JPH04149083A - Carbon material having oxidation resistance at high temperature - Google Patents
Carbon material having oxidation resistance at high temperatureInfo
- Publication number
- JPH04149083A JPH04149083A JP2269423A JP26942390A JPH04149083A JP H04149083 A JPH04149083 A JP H04149083A JP 2269423 A JP2269423 A JP 2269423A JP 26942390 A JP26942390 A JP 26942390A JP H04149083 A JPH04149083 A JP H04149083A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- layer
- sic
- thin film
- oxidation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 40
- 230000003647 oxidation Effects 0.000 title claims abstract description 39
- 239000003575 carbonaceous material Substances 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 52
- 239000010409 thin film Substances 0.000 claims abstract description 27
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 24
- 229910052703 rhodium Inorganic materials 0.000 claims abstract description 22
- 229910052741 iridium Inorganic materials 0.000 claims abstract description 19
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 7
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 6
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 6
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 5
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 4
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 4
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 claims abstract 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 26
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 26
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052799 carbon Inorganic materials 0.000 abstract description 13
- 239000010408 film Substances 0.000 abstract description 13
- 239000002131 composite material Substances 0.000 abstract description 11
- 229910052751 metal Inorganic materials 0.000 abstract description 11
- 239000002184 metal Substances 0.000 abstract description 11
- 238000005229 chemical vapour deposition Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 10
- 229920000049 Carbon (fiber) Polymers 0.000 abstract description 4
- 239000004917 carbon fiber Substances 0.000 abstract description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 3
- 229910008425 Si—Al2O3 Inorganic materials 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 49
- 238000000576 coating method Methods 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 11
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 11
- 239000011247 coating layer Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 8
- 230000008646 thermal stress Effects 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000010406 interfacial reaction Methods 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910003465 moissanite Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 241000575946 Ione Species 0.000 description 1
- LTXREWYXXSTFRX-QGZVFWFLSA-N Linagliptin Chemical compound N=1C=2N(C)C(=O)N(CC=3N=C4C=CC=CC4=C(C)N=3)C(=O)C=2N(CC#CC)C=1N1CCC[C@@H](N)C1 LTXREWYXXSTFRX-QGZVFWFLSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- LNSPFAOULBTYBI-UHFFFAOYSA-N [O].C#C Chemical group [O].C#C LNSPFAOULBTYBI-UHFFFAOYSA-N 0.000 description 1
- -1 and then the b Inorganic materials 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- WHJFNYXPKGDKBB-UHFFFAOYSA-N hafnium;methane Chemical compound C.[Hf] WHJFNYXPKGDKBB-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 229920002239 polyacrylonitrile Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は高温耐酸化炭素材料、更に詳しくは高温耐酸化
防止対策が施された断熱用炭素材、炭素繊維、炭素−炭
素複合材料等に関し、特に宇宙往還機の耐熱構造材の外
、ガスタービン、ジェットエンジン等用の高温部材に有
利に適用できる高温耐酸化炭素材料に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to high-temperature oxidation-resistant carbon materials, and more specifically, to heat-insulating carbon materials, carbon fibers, carbon-carbon composite materials, etc. that are provided with high-temperature oxidation-resistant measures. In particular, the present invention relates to a high-temperature oxidation-resistant carbon material that can be advantageously applied to high-temperature components for gas turbines, jet engines, etc., as well as heat-resistant structural materials for spacecraft.
黒鉛あるいは炭素繊維強化炭素複合材料(以下、C/C
複合材と略称する)の高温耐酸化被覆として既に実用化
されているのは炭化ケイ素(Sin)によるもので、そ
の代表的な例を第2図によって説明する。第2図中、1
は炭素質基材、2はSi0層、4は5102層である。Graphite or carbon fiber reinforced carbon composite material (hereinafter referred to as C/C
Silicon carbide (Sin) has already been put into practical use as a high-temperature oxidation-resistant coating for composite materials (abbreviated as composite materials), and a typical example thereof will be explained with reference to FIG. In Figure 2, 1
2 is a carbonaceous base material, 2 is a Si0 layer, and 4 is a 5102 layer.
Si0層2は炭素質基材1の表面をSiと反応させるか
、あるいは化学的又は物理的蒸着によって形成される。The Si0 layer 2 is formed by reacting the surface of the carbonaceous substrate 1 with Si or by chemical or physical vapor deposition.
