JPH0414927Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] Improvement of the heat treatment container of the high temperature/high vacuum heat treatment apparatus of the present invention, particularly the heat treatment container used for improving the temperature distribution of a heat treated object at high temperature/high vacuum. Regarding.

[Prior Art] Conventionally, a high-temperature/high-vacuum heat treatment apparatus used in the manufacturing process of tantalum solid electrolytic capacitors, etc., processes a heat-treated object 3 in which small lumps, such as powder, are placed in a plate shape, as shown in FIG. It consisted of a box-shaped heat-resistant container 2 to be set, and a heating element 4 formed from a heat-resistant metal plate such as tantalum into a semi-cylindrical shape.

[Problems to be solved by the invention] However, in the structure of the conventional heat treatment equipment,
Since both longitudinal ends of the semi-cylindrical heating element 4 are open in order to carry in and out the heat-resistant container 2 loaded with the object 3 to be heat treated, heat dissipates greatly from the opening, and the object 3 to be heat treated is In the upper case, the temperature in the area near the opening is lower than the temperature in the center, which has the disadvantage that a product of uniform quality cannot be obtained.

[Differences between the invention and the conventional technology] In contrast to the structure of the conventional heat treatment equipment described above, the present invention has an original structure in which the temperature distribution on the object to be heat treated is improved without improving the existing equipment. .

[Means for Solving the Problems] The present invention is a heat treatment container having a heat-resistant container, a heating element, and a heat shielding plate, and the heat-resistant container is for placing an object to be heat-treated. The heating element heats the object to be heat-treated in the heat-resistant container, and has a semi-cylindrical shape and has openings at both ends, and the opening is an opening for carrying in and out of the heat-resistant container. The shielding plates are placed opposite to each other at both ends of the heat-resistant container carried into the heat-resistant container in correspondence with the opening of the heat-resistant container, and improve the temperature difference between the center and outer edges of the heat-treated material inside the heat-resistant container. It is something to do.

[Example] Next, an example of the present invention will be described with reference to the drawings.

(Embodiment 1) FIG. 1 is a perspective view showing an embodiment of the present invention.

1 has a thickness of 0.5 mm and a width of 25 mm, as shown in Figure 2 a.
Heat reflecting plates 1a, 1a are made by forming a tantalum plate with a length of 150 mm into an L-shaped cross section with a long side of 20 mm and a short side of 5 mm.
... are arranged at 5 mm intervals, and the thickness is 0.5 mm.
This is a heat shield plate fixed with rivets to a tantalum plate 1b having a width of 25 mm and a length of 150 mm. 2 is 0.5mm thick
It is a box-shaped heat-resistant container made from a tantalum plate with a width of 150 mm, a length of 300 mm, and a height of 10 mm. 3 is a tantalum powder molded body placed in a plate shape, and 4 is a heating element formed by molding a tantalum plate with a thickness of 1 mm into a semicylindrical shape with a length of 400 mm and a radius of 100 mm. As shown in FIG. 1, the heat treatment container according to the present invention has the heat shielding plates 1, 1 disposed opposite to each other at both ends of the container 2. The container 2 is carried into and out of the heat generating element 4 with the heat shielding plate 1 facing the opening 4a of the heat generating element 4.

Figure 4 shows heat treatment using the heat treatment container of the present invention at a heating temperature of 1800℃ and a vacuum level of 10 ^-5 Torr.
The operation of determining the temperature distribution on the object to be heat treated
It is a figure in which the average was obtained by repeating 10 times and compared with the conventional example. In FIG. 4, the temperature distribution B of the conventional example is shown by a broken line, and the temperature distribution _A1 of the first embodiment is shown by a solid line. As is clear from the figure, in the conventional example, a temperature difference ΔB of 23°C occurred between the center part and the outer edge of the object to be heat treated 3, but in this embodiment 1, the temperature difference ΔA was improved to 10°C. There is.

(Example 2) In Example 1, the heat resistance plate 1a was formed into an L-shaped cross section.
The heat shielding plate 1 was composed of five sheets spaced apart at 5mm intervals to form a heat shielding plate 1 with a width of 25mm, but in this embodiment 2, as shown in Fig. 2b, a tantalum heat shielding plate 1 with a thickness of 0.5mm, a width of 25mm, and a length of 150mm was used. Five reflective plates 1a were arranged in parallel at intervals of 2 mm, and heat shielding plates 1 with a width of 10 mm, each of which was fixed with a tantalum wire 1c having an outer diameter of 2 mm and passed through each reflective plate, were placed facing each other at both ends of a heat-resistant container 2. It is something. FIG. 5 is a diagram showing the temperature distribution on the object to be heat treated in Example 2 of the present invention.

In Example 2, compared to Example 1, the heat shield plate 1
Although the height was increased and the width was narrowed, the effect is almost the same, and there is an advantage that uniform products can be obtained without impairing the loading efficiency of the heat-treated objects.

As shown in FIG. 5, the temperature distribution on the object to be heat treated 3 in Example 2 is _A2 , and the temperature difference _ΔA2 is 12°C, which is almost the same as in Example 1, although the temperature difference is slightly wider. The following effects can be obtained, and the number of objects to be heat treated 3 can be loaded more than in the first embodiment.

[Effects of the Invention] As explained above, according to the present invention, the temperature distribution on the object to be heat-treated can be significantly improved, so that a product with uniform quality can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of the heat treatment container according to the present invention, FIGS. 2a and b are perspective views showing the structure of the heat shield plate, FIG. 3 is a perspective view showing a conventional example, and FIG. FIG. 5 is a diagram showing the temperature distribution on the object to be heat treated in Example 1 of the invention and the conventional example, and FIG. 5 is a diagram showing the temperature distribution on the object to be heat treated in Example 2 of the invention. 1... Heat shielding plate, 2... Heat resistant container, 3... Heat treated object, 4... Heat generating element.

Claims (1)

[Scope of Claim for Utility Model Registration] A heat treatment container having a heat-resistant container, a heating element, and a heat shielding plate, wherein the heat-resistant container is used to place an object to be heat-treated, and the heating element is a heat-resistant container. The heat-resistant container heats the object to be heat-treated in the heat-resistant container, and has a semi-cylindrical shape with openings at both ends.The openings are for carrying in and out of the heat-resistant container. The heat-resistant container is placed oppositely at both ends of the heat-resistant container carried into the heating element in correspondence with the opening of the heat-resistant container, and is intended to improve the temperature difference between the center and outer ends of the heat-treated material in the heat-resistant container. Features of heat treatment container.