JPH0416100Y2 - - Google Patents

Description

[Detailed explanation of the idea]

(Industrial application field) This invention manages personnel in a clean room,
This invention relates to an air shower room that maintains a high degree of cleanliness within a clean room. (Prior art) Conventionally, in order to improve the maintenance of cleanliness in a clean room, when a person other than the person concerned attempts to enter the air shower room, the door on the front side of the air shower room is locked, and if the room is over capacity. There is a known system that gives a warning when a person enters the air shower room, and operates normally only for those who are within the capacity. (Problem that the invention aims to solve) The biggest cause of a decline in cleanliness in a clean room is dust generation due to human movements, so the more people there are in the clean room, the more the total amount of dust generation will increase. The cleanliness of the area will decrease. However, as mentioned above, in the conventional air shower room, the personnel in the clean room are not managed, so it is difficult to maintain a high degree of cleanliness in the clean room. The purpose of the present invention is to eliminate these conventional inconveniences. (Means for Solving the Problems) In order to achieve the above object, the present invention is a space provided in the front room of a clean room for maintaining a clean space, and a front room side door 4 on the front room side. In the air shower room, which is provided with a front room door detector 5 and a clean room side door 6 and a clean room side door detector 7 on the clean room side, the front room door 4 opens and the front room door detector 5 is activated. The first relay 9 ₁ is activated when the clean room side door 6 is opened and the clean room side door detector 7 is activated, and the second relay 9 ₂ is activated when the clean room side door 6 is opened and the clean room side door detector ₇ is activated. First and sixth relays 9
A third relay 9 3 that operates when relays ₁ and 9 ₆ are activated and continues to operate even when the first relay 9 ₁ is deactivated _.
and the first, second and third relays 9 ₁ , 9 ₂ , 9 ₃
operates when inactive, and the second and third relays 9 ₂ ,
A _fourth relay 94 that continues to operate even if at least one of the relays 93 is activated, and a fourth relay ₉₄ that continues to operate even if at least one of the relays ₉₃ is activated, and a fourth relay 94 that operates when the first relay 91 is not activated and the second and fourth relays ₉₂ and ₉₄ are activated. , a fifth relay 9 ₅ that continues to operate even if one of the second and fourth relays 9 ₂ and 9 ₄ becomes inactive, and the first, second and fifth relays 9 ₁ ,
A _sixth relay 96 that operates when relays 92 and ₉₅ are not activated and continues to operate even if at least one of the first and fifth relays _{91 and 95 is} activated, and a second relay ₉₂ .
and a seventh relay 97 that operates when the ninth relay ₉₉ is inoperative and continues to operate even if the second relay ₉₂ becomes inactive, and a seventh relay ₉₇ that operates when the ninth relay 99 is inactive and continues to operate even if the second relay ₉₂ is inactive. an eighth relay that operates when the first and seventh relays 9 ₁ and 9 ₇ are activated and continues to operate even when at least one of the first and seventh relays 9 ₁ and 9 ₇ is inactivated; a ninth relay that operates when the eighth relay _{98 is} activated and the first relay ₉₁ is not activated;
The clean room personnel management counter 8 is provided, which performs addition when the relay ₉₉ and the third relay ₉₃ are activated, and subtracts when the eighth relay ₉₈ is activated. (Function) By providing a counter for managing the personnel in the clean room provided in the air shower room, the personnel in the clean room can be managed, and the cleanliness in the clean room can be maintained at a high level. (Example) Examples of the present invention will be described below with reference to the drawings. The drawing shows an embodiment of the invention. In FIG. 1, 1 is a clean room, 2 is an air shower room which is a private room provided in the front room 3 of the clean room 1, and the front room side door 4 and the front room side door 4 are opened on the front room side of the air shower room 2. A front room side door detector 5 is provided for detecting the front room side door, and a clean room side door 6 and a clean room side door detector 7 are provided on the clean room 1 side. 8 is a counter for managing personnel in the clean room. FIG. 2 shows a circuit diagram of an embodiment of the present invention. The front room door detector 5 has a contact 5a that is closed when the front room door 4 opens, and the clean room door detector 7 has a contact 7a that closes when the clean room door 6 opens. These contacts 5a and 7a are connected to the first and second relays 9 ₁ and 9 ₂ respectively.