又、二酸化ケイ素(SiO3)層5で、Si0層2に発
生する亀裂を封止する目的で塗付等の方法により形成さ
れる。このSi0層2並びにSiO□層5が黒鉛あるい
はC/C複合材料の耐酸化被覆として機能するものであ
る。Further, a silicon dioxide (SiO3) layer 5 is formed by a method such as painting for the purpose of sealing cracks occurring in the Si0 layer 2. The Si0 layer 2 and the SiO□ layer 5 function as an oxidation-resistant coating for graphite or a C/C composite material.
すなわち、SiO2層5は1200℃以上の高温で溶融
すると酸素を透過し難い層として作用する。また、81
0層2は自己の酸化によって5tOaとなる性質を有す
ることから、S+02層5との接合性も良好であり、一
方、炭素質基材の表面を改質して形成した層であること
から、基材との接合性も良好である。810層2の作用
としては、この基材(炭素)とSiL層5を接合すると
ともに、基材(炭S)と5in2の直接の接触による炭
素の酸化(−酸化炭素の発生)、消耗を防ぐ機能が期待
されている(以上、参考文献:米国特許4.47192
3号明細書など)
次に、同じく炭素質基材の耐酸化被覆としてイリジウム
(mの適用について報告されている。この代表例を第3
図によって説明する。第3図中、1は炭素質基材、7は
b層、6は炭化チタン(TiC)又は炭化ハフニウム(
llf(1’)層である。Ir層7を基材(炭素)1の
上に化学的、物理的蒸着法、電着などの手法により直接
形成してもよいが、更に、b層7と基材1の密着性を上
げるため、先ずTiC層、)IfCfC層化学的蒸着法
によって基材1の上に形成しその後、11層7を被覆す
ることもある。Ir層7は酸素を透過し難く前述の81
02層に相当する層として作用する。TiC、Hf[:
等の炭化物層6はbと反応して、b−Ti、 Ir−H
fの金属間化合物を形成する。また、これらの炭化物は
Irに比べると炭素を含むため基材(炭素)1との親和
性がよいことが期待できる。この2点からTiC、t(
fC層をIr層と基材との密着性向上に利用しようとい
うものである(以上、参考文献: J、M、Cr1sc
ione 、 R,A。That is, when the SiO2 layer 5 is melted at a high temperature of 1200° C. or higher, it acts as a layer that is difficult for oxygen to pass through. Also, 81
Since the 0 layer 2 has the property of becoming 5tOa by self-oxidation, it has good bonding properties with the S+02 layer 5, and on the other hand, since it is a layer formed by modifying the surface of the carbonaceous base material, Bondability with the base material is also good. The function of the 810 layer 2 is to bond this base material (carbon) and the SiL layer 5, and to prevent carbon oxidation (-generation of carbon oxide) and consumption due to direct contact between the base material (carbon S) and 5in2. (Reference: U.S. Patent No. 4.47192)
3 specification, etc.) Next, the application of iridium (m) as an oxidation-resistant coating for carbonaceous substrates has also been reported.
This will be explained using figures. In Fig. 3, 1 is a carbonaceous base material, 7 is a b layer, and 6 is titanium carbide (TiC) or hafnium carbide (
This is the llf(1') layer. The Ir layer 7 may be directly formed on the base material (carbon) 1 by chemical, physical vapor deposition, electrodeposition, etc., but in order to further increase the adhesion between the B layer 7 and the base material 1. , a TiC layer,) IfCfC layer may be formed on the substrate 1 by chemical vapor deposition and then coated with the 11 layer 7. The Ir layer 7 is difficult for oxygen to pass through, and the above-mentioned 81
It acts as a layer corresponding to layer 02. TiC, Hf[:
The carbide layer 6 reacts with b to form b-Ti, Ir-H
f to form an intermetallic compound. Further, since these carbides contain carbon compared to Ir, they can be expected to have better affinity with the base material (carbon) 1. From these two points, TiC, t(
The purpose is to use the fC layer to improve the adhesion between the Ir layer and the base material (References: J, M, Cr1sc
ione, R,A.
Mercuri 、 E、P、Schram 、
八、W、Sm1th 、 and H,F。Mercuri, E., P., Schram,
8, W, Sm1th, and H,F.
Volk 、 ”High Temperature
Protective Coatings for G
raphite” ML−TDR−64−173Par
tII Oct。Volk, “High Temperature
Protective Coatings for G
raphite” ML-TDR-64-173Par
tII Oct.
1974 、 J、R,5trife 、 J、G、S
meggil and W、L。1974, J, R, 5trife, J, G, S
meggil and W,L.
