6 g/cm ³ , and the part of the jig that comes into direct contact with the sealing glass is made of a heat-resistant non-oxide sintered body that does not easily wet the sealing glass. A ceramic jig for glass sealing consisting of a solid body. 2. The jig according to claim 1, wherein the heat-resistant non-oxide fired body is made of one or more of boron nitride or carbon material.