are connected in series with the power supply lines 10 ₁ and 10 ₂ . The first relay 9 ₁ has two normally open contacts
X ₁ with four normally closed contacts ₁ and a second relay 9 ₂
has two normally open contacts X ₂ and four normally closed contacts ₂ . The third relay 9 ₃ is a normally open contact X ₁ of the first relay 9 ₁ and a normally open contact of a sixth relay 9 ₆ to be described later.
X ₆ and the normally closed contact ₂ of the second relay 9 ₂ are connected in series to the power supply lines 10 ₁ and 10 ₂ , and its self-holding normally open contact X ₃ is connected in parallel with the normally open contact X ₁ . is connected to the circuit, and is activated when the second relay ₉₂ is inactive and the first relay ₉₁ and the sixth relay ₉₆ are activated, and the closing of the self-holding normally open contact _X3 causes the Even if relay 9 ₁ becomes inactive, it continues to operate (that is, self-maintains), and when the second normally open contact X ₃ closes, an addition operation is performed on the personnel management counter 8. I'm getting used to it. Reference numeral 11 denotes a fan operation timer having a contact t, which is connected in series with the normally closed contact ₁ of the first relay 9 ₁ and in parallel with the third relay 9 ₃ . Reference numeral 12 denotes a fan operating coil provided in the air shower chamber 2, which is connected in series with the contact t of the fan operating timer 11 and in parallel with the timer 11. The fourth relay ₉₄ is connected in series with the normally closed contacts ₁ , 2, and 3 of the _first , _second , and third relays ₉₁ , ₉₂ , and ₉₃ , and its self-holding normally open contact _X4 is connected in parallel with normally closed contacts ₂ and ₃ , and the first and second
Even if the third relays 9 ₁ , 9 ₂ , 9 ₃ operate when they are not activated, and the second and third relays 9 ₂ , 9 ₃ operate due to the closing of the normally open contact X ₄ for self-holding. It is designed to continue operating (that is, self-maintaining). The fifth relay 9 ₅ is the normally closed contact ₁ of the first relay 9 ₁ and the normally open contacts of the second and fourth relays 9 ₂ and 9 ₄ .
_{X 2} and X ₄ are connected in series, and its self-holding normally open contact _{X 5} is connected in parallel with the normally open contacts _X 2 and It operates when the fourth relays 9 ₂ and 9 ₄ are activated, and when the self-holding contact X ₅ closes, the second and fourth relays 9 ₂ ,
Even if ₉₄ becomes inoperable, it continues to operate (that is, self-maintains). The sixth relay 9 ₆ is connected in series with the normally closed contacts ₁ , ₅ , 2 of the first, fifth and second relays 9 ₁ , _{9 5} , _{9 2 ,} and its self-holding normally open contact X ₆ teeth,
Normally closed contacts ₁ of the first and fifth relays 9 ₁ , 9 ₅ ,
It is connected in parallel with X ₅ and operates when the first, fifth and second relays 9 ₁ , 9 ₅ , 9 ₂ are inactive, and the first and second relays are connected by closing the self-holding normally open contact X ₆ . 5
Even if the relays 9 ₁ and 9 ₅ are activated, they continue to operate (that is, self-hold). The seventh relay 9 ₇ is connected in series with the normally open contact X ₂ of the second relay 9 ₂ and the normally closed contact ₉ of the ninth relay 9 ₉ , and its self-holding normally open contact X ₇ is a normally open contact.
X ₂ is connected in parallel, and is activated when the ninth relay 9 ₉ is inactive and the second relay 9 ₂ is activated, and the second relay _{9 2} is activated by closing its self-holding normally open contact X ₇ . It is designed to continue its operation (that is, self-maintain) even if it becomes inactive. The eighth relay 9 ₈ is the seventh and first relay 9
The normally open contacts X _{7 ,} X ₁ of 7 , 9 ₁ and the normally closed contact ₂ of the second relay 9 ₂ are connected in series, and the normally open contact X ₈ for self-holding is connected in series with the normally open contacts X _{7 ,} , 9 ₁ are connected in parallel with _the normally open contacts _{X 7} , X ₁ of
₁ is activated, and continues to operate (i.e., self-maintain) even if the seventh and first relays 9 ₇ and 9 ₁ are deactivated by closing the self-maintaining normally open contact X ₈ . It's getting old. The ninth relay ₉₉ is connected in series with the normally closed contact _X1 of the first relay ₉₁ , and the eighth relay ₉₈ and the second
is connected in parallel with the series circuit of normally closed contacts ₂ of relay 9 ₂ , and the first relay 9 ₁ is inactive and the first and seventh relays 9 ₁ and 9 ₇ are activated or the eighth relay 9 ₈ It is designed to operate when the Next, the operation of the above embodiment will be explained with reference to the sequence diagram below.