Worrell “Reaction of I
ridium 1vith MetalCaebi
des in tbe Temporature
Range of 1923to 2400
K” J、Am、(:er、Soc、、 73 (4
) P 83445 、 1990など)
〔発明が解決しようとする課題〕
まず、SlO□とSiCを耐酸化被覆として使用する方
法では、以下の問題点がある。ずなわち、Sin。とS
iCとCが共存する系では、1500℃以上で生成する
ガスの総蒸気圧が1気圧を超えるため、5I02の被膜
内に気泡が発生し、被膜が破壊され耐酸化の機能が損な
われる(出典:G。Worrell “Reaction of I
ridium 1with MetalCaebi
Des in tbe Temporature
Range of 1923 to 2400
K” J, Am, (:er, Soc,, 73 (4
) P 83445, 1990, etc.) [Problems to be Solved by the Invention] First, the method of using SlO□ and SiC as an oxidation-resistant coating has the following problems. Zunawa, Sin. and S
In a system where iC and C coexist, the total vapor pressure of the gases generated at temperatures above 1500°C exceeds 1 atm, which causes bubbles to form within the 5I02 coating, destroying the coating and impairing its oxidation-resistant function (Source :G.
H,5chiroky 、 R,T、Pr1ce
、 J、E、5beehan 、 G、A。H, 5chiroky, R, T, Pr1ce
, J.E., 5beehan, G.A.
Technologies Report G八−
A 18696 (1,986) )従って、S
lO,とSiCを耐酸化被覆として利用する方法では安
定して使用できる温度の上限が1500℃付近となるた
め、これを超える温度での長時間の使用は難しい。Technologies Report G8-
A 18696 (1,986)) Therefore, S
In the method of using lO, and SiC as an oxidation-resistant coating, the upper limit of the temperature at which it can be stably used is around 1500° C., so it is difficult to use it for a long time at a temperature exceeding this.
次に、Irを耐酸化被覆として使用する方法では以下の
問題点がある。すなわち、Irは炭化物を形成せず、ま
た炭素の固溶限も低いた?hlrと炭素質基材の界面の
接合性は非常に悪い。その上1rの熱膨張率は8〜10
x 10−s/l: (1000℃以上)であるのに
対し炭素質基材は一般に熱膨張率が小さく、特にC/C
複合材料の場合1〜2X10−6/を程度であることか
ら、熱膨張率の差によって昇降温の際、界面に熱応力が
発生し容易に被膜が剥離する。Next, the method of using Ir as an oxidation-resistant coating has the following problems. In other words, Ir does not form carbides and has a low solid solubility limit for carbon. The bondability at the interface between hlr and the carbonaceous base material is very poor. Moreover, the coefficient of thermal expansion of 1r is 8 to 10
x 10-s/l: (1000°C or higher), whereas carbonaceous base materials generally have a small coefficient of thermal expansion, especially C/C
In the case of a composite material, the ratio is about 1 to 2 x 10-6/, so when the temperature is raised or lowered due to the difference in thermal expansion coefficient, thermal stress is generated at the interface and the film easily peels off.
また、炭素質基材とIr層との間にTiC、HfCを化
学蒸着する従来例においては、lrと炭化物の接合性は
界面反応によって獲得できる可能性はある。しかしTi
C0熱膨張率は約8X10−6/℃、HfCの熱膨張率
は約7xlO−’/lとIrと同程度であるため、炭素
質基材との熱膨張率差は大きく、更に蒸着によって形成
されたTiC。Furthermore, in the conventional example of chemical vapor deposition of TiC or HfC between a carbonaceous base material and an Ir layer, there is a possibility that the bondability between lr and carbide can be obtained by an interfacial reaction. However, Ti
The coefficient of thermal expansion of C0 is approximately 8X10-6/℃, and the coefficient of thermal expansion of HfC is approximately 7X1O-'/l, which is about the same as that of Ir, so the difference in coefficient of thermal expansion with the carbonaceous base material is large. TiC.
HfCと炭素質基材との界面で反応が活発に起こるとは
考えられないことから、この界面が熱応力によって剥離
するという課題は依然として残る。Since it is not considered that a reaction actively occurs at the interface between HfC and the carbonaceous base material, the problem that this interface peels off due to thermal stress still remains.
更に万一1rの被覆層が剥離その他の損傷を受けた場合
、Irを直接炭素質基材に被覆した例では、炭素質基材
が直接高温にさらされることとなり瞬時のうちに焼損し
、炭素質基材を使用する機器全体への損害が大きい。ま
た、TiC、HfC層を介してIrを被覆した例で仮に
TiC、HfC層のみが残存したとしても、これらの炭
化物表面の酸化によって生じる酸化膜、すなわち酸化チ
タン、酸化ハフニウムはSiCにおけるSiO2の如き
酸素を透過し難い性質をもたないため、炭素質基材の酸
化を防ぐための役割を果し得ない。Furthermore, in the event that the coating layer 1r is peeled off or otherwise damaged, in the case where Ir is directly coated on the carbonaceous base material, the carbonaceous base material will be directly exposed to high temperatures and will instantly burn out, causing the carbon Damage to the entire equipment that uses high-quality base materials is significant. Furthermore, even if only the TiC and HfC layers remain in an example in which Ir is coated through the TiC and HfC layers, the oxide films produced by oxidation of the surfaces of these carbides, that is, titanium oxide and hafnium oxide, are similar to SiO2 in SiC. Since it does not have a property that makes it difficult for oxygen to pass through, it cannot play a role in preventing oxidation of the carbonaceous base material.
本発明は上記技術水準に鑑み、従来材料におけるような
問題点のない高温耐酸化炭素材料を提供しようとするも
のである。In view of the above-mentioned state of the art, the present invention aims to provide a high temperature oxidation-resistant carbon material that does not have the problems of conventional materials.
本発明は炭素質基材の表面に、(a)炭化ケイ素を主成
分とする炭化物層からなる薄膜と、(b)Hf 、
Zr 、 Si 、 Cr 、 Ti 、 T
a 、 Nb及びA1のうちのいずれかの薄膜と、(
c) Ir 、 Ru及びRhのいずれかの薄膜を順次
形成させてなることを特徴とする高温耐酸化炭素材料で
ある。The present invention provides a thin film consisting of (a) a carbide layer containing silicon carbide as a main component on the surface of a carbonaceous base material, (b) Hf,
Zr, Si, Cr, Ti, T
a, a thin film of any one of Nb and A1, and (
c) A high-temperature oxidation-resistant carbon material characterized by sequentially forming thin films of Ir, Ru, and Rh.
まず、SiCとSin、を耐酸化被覆として使用する従
来技術において課題となっている1500℃以上で安定
して使用できないという点に対して、本発明では炭素質
基材表面に形成されたSiCを主成分とする炭化物層(
SiCとC)の上に、Ir、Ru及びRhを被!すると
いう手段によって解決を図っている。SiCは酸化され
ない限り2600℃付近まで安定であり、ir、Ru及
びRhによって被覆された状態であるたb1500℃以
上の温度でも使用可能となり、Rhを被覆したものは1
800〜1850t’、Ir、Ruを被覆したものは最
高2000を付近まで使用可能となる。First, in order to solve the problem of conventional technology using SiC and Sin as oxidation-resistant coatings, which cannot be stably used at temperatures above 1500°C, the present invention uses SiC formed on the surface of a carbonaceous base material. The main component is a carbide layer (
SiC and C) are coated with Ir, Ru and Rh! We are trying to solve the problem by doing this. As long as SiC is not oxidized, it is stable up to around 2600°C, and if it is coated with ir, Ru, and Rh, it can be used even at temperatures above 1500°C;
Those coated with 800 to 1850 t', Ir, and Ru can be used up to around 2000 t'.
次に、Ir単相を直接炭素質基材の上に被覆する従来技
術において課題となっている。b被覆層との界面の接合
性が不充分で剥離し易いという点に対しては、本発明で
はSiCを主成分とする炭化物層の上にHfなどの金属
の薄膜を形成し、その後、b 、Ru及びRhを被覆す
る方法により解決を図っている。Hfなどの金属の薄膜
は予備的な加熱処理か、または最初の使用時の加熱の効
果でIr 、 Ru及びRhともSiCとも反応して界
面の密着性を向上させる役割を担う。Next, there is a problem in the conventional technique of directly coating a carbonaceous base material with a single phase of Ir. In order to solve the problem that the interface with the b coating layer is insufficient and peels off easily, in the present invention, a thin film of metal such as Hf is formed on the carbide layer whose main component is SiC, and then the b , Ru and Rh are used to solve the problem. A thin film of metal such as Hf reacts with Ir, Ru, Rh, and SiC through preliminary heat treatment or heating during first use, and plays a role in improving the adhesion of the interface.