【table】

[Table] When the air shower room 2 cannot be entered, the 4th
and the sixth relays 9 ₄ and 9 ₆ are operating. When a person entering the room opens the front door 4 of the air shower room 2 from the front room 3, the front door detector 5 is activated to close its contact 5a, and the first relay ₉₁ is activated. The activation of the first relay 9 ₁ activates the third relay 9 ₃ and closes its self-holding normally open contact X ₃ .
The clean room personnel management counter 8 is activated by the operation of the third relay ₉₃ and incremented by 1. When the front chamber door 4 is closed, the first relay ₉₁ is deactivated, the fan operation timer 11 starts operating, and the fan operation coil 12 is energized for a predetermined period of time. The air shower is thus performed for a predetermined period of time. When the air shower is finished and a person opens the clean room side door 6 and enters the clean room 1,
The clean room side door detector 7 is activated and closes its contact 7a, and the second relay ₉₂ is activated. Second
When the relay ₉₂ is activated, the sixth relay ₉₆ is deactivated, the third relay ₉₃ is deactivated, and the seventh relay ₉₇ is activated to maintain self-holding. When the clean room side door 6 is closed, the detector 7 is deactivated, the second relay ₉₂ is deactivated, and the normally closed contact ₂ is closed. Thus, the eighth relay 9 ₈ is the first
When the relay 9 ₁ is activated, the counter 8 becomes ready for operation, that is, the counter 8 is ready for subtraction. Fourth
The relay ₉₄ is deactivated when the front room side door 4 is opened, but when the clean room side door 6 is closed, it is activated again and its operation is self-maintained. When the clean room side door 6 is opened and the air shower room 2 is entered in order to exit the clean room 1, the clean room side door detector 7 is activated, the second relay ₉₂ is activated, and the fifth relay ₉₅ is activated. At the same time, the sixth relay ₉₆ becomes inoperable. With the clean room side door 6 closed,
The fourth and fifth relays 9 ₄ and 9 ₅ continue to operate, and the seventh relay 9 ₇ also operates when entering the room and continues to operate, so when the front door 4 is opened, The actuation of the detector 5 causes the first relay 9 ₁ to actuate, which in turn causes the eighth relay 9 ₈ to actuate, causing the counter 8 to subtract 1. Even if the front room side door 4 is opened, the third relay ₉₃ will not be activated because the sixth relay 96 continues to be inactive even after the clean room side door ₆ is closed as described above. . Therefore, the counter 8 will not add 1 again. (As mentioned above, the fourth and fifth relays 9 ₄ , 9
₅ is necessary to prevent the counter 8 from adding up even if the front room side door 4 is opened when exiting the room. ) When the front chamber side door 4 is closed, the first relay ₉₁ is deactivated and the ninth relay ₉₉ is activated, and by opening its normally closed contact ₉ , the seventh relay ₉₇ is deactivated, and the 8
_{Normally open contact ​} The counter 8 will not malfunction. Even if the front room door 4 is closed, the eighth relay ₉₈ continues to operate, but if another person tries to enter the clean room 1 from the front room 3, opens the front room door 4 and enters the air shower room 2. With the clean room side door 6 open, the eighth relay ₉₈ becomes inactive and returns to its original state. Even when a person exiting the clean room 1 opens the clean room side door 6, the eighth relay ₉₈ is deactivated and the system returns to its original state. In this way, the number of people in the clean room 1 can be known from the counter 8 of the air shower room 2, and the number of people in the clean room 1 can be managed so as not to exceed a predetermined number. In the embodiment described above, an alarm device may be provided in the air shower room 2 so that an alarm is generated by the output of the counter 8 when the number of persons in the clean room 1 exceeds a predetermined number. Furthermore, if the air shower room 2 is provided with an audio device for reconfirming the purpose of use of the air shower, the cleanliness inside the clean room will not be impaired due to the carelessness of the person entering the room. (Effects of the invention) As explained above, according to the invention, personnel inside the clean room can be managed through the door detector installed on the front room side door and the clean room side door of the air shower room. This has the effect of maintaining a high level of cleanliness.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a schematic configuration of an air shower chamber according to an embodiment of the present invention, and FIG. 2 is an electric circuit diagram thereof. 1...Clean room, 2...Air shower room, 3...Ante room, 4...Ante room side door, 5...Ante room side door detector, 6...Clean room side door, 7...Clean room side door detector , 8... Counter for managing personnel in the clean room, 9 ₁ to _{9 9} ... Relay.