更に、Irと炭素質基材との間にTiC、HfCを蒸着
により被覆する従来技術と、Irを直接炭素質基材に被
覆する従来技術との双方にとっての課題であるIrまた
はTiC、flfcと炭素質基材との熱膨張率の差に起
因する熱応力による剥離に対しては、本発明では以下の
手段により解決を図っている。すなわち、Ir、Ru及
びRhの薄膜はSICを主成分とする炭化物層と接合さ
れており、SiCCD熱膨張率1k 5〜6 X 10
−’/ を程度で炭素質基材(特にC/C複合材料)と
比べてIr 、 Ru及びRhとの熱膨張率の差が小さ
いため、温度変動によって生じる熱応力が小さい。その
上、SiCを主成分とする炭化物層とIr、Ru及びR
hの層間には、両者と反応し易い金属(Hf。Furthermore, Ir or TiC, flfc, which is a problem for both the conventional technique of coating TiC or HfC between Ir and the carbonaceous substrate by vapor deposition, and the conventional technique of coating Ir directly on the carbonaceous substrate. The present invention attempts to solve the problem of peeling due to thermal stress caused by the difference in coefficient of thermal expansion with the carbonaceous base material by the following means. That is, the thin films of Ir, Ru, and Rh are bonded to a carbide layer mainly composed of SIC, and the SiCCD thermal expansion coefficient is 1k 5 ~ 6 x 10
Since the difference in coefficient of thermal expansion between Ir, Ru, and Rh is smaller than that of a carbonaceous base material (particularly a C/C composite material) in terms of -'/, thermal stress caused by temperature fluctuations is small. Moreover, a carbide layer mainly composed of SiC and Ir, Ru and R
Between the layers of h is a metal (Hf) that easily reacts with both.
2r、 Si、 Cr、 Ti、 Ta、 Nb及びA
l)を被覆し、加熱による反応層形成で界面の接合性が
高められているため剥離し難い。2r, Si, Cr, Ti, Ta, Nb and A
1) and is difficult to peel off because the adhesiveness at the interface is improved by forming a reaction layer by heating.
SiCを主成分とする炭化物層と炭素質基材の界面形成
法については、既に、従来技術としである炭素質基材と
Siのような炭化物形成元素を反応させ、炭素質基材表
面を炭化物化する手法により炭化物層を形成する手段を
利用して炭素と炭化物の存在比率が徐々に変わるように
して熱応力が集中せず剥離し難い界面を得ることも可能
である。Regarding the method of forming an interface between a carbide layer mainly composed of SiC and a carbonaceous base material, there has already been a conventional technique in which a carbonaceous base material is reacted with a carbide-forming element such as Si to form a carbide layer on the surface of the carbonaceous base material. It is also possible to obtain an interface that does not concentrate thermal stress and is difficult to peel off by gradually changing the ratio of carbon to carbide by forming a carbide layer using a method of oxidation.
Irを被覆層として用いる従来技術でもう一つの共通の
課題であるところのIr層が損傷を受けた後の炭素質基
材の急激な焼損に対しては、本発明ではだとえIr、R
u及びRhの層が損傷を受けたとしても、中間層となる
SiCが耐酸化性を示すた杓、炭素質基材の急激な焼損
を抑止することが期待できる。Another common problem with conventional techniques using Ir as a coating layer is rapid burnout of the carbonaceous base material after the Ir layer is damaged.
Even if the u and Rh layers are damaged, it can be expected that the intermediate layer SiC exhibits oxidation resistance and can prevent rapid burnout of the carbonaceous base material.
本発明の高温耐酸化炭素材料の構成を第1図によって更
に詳述する。The structure of the high-temperature oxidation-resistant carbon material of the present invention will be explained in more detail with reference to FIG.
第1図中、1は炭素質基材で、2は膜厚1o。In FIG. 1, 1 is a carbonaceous base material, and 2 is a film thickness of 1o.
μm程度のSiCを主成分とする炭化物層薄膜であり、
3はHf、 Zr、 Si、 Cr、 Ti、 Ta、
Nb及びA1のいずれかの金属薄膜であり、この金属
層薄膜3は化学蒸着、物理蒸着、電着等の手法により形
成されたものであって、その膜厚は1〜10μm程度の
ものである。4はす、Ru及びRhの薄膜であり、この
薄膜4も化学蒸着、物理蒸着、電着等の手法により形成
することができ、その膜厚は10〜100μm程度のも
のである。It is a carbide layer thin film mainly composed of SiC of about μm,
3 is Hf, Zr, Si, Cr, Ti, Ta,
It is a metal thin film of either Nb or A1, and this metal layer thin film 3 is formed by a method such as chemical vapor deposition, physical vapor deposition, electrodeposition, etc., and the film thickness is about 1 to 10 μm. . 4 is a thin film of Ru, Rh, and Ru. This thin film 4 can also be formed by chemical vapor deposition, physical vapor deposition, electrodeposition, etc., and has a thickness of about 10 to 100 μm.
SiCを主成分とする炭化物層薄膜2は炭素質基材1と
Ir、Ru及びRh薄膜4の熱膨張率の差を徐々に変化
させる役目を有する。また、b 。The carbide layer thin film 2 mainly composed of SiC has the role of gradually changing the difference in thermal expansion coefficient between the carbonaceous base material 1 and the Ir, Ru, and Rh thin film 4. Also, b.
Ru及びRh薄膜4が損傷を受けた場合、−時的に炭素
質基材を急激な焼損から保護する。次に、Hf、 2r
、 Si、 Cr、 Ti、 Ta、 Nb及びA1の
金属薄膜3は化学蒸着、物理蒸着等による被膜形成時の
加熱や、最初に高温で使用した際の加熱の効果によって
、SiCを主成分とする炭化物層薄膜2Ir、Ru及び
Rh薄膜4と反応し、界面の密着性向上の役割を担う。If the Ru and Rh thin film 4 is damaged, it will - temporarily protect the carbonaceous substrate from rapid burnout. Next, Hf, 2r
, Si, Cr, Ti, Ta, Nb, and A1 metal thin film 3 has SiC as its main component due to heating during film formation by chemical vapor deposition, physical vapor deposition, etc., or due to the effect of heating when initially used at high temperature. The carbide layer thin film 2 reacts with the Ir, Ru, and Rh thin films 4 and plays a role in improving the adhesion of the interface.
この界面反応を促すため、被膜形成後に加熱処理を施す
ことも有効である以上の観点から、Ir、Ru及びRh
薄膜4とSiCを主成分とする炭化物層薄膜2の間に使
用する金属の選定規準として、■Siよりも炭化物生成
エネルギーが低いこと、■Ir、Ru及びRhに固溶す
るか、あるいは安定な化合物を形成することの2点を採
用した。In order to promote this interfacial reaction, it is also effective to perform heat treatment after film formation.From the above viewpoint, Ir, Ru and Rh
The criteria for selecting the metal to be used between the thin film 4 and the carbide layer thin film 2 mainly composed of SiC are: ■ It must have lower carbide formation energy than Si, and ■ It must be a solid solution in Ir, Ru, and Rh, or it must be stable. Two points were adopted: forming a compound.
第1表に、選定した元素の炭化物生成エネルギとIr
(代表例)との反応性について示す。Table 1 shows the carbide formation energy of the selected elements and Ir
(Representative example)
一方、Ir 、 Ru及びRh4は炭素質基材の高温耐
酸化被膜として機能する。Ir、Ru及びRhは高温に
おいて金属として安定であり、酸化による消耗もモリブ
デン、タングステンなどの他の高融点金属に比べると少
ない。特に、白金族元素のうちIr 、 Ru及びRh
は融点が2000℃付近か、それ以上であり、1800
を以上の高温での耐酸化被膜として働く。Osは融点は
3000℃を越えるが、lr、Ru及びRhに比べ酸化
による揮発消耗が著しいためこれを除いた。On the other hand, Ir, Ru, and Rh4 function as a high-temperature oxidation-resistant coating on the carbonaceous base material. Ir, Ru, and Rh are stable as metals at high temperatures, and are less consumed by oxidation than other high-melting point metals such as molybdenum and tungsten. In particular, among the platinum group elements, Ir, Ru and Rh
has a melting point of around 2000℃ or higher, and has a melting point of 1800℃ or higher.
Acts as an oxidation-resistant film at high temperatures. Although Os has a melting point exceeding 3000° C., it was excluded because it is more volatile and consumed by oxidation than Ir, Ru, and Rh.
第2表に、実施例として32種の構成について被覆層を
形成した例を示す。実施例では炭素質材料としてC/C
複合材料(ポリアクリロニトリル系炭素繊維の織物とフ
ェノール樹脂を原料とする炭素マトリックスにより形成
された繊維体積率50%のもの)を用い、その表面を8
1と反応(1800℃の炉中にC/C複合材料を33%
SiC、33%Si:33%Atz03の粉末と共に装
入して4時間保持)させてSiCとしたものを基材とし
て採用した。更に、その上にスパッタリング法によって
Hf等の金属の薄膜を形成し、その後1r等の塩化物を
用いた熱CVD法で被膜を形成した。Table 2 shows examples in which coating layers were formed for 32 different configurations. In the examples, C/C is used as the carbonaceous material.