Claims (1)

[Scope of utility model registration request] This is a space provided in the front room of a clean room that maintains a clean space, and the front room side door 4 and front room door detector 5 are installed on the front room side, and the clean room side door 6 and clean room side door detector are installed on the clean room side. In an air shower room where the front chamber side door 4 is opened and the front chamber side door detector 5 is activated, a first relay ₉₁ is activated, and the clean room side door 6 is opened and the clean room side door is activated. a second relay ₉₂ that is activated when the detector 7 is activated;
A third relay that operates when the second relay 9 ₂ is inoperative and the first and sixth relays 9 ₁ and 9 ₆ are activated, and continues to operate even when the first relay 9 ₁ is inactivated. 9 ₃ and the first, second and third relays 9 ₁ , 9
_A fourth relay ₉₄ operates when relays 2 and 93 are inoperative, and continues to operate even if at least one of the second and third relays ₉₂ and ₉₃ operates, and a fourth relay ₉₄ operates when the first relay ₉₁ is inoperable. a fifth relay that operates when the second and fourth relays 9 ₂ and 9 ₄ are activated and continues to operate even if either the second or fourth relays 9 ₂ or 9 ₄ become inactive; relay 9 ₅ and the first, second, and fifth relays 9 ₁ , 9 ₂ , and 9 ₅ are activated when they are not activated, and at least one of the first and fifth relays 9 ₁ and 9 ₅ is activated. The sixth relay ₉₆ continues to operate, and the second relay ₉₂ operates and operates when the ninth relay ₉₉ is inoperative, and continues to operate even if the second relay ₉₂ becomes inactive. The seventh relay 9 ₇ continues to operate, and the second relay 9 ₂ is inactive and the first and seventh relays 9 ₁ ,
It operates when 9 ₇ is activated, and the first and seventh relays 9
An eighth relay 98 that continues to operate even if at least one of the relays ₁ and ₉₇ becomes inoperable; and an eighth relay _{98 .}
is activated and a ninth relay ₉₉ is activated when the first relay ₉₁ is not activated, addition is performed by activation of the third relay ₉₃ , and subtraction is performed by activation of the eighth relay ₉₈ . An air shower room characterized by being provided with a counter 8 for managing internal personnel.