A composite material (50% fiber volume ratio formed from a polyacrylonitrile carbon fiber fabric and a carbon matrix made from phenolic resin) is used, and its surface is
1 (33% C/C composite material in a furnace at 1800℃)
SiC was charged together with 33% Si:33% Atz03 powder and held for 4 hours) to form SiC, and this was used as the base material. Furthermore, a thin film of metal such as Hf was formed thereon by sputtering, and then a film was formed by thermal CVD using chloride such as 1r.
比較として、従来技術に相当する以下の3種の供試材を
使用した。すなわち、上記の表面をSiCとした基材上
にSiの有機化合物を塗付後加熱処理によりS10□被
膜としたもの、炭素質基材上にIrを直接化学蒸着した
もの、更に炭素質基材上にHfCをスパッタリング後、
Irを化学蒸着したものの3種である。For comparison, the following three types of test materials corresponding to the prior art were used. In other words, an organic compound of Si is coated on a substrate whose surface is made of SiC and then heated to form an S10□ film, a carbonaceous substrate is coated with Ir by direct chemical vapor deposition, and a carbonaceous substrate is further coated with Ir by chemical vapor deposition. After sputtering HfC on top,
There are three types with Ir chemically vapor deposited.
第
表
以上の供試材について耐酸化性と熱応力による被膜の剥
離性を次の方法によって比較検討した。すなわち、耐酸
化性については、1800℃に加熱した大気雰囲気炉中
で連続して120分加熱後取り出し、重量変化を調べた
。熱応力に対してはAr雰囲気中で室温と1800℃と
の熱サイクルを10回繰り返し剥離の有無を目視並びに
切断面の観察により調べた。The oxidation resistance and peeling properties of the coating due to thermal stress were compared and examined using the following method for the test materials shown in Table 1 and above. That is, regarding oxidation resistance, the sample was heated continuously for 120 minutes in an atmospheric furnace heated to 1800° C., then taken out, and the change in weight was examined. Regarding thermal stress, the thermal cycle between room temperature and 1800° C. was repeated 10 times in an Ar atmosphere, and the presence or absence of peeling was examined visually and by observing the cut surface.
次に、Ir等の被覆層に損傷が生じた後の炭素質基材へ
の影響を調べるため本発明になる供試材の全てと、Ir
を被覆した2種の比較材について、Irの融点を超える
2500℃で1分間酸素アセチレン炎に暴露した。Next, in order to investigate the effect on the carbonaceous base material after damage has occurred to the coating layer such as Ir, all of the test materials of the present invention and Ir
Two comparative materials coated with Ir were exposed to an oxygen-acetylene flame for 1 minute at 2500° C., which exceeds the melting point of Ir.
第3表に試験結果を示す。Table 3 shows the test results.
第3表から明らかなように、SiCとSin、で被覆し
た試験片(Nα33)は大気中加熱試験によりC/C複
合材料の基板が焼損した。これに対しIrを被覆した比
較材(No、34.Nα35)と本発明品は最外層の被
覆層がやや酸化減肉したものの基材は損傷を受けていな
い。As is clear from Table 3, the substrate of the C/C composite material of the test piece (Nα33) coated with SiC and Sin was burnt out in the atmospheric heating test. On the other hand, in the Ir-coated comparative materials (No. 34, Nα35) and the invention product, the outermost coating layer was slightly thinned by oxidation, but the base material was not damaged.
次に熱サイクル試験で、Irを被覆した比較材(k34
.Nα35)は全て剥離が認められたのに対し、本発明
品には剥離が認められなかった。Next, in a thermal cycle test, a comparative material coated with Ir (k34
.. While peeling was observed in all Nα35) products, no peeling was observed in the products of the present invention.
更に25oO℃火炎暴露で、lrを被覆した比較材(N
α34.Nα35)は炭素質基材がかなり焼損したのに
対し、本発明品では炭素の焼損量は少なかった。Furthermore, a comparative material (N
α34. While the carbonaceous base material of Nα35) was considerably burnt out, the amount of carbon burnt out was small in the product of the present invention.
実施例で述べたように、本発明高温耐酸化炭素材料は、
従来のSiCとS10.による耐酸化被覆炭素材料では
耐酸化の機能が損なわれる1500℃以上においても優
れた耐酸化性を示す。As described in the examples, the high temperature oxidation resistant carbon material of the present invention has the following properties:
Conventional SiC and S10. The oxidation-resistant coated carbon material shown in Fig. 1 shows excellent oxidation resistance even at temperatures above 1,500°C, where the oxidation-resistant function is impaired.
また、炭素質基材の耐酸化被覆にとって、大きな技術課
題である被覆層と母材の熱膨張率の差による熱応力の集
中を抑えたため、被覆層の耐剥離性も改善される。Furthermore, since the concentration of thermal stress due to the difference in thermal expansion coefficient between the coating layer and the base material, which is a major technical issue for oxidation-resistant coatings on carbonaceous substrates, is suppressed, the peeling resistance of the coating layer is also improved.
更に、Sl[を主成分とする炭化物層と、Ir。Further, a carbide layer mainly composed of Sl and Ir.
Ru及びRhの被覆層を組み合わせたことから、仮にI
r、 Ru及びRhの被覆層が何らかの原因で損傷を受
けてもSiCの耐酸化機能により母材である炭素質基材
の急激な焼損が防止できる。Since the Ru and Rh coating layers are combined, it is assumed that I
Even if the coating layers of Ru, Ru, and Rh are damaged for some reason, the oxidation-resistant function of SiC can prevent the carbonaceous base material, which is the base material, from being rapidly burnt out.
第1図は本発明の一実施例の高温耐酸化炭素材料の説明
図、第2図は従来のS+02とSiCによる耐酸化被覆
炭素材料の説明図、第3図は従来のIrによる耐酸化被
覆炭素材料の説明図である。Fig. 1 is an explanatory diagram of a high-temperature oxidation-resistant carbon material according to an embodiment of the present invention, Fig. 2 is an explanatory diagram of a conventional oxidation-resistant coated carbon material with S+02 and SiC, and Fig. 3 is an explanatory diagram of a conventional oxidation-resistant coated carbon material with Ir. FIG. 3 is an explanatory diagram of a carbon material.
Claims (1)
と、 (b)Hf、Zr、Si、Cr、Ti、Ta、Nb及び
Alのうちのいずれかの薄膜と、(c)Ir、Ru及び
Rhのいずれかの薄膜を順次形成させてなることを特徴
とする高温耐酸化炭素材料。(1) On the surface of the carbonaceous base material, (a) a thin film consisting of a carbide layer mainly composed of silicon carbide, and (b) any one of Hf, Zr, Si, Cr, Ti, Ta, Nb, and Al. A high-temperature oxidation-resistant carbon material characterized by forming the above thin film and (c) a thin film of any one of Ir, Ru, and Rh in sequence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2269423A JPH04149083A (en) | 1990-10-09 | 1990-10-09 | Carbon material having oxidation resistance at high temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2269423A JPH04149083A (en) | 1990-10-09 | 1990-10-09 | Carbon material having oxidation resistance at high temperature |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04149083A true JPH04149083A (en) | 1992-05-22 |
Family
ID=17472217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2269423A Pending JPH04149083A (en) | 1990-10-09 | 1990-10-09 | Carbon material having oxidation resistance at high temperature |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04149083A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0657404A1 (en) * | 1993-12-08 | 1995-06-14 | Hitachi, Ltd. | Heat and oxidation resistive high strength material and its production method |
| CN103739311A (en) * | 2013-09-11 | 2014-04-23 | 太仓派欧技术咨询服务有限公司 | A kind of (Nb/C/SiC)n multi-layer anti-oxidation coating and preparation method thereof |
| CN105669254A (en) * | 2016-01-18 | 2016-06-15 | 太原理工大学 | Method for improving high temperature oxidization resistance performance of carbon/carbon composite material |
| JP2020063175A (en) * | 2018-10-17 | 2020-04-23 | 株式会社豊田中央研究所 | Crystal growth material |
-
1990
- 1990-10-09 JP JP2269423A patent/JPH04149083A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0657404A1 (en) * | 1993-12-08 | 1995-06-14 | Hitachi, Ltd. | Heat and oxidation resistive high strength material and its production method |
| US5545484A (en) * | 1993-12-08 | 1996-08-13 | Hitachi, Ltd. | Heat and oxidation resistive high strength material and its production method |
| CN103739311A (en) * | 2013-09-11 | 2014-04-23 | 太仓派欧技术咨询服务有限公司 | A kind of (Nb/C/SiC)n multi-layer anti-oxidation coating and preparation method thereof |
| CN105669254A (en) * | 2016-01-18 | 2016-06-15 | 太原理工大学 | Method for improving high temperature oxidization resistance performance of carbon/carbon composite material |
| JP2020063175A (en) * | 2018-10-17 | 2020-04-23 | 株式会社豊田中央研究所 | Crystal growth material |
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